596results about "Electrical discharge ozone preparation" patented technology

Systems and methods are delineated which, among other things, are for depositing a film on a substrate that is within a reaction chamber. In an exemplary method, the method may comprise applying an atomic layer deposition cycle to the substrate, wherein the cycle may comprise exposing the substrate to a precursor gas for a precursor pulse interval and then removing the precursor gas thereafter, and exposing the substrate to an oxidizer comprising an oxidant gas and a nitrogen-containing species gas for an oxidation pulse interval and then removing the oxidizer thereafter. Aspects of the present invention utilize molecular and excited nitrogen-oxygen radical/ionic species in possible further combination with oxidizers such as ozone. Embodiments of the present invention also include electronic components and systems that include devices fabricated with methods consistent with the present invention.

The present invention relates to a process and system for depositing a thin film onto a substrate. One aspect of the invention is depositing a thin film metal oxide layer using atomic layer deposition (ALD).

One ozone concentrating chamber is provided therein with a part of a cooling temperature range where ozone can be selectively condensed or an oxygen gas can be selectively removed by transmission from an ozonized oxygen gas, and a part of a temperature range where condensed ozone can be vaporized, and condensed ozone is vaporized by moving condensed ozone with flow of a fluid or by gravitation to the part where condensed ozone can be vaporized, whereby the ozonized oxygen gas can be increased in concentration. Such a constitution is provided that a particle material 13 for condensation and vaporization filled in the ozone concentrating chambers 11 and 12 has a spherical shape of a special shape with multifaceted planes on side surfaces, or an oxygen transmission membrane 130 capable of selectively transmitting an oxygen gas in an ozone gas is provided.

An ozone generator for generating ozone by applying a specified process to oxygen by discharge includes a first raw material gas supply unit for supplying the oxygen as a first raw material gas, and a second raw material gas supply unit for supplying an oxide compound gas as a second raw material gas, in which, by excited light, excited and generated by a discharge in the oxygen and the oxide compound gas, the oxide compound gas is dissociated, or the oxide compound gas is excited accelerating dissociation of the oxygen, and ozone is generated. In this way, ozone generation efficiency is raised.

An improved system and method for controlling ozone concentration in connection with a multi-chamber tool. The system and method involve a first and a second concentration controller in combination with an ozone generator. The first concentration controller detects an EVENT (i.e., one of the chambers in the multi-chamber tool coming on-line or off-line) and in response provides a power instruction to the ozone generator in accordance with a predictive control algorithm. The first concentration controller has a fast (i.e, about 1 second) response time. The second concentration controller is masked from the ozone generator during the EVENT, but otherwise controls the generator after an interval of time has lapsed after the EVENT. The second concentration controller has a slower response time than the first concentration controller, however the second concentration controller provides the system with long-term stability and can be used to provide updated data to the predictive control algorithm.

An ozone gas concentration measurement method that can easily measure the concentration of ozone gas. A process gas containing ozone gas is produced from a raw gas containing oxygen gas. The number of moles of gas molecules contained in the process gas is measured. The concentration of the ozone gas contained in the process gas is calculated based on the number of moles of gas molecules contained in the process gas.

A method for making surface corona discharge, which produces ozone gas and apparatus for producing the same are disclosed, in which a dielectric spacer/film having a specific capacity C' equal to or more than 200 nanofarad per square meter positioned between the base electrode and the net electrode. Said net electrode is a wire net or a perforated metal or a wire winding having an open area not less than about 70%, and a size of hole D equals to or less than about 0.7V/P, where V is a voltage in kilovolts and P is pressure of an ambient air or an oxygen in atmospheres. Net electrode has radius R of wire or radius of an edge of openings in the perforated metal equal to or more than about 1.6d, where d is the thickness of the said dielectric spacer/film, which is determined by a fundamental formula d=9k/C', where d is in millimeters, C' is in nF/m2, and k is dimensionless dielectric constant k of given material. Under disclosed parameters said surface corona is safe for human contact if said net electrode is grounded. Start voltage Vst of ozone production is determined by experimental formula Vst=0.7+60/C', kV, here C' in nF/m2. The even and high intensity corona surface and high ozone output takes place if the operating voltage is more than about 3Vst. AC power supply is applied to produce ozone gas at "home" voltage 0.7-1.0 kV and produces ozone gas more effectively at 2,5-3.6 kV. A method for disinfection and decontamination of objects by using the direct corona contact and apparatus for making the same is disclosed, in which safe corona surface is placed on said object and is acting by ozone, ultraviolet and ion bombing simultaneously in the unique environment, which takes place inside of the safe corona. A method for ozone disinfection and decontamination and devices for making the same is disclosed, in which said ozone generating element is placed in a closed container/room with or without treated objects and produce a high ozone concentration due to effective ozone dispersion from corona surface without blowing of air/oxygen through said container/room.

