98results about How to "Improve deposition efficiency" patented technology

The invention relates to the technical field of semiconductors, and discloses a semiconductor wafer clamp and semiconductor equipment. The semiconductor wafer clamp comprises a clamp body and a refrigeration structure, the clamp body comprises a base, a sealing ring and a pressing disc, the sealing ring is installed on the base, and the sealing ring is configured to make contact with a wafer part so that the part, making contact with the wafer, of the sealing ring can be sealed under the action of external pressure; the pressure plate can be arranged on the base in a covering manner so as to apply sealing external pressure to the wafer and press the wafer against the sealing ring; and the refrigeration structure is arranged on the clamp main body and can cool the wafer in contact with the sealing ring after the wafer carried by the clamp main body is taken out from the preset medium, so that the part, in contact with the sealing ring, of the wafer is converted into a non-adhesion state from an adhesion state. According to the semiconductor wafer clamp, the deposited wafer can be cooled, adhesion of photoresist and the sealing ring is avoided, and the situation that the wafer is broken or the sealing ring is pulled away from the base when the wafer is taken out of the clamp is avoided.

The invention discloses a method for manufacturing a functionally graded composite material through wire powder composite arc additive manufacturing, which comprises the following steps: firstly, carrying out surface treatment on a base material, enabling the surface of titanium alloy to expose fresh white bright metal luster by adopting a machining mode, and removing surface oil stains by using alcohol and acetone; according to the requirement of materials for the gas atmosphere in the additive manufacturing process, the flexible inert gas cabin is filled with appropriate gas, and the gas atmosphere is kept all the time in the additive manufacturing process. On the basis of the electric arc additive manufacturing technology, electric arc additive manufacturing of the functional gradient metal-based composite material is achieved through a wire powder composite device, and the key technology is that according to different position requirements of parts, the metal-based composite materials with different ceramic particle contents are manufactured in an additive mode; a gradient transition area is manufactured between two areas with large particle content difference, and large stress generated at an interface due to component mutation is reduced.

The invention provides a neodymium-iron-boron magnet surface treatment method and a neodymium-iron-boron magnet, and belongs to the technical field of rare earth permanent magnet material preparation. The surface treatment method comprises the steps that a to-be-electroplated magnet with the clean and rough surface is prepared; connecting with a power supply, soaking in a plating solution, and forming a corrosion-resistant plating layer on the surface of the to-be-electroplated magnet through an ion exchange electrodeposition method; wherein the ion exchange electrodeposition method comprises a first stage of synchronously applying a constant magnetic field and a variable-frequency electric field and a second stage of synchronously applying a rotating magnetic field and a variable-frequency electric field, the intensity of the constant magnetic field and the rotating magnetic field is 1000-3000 gs, and the rotating speed of the rotating magnetic field is 20-100 rpm / min. According to the neodymium-iron-boron magnet surface treatment method provided by the invention, a variable-frequency electric field and magnetic field synergistic enhanced ion exchange deposition technology is adopted to improve the deposition efficiency and corrosion resistance of a plating layer, and the neodymium-iron-boron magnet with an excellent corrosion resistance effect is efficiently prepared.

The invention discloses a coaxial powder feeding MIG wire powder composite additive manufacturing device and method, and belongs to the field of electric arc additive manufacturing. The device comprises an MIG wire powder composite welding gun for coaxial powder feeding; the composite welding gun comprises a wire powder coaxial copper nozzle with a wire feeding port in the middle, an ion gas shell and a powder feeding shell. Powder feeding ports are formed in the left end and the right end of the wire feeding port. The wire powder coaxial copper nozzle is located at the bottom end of the plasma arc welding gun and connected with the welding gun shell. A second channel between the ion gas shell and the powder feeding shell is used for feeding powder; the MIG electrode comprises a welding wire tube used for arranging a welding wire, and one end of the welding wire is sent out through a wire feeding port. A slotting sleeve is arranged on the outer side of a welding wire tube of an MIG electrode of the composite welding gun and located on the inner side of an ion gas shell. According to the device, the welding wire and the powder can synchronously enter the molten pool, so that the problem of component regulation and control in multi-component alloy additive manufacturing is effectively solved, and the utilization efficiency of the powder is improved.

