Ozone generation device and method for attaching object-transfer internal member

Abstract

The purpose of the present disclosure is to provide an ozone generation device that can, in a structure having an object-transfer internal member, reduce environmental load and extend service life without decreasing the efficiency of use. In the present disclosure, an outer frame member (31) has an opening (31b), and an object-transfer internal member (32) is provided in the opening (31b). The object-transfer internal member (32) has a diameter variation property in which the member diameter (d2) becomes less than the opening diameter (d1) of the opening (31) at a cooling temperature (T1) or lower, and the member diameter (d2) becomes equal to or greater than the opening diameter (d1) in a non-cooling temperature range (TH). At a boundary surface (33) between the outer circumferential surface of the object-transfer internal member (32) and the inner circumferential surface of the opening (31b), the object-transfer internal member (32) and the opening (31b) are tightly attached to each other without having another member interposed therebetween.

Description

Ozone generator and method for installing internal components for transmitting objects

[0001] The present disclosure relates to an ozone generating device including an ozone generator that performs an ozone generation process to generate ozone gas from a raw material gas supplied to a discharge space, and a method for attaching an object-transmitting internal member provided in the ozone generating device.

[0002] An example of a conventional ozone generator having an ozone generator that performs an ozone generation process in which a dielectric barrier discharge is generated in a discharge space and ozone gas is generated from a raw material gas (oxygen gas) supplied to the discharge space is the ozone generator disclosed in Patent Document 1.

[0003] Such a conventional ozone generator has a transmission member for transmitting a transmission target for the ozone generator. The transmission target may be, for example, a source gas such as ozone gas or oxygen gas, and the transmission member may be an ozone gas passage for transmitting the ozone gas or a source gas passage for transmitting the source gas.

[0004] Furthermore, conventional ozone generators have an internal object transmission member for outputting an object such as ozone gas to the outside or inputting an object such as a raw material gas from the outside. The internal object transmission member is connected to a transmission member so that the object can be transmitted. For example, if the object is ozone gas, the internal object transmission member is connected to an ozone gas passage so that the ozone gas can be transmitted.

[0005] Fig. 14 is an explanatory diagram that schematically shows the planar structure of a conventional object transmission structure 60. Fig. 15 is an explanatory diagram that schematically shows the cross-sectional structure of the conventional object transmission structure 60.

[0006] As shown in these figures, the conventional object transmission structure 60 includes, as its main components, an outer frame member 61 having a circular opening 61b in a planar view, and an object transmission internal member 62 that is arranged within the opening 61b and is also circular in a planar view.

[0007] The outer frame member 61 includes, as its main components, an outer alloy periphery 61 a and an opening 61 b ​​that penetrates the central region of the outer alloy periphery 61 a. The outer frame member 61 is made of a relatively lightweight material with a high specific strength, such as an aluminum alloy, for the outer alloy periphery 61 a, thereby achieving weight reduction.

[0008] The object-transmitting internal member 62 includes, as its main components, an outer alloy portion 62a and a through-flow passage 62b that penetrates a central region of the outer alloy portion 62a. The through-flow passage 62b is circular in plan view to transmit (flow) the object. The outer alloy portion 62a is made of a corrosion-resistant alloy material, such as stainless steel, that is resistant to corrosion when the object is circulated.

[0009] As such, since it is necessary to change the constituent material between the outer frame member 61 (alloy outer peripheral portion 61a) and the object transmission internal member 62 (alloy outer peripheral portion 62a), the object transmission structure 60 requires two parts (outer frame member 61 + object transmission internal member 62).

[0010] In order to position the object transmission internal member 62 within the opening 61b, the member diameter d62 of the object transmission internal member 62 is set to be approximately the same length as the opening diameter d61 so that it gently contacts the inner surface of the opening 61b (opening diameter d61).

[0011] The outer circumferential alloy portion 61a made of aluminum alloy and the outer circumferential alloy portion 62a made of stainless steel cannot be directly joined together.

[0012] Therefore, in the conventional object transmission structure 60, the O-ring 66 serving as a sealing member for ensuring close contact between the outer frame member 61 and the object transmission internal member 62 is an essential component.

[0013] Specifically, a sealing groove 62c having a circular shape in plan view is provided in the central region of the outer periphery of the alloy outer periphery 62a. An O-ring 66, which is a sealing member having a circular shape in plan view, is provided in the sealing groove 62c, thereby improving the airtightness between the inner periphery of the opening 61b of the outer frame member 61 and the outer periphery of the object transmission inner member 62 (alloy outer periphery 62a). This is because the O-ring 66, which serves as a sealing member, is interposed between the inner periphery of the opening 61b of the outer frame member 61 and the outer periphery of the object transmission inner member 62.

[0014] Patent No. 3607890

[0015] However, since the O-ring 66 generally has the characteristic of deteriorating over time due to changes in hardness and corrosion, it is necessary to replace the O-ring 66 during the use period of the ozone generator having the object transmission structure 60.

[0016] As described above, conventional ozone generators having an object transmission structure 60 require replacement of the O-ring 66, which is a sealing member, resulting in a decrease in the efficiency of use of the ozone generator. In addition, there is a problem in that the disposal of used O-rings 66 places a high burden on the environment.

[0017] Furthermore, when replacing the O-ring 66, the task of removing the O-ring 66 is relatively difficult, and there is a risk that the outer frame member 61 or the object transmission internal member 62 may be damaged during replacement, thereby degrading the performance of the object transmission structure 60. Specifically, there is a risk that the inner peripheral surface of the alloy outer peripheral portion 61a (the inner peripheral surface of the opening 61b) or the outer peripheral surface of the alloy outer peripheral portion 62a, which are the mating portions between the outer frame member 61 and the object transmission internal member 62, may be damaged, degrading performance.

[0018] As described above, the conventional ozone generator having the object transmitting structure 60 has the problem of reducing the usage efficiency and increasing the environmental load.

[0019] Furthermore, since sealing members such as the O-ring 66 used in the conventional object transmission structure 60 have a tendency to deteriorate over time, there was a problem in that it was difficult to extend the life of the conventional ozone generator having the object transmission structure 60.

[0020] The present disclosure aims to solve the above-mentioned problems and provide an ozone generator having an internal object transmission component, which can reduce environmental impact and extend the lifespan without reducing usage efficiency.

[0021] An ozone generator according to the present disclosure includes an ozone generator that performs an ozone generation process by generating a dielectric barrier discharge in a discharge space and generating ozone gas from a raw material gas supplied to the discharge space, an ozone gas passage for flowing the ozone gas generated in the discharge space, a generator housing member that houses the ozone generator and the ozone gas passage within a housing space, and an object transmission internal member attached to a member mounting region of the generator housing member, wherein the object transmission internal member is connected to a transmission member in a manner that a transmission object for the ozone generator can be transmitted, the transmission member being a structure or space for transmitting the transmission object, and the transmission object includes the ozone gas, The transmission member includes the ozone gas passage, the member mounting region has an opening, the object transmission internal member is provided within the opening, the opening has a circular shape of the opening diameter in a planar view, the object transmission internal member has a circular shape of the member diameter in a planar view, the object transmission internal member has a diameter fluctuation property such that the member diameter is smaller than the opening diameter when the temperature is below a predetermined cooling temperature, and the member diameter is larger than the opening diameter when the temperature is above the predetermined cooling temperature and in a non-cooling temperature range of 0°C or higher, and in the non-cooling temperature range at least, the object transmission internal member and the opening are in close contact at the boundary surface between the outer peripheral surface of the object transmission internal member and the inner peripheral surface of the opening, without any other member in between.