An electro-kinetic air conditioner for removing particulates from the air creates an airflow using no moving parts. The conditioner includes an ion generator that has an electrode assembly including a first array of emitter electrodes, a second array of collector electrodes, and a high voltage generator. Preferably, a third or leading or focus electrode is located upstream of the first array of emitter electrodes, and/or a trailing electrode is located downstream of the second array of collector electrodes. The device can also include an interstitial electrode located between collector electrodes, an enhanced collector electrode with an integrally formed trailing end, and an enhanced emitter electrode with an enhanced length in order to increase emissitivity.

An electro-kinetic air conditioner for removing particulates from the air creates an airflow using no moving parts. The airflow is subjected to UV radiation from a germicidal lamp within the device. The conditioner includes an ion generator that has an electrode assembly including a first array of emitter electrodes, a second array of collector electrodes, and a high voltage generator. The device can also include a third or leading or focus electrode located upstream of the first array of emitter electrodes, and/or a trailing electrode located downstream of the second array of collector electrodes, and/or an interstitial electrode located between collector electrodes, and/or an enhanced emitter electrode with an enhanced length in order to increase emissivity.

An ozone generating system and an ozone generating method producing ozone at a high concentration and operating at high efficiency, in which a raw material gas with no nitrogen added and mainly containing oxygen is used. The amount of generation of NO_X by-product is null. A raw material gas not containing nitrogen and mainly containing oxygen is supplied to an ozone generator, an AC voltage is applied to produce discharge light having wavelength of 428 nm to 620 nm, a catalytic material containing a photocatalytic material with a band gap energy of 2.0 eV to 2.9 eV is provided on an electrode or a dielectric in a discharge region, gas pressure is kept at 0.1 MPa to 0.4 MPa, and ozone is generated.

An electro-kinetic air conditioner for removing particulates from the air creates an airflow using no moving parts. The airflow is subjected to UV radiation from a germicidal lamp within the device. The conditioner includes an ion generator that has an electrode assembly including a first array of emitter electrodes, a second array of collector electrodes, and a high voltage generator. The device can also include a third or leading or focus electrode located upstream of the first array of emitter electrodes, and/or a trailing electrode located downstream of the second array of collector electrodes, and/or an interstitial electrode located between collector electrodes, and/or an enhanced emitter electrode with an enhanced length in order to increase emissivity.

A new and novel ozone generator with a dual dielectric barrier discharge design is disclosed where high-purity ozone is generated and whose concentration can be varied over a wide range. The simplified design of the ozone generator cell possesses a gas inlet and outlet connected to an annular, sealed dielectric gas envelope that supports both inner and outer electrodes that do not come into contact with the gas. The design eliminates the need for gaskets, o-rings or other methods applied to seal the ozone cell and reduces problems associated with potential interaction resulting from material compatability issues. The applied high voltage is provided by a simple self-resonating, push-pull oscillating circuit whose efficiency is optimized through application of an appropriate impedance matching device. The ozone is concentration is adjusted by varying the pulse width duty cycle of the applied voltage and gas flow rate. The design configuration of the ozone generating cell also eliminates the need for forced air or liquid cooling by natural convective air currents and conductive means.