The invention discloses a high-alloy wear-resistant roller repair welding material, and belongs to the technical field of alloy repair welding. The method is achieved through the three steps of a coal mill roller sleeve, a lining tile deposited metal formula, an alloy element transition coefficient formula and wear-resistant surfacing flux-cored wire preparation. The self-protection flux-cored wire can be suitable for various welding positions, and single-face welding and double-face forming are good; the production efficiency is high, and compared with manual welding, the allowable welding current of the self-protection flux-cored wire is large, and the deposition efficiency is high. According to the method, various hole pattern design methods including a strip steel edge and circumference combined bending method are adopted, the hole pattern of the roller is subjected to improved design, the forming mode of a steel strip on a wire rolling machine is changed, finally, a lap joint O-shaped section is formed, and the quality of the flux-cored wire is improved. The carbide in the welding wire surfacing sample is finer, more in quantity and more regular in arrangement.

The invention provides a composite negative pole piece for a sodium-ion battery, a preparation method of the composite negative pole piece and the sodium-ion battery, and belongs to the technical field of battery materials. The composite negative electrode plate comprises a negative electrode current collector and a negative electrode active layer arranged on at least one side surface of the negative electrode current collector; along the direction away from the negative electrode current collector, the surface of the negative electrode active layer comprises a functional layer and a structural layer which are laminated; the functional layer comprises a first negative electrode active material, a first binder and a functional material, and the functional material comprises metal fluoride and / or metal oxide; the structural layer includes a second negative electrode active material and a second binder. According to the composite negative pole piece, the sodium ion deposition and stripping efficiency is improved, the energy density of the sodium ion battery is improved, the capacity fading of the sodium ion battery is slowed down, and the cycle life of the sodium ion battery is prolonged. According to the composite negative pole piece, the sodium ion battery can be used in a wider application field.

The invention provides a preparation method of a tantalum carbide coating graphite component, and relates to the technical field of semiconductor growth. The surface of the graphite substrate is pre-coated with a titanium carbide coating through a low-temperature process method, and a buffer transition layer is obtained; the surface of the transition layer is coated with a titanium carbide coating through a variable-temperature process method, and temperature conversion is conducted; according to the variable-temperature process method, only one-time variable-temperature growth or multiple-cycle growth is carried out, a buffer layer with low crystal quality is pre-coated on the surface of a graphite substrate so as to reduce stress and thermal adaptation between the graphite substrate and a surface coating, and then a main coating tantalum carbide film is produced on the buffer layer through a variable-temperature process, so that the surface of the graphite substrate is coated with the tantalum carbide film. And a variable-temperature process is used for reducing the stress in the coating production process.

The utility model belongs to the field of electric arc material increasing and decreasing devices, and discloses double-workbench electric arc material increasing and decreasing equipment which comprises two sets of bottom plates, a rotary table body, an electric arc material increasing system assembly and a high-speed cutting material decreasing system assembly. The double-moving flatcar is connected with a positioner, the electric arc material adding system assembly is connected with any double-gantry device, and the high-speed cutting material adding system assembly is connected with the other double-gantry device. The rotary table body is connected with a rotary table rail and an air cylinder, and the air cylinder is provided with a linear stroke amplifying mechanism and connected with the double-moving flatcar. According to the technical scheme, double stations can work at the same time, the production efficiency is greatly improved, mass production is achieved, the deposition efficiency is high, additive manufacturing of complex structural parts can be rapidly completed, and practicability is greatly improved.