[0022] The object transmission internal member provided in the generator housing member of the ozone generator of the present disclosure is attached to the member mounting area of ​​the generator housing member in a tightly and airtight state in which the object transmission internal member is tightly attached within the opening without any other members in between when the temperature is in the non-cooling temperature range.

[0023] Since the object transmission internal member has the above-mentioned diameter fluctuation property, the object transmission internal member, which has been set to a predetermined cooling temperature or below, can be placed in the opening of the member mounting area, and then the temperature of the object transmission internal member can be set to the non-cooling temperature zone, thereby allowing the object transmission internal member to be mounted in the member mounting area of ​​the generator accommodating member in the above-mentioned close-fitting state.

[0024] As a result, in the ozone generator of the present disclosure, the internal object transmission member does not have any parts that require replacement during use, so that a decrease in the usage efficiency of the ozone generator can be reliably avoided.

[0025] Furthermore, in the ozone generator disclosed herein, the internal object transmission component does not have any parts that need to be replaced during use, so there is no possibility of damage to the internal object transmission component or component mounting area due to component replacement, and the life of the ozone generator can be extended.

[0026] In addition, the internal object-transmitting member provided in the ozone generator of the present disclosure does not have any parts that are to be discarded during use, which reduces the environmental impact.

[0027] The objects, features, aspects, and advantages of the present disclosure will become more apparent from the following detailed description and the accompanying drawings.

[0028] FIG. 1 is an explanatory diagram schematically showing a cross-sectional structure of an object transmission structure provided in an ozone generator according to a first embodiment of the present disclosure. FIG. 2 is an explanatory diagram schematically showing a cross-sectional structure of an outer frame member in the object transmission structure of FIG. 1. FIG. 3 is an explanatory diagram schematically showing a cross-sectional structure of an object transmission internal member of FIG. 1. FIG. 4 is an explanatory diagram schematically showing a configuration of an ozone generator according to a first embodiment having an object transmission internal member. FIG. 5 is an explanatory diagram schematically showing a structure of a focused region of the ozone generator shown in FIG. 4. FIG. 6 is an explanatory diagram showing details of a focused region of the base shown in FIG. 4. FIG. 7 is an explanatory diagram schematically showing a cross-sectional structure of an ozone generator according to a first modified embodiment of the present disclosure. FIG. 8 is an explanatory diagram schematically showing a cross-sectional structure of an ozone generator according to a second modified embodiment of the present disclosure. FIG. 9 is an explanatory diagram (part 1) showing a method of attaching an object transmission internal member according to a second embodiment. FIG. 10 is an explanatory diagram (part 2) showing a method of attaching an object transmission internal member according to a second embodiment. Fig. 10 is an explanatory diagram (part 3) showing a method for attaching the object transmission internal member according to embodiment 2. Fig. 11 is an explanatory diagram (part 4) showing a method for attaching the object transmission internal member according to embodiment 2. Fig. 12 is an explanatory diagram schematically showing the planar structure of a conventional object transmission structure. Fig. 13 is an explanatory diagram schematically showing the cross-sectional structure of a conventional object transmission structure.

[0029] <First Embodiment> Fig. 1 is an explanatory diagram schematically showing the cross-sectional structure of an object transmission structure 30 provided in an ozone generator 100 (described later) according to a first embodiment of the present disclosure. Fig. 2 is an explanatory diagram schematically showing the cross-sectional structure of an outer frame member 31 in the object transmission structure 30 in Fig. 1. Fig. 3 is an explanatory diagram schematically showing the cross-sectional structure of an object transmission inner member 32 in the object transmission structure 30.

[0030] As shown in these figures, the object transmission structure 30 of embodiment 1 includes, as its main components, an outer frame member 31 having a circular opening 31b in a planar view, and an object transmission internal member 32 that is provided within the opening 31b and is circular in a planar view.

[0031] The object transmission internal member 32 is a member to which a transmission object for the ozone generator 101, which will be described later, is connected to a transmission member so as to be capable of being transmitted. The "transmission member" is a structure or space for transmitting the transmission object.

[0032] The outer frame member 31 includes, as its main components, an outer alloy periphery 31a and an opening 31b that penetrates the central region of the outer alloy periphery 31a. The outer frame member 31 is made of a relatively lightweight material with a high specific strength, such as an aluminum alloy, for the outer alloy periphery 31a, thereby achieving weight reduction.

[0033] The object-transmitting internal member 32 includes, as its main components, an outer alloy portion 32a and a through-flow passage 32b that penetrates a central region of the outer alloy portion 32a. The through-flow passage 32b has a circular shape with a through diameter d3 in a plan view to transmit (flow) the object. The outer alloy portion 32a is made of a corrosion-resistant alloy material, such as stainless steel, that is resistant to corrosion when the object is circulated through it.

[0034] The opening 31b in the outer frame member 31 has a circular shape with an opening diameter d1 in plan view, and the object transmission internal member 32 has a circular shape with a member diameter d2 in plan view.

[0035] Hereinafter, in this specification, the term "transmission" is used as a concept including the flow of gases such as raw material gases, the flow of liquids such as refrigerants including cooling water, and the transmission of electrical signals such as power (voltage).

[0036] As such, since it is necessary to change the constituent material between the outer frame member 31 (alloy outer peripheral portion 31a) and the object transmission internal member 32 (alloy outer peripheral portion 32a), the object transmission structure 30 requires two parts (outer frame member 31 + object transmission internal member 32).

[0037] As shown in Figure 1, in the object transmission structure 30, the outer frame member 31 has an opening 31b and the area surrounding the opening 31b as a component mounting area, and the object transmission internal member 32 is attached to the component mounting area in such a manner that the object transmission internal member 32 is disposed within the opening 31b.

[0038] The object transmission internal member 32 in the object transmission structure 30 of the first embodiment has the following diameter fluctuation characteristics.

[0039] Diameter fluctuation characteristics: When the cooling temperature is below a predetermined cooling temperature T1, the member diameter d2 of the object transmission internal member 32 is smaller than the opening diameter d1 of the opening 31b, and when the cooling temperature is above T1 and in the non-cooling temperature zone TH of 0°C or higher, the member diameter d2 becomes larger than the opening diameter d1.

[0040] Here, if the member diameter d2 at or below the cooling temperature T1 is defined as the cooled member diameter d22, and the member diameter d2 at the non-cooling temperature zone TH is defined as the non-cooled member diameter d21, then {d21<d1≦d22} holds between the opening diameter d1 of the opening 31b.

[0041] In this way, the object transmission structure 30 of embodiment 1 has a diameter fluctuation property in which, when the cooling temperature is below T1, the member diameter d2 (= member diameter d22 when cooled) is smaller than the opening diameter d1, and when the temperature is in the non-cooling temperature zone TH, the member diameter d2 (= member diameter d21 when not cooled) is larger than the opening diameter d1.

[0042] Since the object transmission internal member 32 has the above-mentioned diameter fluctuation characteristics, when the object transmission structure 30 is in the non-cooling temperature zone TH, the object transmission internal member 32 and the outer frame member 31 are in a tightly attached state at the boundary surface 33 between the outer surface of the object transmission internal member 32 and the inner surface of the opening 31b.

[0043] The attachment of the object transmission internal member 32 to the member attachment region of the outer frame member 31 can be performed as follows: The object transmission internal member 32, set to a cooling temperature T1 or lower, is placed in the opening 31b of the member attachment region, and then the temperature of the object transmission internal member 32 is set to the non-cooling temperature zone TH. The attachment method of the object transmission internal member 32 will be described in detail in the second embodiment described below.

[0044] In this way, the object transmission structure 30 has the object transmission internal member 32 attached in a tightly fitted state within the opening 31b without any other members including sealing members such as O-rings.

[0045] FIG. 4 is an explanatory diagram schematically illustrating the configuration of the ozone generator 100 according to the first embodiment, which has the object transmitting structure shown in FIGS.

