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46 results about "Cathodic arc deposition" patented technology

Cathodic arc deposition or Arc-PVD is a physical vapor deposition technique in which an electric arc is used to vaporize material from a cathode target. The vaporized material then condenses on a substrate, forming a thin film. The technique can be used to deposit metallic, ceramic, and composite films.

Method for preparing DLC (diamond-like carbon) thick films by means of efficient magnetic filter plasma deposition

ActiveCN105755442AEffective filteringFacilitate separate control of the ionization processVacuum evaporation coatingSputtering coatingCathodic arc depositionDiamond-like carbon
The invention discloses a method for preparing Metal carbide-inlaid Diamond-like Carbon (MC/DLC) films with the thicknesses larger than 30 micrometers, belongs to the field of preparation of hard abrasion-resistant coatings, and particularly relates to a technology for preparing MC/DLC thick films by the aid of magnetic filter plasma deposition processes.MC/DLC thick film structures comprise ion injection pinning layers, metal transition layers and the MC/DLC films.The method has the advantages that the DC/DLC films prepared by the aid of ion injection technologies, magnetic filter technologies and cathodic arc deposition technologies are high in binding force, the arc current intensity, the magnetic field intensity of bent pipes and the gas inflow of gas with carbon are controlled in deposition procedures, accordingly, the thicknesses, the hardness, the rub resistance and the abrasion resistance of the MC/DLC thick films can be optimized, and the high-quality MC/DLC thick films can be prepared by the aid of the method; magnetic filter plasma deposition equipment for implementing the method has proprietary intellectual property rights and is easy to operate, processes are mature, the MC/DC films can be produced on a large scale, and the method is suitable for deposition application to high-hardness abrasion-resistant coatings in all industrial components such as bearings of cutters.
Owner:BEIJING NORMAL UNIVERSITY

Method for preparing anti-lock thread coating through PVD

The invention discloses a method for preparing an anti-lock thread coating through PVD (physical vapor deposition). The method for preparing the anti-lock thread coating through PVD comprises the following steps: (1) polishing the surface of a metal thread, removing oil stain, and dewatering; (2) spraying sand to roughen the surface of the metal thread; (3) putting the metal thread into vacuum cathodic arc deposition equipment, and sputter-etching to obtain a surface activated metal thread; (4) introducing argon into the vacuum cathodic arc deposition equipment, and plating a film on the surface activated metal thread for the first time to obtain a metal thread with a nickel coating on the surface; and (5) plating a film on the metal thread for the second time in an argon atmosphere by using a pure-silver cathodic arc source to obtain a metal thread with a nickel composite coating on the surface. Because the wear resistant anti-lock coating is prepared on the surface of the metal thread through PVD, the prepared wear resistant anti-lock thread coating has a strong bonding force, can resist corrosion, is low in friction coefficient and is highly reliable, the purposes of improving the fastening force of a screw and preventing the metal thread from being occluded and locked can be achieved, and the metal thread can serve a long time under heavy load, corrosion and other harsh environment.
Owner:西安赛福斯材料防护有限责任公司

Method for preparing aluminum-nitrogen co-doped diamond-like-like composite film

The invention discloses a method for preparing an aluminum-nitrogen co-doped diamond-like composite film. Two dual-excitation energy source cathode arc coating devices with different characteristics are configured by adopting an ion source-assisted cathode arc deposition technology, one dual-excitation energy source cathode arc coating device adopts a direct-current arc evaporation cathode sourceand is used for installing an aluminum target, and the other dual-excitation energy source cathode arc coating device adopts a pulsed arc evaporation cathode source and is used for installing a graphite target; nitrogen gas is taken as reaction gas in the deposition process, nitrogen gas (N2) is ionized into ionic nitrogen (N<+>) through an ion source, the aluminum target installed on the direct-current arc evaporation cathode source and the graphite target installed on the pulsed arc evaporation cathode source achieve sputtering deposition on the surface of a workpiece by rotating the workpiece, and the component-controllable aluminum-nitrogen co-doped diamond-like composite film is obtained. According to the method for preparing the aluminum-nitrogen co-doped diamond-like composite film,the film is doped with N in an ion mode, and hard aluminum nitride (AlN) and metal Al nanocrystalline particles are promoted to be formed in the diamond-like composite film; and the diamond-like composite film has the advantages of being smooth in surface, high in hardness and toughness and low in stress.
Owner:北京物科国华技术有限公司