The invention discloses a double-beam laser assisted cold spraying aluminum alloy defective part high-performance repairing method which comprises the following steps: firstly, preprocessing an aluminum alloy defective part to obtain a preprocessed aluminum alloy defective part; secondly, cold spraying repairing treatment is conducted on the preprocessed aluminum alloy defect part, meanwhile, low-power-density laser is emitted to the preprocessed aluminum alloy defect part to assist in cold spraying repairing, and therefore initial repairing aluminum alloy is obtained; then, high-power-density laser is used for conducting micro-scale laser shock peening treatment on the aluminum alloy, and the pre-repaired aluminum alloy is obtained; and then, the laser-assisted cold spraying treatment and the laser shock peening treatment flow are repeated until repairing is completed, and at the moment, repairing of the aluminum alloy defective part can be completed. On the basis of a cold spraying technology, two laser beams with different powers are carried, compared with a traditional technology, the repairing effect can be improved, heat influence on components is avoided, and therefore the method is very suitable for in-situ repairing of the aviation aluminum alloy.

The invention discloses a preparation method of a silicon-carbon negative electrode material. The preparation method comprises the following steps: drying porous carbon to serve as a matrix; the method comprises the following steps: mixing a porous carbon substrate and a deposition aid, placing the mixture in a reactor together, introducing shielding gas, heating to a deposition temperature, introducing a mixture of silicon source gas and the shielding gas, and depositing silicon into porous carbon; adjusting the temperature of the reactor to a coating temperature, introducing a mixture of carbon source gas 1 and protective gas, carrying out primary carbon coating on the porous carbon, and then introducing a mixture of carbon source gas 1, carbon source gas 2 and protective gas to complete complete carbon coating on the surface of the porous carbon; and separating out the deposition aid to obtain the silicon-carbon negative electrode material. According to the invention, the problem of non-uniform silicon deposition in the process of producing the silicon-carbon negative electrode material by the existing vapor deposition method is solved, the gas-solid mass transfer is enhanced, the deposition and coating temperature is reduced, and the product quality and the production safety are improved.

The invention relates to the technical field of titanium and titanium alloy welding, and provides a titanium alloy annular seam efficient large-deposition vibration wire feeding narrow gap welding method, by innovatively designing an asymmetric inclined groove combined with an asymmetric arc swing and an asymmetric vibration wire feeding technology, by designing an asymmetric inclined groove between the upper and lower parts of the groove, the influence of gravity on the welding molten pool is effectively reduced; the asymmetric arc swing technology is adopted to extend the residence time of the tungsten electrode at the upper part of the groove to preheat the side wall, while shortening the residence time at the lower part, reducing heat input, and preventing the molten pool metal from dripping down; combined with the introduction of asymmetric vibration wire feeding technology, according to the different positions of the tungsten electrode at the upper and lower parts of the groove, the vibration mode of the welding wire is dynamically adjusted, the surface tension of the deposited metal is improved, the uniform spreading of the large deposited metal in the groove is promoted, and the flow of the molten pool is disturbed by vibration, the accumulation of the deposited metal at the lower part of the groove is effectively prevented, and the heat distribution and the molten pool behavior during welding are optimized.

The invention discloses an additive component and a friction stir deposition additive manufacturing device and method.The additive component is provided with an axial direction and a feeding channel, the feeding channel penetrates through the additive component in the axial direction, a shaft shoulder side facing a base plate is formed at the end, located in the axial direction, of the additive component, and a material storage cavity is formed in the additive component; the material storage cavity is arranged around the feeding channel in the circumferential direction, communicates with the feeding channel and is adjacent to the shaft shoulder side. The material storage cavity is formed in the material adding component, high-value instantaneous shear strain is generated through friction between the rotating bar and the inner wall of the material storage cavity, and more friction and deformation heat are generated, so that the material can be thermally plasticized in the material storage cavity in advance before deposition, the flow stress of the material is reduced, and the fluidity of the material is improved; the hard high-strength material can be applied to friction stir deposition additive manufacturing, the application range of the material is expanded, metallurgical bonding of a deposition layer interface is enhanced, and component forming is optimized.