[0046] The ozone generator 100 functions as a flat-plate stacked type ozone generator, and has a combination of a base 24 and a generator cover 110 as a generator housing member having a housing space S100 for housing an ozone generator 101.

[0047] That is, the generator accommodating member includes a base 24 and a generator cover 110 disposed on the surface of the base 24, and an accommodating space S100 is formed on the surface of the base 24.

[0048] The accommodation space S100 accommodates an ozone generator 101. The ozone generator 101 generates a dielectric barrier discharge in the discharge space 6, and performs an ozone generation process to generate ozone gas G2 from a raw material gas G1 such as oxygen gas supplied to the discharge space 6.

[0049] Furthermore, the ozone generator 100 has an ozone transformer 200 and a high-frequency inverter 300 as a power supply unit that supplies power to the ozone generator 101 .

[0050] The high-frequency inverter 300 converts the power input from the power supply input 404 into a required frequency and outputs it to the inverter output cable 403. The ozone transformer 200 boosts this power to a predetermined voltage and supplies it to the ozone generator 100 as high-voltage ozone generating power required for ozone generation.

[0051] The power (voltage) for generating ozone supplied from the ozone transformer 200 is supplied from a high-voltage cable 401, which serves as a power supply line, to the high-voltage bushing 120 (including the relay terminal 121) and the power supply terminal 4 in the accommodation space S100, to the high-voltage electrode 3 of the ozone generator 100. On the other hand, a low voltage is supplied from a low-voltage cable 402 to the low-voltage electrode 7 via the base 24.

[0052] The ozone generator 100 includes a plurality of electrode modules 102, each of which includes as its main components a high-voltage electrode 3 and a low-voltage electrode 7. The ozone generator 101 is configured by stacking a predetermined number of electrode modules 102 on a base 24 in the direction of the arrow Z in the figure in the order "N-1," "N-2," "N-3," ..., "N-7," and "N-8."

[0053] The ozone generator 101 is covered with a generator cover 110. A source gas inlet 130 for supplying a source gas G1, which is oxygen gas containing trace amounts of nitrogen, carbon dioxide, etc., is provided on a cover side surface 110s of the generator cover 110. The supplied source gas G1, such as oxygen gas, fills the accommodation space S100 and flows into the discharge space 6.

[0054] On the other hand, the base 24 is provided with an ozone gas outlet 11 for discharging the ozone gas G2 generated in the discharge space 6 from the ozone generator 100 to the outside, and a refrigerant inlet / outlet 12 for allowing a refrigerant such as cooling water for cooling the electrode module 102 to flow in and out.

[0055] 5 is an explanatory diagram schematically illustrating the structure of a focused region R1 of ozone generator 101. As shown in the figure, a flat high-voltage electrode 3 is provided opposite a flat low-voltage electrode 7, and a flat dielectric 5 is provided between the low-voltage electrode 7 and the high-voltage electrode 3. A discharge space 6 is formed between the low-voltage electrode 7 and the dielectric 5 via a spacer (not shown).

[0056] Electric power for generating ozone is supplied to the high-voltage electrode 3 from the ozone transformer 200 shown in Figure 4 via the high-voltage bushing 120 (relay terminal 121) and the power supply terminal 4. The high-voltage electrode 3 is made of a metal such as stainless steel or aluminum. The main surface of the dielectric 5 is in close contact with the high-voltage electrode 3. The dielectric 5 is made of a material such as ceramic, glass, or silicon.

[0057] In the ozone generator 100 having the basic configuration of the first embodiment, the discharge space 6 is formed in a disk shape in a plan view, and the source gas G1 filled in the accommodation space S100 is injected from all around the discharge space 6 toward the center. That is, in the ozone generator 100, the accommodation space S100 functions as a transmission member for transmitting (supplying) the source gas G1 to the discharge space 6 of the ozone generator 101.

[0058] An electrode supply unit including an ozone transformer 200 and a high-frequency inverter 300 applies an AC high voltage between the high-voltage electrode 3 and the low-voltage electrode 7, thereby generating a dielectric barrier discharge in the discharge space 6. Therefore, the ozone generator 101 can perform an ozone generation process in which a source gas G1, such as oxygen gas, flowing in the discharge space 6 is converted into ozone gas G2. The ozone gas G2 generated by the ozone generation process is guided from the center of the low-voltage electrode 7 through an ozone gas passage 8 provided within the low-voltage electrode 7 to an ozone gas outlet 11 provided in the base 24.

[0059] The low-voltage electrode 7 is a thin, conductive rigid body made by joining two conductive plates made of stainless steel or the like to form an ozone gas passage 8 between the plates. In addition to the ozone gas passage 8, the low-voltage electrode 7 is provided with a coolant passage 9 for increasing the efficiency of ozone generation. The gas temperature in the discharge space 6 is lowered by flowing a coolant such as cooling water through this coolant passage 9.

[0060] On the other hand, in order to cool the high voltage electrode 3, a water-cooled electrode cooling plate 1 is arranged on the high voltage electrode 3 via an insulating plate 2 with excellent thermal conductivity. The electrode cooling plate 1 is a thin rigid body made by joining two steel plates made of stainless steel or the like and forming a refrigerant passage 9 between the plates. That is, the electrode cooling plate 1 also has a refrigerant passage 9, and a refrigerant such as cooling water flows through this refrigerant passage 9.

[0061] An ozone gas passage 8 formed in the low-voltage electrode 7 communicates with an ozone gas outlet 11 provided in the base 24. On the other hand, a refrigerant passage 9 formed in the electrode cooling plate 1 and the low-voltage electrode 7 communicates with a refrigerant inlet / outlet 12 provided in the base 24.

[0062] The ozone gas passage 8 is a passage for allowing the ozone gas G2 generated in the discharge space 6 to flow, and the coolant passage 9 is a passage for supplying a coolant to the ozone generator 101.

[0063] The electrode module 102, which includes the low-voltage electrode 7, the high-voltage electrode 3, the dielectric 5, a spacer (not shown), the insulating plate 2, and the electrode cooling plate 1, is fastened and fixed between the electrode pressing plate 22 and the base 24 by tightening bolts 21 that pass through each component.

[0064] Figure 6 is an explanatory diagram showing details of the region of interest R2 of the base 24 in Figure 4. As shown in the figure, the internal ozone gas member 51 has the same structure as the internal object transmission member 32 shown in Figures 1 to 3. Here, the base 24 corresponds to the outer frame member 31, and the opening 31b in the base 24 for attaching the internal ozone gas member 51 and its surrounding area constitute the member attachment region.

[0065] That is, the ozone gas internal member 51, which becomes the object transmitting internal member 32, is attached inside (the opening 31b of) the base 24, which becomes the outer frame member 31. Therefore, the through flow path 32b of the object transmitting internal member 32 becomes the ozone gas outlet 11 of the ozone gas internal member 51. In the ozone gas internal member 51, the object to be transmitted becomes ozone gas G2, and the transmitting member becomes the ozone gas passage 8. The opening 31b shown in FIG. 6 has a groove structure with a closed top.

[0066] The ozone gas internal member 51 is connected to the ozone gas passage 8 so that the ozone gas G2 can flow through the through passage 32b of the object transmission internal member 32. The connection between the ozone gas internal member 51 and the ozone gas passage 8 is performed using an existing connection method (joining method) such as socket welding or butt welding. In the structure shown in Fig. 6, the ozone gas passage 8 and the outer frame member 61 are joined in a manner such that the tip of the ozone gas passage 8 enters the ozone gas outlet 11.