A method for preparing dlc thick film by high-efficiency magnetic filtration plasma deposition

ActiveCN105755442BEffective filteringFacilitate separate control of the ionization processVacuum evaporation coatingSputtering coatingCathodic arc depositionDiamond-like carbon
The invention discloses a method for preparing Metal carbide-inlaid Diamond-like Carbon (MC / DLC) films with the thicknesses larger than 30 micrometers, belongs to the field of preparation of hard abrasion-resistant coatings, and particularly relates to a technology for preparing MC / DLC thick films by the aid of magnetic filter plasma deposition processes.MC / DLC thick film structures comprise ion injection pinning layers, metal transition layers and the MC / DLC films.The method has the advantages that the DC / DLC films prepared by the aid of ion injection technologies, magnetic filter technologies and cathodic arc deposition technologies are high in binding force, the arc current intensity, the magnetic field intensity of bent pipes and the gas inflow of gas with carbon are controlled in deposition procedures, accordingly, the thicknesses, the hardness, the rub resistance and the abrasion resistance of the MC / DLC thick films can be optimized, and the high-quality MC / DLC thick films can be prepared by the aid of the method; magnetic filter plasma deposition equipment for implementing the method has proprietary intellectual property rights and is easy to operate, processes are mature, the MC / DC films can be produced on a large scale, and the method is suitable for deposition application to high-hardness abrasion-resistant coatings in all industrial components such as bearings of cutters.
Owner:BEIJING NORMAL UNIVERSITY

Variable-angle variable-diameter magnetic filtered cathode arc thin film deposition equipment and method

The invention provides variable-angle variable-diameter magnetic filtered cathode arc thin film deposition equipment and method. The equipment comprises a cathode arc generating system, a plasma transmission system, a vacuum coating cavity and a power source. The cathode arc generating system comprises an arc generator and a target. The plasma transmission system comprises a variable-diameter magnetic filtered pipeline, an electromagnetic coil and a scanning electromagnetic coil. The electromagnetic coil is wound around the variable-diameter magnetic filtered pipeline, and the variable-diameter magnetic filtered pipeline is in a double-horn shape with the two ends larger than the middle. As the variable-diameter magnetic filtered pipeline in the double-horn shape with the two ends larger than the middle is designed in the cathode arc deposition equipment, in cooperation with the electromagnetic coil wound around the variable-diameter magnetic filtered pipeline, focusing and deflectingelectromagnetic fields can guide plasma flow towards a substrate, neutral macroparticles not affected by the electromagnetic fields continue to advance along a straight line from a cathode to be filtered, and through the design of the simple magnetic filtered pipeline, dense uniform cathode arc thin films can be obtained.
Owner:JIHUA LAB

A method for preparing aluminum-nitrogen co-doped diamond-like composite film

The invention discloses a method for preparing an aluminum-nitrogen co-doped diamond-like composite film. Two dual-excitation energy source cathode arc coating devices with different characteristics are configured by adopting an ion source-assisted cathode arc deposition technology, one dual-excitation energy source cathode arc coating device adopts a direct-current arc evaporation cathode sourceand is used for installing an aluminum target, and the other dual-excitation energy source cathode arc coating device adopts a pulsed arc evaporation cathode source and is used for installing a graphite target; nitrogen gas is taken as reaction gas in the deposition process, nitrogen gas (N2) is ionized into ionic nitrogen (N<+>) through an ion source, the aluminum target installed on the direct-current arc evaporation cathode source and the graphite target installed on the pulsed arc evaporation cathode source achieve sputtering deposition on the surface of a workpiece by rotating the workpiece, and the component-controllable aluminum-nitrogen co-doped diamond-like composite film is obtained. According to the method for preparing the aluminum-nitrogen co-doped diamond-like composite film,the film is doped with N in an ion mode, and hard aluminum nitride (AlN) and metal Al nanocrystalline particles are promoted to be formed in the diamond-like composite film; and the diamond-like composite film has the advantages of being smooth in surface, high in hardness and toughness and low in stress.
Owner:BEIJING WUKE GUOHUA TECH CO LTD
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