The invention discloses a B-doped graphene porous membrane loaded platinum nanocrystalline electrode material which is used for constructing a fuel cell electrode with ultralow platinum dosage. The graphene is deposited on the aluminum foil by adopting an arc discharge method, has abundant porosity and high graphite degree, and provides an efficient mass transfer channel and excellent corrosion resistance; and platinum nanocrystals are deposited on the basis to serve as a catalyst layer of the fuel cell. The method is easy to operate, the preparation period is short, the platinum cost is relatively low, the production cost of the product is also reduced, and meanwhile, the performance test is carried out in the ultralow platinum fuel cell by utilizing the method, so that the product quality is improved. The result shows higher power density and current density than those of a commercial powder-based Pt / C catalyst and a pure graphene membrane electrode prepared in the same way.

This invention discloses a method for preparing and applying a current collector for a negative electrode-free sodium metal battery modified with monodisperse metal sites. The current collector substrate is placed in the reaction chamber of an atomic layer deposition (ALD) apparatus. A metal source and co-reactants are introduced through alternating feeding to generate monodisperse metal atoms, ultimately producing a negative electrode-free sodium metal current collector. By constructing uniform, high-density monodisperse metal atoms on the surface of the current collector substrate, the active sites of the metal atoms are densely and uniformly distributed. This guides sodium metal to deposit and peel off in a dense, flat layered morphology, effectively suppressing sodium dendrite formation and reducing the generation of dead sodium during cycling. This significantly improves the coulombic efficiency of the negative electrode-free sodium metal battery. When applied to a negative electrode-free sodium metal battery, the battery can achieve stable long-cycle operation in the initial state of a completely sodium-free negative electrode, effectively improving battery cycle stability and coulombic efficiency, and significantly extending battery life.

A display device includes: a display panel including a display area for displaying an image and a sub-area extending in one direction from the display area, in which the sub-area includes a bent area bent in a rear direction of the display panel and an outer portion extending from the bent area to overlap with the display area; a display driving circuit disposed at an outer portion of the sub-area to drive pixels of the display area; a bending protection member provided to cover a bending region of the sub-region; a rear surface cover disposed on a rear surface of the display panel to cover an outer portion of the sub-area and the display driving circuit; and an adhesive tape covering an end portion of the rear surface cover adjacent to the bending region.

The present invention belongs to the technical field of semiconductor equipment, and specifically relates to a silicon carbide crystal deposition device and a silicon carbide crystal preparation method. The raw material gas is first mixed in a feed mixing chamber of a preheating mixing module and the mixed gas in a heat exchange chamber is preheated by heat exchange with the tail gas of the deposition chamber, thereby preheating the raw material gas to a temperature close to the deposition temperature in a reduction furnace, reducing the temperature gradient between the feed position and other areas in the reduction furnace, so that the raw material can enter the deposition chamber at a low temperature and quickly start reaction and deposition on the surface of a carrier with a higher temperature, thereby improving the crystal deposition efficiency and realizing the recycling of the tail gas; and by arranging a light source catalyst and an active metal layer, the material molecules are pretreated by the dual catalysis of light and active metal, which is beneficial to improving the material molecule energy, reducing the activation energy of the reaction, and promoting the reaction to proceed at a low temperature, so that the material can react quickly and fully, thereby helping to improve the deposition efficiency of the silicon carbide crystal.

The invention relates to a metal material OLED deposition mask. The deposition mask includes a deposition region and a non-deposition region. The deposition region includes an active portion and a non-active portion. The active portion includes a plurality of through-holes including small-surface holes formed in a depth direction from one surface and large-surface holes communicating with the small-surface holes in the depth direction from another surface opposite the one surface, and island-shaped portions located between the plurality of large-surface holes on the other surface. The average center line average surface roughness in the longitudinal direction and the average center line average surface roughness in the lateral direction of the island-like portion on the other surface are 0.1 [mu] m to 0.3 [mu] m, respectively; an average 10-point average surface roughness in a longitudinal direction and an average 10-point average surface roughness in a lateral direction of the island-shaped portion on the other surface are 0.5 [mu] m to 1.5 [mu] m, respectively, the longitudinal direction being a rolling direction of the metal material, and the lateral direction being a direction perpendicular to the rolling direction.