[0067] The refrigerant internal member 52, which serves as the object-transmitting internal member 32, is attached to (inside the opening 31b of) the base 24, which serves as the outer frame member 31. Therefore, the through flow passage 32b of the object-transmitting internal member 32 serves as the refrigerant inlet / outlet 12 of the refrigerant internal member 52. In the refrigerant internal member 52, the object to be transmitted is the refrigerant CM such as cooling water, and the transmitting member serves as the refrigerant passage 9.

[0068] The refrigerant internal member 52 is connected to the refrigerant passage 9 so that the refrigerant CM can flow through the through passage 32b of the object transmission internal member 32. Note that the connection between the refrigerant internal member 52 and the refrigerant passage 9 is performed using an existing connection method (joining method).

[0069] In this way, the base 24, which functions as part of the generator housing member, has two member mounting areas including two openings 31b, and functions as a flange for mounting the internal member 51 for ozone gas and the internal member 52 for refrigerant.

[0070] Meanwhile, the source gas internal member 53, which serves as the object transmitting internal member 32, is attached to (the opening 31b of) the cover side surface 110s of the generator cover 110. Therefore, the through flow path 32b of the object transmitting internal member 32 serves as the source gas inlet 130 of the source gas internal member 53. In the source gas internal member 53, the object to be transmitted is the source gas G1 such as oxygen gas, and the space that serves as the transmitting member serves as the accommodation space S100.

[0071] In this way, in the ozone generator 100 of the basic configuration, the raw material gas inlet 130, which is the through-flow passage 32b of the raw material gas internal member 53, is connected to the storage space S100 so that the raw material gas G1 can flow into the ozone generator 101.

[0072] Furthermore, a bushing internal member 54 (high-pressure bushing 120) that serves as the object transmission internal member 32 is attached to (inside the opening 31b of) the cover side surface 110s of the generator cover 110. As shown in FIG. 4 , the high-pressure bushing 120 itself functions as the bushing internal member 54.

[0073] In the bushing internal member 54, one end of the relay terminal 121, which is a component, is electrically connected to the high-voltage cable 401, and the other end of the relay terminal 121 is electrically connected to the power supply terminal 4, which serves as the power supply path. In this way, in the bushing internal member 54, the object to be transmitted is the ozone generation power, and the transmitting member is the power supply terminal 4, which serves as the power supply path. Therefore, the ozone generation power is electrically connected to the power supply terminal 4, which serves as the power supply path, so that it can be supplied via the relay terminal 121 of the bushing internal member 54.

[0074] The source gas internal member 53 and the bushing internal member 54 each have substantially the same structure as the object transmission internal member 32 shown in Figures 1 to 3. That is, the cover side surface 110s of the generator cover 110 corresponds to the outer frame member 31, and on the cover side surface 110s, the two openings 31b for attaching the source gas internal member 53 and the high-pressure bushing 120 and the surrounding areas of the two openings 31b form the member attachment areas.

[0075] The relay terminal 121 can be installed in the object transmitting internal member 32 in a manner that it passes through the through-flow passage 32b, for example.

[0076] In this way, the cover side surface 110s of the generator cover 110, which functions as part of the generator housing member, has two component mounting areas including two openings 31b, and functions as a flange for mounting the raw material gas internal component 53 and the bushing internal component 54.

[0077] The relationship between the object transmitting structure 30 shown in FIGS. 1 to 3 and the ozone generating device 100 shown in FIGS. 4 to 6 will be summarized below.

[0078] 1 to 3 correspond to the base 24 of the ozone generator 100 and the cover side surface 110s of the generator cover 110. The base 24 and the generator cover 110 constitute a generator housing member.

[0079] The internal member 32 for transmitting an object shown in Figures 1 to 3 corresponds to the internal member 51 for ozone gas and the internal member 52 for refrigerant attached to the base 24, and the internal member 53 for raw material gas and the internal member 54 for bushing attached to the cover side surface 110s.

[0080] In the base 24, the openings 31b and their surrounding areas for the ozone gas internal member 51 and the refrigerant internal member 52 respectively serve as component mounting areas. Similarly, in the cover side surface 110s, the openings 31b and their surrounding areas for the source gas internal member 53 and the bushing internal member 54 respectively serve as component mounting areas.

[0081] Therefore, the base 24 has two component mounting areas for the ozone gas internal component 51 and the refrigerant internal component 52, and the cover side surface 110s of the generator cover 110 has two component mounting areas for the raw material gas internal component 53 and the bushing internal component 54.

[0082] In this way, a total of four object-transmitting internal members 32 are respectively attached to four member attachment regions of the generator housing member, including the base 24 and the cover side surface 110s.

[0083] As described above, the object transmission internal member 32 provided in the generator housing member of the ozone generator 100, which is the basic configuration of the first embodiment of the present disclosure, is attached to the member mounting area in a highly airtight, tightly attached state in which the object transmission internal member 32 is in close contact with the opening 31 b without any other members in between when the temperature is in the non-cooling temperature zone TH. Note that in the ozone generator 100, the generator housing member is formed by the combination of the base 24 and the generator cover 110, and the member mounting area is a part of the base 24 or the cover side surface 110s.

[0084] The object transmission internal member 32 has the diameter fluctuation property described above. Therefore, by placing the object transmission internal member 32, which has been set to a temperature equal to or lower than the cooling temperature T1, in the opening 31b and then setting the temperature of the object transmission internal member 32 to the non-cooling temperature zone TH, the object transmission internal member 32 can be attached to the member attachment region of the generator housing member in the above-described close contact attachment state.

[0085] As a result, in the ozone generator 100 of embodiment 1, the object transmission internal member 32 does not have any parts that require replacement during use, so a decrease in the usage efficiency of the ozone generator 100 can be reliably avoided.

[0086] Note that a part requiring replacement may be, for example, a sealing member such as an O-ring. Generally, an O-ring, which is a typical sealing member, tends to deteriorate over time, and therefore requires periodic repairs such as overhauls to replace the O-ring. Such work does not occur in the ozone generator 100 of embodiment 1.

[0087] Furthermore, since the ozone generator 100 of embodiment 1 does not have any parts that need to be replaced while the object transmission internal member 32 is in use, there is no possibility that damage associated with part replacement will occur to the object transmission internal member 32 or the member mounting area, and the life of the ozone generator 100 can be extended.

[0088] In addition, object transmitting internal member 32 provided in ozone generator 100 of embodiment 1 does not have any parts that are to be discarded during use, which reduces the environmental impact of ozone generator 100. This is because, with ozone generator 100 of embodiment 1, there is no need to discard sealing members such as O-rings.

[0089] The ozone generator 100 of the first embodiment has an ozone gas internal member 51 provided in the member mounting region of the base 24. That is, the base 24 corresponding to the outer frame member 31 and the ozone gas internal member 51 corresponding to the object transmission internal member 32 constitute the object transmission structure 30 shown in FIGS.

[0090] In the ozone generator 100 of the first embodiment, the ozone gas internal member 51 included in the object transmission internal member 32 having the outer frame member 31 as the base 24 does not have any parts that require replacement during use. Therefore, it is possible to reliably avoid a decrease in the usage efficiency of the ozone generator 100 having the ozone gas internal member 51, and to extend the life of the ozone generator 100.

[0091] In addition, in the ozone generator 100 of embodiment 1, the internal member 51 for ozone gas provided on the base 24 does not include any parts that are to be discarded during use, and therefore, the environmental load of the ozone generator 100 can be reduced.

[0092] The ozone generator 100 of the first embodiment is provided with a refrigerant internal member 52 in the member mounting region of the base 24. That is, the base 24 corresponding to the outer frame member 31 and the refrigerant internal member 52 corresponding to the object transmission internal member 32 constitute the object transmission structure 30 shown in FIGS.

