The invention relates to a preparation method of an
etching-resistant and wear-resistant Y2O3-AlxOy
composite coating. The preparation method comprises the following steps: carrying out ultrasonic cleaning on a
corrosion-resistant matrix; performing
plasma bombardment cleaning activation on the surface of the
corrosion-resistant matrix; a Y2O3
coating and an AlxOy
coating are alternately deposited on a
corrosion-resistant base body in a double-target magnetron
sputtering mode to form the Y2O3-AlxOy
composite coating, the
sputtering power of a Y target is larger than that of an Al target, and the ratio of x to y in the AlxOy
coating is larger than 1. According to the method, the amorphous AlxOy coating dominated by the
metal state is introduced into the Y2O3 coating, growth of Y2O3 columnar crystals is continuously broken,
crystal grains are refined, formation of intergranular easy-to-etch point locations is inhibited, and an
yttrium aluminum
oxide composite strengthening phase is formed at an interface, so that
plasma etching resistance is improved; the thickness of a single-layer coating in the
composite coating is very thin; under the action of growth stress, the structure of the coating presents a wave-shaped
microstructure and a soft and hard alternate mechanical structure, and the soft and hard alternate mechanical structure is beneficial to inhibiting generation of transverse cracks, guiding friction crack level expansion, prolonging the friction life of the coating and reducing the wear rate.