The invention relates to the field of high-temperature protective ceramic coatings for aero-engines, and particularly discloses an environmental barrier coating with a gradient structure and a long service life and a suspension plasma spraying preparation method thereof. The specific method comprises the following steps: by taking silicon powder as a raw material, preparing a bonding layer on a silicon carbide ceramic or SiCf / SiC ceramic-based composite material by utilizing an axial powder feeding three-electrode atmosphere plasma spraying system, preparing suspension liquid by taking rare earth silicate RE2Si2O7 and the like as raw materials, and respectively spraying a compact structure RE2Si2O7 middle layer and a columnar crystal-like structure RE2Si2O7 surface layer; and the prepared state coating is placed in Ar atmosphere and subjected to high-temperature annealing treatment, and the environment barrier coating with the high crystallinity and the gradient structure is obtained. The coating prepared by the invention has gradient transition structural characteristics, has excellent thermal shock resistance in actual tests, and has important application significance in prolonging the service life of silicon carbide ceramic or SiCf / SiC ceramic-based composite materials.

A kind of diamond chemical vapor deposition device, including vacuum reaction chamber, the upper portion of the vacuum reaction chamber is provided with distribution platform, the top left side of the distribution platform is connected with hydrogen pipeline, the top right side of the distribution platform is connected with carbon-containing pipeline, the lower portion of the distribution platform is provided with microwave plasma, the lower portion of the microwave plasma is provided with substrate table, the upper portion of the substrate table is provided with molybdenum support, diamond seed is placed on the molybdenum support, the bottom of the substrate table is provided with cooling assembly, the right side of the vacuum reaction chamber is provided with negative pressure fan.The utility model can better solve the problems in the prior art, create better economic benefits.

The invention relates to the technical field of metal material preparation, and in particular to a method for preparing a corrosion-resistant metal material in a seawater environment, comprising placing a base material and a sample material on different sample plates at the same height in a reaction chamber, respectively, introducing a precursor and a reducing gas into the reaction chamber, heating the base material to a preset temperature at the same time, heating the sample material in a preset heating manner, detecting the deposition area of ​​the surface of the sample material per unit time by a reflection spectrum analysis technology and determining the optimal heating temperature of the base material, controlling the sample plate corresponding to the sample material to move around the sample plate where the base material is located in the reaction chamber to determine the optimal deposition position, moving the sample plate corresponding to the base material to the optimal deposition position, and completing the deposition of a surface coating on the base material at the optimal deposition position; ensuring that the coating is deposited under optimal process conditions, so that the final coating is more uniform and dense, thereby effectively improving the corrosion resistance of the deposited coating.

The invention belongs to the technical field of sewage treatment, and particularly relates to a sewage treatment and recycling device and method.The sewage treatment and recycling device comprises a treatment tank, a settling chamber and two sewage treatment chambers are sequentially arranged in the treatment tank in the axis direction of the treatment tank, and the settling chamber and the two sewage treatment chambers are completely separated through vertical partition plates; through holes are formed in the tops of the settling chamber and the two sewage chambers, and two guide plates are symmetrically arranged in the settling chamber. Through the arrangement of the separation assembly, when sewage flows through the inner side of a U-shaped plate under the guidance of a flow guide plate, a magnetic plate located in a protective cover can adsorb and intercept metal residues in the sewage, then the magnetic plate can be far away from the metal residues by extending a hydraulic push rod, and then the suction force to the metal residues is weakened; and finally, the metal residues can fall into the collecting groove through the strip-shaped hole to be recycled, and waste of the metal residues is avoided.

The invention discloses a heterojunction battery and a preparation method thereof. The preparation method comprises the steps of preparing the semiconductor substrate layer; preparing intrinsic amorphous silicon layers on two opposite surfaces of the semiconductor substrate layer respectively; depositing a doping layer on the intrinsic amorphous silicon layer; and manufacturing a transparent conductive layer on the doped layer. The preparation of the doping layer on the intrinsic amorphous silicon layer comprises the following steps: depositing a collection layer on at least one intrinsic amorphous silicon layer; a microcrystalline silicon layer is deposited on the collection layer, and carrier gas used in the process of depositing the microcrystalline silicon layer comprises argon. In this way, the deposition efficiency of the microcrystalline silicon layer and the photoelectric conversion efficiency of the heterojunction cell can be improved.