[0093] In ozone generator 100 of Embodiment 1, refrigerant internal member 52 included in object transmission internal member 32 having outer frame member 31 as base 24 does not have any parts that require replacement during use. Therefore, it is possible to reliably avoid a decrease in the usage efficiency of ozone generator 100 having refrigerant internal member 52 and to extend the life of ozone generator 100.

[0094] In addition, in the ozone generator 100 of embodiment 1, the refrigerant internal member 52 provided on the base 24 does not include any parts that are to be discarded during use, and therefore, the environmental impact of the ozone generator 100 can be reduced.

[0095] In the ozone generator 100 of the first embodiment, an internal member for source gas 53 is provided in a member mounting region of the cover side surface 110s of the generator cover 110. That is, the cover side surface 110s corresponding to the outer frame member 31 and the internal member for source gas 53 corresponding to the internal member for object transmission 32 constitute the object transmission structure 30 shown in FIGS.

[0096] In the ozone generator 100 of the first embodiment, the source gas internal member 53 included in the object transmitting internal member 32 having the outer frame member 31 as the cover side surface 110s does not have any parts that require replacement during use. This reliably avoids a decrease in the usage efficiency of the ozone generator 100 having the source gas internal member 53, and also enables the life of the ozone generator 100 to be extended.

[0097] In addition, in the ozone generator 100 of embodiment 1, the internal member 53 for raw material gas provided on the cover side surface 110s does not include any parts that are to be discarded during use, and therefore, the environmental impact of the ozone generator 100 can be reduced.

[0098] In the ozone generator 100 of the first embodiment, a bushing inner member 54 is provided as a high-pressure bushing 120 in a member mounting region of the cover side surface 110s of the generator cover 110. That is, the cover side surface 110s corresponding to the outer frame member 31 and the bushing inner member 54 corresponding to the object transmission inner member 32 constitute the object transmission structure 30 shown in FIGS.

[0099] In the ozone generator 100 of the first embodiment, the bushing internal member 54 included in the object transmission internal member 32 having the outer frame member 31 as the cover side surface 110s does not have any parts that require replacement during use. This reliably prevents a decrease in the usage efficiency of the ozone generator 100 having the bushing internal member 54, and also extends the life of the ozone generator 100.

[0100] In addition, in the ozone generator 100 of embodiment 1, the bushing internal member 54 provided on the cover side surface 110s does not include any parts that are to be discarded during use, and therefore, the environmental impact of the ozone generator 100 can be reduced.

[0101] Furthermore, the generator housing member in the ozone generator 100, which is the basic configuration of the first embodiment, has a combined structure of the base 24 and the generator cover 110. Therefore, before the generator housing member is completed, the object transmission internal member 32 (51 to 54) can be attached relatively easily to the base 24 or the generator cover 110, which are single components.

[0102] That is, the internal member 51 for ozone gas and the internal member 52 for refrigerant can be attached to the base 24, which is a single-piece structure prior to becoming a generator housing member, and the internal member 53 for raw material gas and the internal member 54 for bushing can be attached to the cover side surface 110s of the generator cover 110, which is a single-piece structure prior to becoming a generator housing member.

[0103] As a result, the attachment efficiency of the object transmission internal member 32 can be improved during the manufacturing stage of the ozone generator 100 of the first embodiment.

[0104] 7 is an explanatory diagram schematically illustrating a cross-sectional configuration of an ozone generator 100A according to a first modification of the first embodiment of the present disclosure. Hereinafter, components similar to those of the ozone generator 100 having the basic configuration shown in FIGS. 4 to 6 are designated by the same reference numerals, and descriptions thereof will be omitted as appropriate. The following description will focus on the characteristic features of the ozone generator 100A.

[0105] As shown in the figure, the generator housing member of the ozone generator 100A includes, as main components, a base 24A and a generator cover 110A placed on the surface of the base 24A. In the first modification, a housing space S100 covered by the generator cover 110A is formed on the surface of the base 24A.

[0106] The ozone gas internal member 51, the refrigerant input internal member 52A, and the refrigerant output internal member 52B each have a structure similar to the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3. Here, the base 24A corresponds to the outer frame member 31, and in the base 24A, three openings 31b for the ozone gas internal member 51, the refrigerant input internal member 52A, and the refrigerant output internal member 52B, respectively, and the surrounding areas of the three openings 31b form member mounting areas.

[0107] A refrigerant input internal member 52A, which serves as the object-transmitting internal member 32, is attached to (inside the opening 31b of) the base 24A, which serves as the outer frame member 31, and the through-flow passage 32b of the object-transmitting internal member 32 serves as the refrigerant inlet 12A of the refrigerant input internal member 52A. In the refrigerant input internal member 52A, the object to be transmitted is refrigerant CM such as cooling water, and the transmitting member serves as the refrigerant input passage 9A. The refrigerant input passage 9A is a passage for supplying the refrigerant such as cooling water to the ozone generator 101.

[0108] The refrigerant input internal member 52A is connected to the refrigerant input passage 9A so that the refrigerant CM can flow through the through passage 32b of the object transmission internal member 32. Note that the connection between the refrigerant input internal member 52A and the refrigerant input passage 9A is performed using an existing connection method (joining method).

[0109] The refrigerant output internal member 52B, which serves as the object-transmitting internal member 32, is attached to (inside the opening 31b of) the base 24A, which serves as the outer frame member 31, and the through-flow passage 32b of the object-transmitting internal member 32 serves as the refrigerant outlet 12B of the refrigerant output internal member 52B. In the refrigerant output internal member 52B, the object to be transmitted is the refrigerant CM, and the transmitting member is the refrigerant output passage 9B. The refrigerant output passage 9B is a passage for discharging the refrigerant supplied to the ozone generator 101.

[0110] The refrigerant output internal member 52B is connected to the refrigerant output passage 9B so that the refrigerant CM can flow through the through passage 32b of the object transmission internal member 32. Note that the connection between the refrigerant output internal member 52B and the refrigerant output passage 9B is performed using an existing connection method (joining method).

[0111] In this way, the base 24A, which functions as part of the generator housing member, has three member mounting areas including three openings 31b, and functions as flanges for mounting the ozone gas internal member 51, the refrigerant input internal member 52A, and the refrigerant output internal member 52B.

[0112] Meanwhile, a source gas internal member 53 and a bushing internal member 54 are attached to the cover side surface 110s of the generator cover 110A. The source gas internal member 53 and the bushing internal member 54 each have substantially the same structure as the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3.

[0113] That is, the cover side surface 110s of the generator cover 110 corresponds to the outer frame member 31, and on the cover side surface 110s, the two openings 31b for the raw material gas internal member 53 and the high-pressure bushing 120 and the surrounding areas of each of the two openings 31b become the member mounting areas.

[0114] The source gas internal member 53, which serves as the object transmitting internal member 32, is attached to (the opening 31b of) the cover side surface 110s, which serves as the outer frame member 31, and the through flow path 32b of the object transmitting internal member 32 serves as the source gas inlet 130 of the source gas internal member 53. In the source gas internal member 53, the object to be transmitted is the source gas G1, and the transmitting member serves as the source gas passage 18.

[0115] The source gas passage 18 is provided to supply the source gas G1 to the discharge space 6 (not shown). As in the ozone generator 100 with the basic configuration, the accommodation space S100 may function as a transmission member for the source gas G1 instead of the source gas passage 18.

[0116] In this way, the cover side surface 110s of the generator cover 110A, which functions as part of the generator housing member, has two member mounting areas including two openings 31b, and functions as a flange for mounting the raw material gas internal member 53 and the bushing internal member 54.

[0117] The ozone generator 100A of the first modified example has the following advantages in addition to the advantages of the basic configuration.