An electro-kinetic air conditioner for removing particulates from the air creates an airflow using no moving parts. The airflow is subjected to UV radiation from a germicidal lamp within the device. The conditioner includes an ion generator that has an electrode assembly including a first array of emitter electrodes, a second array of collector electrodes, and a high voltage generator. The device can also include a third or leading or focus electrode located upstream of the first array of emitter electrodes, and/or a trailing electrode located downstream of the second array of collector electrodes, and/or an interstitial electrode located between collector electrodes, and/or an enhanced emitter electrode with an enhanced length in order to increase emissivity.

A multi-use sanitization system is disclosed which includes one or more containers in fluid communication with other system components. Components of the system include an ozone contacting device, such as a vortex-venturi or a sparger, for incorporating ozone into a liquid, an ozone generator to provide ozone to the vortex-venturi, a fluid transfer valve to allow simultaneous flow of liquid into and out of the container, and a pump to promote fluid flow through the system. Optionally, a gas-liquid separator with an optional integral gas release valve, an ozone destructor, an oxidation-reduction potential ozone sensor, or a pour-through type pre-filter may be incorporated into the system.

A method of sterilizing a closed environment is provided in which an disinfection apparatus is placed into the closed environment; it then generates ozone to a predetermined ozone concentration, following which the humidity of the closed environment is rapidly increased. A catalytic converter then reduces the ozone concentration to safe levels. When the ozone concentration is reduced to a predetermined safe level, the disinfection apparatus signals.

An apparatus performs radical treatment by electric discharge. The radical treatment apparatus includes an electrode unit having a gas flow path that blows gas onto treatment water and an electrode member that generates the electric discharge at a leading edge in order to generate a radical from the gas.

To provide a generator capable of generating plasma and ozone with high efficiency and easy to handle, with a simple structure. An electrode part 10 is formed of electrodes 11 and 12 without dielectric material interposed therebetween. An arc-extinguishing capacitor 13 as a charge storage part for storing charge is connected in series to the electrode part 10. An AC power source 15 generating plasma by causing self-arc-extinguishing discharge between the electrodes 11 and 12 by applying AC voltage to charge and discharge the arc-extinguishing capacitor 13, is connected to both ends of a circuit in which the electrode part 10 and the arc-extinguishing capacitor 13 are connected in series. The arc-extinguishing capacitor 13 and one electrode 12 of the electrode part 10 connected thereto are unitized, for making the electrode part multi-polarized. A unit is constituted of a floating electrode serving as both of the one electrode 12 of the electrode part 10 and one electrode of the arc-extinguishing capacitor 13, an insulating material provided around the floating electrode and a grounding electrode provided around the insulating material.

The present invention provides an apparatus 1 for the treatment of air comprising a low power corona discharge ozone generator 5,6 inside a chamber 9 having an inlet 2 and an outlet 7, and at least one air flow impeller 3 for inducing a flow of air through the chamber 9. The ozone generator 5,6 is formed and arranged for generating a restricted concentration of ozone, within an inactivating zone 10 contained within the chamber 9, through which the air flow is passed. The restricted concentration is sufficient to inactivate airborne pollutant material entrained in the air flow, yet decays sufficiently outside the inactivating zone so that the concentration of ozone in the cleaned air expelled from the apparatus 1 is at a physiologically acceptable level without the use of an ozone decomposition catalyzer.

Embodiments of the present invention are directed to a method and apparatus for moving air using an air-conditioning system therein, whereby the air-conditioning system preferably includes at least one emitter electrode, at least one collector electrode, at least one driver electrode disposed adjacent to the collector electrode, and/or at least one trailing electrode positioned downstream of the collector electrode. The collector electrode and the driver electrode are removable from the device. In one embodiment, the driver electrodes are removable from the device and/or the collector electrode. The ability of remove the collector electrode as well as driver electrode allow for easy cleaning of the electrodes. In one embodiment, the present device includes a removable exhaust grill upon which the driver electrode and/or the trailing electrode are coupled to. The removable grill allows the user to easily clean the driver electrode without having to remove the collector electrode.