The application belongs to the technical field of battery manufacturing, and particularly relates to a silicon-carbon negative electrode material, a preparation method thereof and a secondary battery. The preparation method comprises the step of growing a silicon-carbon thin film on the surface of a copper foil by using a cold plasma chemical vapor deposition method, and the deposition source gas is a carbon-containing organosilicon compound or a mixture thereof. The method has a short preparation process, high safety of raw materials, can effectively improve the deposition efficiency, inhibit the crystallization and agglomeration of silicon, improve the carbon coating effect, and enhance the bonding force between the silicon-carbon composite material and the copper foil, so as to improve the overall conductivity, improve the cycle performance and the battery capacity.

The invention discloses a MoNbZr / Zr nano-layered material and a preparation method thereof. The MoNbZr / Zr nano-layered material is prepared by depositing on a clean silicon substrate by a magnetron sputtering deposition method. Ar+ ions bombard a target material to cause elastic collisions with MoNbZr / Zr atoms, further generating a collision cascade, whereby the sample atoms are excited and reversely deposited onto the substrate. MoNbZr atoms and Zr atoms are deposited in sequence to alternately form multilayer nano-layered materials with different modulation periods, different interface structures, and different phase compositions. High-density plasmas such as secondary electrons generated by sputtering circulate in the form of cycloids under the combined action of mutually perpendicular electromagnetic fields, and do not contact the substrate. Therefore, the ionization efficiency is high and the deposition rate is fast. The invention not only successfully prepares nano-layered materials with different phase compositions, but also the obtained nano-layered materials are uniform and dense, with clear interface structures and excellent comprehensive performance.

The invention belongs to the technical field of metal-based composite materials, and relates to a preparation method of zirconium dioxide dispersion strengthened copper alloy, which comprises the following steps of: 1, smelting copper into molten copper; 2, molten copper is poured into a tundish, and nanoscale zirconium dioxide powder is placed in the sealed tundish; 3, atomizing molten copper and nanoscale zirconium dioxide powder, and spraying the atomized molten copper and nanoscale zirconium dioxide powder onto a deposition disc to form a blank; and 4, the blank is subjected to hot extrusion and cold drawing, and a finished product is prepared. According to the preparation method, liquid metal atomization and ZrO2 powder atomization are uniformly combined by adopting a spray forming method, so that a blank with a rapid solidification structure characteristic is prepared; the method has the characteristics of near net shape forming, structure refinement, short technological process, low cost, high deposition efficiency, high alloy component and the like, and solves the technical problems that oxide dispersion distribution is not uniform, dispersed phase grains are large in size and easy to agglomerate, the production process is complex, the production cost is relatively high, large blanks cannot be prepared, and the shapes and sizes of the blanks are limited.

The application discloses a silicate cement admixture and a preparation method thereof, and belongs to the technical field of recycled concrete. The silicate cement admixture is prepared by using self-synthesized modified coal gangue nanosheets, copper-calcium nanoneedle composite modified scales and a modified binder as part of fillers. The modified binder can significantly increase the interfacial bonding force of the silicate cement admixture, the cement matrix and the recycled aggregate. The modified coal gangue nanosheets and the copper-calcium nanoneedle composite modified scales, which are both reinforcing phases, can give the silicate cement admixture sufficient mechanical strength. The two kinds of materials are both in a sheet structure, and the stress can be dispersed by mutual sliding of the two kinds of materials, so that stress concentration points are avoided at the interface. The copper-calcium nanoneedle composite modified scales can increase the contact area with other materials through a mechanical interlocking effect, and the existence of the nanoneedle structure allows a gap between the copper-calcium nanoneedle composite modified scales and other materials, so that the porosity and the water permeability are increased.