[0118] The ozone generator 100A of the first modification has a refrigerant input internal member 52A and a refrigerant output internal member 52B provided in the member mounting region of the base 24A. That is, the base 24A corresponding to the outer frame member 31 and the refrigerant input internal member 52A and the refrigerant output internal member 52B corresponding to the two object transmission internal members 32 realize the object transmission structure 30 having the configuration shown in Figures 1 to 3 in a two-unit configuration.

[0119] In ozone generator 100 of Embodiment 1, refrigerant input internal member 52A and refrigerant output internal member 52B included in object transmission internal member 32 having outer frame member 31 as base 24A do not have any parts that require replacement during use. This reliably avoids a decrease in the usage efficiency of ozone generator 100A having refrigerant input internal member 52A and refrigerant output internal member 52B, and also extends the life of ozone generator 100A.

[0120] In addition, in the ozone generator 100A of the first modification, the refrigerant input internal member 52A and the refrigerant output internal member 52B provided on the base 24A do not contain any parts that are to be discarded during use, and therefore, the environmental impact of the ozone generator 100A can be reduced.

[0121] (Second Modification) Figure 8 is an explanatory diagram schematically showing a cross-sectional configuration of ozone generator 100B according to a second modification of embodiment 1 of the present disclosure. Hereinafter, components similar to those of ozone generator 100 having the basic configuration shown in Figures 4 to 6 or ozone generator 100A according to the first modification shown in Figure 7 will be designated by the same reference numerals and description thereof will be omitted as appropriate, and the following description will focus on the characteristic features of ozone generator 100B.

[0122] As shown in the figure, the generator housing member of the ozone generator 100B includes, as main components, a base 24B and a generator cover 110B placed on the surface of the base 24B. In the second modification, a housing space S100 covered by the generator cover 110B is formed on the surface of the base 24B.

[0123] An ozone gas internal member 51, a refrigerant input internal member 52A, a refrigerant output internal member 52B, and a raw material gas internal member 53 are provided on the base 24B.

[0124] The ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, and the raw material gas internal member 53 each have a structure similar to the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3. Here, the base 24B corresponds to the outer frame member 31, and in the base 24B, four openings 31b for the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, and the raw material gas internal member 53, respectively, and the surrounding areas of the four openings 31b, form member mounting areas.

[0125] In this way, the base 24B, which functions as part of the generator housing member, has four member mounting areas including four openings 31b, and functions as flanges for mounting the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, and the raw material gas internal member 53.

[0126] Meanwhile, a bushing internal member 54 is attached to the cover side surface 110s of the generator cover 110B as the high-pressure bushing 120. The bushing internal member 54 has substantially the same structure as the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3. That is, the cover side surface 110s of the generator cover 110 corresponds to the outer frame member 31, and on the cover side surface 110s, the opening 31b for the high-pressure bushing 120 and the surrounding area of ​​the opening 31b form the member attachment area.

[0127] In this way, the cover side surface 110s of the generator cover 110B, which functions as a part of the generator accommodating member, has a member mounting area including the opening 31b, and functions as a flange for mounting the bushing inner member 54.

[0128] The ozone generator 100B of the second modified example has the same basic configuration and provides the same effects as the first modified example.

[0129] (Third Modification) Figure 9 is an explanatory diagram schematically showing a cross-sectional configuration of ozone generator 100C according to a third modification of embodiment 1 of the present disclosure. Hereinafter, components similar to those of ozone generator 100 having the basic configuration shown in Figures 4 to 6, ozone generator 100A according to the first modification shown in Figure 7, or ozone generator 100B according to the second modification shown in Figure 8 will be assigned the same reference numerals and descriptions thereof will be omitted as appropriate. The following description will focus on the characteristic features of ozone generator 100C.

[0130] As shown in the figure, the generator accommodating member of the ozone generator 100C is provided as a generator accommodating housing 105 having a single structure. The generator accommodating housing 105 is configured in a housing shape with an accommodating space S100 inside.

[0131] An ozone gas internal member 51, a refrigerant input internal member 52A, a refrigerant output internal member 52B, and a raw material gas internal member 53 are provided on the housing bottom 105b of the generator housing housing 105.

[0132] The ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, and the raw material gas internal member 53 each have a structure similar to the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3.

[0133] That is, the housing bottom 105b corresponds to the outer frame member 31, and in the housing bottom 105b, the four openings 31b for the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, and the raw material gas internal member 53, and the surrounding areas of the four openings 31b, respectively, become the member mounting areas.

[0134] In this way, the housing bottom 105b of the generator housing 105, which is the generator housing member, has four member mounting areas including four openings 31b, and functions as flanges for mounting the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, and the raw material gas internal member 53.

[0135] Meanwhile, a bushing internal member 54 is attached as the high-pressure bushing 120 to the housing side surface 105s of the generator housing 105. The bushing internal member 54 has substantially the same structure as the object transmission internal member 32 in the object transmission structure 30 shown in Figures 1 to 3. That is, the housing side surface 105s of the generator housing 105 corresponds to the outer frame member 31, and on the housing side surface 105s, the opening 31b for the high-pressure bushing 120 and the surrounding area of ​​the opening 31b form the member attachment area.

[0136] In this way, the housing side surface 105s of the generator housing housing 105, which is the generator housing member, has a member mounting area including the opening 31b, and functions as a flange for mounting the bushing internal member 54.

[0137] The ozone generator 100C of the third modified example has the same effects as the basic configuration, the first modified example, and the second modified example, and also has the following unique effects.

[0138] The generator housing 105 serving as the generator housing member in the ozone generator 100C of the third modified example has a unitary structure, and therefore the number of parts of the generator housing member can be minimized.

[0139] Second Embodiment FIGS. 10 to 13 are explanatory diagrams showing a method of attaching an object transmitting internal member 32 according to a second embodiment of the present disclosure.

[0140] The object-transmitting internal member 32 is a component of the ozone generator 100 of the first embodiment and the ozone generators 100A to 100C of the first to third modifications.

[0141] For example, in the ozone generator 100 having the basic configuration of the first embodiment shown in FIGS. 4 to 6, the base 24 or the cover side surface 110s of the generator cover 110 serves as the outer frame member 31, and the ozone gas internal member 51, the refrigerant internal member 52, the raw material gas internal member 53, and the bushing internal member 54 serve as the object transmission internal member 32.

[0142] In addition, in an ozone generator 100A which is a first modified example shown in FIG. 7, the base 24A or the cover side surface 110s of the generator cover 110A serves as the outer frame member 31, and the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, the raw material gas internal member 53, and the bushing internal member 54 serve as the object transmission internal member 32.

[0143] On the other hand, in an ozone generator 100B which is a second modified example shown in FIG. 8, the base 24B or the cover side surface 110s of the generator cover 110B serves as the outer frame member 31, and the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, the raw material gas internal member 53, and the bushing internal member 54 serve as the object transmission internal member 32.

[0144] In an ozone generator 100C, which is a third modified example shown in FIG. 9, the housing bottom 105b or housing side surface 105s of the generator housing 105 serves as the outer frame member 31, and the ozone gas internal member 51, the refrigerant input internal member 52A, the refrigerant output internal member 52B, the raw material gas internal member 53, and the bushing internal member 54 serve as the object transmission internal member 32.

[0145] In this way, the plurality of object-transmitting internal members 32 are attached to the member attachment region of the outer frame member 31 as components of the ozone generator 100 (100A to 100C). Hereinafter, the ozone generators 100, 100A to 100C may be collectively referred to as the "ozone generator 100, etc."

[0146] The ozone generator 100 or the like has an ozone generator 101. The ozone generator 101 performs an ozone generation process by generating a dielectric barrier discharge in the discharge space 6 and generating ozone gas G2 from a raw material gas G1 supplied to the discharge space 6. The ozone generator 101 is housed in a housing space S100 of a generator housing member.

