Method for preparing DLC (diamond-like carbon) thick films by means of efficient magnetic filter plasma deposition

Abstract

The invention discloses a method for preparing Metal carbide-inlaid Diamond-like Carbon (MC / DLC) films with the thicknesses larger than 30 micrometers, belongs to the field of preparation of hard abrasion-resistant coatings, and particularly relates to a technology for preparing MC / DLC thick films by the aid of magnetic filter plasma deposition processes.MC / DLC thick film structures comprise ion injection pinning layers, metal transition layers and the MC / DLC films.The method has the advantages that the DC / DLC films prepared by the aid of ion injection technologies, magnetic filter technologies and cathodic arc deposition technologies are high in binding force, the arc current intensity, the magnetic field intensity of bent pipes and the gas inflow of gas with carbon are controlled in deposition procedures, accordingly, the thicknesses, the hardness, the rub resistance and the abrasion resistance of the MC / DLC thick films can be optimized, and the high-quality MC / DLC thick films can be prepared by the aid of the method; magnetic filter plasma deposition equipment for implementing the method has proprietary intellectual property rights and is easy to operate, processes are mature, the MC / DC films can be produced on a large scale, and the method is suitable for deposition application to high-hardness abrasion-resistant coatings in all industrial components such as bearings of cutters.

Description

technical field [0001] The invention belongs to the field of hard wear-resistant coatings, in particular to a method for preparing an ultra-thick MC / DLC film deposited by high-efficiency magnetic filtration plasma. technical background [0002] Diamond-like carbon film (Diamond-likecarbon, DLC) is an amorphous carbon film, which has a high structure and performance with diamond, but unlike diamond, the covalent bond between C atoms in the DLC structure contains two kinds of hybridization The method is SP3 hybridization and SP2 hybridization, and a remote disordered three-dimensional network structure formed by mixing SP2 with SP3 as the main body. The film was firstly prepared by the German scholar Aisenberg using carbon ion beam enhanced deposition technology, which is an amorphous carbon film with similar characteristics to diamond, and is defined as DLC. Similar to diamond, DLC not only has very high strength, hardness and friction and wear resistance, but also has excel...

AI Technical Summary

Problems solved by technology

These technologies are very mature for the preparation of DLC films below 20 microns, but it is difficult to achieve the above-mentioned technologies for the preparation of DLC films with a thickness greater than 30 microns

For example, chemical vapor deposition of DLC is easy to prepare DLC thick film, but the hardness is generally soft

DLC prepared by ordinary physical vapor deposition has high hardness, but it is difficult to prepare thick films

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