Method for preparing aluminum-nitrogen co-doped diamond-like-like composite film

A composite film and diamond technology, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve problems such as rare research, achieve the effect of reducing roughness, reducing internal stress, and improving surface quality

Active Publication Date: 2018-10-19
北京物科国华技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, studies on Al and N double-element

Method used

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  • Method for preparing aluminum-nitrogen co-doped diamond-like-like composite film
  • Method for preparing aluminum-nitrogen co-doped diamond-like-like composite film
  • Method for preparing aluminum-nitrogen co-doped diamond-like-like composite film

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Embodiment 1

[0033]At first provide a kind of coating device that adopts in the substrate surface modification process, promptly described direct current and pulse dual excitation source cathodic arc coating device, such as figure 1 As shown, the device includes a vacuum chamber 1, a DC aluminum cathode target 4, and a pulsed graphite cathode target 7; a DC aluminum cathode arc power supply 2 and a pulsed graphite cathode arc power supply 3 are installed on the rear wall of the vacuum chamber 1, and the DC aluminum cathode target 4 is equipped with The upper and lower sets of combined deflection magnetic filter devices 5, the bottom of the vacuum chamber 1 is equipped with a circular rotating sample stage 6, and the lower end of the sample stage is connected to a bias power supply 8 outside the vacuum chamber; a pulsed graphite anode target is arranged below the pulsed graphite cathode target 7 9. There is a sputtering ion source 14 under the DC aluminum cathode target; an exhaust channel 1...

Embodiment 2

[0040] This embodiment provides a method for preparing a high-hardness, high-toughness aluminum-nitrogen co-doped diamond-like composite film using the device described in Embodiment 1, comprising the following steps:

[0041] (1) Workpiece surface treatment: put the workpiece into acetone solution, ethanol solution and deionized water for 10 minutes to ultrasonically clean each to remove surface grease and other pollutants, and then place the substrate in an oven to dry for use;

[0042] (2) Fix the pretreated workpiece in such as figure 1 On the rotary sample stage 6 in the vacuum chamber 1 of the cathodic arc device shown, the DC aluminum cathode target 4 and the pulse graphite cathode target 7 are installed on the evaporators of the DC aluminum cathode arc power supply 2 and the pulse cathode arc power supply 3 respectively;

[0043] (3) Vacuumize the vacuum chamber 1 with a vacuum device 11 to make the vacuum degree reach 6×10 −4 Pa; Pass argon gas into the vacuum chamb...

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Abstract

The invention discloses a method for preparing an aluminum-nitrogen co-doped diamond-like composite film. Two dual-excitation energy source cathode arc coating devices with different characteristics are configured by adopting an ion source-assisted cathode arc deposition technology, one dual-excitation energy source cathode arc coating device adopts a direct-current arc evaporation cathode sourceand is used for installing an aluminum target, and the other dual-excitation energy source cathode arc coating device adopts a pulsed arc evaporation cathode source and is used for installing a graphite target; nitrogen gas is taken as reaction gas in the deposition process, nitrogen gas (N2) is ionized into ionic nitrogen (N<+>) through an ion source, the aluminum target installed on the direct-current arc evaporation cathode source and the graphite target installed on the pulsed arc evaporation cathode source achieve sputtering deposition on the surface of a workpiece by rotating the workpiece, and the component-controllable aluminum-nitrogen co-doped diamond-like composite film is obtained. According to the method for preparing the aluminum-nitrogen co-doped diamond-like composite film,the film is doped with N in an ion mode, and hard aluminum nitride (AlN) and metal Al nanocrystalline particles are promoted to be formed in the diamond-like composite film; and the diamond-like composite film has the advantages of being smooth in surface, high in hardness and toughness and low in stress.

Description

technical field [0001] The invention relates to a method for preparing an aluminum-nitrogen co-doped diamond-like composite film, which belongs to the technical field of diamond-like composite film preparation. Background technique [0002] As the most important type of film in solid lubricating coatings, diamond-like carbon films are widely used in high-speed cutting tools and mold protection. However, there are still some problems that need to be solved urgently in the diamond-like carbon film itself, such as: the high internal stress of the diamond-like carbon film and the low bonding strength of the film base caused by the high internal stress cause delamination, peeling or failure; at the same time, in order to solve the internal stress However, the hardness of the film caused by doping with metal elements is reduced. Therefore, it is particularly critical and urgent to solve the above-mentioned problems restricting the application of diamond-like carbon films. [000...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/32
CPCC23C14/0021C23C14/0611C23C14/325
Inventor 周兵刘竹波高洁于盛旺王志峰徐斌
Owner 北京物科国华技术有限公司
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