[0147] The accommodation space S100 is provided with an ozone gas passage 8 for passing the ozone gas G2 generated in the discharge space 6, coolant passages 9 (coolant input passage 9A, coolant output passage 9B) for passing a coolant such as cooling water, a source gas passage 18 for passing the source gas G1, a power supply terminal 4 serving as a power supply path, etc. In the ozone generator 100 of the basic configuration, the accommodation space S100 itself functions as a transmission member for the source gas G1.

[0148] The process of the method for attaching the object transmission internal member 32 will be described below with reference to Figures 10 to 13. The attachment method involves performing steps (a) to (c) described below. For the sake of convenience, the through-flow passage 32b provided in the object transmission internal member 32 is not shown in Figures 10 to 13.

[0149] Step (a)...As shown in FIG. 10, an outer frame member 31 having an opening 31b and an object-transmitting inner member 32 to be mounted in the opening 31b are prepared.

[0150] The opening 31b has a circular shape with an opening diameter d1 in a plan view, and the object transmission internal member 32 has a circular shape with a member diameter d2 in a plan view. The outer peripheral surface of the object transmission internal member 32 does not have a recess such as a sealing groove.

[0151] In the outer frame member 31, the opening 31b and the area around it become a member mounting area for mounting the object transmission internal member 32.

[0152] The object transmission internal member 32 has a diameter fluctuation property in which, when the temperature is below a predetermined cooling temperature T1, the member diameter d2 of the object transmission internal member 32 is smaller than the opening diameter d1, and when the temperature is above the cooling temperature T1 and in a non-cooling temperature zone TH of 0°C or higher, the member diameter d2 becomes equal to or larger than the opening diameter d1.

[0153] The non-cooling temperature zone TH is a temperature range above the cooling temperature T1 and equal to or higher than 0° C., and includes the normal temperature zone TR of {0 to 40° C.}. The temperature at which the ozone generator 101 performs the ozone generation process is also included in the temperature range of the non-cooling temperature zone TH.

[0154] 10 to 13, the member diameter d2 in the non-cooling temperature zone TH is referred to as the non-cooling member diameter d21, and the member diameter d2 at or below the cooling temperature T1 is referred to as the cooled member diameter d22. The outer frame member 31 is excluded from the cooling target and is always set to a temperature in the non-cooling temperature zone TH, so it has a constant opening diameter d1.

[0155] For example, in the non-cooling temperature zone TH, the dimensions are set so that the relationship between the non-cooling member diameter d21 and the opening diameter d1 satisfies the formula (1) {d21 = k d1 (1)}, where the coefficient k is set to {k = 1.0002 to 1.0003}.

[0156] Therefore, as shown in FIG. 10, when step (a) is performed, the diameter d21 of the inner member 32 for transmitting an object when not cooled is longer than the opening diameter d1 of the outer frame member 31.

[0157] After step (a) is executed, step (b) is executed. Step (b) includes the following steps (b-1) and (b-2).

[0158] Step (b-1)...As shown in Fig. 11, the object transmission internal member 32 is set to a low temperature state below the cooling temperature T1. The temperature of the outer frame member 31 is set to the non-cooling temperature zone TH.

[0159] Step (b-2)...As shown in FIG. 12, the object transfer internal member 32 is placed in the opening 31b of the outer frame member 31 in a state where the temperature is below the cooling temperature T1.

[0160] By performing step (b-1), the diameter d2 of the internal member 32 for transmitting the object is reduced from the uncooled diameter d21 to the cooled diameter d22, and the formula (2) {d22<d1} is established. This point will be described in detail below.

[0161] When the material of the internal object transmission member 32 is a corrosion-resistant alloy material such as stainless steel, the member diameter d2 has the property of shortening as the temperature decreases due to thermal strain ε, which is positively correlated with temperature.

[0162] Therefore, by setting the temperature of the object transmission internal member 32 to a cooling temperature T1 or less, which is sufficiently lower than 0°C, it is possible to achieve the cooled member diameter d22 that satisfies the above-mentioned formula (2). Note that the cooling temperature T1 is set to a value sufficiently lower than 0°C in the range of {-270°C to -20°C}, for example, 196°C.

[0163] When step (b-2) is performed, the above formula (2) is satisfied, so a gap 35 is created between the outer surface of the object transmission internal member 32 and the inner surface of the opening 31b, making it relatively easy to position the object transmission internal member 32 within the opening 31b.

[0164] In this way, step (b), which includes the above-mentioned steps (b-1) and (b-2), involves placing the object-transmitting internal member 32, which has been set to a cooling temperature equal to or lower than T1, in the opening 31b of the member mounting area in the outer frame member 31. The member mounting area of ​​the outer frame member 31 is the opening 31b and its surrounding area. After step (b) is performed, the following step (c) is performed.

[0165] Step (c)... With the object transmission internal member 32 placed in the opening 31b of the outer frame member 31, the set temperature of the object transmission internal member 32 is increased from the cooling temperature T1 to the non-cooling temperature zone TH.

[0166] As a result, as shown in Figure 13, an object transmission structure 30 can be obtained in which the outer frame member 31 and the object transmission internal member 32 are integrated with each other, with the outer surface of the object transmission internal member 32 being in close contact with the boundary surface 33 with the inner surface of the opening 31b.

[0167] In the non-cooling temperature zone TH, the above-mentioned formula (1) is established, so that the gap 35 between the inner circumferential surface of the opening 31b and the object transmission internal member 32 is completely filled, and the outer circumferential surface of the object transmission internal member 32 and the inner circumferential surface of the opening 31b are in tight contact with each other at the boundary surface 33. In other words, the object transmission internal member 32 is attached in the opening 31b of the outer frame member 31 in a tightly attached state.

[0168] In addition, the ozone gas internal member 51 and the like that constitute the object transmission internal member 32 are sufficiently small compared to the base 24 and the cover side surface 110s of the generator cover 110 that constitute the outer frame member 31, and therefore the force (stress x contact area) that the outer frame member 31 receives from the object transmission internal member 32 is also relatively small. Therefore, in the object transmission structure 30 to which the object transmission internal member 32 is attached, even if equation (1) is established in the non-cooling temperature zone TH, the outer frame member 31, such as the base 24 and the generator cover 110, will not deform.

[0169] The operating temperature of the ozone generator 100 when the ozone generator 101 is in an operating state is included in the non-cooling temperature zone TH. In addition, the temperature of the refrigerant CM, such as cooling water, is 0°C or higher, and the supply of the refrigerant CM does not cause the temperature of the object transmission internal member 32 to fall below the cooling temperature T1.

[0170] Therefore, after the object transmission structure 30 is completed, the tightly attached state of the object transmission internal member 32 in the opening 31b is maintained with good stability.

[0171] After the object transmission structure 30 is completed, the object transmission internal member 32 is attached to the member attachment region as the ozone gas internal member 51, the refrigerant internal member 52 (refrigerant input internal member 52A, refrigerant output internal member 52B), the source gas internal member 53, and the bushing internal member 54. In other words, the object transmission internal member 32 becomes a component of the ozone generator 100, etc.

[0172] For example, in the case of the ozone generator 100 of the first embodiment shown in Figures 4 to 6, the ozone gas internal member 51 and the refrigerant internal member 52, each of which becomes the object transmission internal member 32, are attached to the base 24, which becomes the outer frame member 31, by the attachment method of the object transmission internal member 32 of the second embodiment.

[0173] Similarly, an internal member 53 for the raw material gas and an internal member 54 for the bushing, each of which becomes an object transmission internal member 32, are attached to the cover side surface 110s of the generator cover 110, which becomes the outer frame member 31, using the attachment method for the object transmission internal member 32 of embodiment 2.