The invention provides an atomizer system based on inspiration airflow sensing adjustment and an adjustment method, and relates to the technical field of medical instruments, and the atomizer system comprises an atomizer body, an airflow sensing module, a control module, an atomization output adjustment module and a voice broadcast module. The airflow sensing module is used for sensing inspiration airflow and converting the inspiration airflow into electric signals. The control module and the airflow sensing module are used for receiving the electric signals and sending control instructions. When the inspiration airflow intensity corresponding to the electric signal is lower than a preset threshold value, a reminding instruction is sent, the atomization output adjusting module is used for adjusting the atomization output quantity of the atomizer body according to a control instruction, and the voice broadcast module is used for receiving the reminding instruction and outputting electronic voice prompt information. Atomization output is matched with the inspiration state in real time, medicine loss is effectively reduced, and the medicine utilization rate is increased; by establishing mathematical models for different nebulizer types and combining breathing parameter correction, individualized accurate adjustment is achieved, and the treatment effect is improved.

The invention relates to the technical field of solar cell modules, in particular to a spatial atomic layer deposition system, an atomic layer deposition process using the spatial atomic layer deposition system and a composite film. The spatial atomic layer deposition system comprises a plate-type reaction chamber, wherein the plate-type reaction chamber is communicated with a plurality of nitrogen input pipes and nitrogen exhaust pipes along the length direction of the plate-type reaction chamber; the nitrogen exhaust pipes are arranged between the adjacent nitrogen input pipes, and the two nitrogen exhaust pipes are arranged between the adjacent nitrogen input pipes; a metal source input pipe group and an oxygen source input pipe group which are communicated with the plate-type reaction chamber are sequentially arranged in the length direction of the plate-type reaction chamber in a crossed manner; and the metal source input pipe group and the oxygen source input pipe group respectively comprise a plurality of metal source input pipes and oxygen source input pipes. The spatial atomic layer deposition system can improve the deposition efficiency of an atomic layer, can also improve the structure of a deposited atomic layer thin film, regulates and controls the characteristics of the thin film, and improves the conductivity and photoelectric conversion efficiency of a solar cell module.

This invention discloses an isostatic pressing graphite tantalum carbide coating deposition apparatus for epitaxial substrates, specifically relating to the technical field of coating deposition equipment. It includes a support base, with a convergence deposition assembly mounted on top of the base. The convergence deposition assembly includes a connecting plate for support, which is located on top of the base. Through the corresponding cooperation of various structures, the two first heating plates are brought close together to initially limit the material, preventing displacement during subsequent coating deposition. The material can converge between the first and second heating plates, ensuring that the coating is concentrated between the first and second heating plates and the material during deposition, improving deposition efficiency. Furthermore, the trapezoidal cross-section formed by the combination of the second and first guide plates continuously causes the coating to converge downwards, resulting in a higher density.

The invention provides a method and a device for preparing a coating on the inner wall of a pipe barrel based on bipolar magnetron sputtering, and the uniform and continuous coating on the inner wall of the pipe barrel is prepared on the inner wall of the deep pipe barrel by improving a magnetic field structure on the basis of existing magnetron sputtering equipment. Specifically, the device comprises a tube barrel and a tubular target arranged in the tube barrel, and the tube barrel and the tubular target are insulated. In the preparation process of the coating on the inner wall of the pipe barrel, the pipe barrel and the tubular target can be mutually positive and negative electrodes and can also be respectively connected with a direct-current power supply, a pulse power supply or a radio-frequency power supply according to the requirements of a coating process, and the tubular target must have the time when the potential is negative relative to the pipe barrel. At least two closed magnetic fields with magnetic induction lines distributed in an arch shape and penetrating through the target surface are constructed on the surface of the tubular target through a permanent magnet or an electromagnetic coil or a combination of the permanent magnet and the electromagnetic coil, at least one divergent magnetic field mainly perpendicular to the target surface component exists between two annular runways, and magnetic lines of the divergent magnetic field on the surface of the tubular target are dense. And the inner wall of the pipe barrel far away from the target surface is loosened. And part of high-energy electrons are guided to move towards the inner wall of the pipe barrel through magnetic induction lines, so that the density of ions reaching the inner wall of the pipe barrel is improved, and high-speed and high-quality preparation of the inner wall coating of the pipe barrel is realized.