[0174] The method of installing the object transmission internal member 32 according to the second embodiment of the present disclosure utilizes the above-described diameter variation property of the object transmission internal member 32 to perform the above-described steps (a) to (c).

[0175] By performing the above-mentioned steps (b) and (c), the object transmission internal member 32 can be attached in a tightly fitted state within the opening 31b of the member attachment area in the outer frame member 31 relatively easily, without the need to provide other members such as sealing members including O-rings.

[0176] As a result, the method of attaching the object transmission internal member of embodiment 2 can attach the object transmission internal member 32 to the outer frame member 31 without the need for other members such as sealing members, thereby reliably avoiding a decrease in the usage efficiency of the ozone generator 100, etc., that would be associated with replacing other members.

[0177] In addition, the object transmission structure 30 corresponds to, for example, in the case of the ozone generator 100 of the basic configuration, a combination of the base 24, an internal member 51 for ozone gas, and an internal member 52 for refrigerant, and a combination of the cover side surface 110s of the generator cover 110, an internal member 53 for raw material gas, and an internal member 54 for bushing.

[0178] Although the present disclosure has been described in detail, the above description is illustrative in all respects and does not limit the present disclosure to the above. It is understood that countless variations not illustrated can be envisioned without departing from the scope of the present disclosure.

[0179] DESCRIPTION OF SYMBOLS 4 Power supply terminal 8 Ozone gas passage 9 Refrigerant passage 9A Refrigerant input passage 9B Refrigerant output passage 11 Ozone gas outlet 12 Refrigerant inlet / outlet 12A Refrigerant inlet 12B Refrigerant outlet 18 Raw material gas passage 24, 24A, 24B Base 30 Structure for transmitting object 31 Outer frame member 31b Opening 32 Internal member for transmitting object 32b Through flow path 51 Internal member for ozone gas 52 Internal member for refrigerant 52A Internal member for refrigerant input 52B Internal member for refrigerant output 53 Internal member for raw material gas 54 Internal member for bushing 100, 100A to 100C Ozone generator 101 Ozone generator 105 Generator accommodating housing 105b Housing bottom 105s Housing side 110, 110A, 110B Generator cover 110s Cover side surface 120 High-pressure bushing 130 Raw material gas inlet 200 Ozone transformer 300 High-frequency inverter CM Refrigerant d1 Opening diameter d2 Component diameter d21 Component diameter when not cooled d22 Component diameter when cooled G1 Raw material gas G2 Ozone gas S100 Storage space

Claims

1. An ozone generator that performs an ozone generation process by generating a dielectric barrier discharge in a discharge space and generating ozone gas from a raw material gas supplied to the discharge space; an ozone gas passage for flowing the ozone gas generated in the discharge space; a generator housing member that houses the ozone generator and the ozone gas passage within a housing space; and an object transmission internal member attached to a member attachment region of the generator housing member, wherein the object transmission internal member is connected to a transmission member so that a transmission object for the ozone generator can be transmitted, the transmission member being a structure or space for transmitting the transmission object, the transmission object including the ozone gas and the transmission member including the ozone gas passage, the member attachment region having an opening, the object transmission internal member being provided within the opening, the opening being circular in shape with an opening diameter in a plan view, and the object transmission internal member being circular in shape with a member diameter in a plan view, an ozone generator, wherein the object transmission internal member has a diameter fluctuation property such that the member diameter is smaller than the opening diameter when the temperature is below a predetermined cooling temperature, and the member diameter is equal to or larger than the opening diameter when the temperature is above the predetermined cooling temperature and in a non-cooling temperature range of 0°C or higher, and wherein the object transmission internal member and the opening are in close contact with each other at the boundary surface between the outer circumferential surface of the object transmission internal member and the inner circumferential surface of the opening, without any other member in between.

2. An ozone generator according to claim 1, wherein the object transmission internal member has a through flow path for circulating the object to be transmitted, the object transmission internal member includes an ozone gas internal member, and the ozone gas internal member is connected to the ozone gas passage so that the ozone gas can be transmitted via the through flow path of the object transmission internal member.

3. An ozone generator according to claim 2, further comprising a refrigerant passage for supplying a refrigerant to the ozone generator, the refrigerant passage being housed within the accommodation space of the generator accommodation member, the transfer object containing the refrigerant, the transfer member containing the refrigerant passage, the object transfer internal member containing a refrigerant internal member, and the refrigerant internal member being connected to the refrigerant passage so that the refrigerant can be transferred via the through-flow path of the object transfer internal member.

4. An ozone generator according to claim 3, wherein the refrigerant passage includes a refrigerant input passage for supplying the refrigerant to the ozone generator and a refrigerant output passage for discharging the refrigerant supplied to the ozone generator, the transmission member includes the refrigerant input passage and the refrigerant output passage, the refrigerant internal member includes a refrigerant input internal member and a refrigerant output internal member, the refrigerant input internal member is connected to the refrigerant input passage via the through-flow passage so that the refrigerant can be transmitted, and the refrigerant output internal member is connected to the refrigerant output passage via the through-flow passage.

5. An ozone generator according to any one of claims 2 to 4, further comprising a raw material gas passage for supplying the raw material gas to the discharge space of the ozone generator, the raw material gas passage being provided within the accommodation space of the generator accommodation member, the transfer object containing the raw material gas, the transmission member containing the raw material gas passage, the object transmission internal member containing a raw material gas internal member, and the raw material gas internal member being connected to the raw material gas passage so that the raw material gas can be transmitted via the through flow path of the object transmission internal member.

6. An ozone generator according to claim 1, further comprising: a power supply unit provided outside the generator housing member and supplying power for ozone generation via a power supply line; and a power supply path provided within the housing space of the generator housing member and for supplying the power for ozone generation to the ozone generator, wherein the transmission object includes the power for ozone generation, the transmission member includes the power supply path, the object transmission internal member includes a bushing internal member, and the bushing internal member is connected to the power supply path so that the power for ozone generation can be supplied via the object transmission internal member.

7. An ozone generator according to any one of claims 1 to 6, wherein the generator housing member includes a base and a generator cover placed on the surface of the base, the housing space is formed on the surface of the base, and the member mounting area includes the area of ​​the base or the area of ​​the generator cover.

8. An ozone generator according to any one of claims 1 to 6, wherein the generator housing member has a single structure and has the housing space therein.

9. A method for attaching an object transmission internal member in an ozone generator, the ozone generator comprising: an ozone generator that performs ozone generation processing by generating a dielectric barrier discharge in a discharge space and generating ozone gas from a raw material gas supplied to the discharge space; an ozone gas passage for flowing the ozone gas generated in the discharge space; and a generator housing member that houses the ozone generator and the ozone gas passage within a housing space; the method for attaching the object transmission internal member is a method for attaching the object transmission internal member to an opening in a member mounting area of ​​the generator housing member, the method comprising: (a) preparing the object transmission internal member; the opening having a circular shape with an opening diameter in a plan view, and the object transmission internal member having a circular shape with a member diameter in a plan view; and the object transmission internal member having a diameter fluctuation property such that the member diameter is smaller than the opening diameter when the temperature is equal to or lower than a predetermined cooling temperature, and the member diameter is equal to or larger than the opening diameter when the temperature is higher than the predetermined cooling temperature and in a non-cooling temperature range of 0°C or higher; The method for installing an object transmission internal member is executed after performing step (a), and further comprises the steps of: (b) placing the object transmission internal member, which has been set to a temperature equal to or lower than the predetermined cooling temperature, within the opening of the member installation area; and (c) setting the temperature of the object transmission internal member to the non-cooling temperature range while the object transmission internal member is placed within the opening.

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