282 results about "Plasma flow" patented technology

The invention is embodied in a plasma flow device or reactor having a housing that contains conductive electrodes with openings to allow gas to flow through or around them, where one or more of the electrodes are powered by an RF source and one or more are grounded, and a substrate or work piece is placed in the gas flow downstream of the electrodes, such that said substrate or work piece is substantially uniformly contacted across a large surface area with the reactive gases emanating therefrom. The invention is also embodied in a plasma flow device or reactor having a housing that contains conductive electrodes with openings to allow gas to flow through or around them, where one or more of the electrodes are powered by an RF source and one or more are grounded, and one of the grounded electrodes contains a means of mixing in other chemical precursors to combine with the plasma stream, and a substrate or work piece placed in the gas flow downstream of the electrodes, such that said substrate or work piece is contacted by the reactive gases emanating therefrom. In one embodiment, the plasma flow device removes organic materials from a substrate or work piece, and is a stripping or cleaning device. In another embodiment, the plasma flow device kills biological microorganisms on a substrate or work piece, and is a sterilization device. In another embodiment, the plasma flow device activates the surface of a substrate or work piece, and is a surface activation device. In another embodiment, the plasma flow device etches materials from a substrate or work piece, and is a plasma etcher. In another embodiment, the plasma flow device deposits thin films onto a substrate or work piece, and is a plasma-enhanced chemical vapor deposition device or reactor.

A remote plasma generator includes a body, a driver, and a protection tube. The body includes a gas injection port, a plasma exhaust port, and a plasma generation pipe through which discharge gas or plasma flow. The driver is coupled to the body and generates a magnetic field and plasma in the body. The protection tube is at an inner side of the plasma generation pipe to protect the plasma generation pipe from plasma.

A process and apparatus for preparing a nanopowder are presented. The process comprises feeding a reactant material into a plasma reactor in which is generated a plasma flow having a temperature sufficiently high to vaporize the material; transporting the vapour by means of the plasma flow into a quenching zone; injecting a preheated quench gas into the plasma flow in the quenching zone to form a renewable gaseous condensation front; and forming a nanopowder at the interface between the renewable controlled temperature gaseous condensation front and the plasma flow.

In a simple method and device for producing plasma flows of a metal and/or a gas electric discharges are periodically produced between the anode and a metal magnetron sputtering cathode in crossed electric and magnetic fields in a chamber having a low pressure of a gas. The discharges are produced so that each discharge comprises a first period with a low electrical current passing between the anode and cathode for producing a metal vapor by magnetron sputtering, and a second period with a high electrical current passing between the anode and cathode for producing an ionization of gas and the produced metal vapor. Instead of the first period a constant current discharge can be used. Intensive gas or metal plasma flows can be produced without forming contracted arc discharges. The selfsputtering phenomenon can be used.

Devices and methods for generating a low-temperature, atmospheric pressure plasma are disclosed. A plasma device may include a first electrode having an inlet for a gas, a second electrode having an outlet for the gas and disposed proximate to the first electrode to form a substantially uniform gap therebetween. The gas flows along the substantially uniform gap and from a plurality of different directions to converge and flow through the outlet. High frequency electrical power is applied between the first electrode and the second electrode to generate a plasma within the gas flow emerging at the outlet. Precursor chemicals are added to the plasma flow at the outlet. Various electrode designs may be implemented and various applications involving surface treatment of materials with the low-temperature atmospheric plasma, including surface activation, cleaning, sterilization, etching and deposition of thin films are disclosed.

An apparatus and method are provided for separating components of a fluid or particles. A separation vessel having a barrier dam is provided to initially separate an intermediate density components of a fluid, and a fluid chamber is provided to further separate these intermediate density components by forming an elutriative field or saturated fluidized particle bed. The separation vessel includes a shield for limiting flow into the fluid chamber of relatively high density substances, such as red blood cells. The separation vessel also includes a trap dam with a smooth, gradually sloped downstream section for reducing mixing of substances. Structure is also provided for adding additional plasma to platelets and plasma flowing from the fluid chamber. The system reduces clumping of platelets by limiting contact between the platelets and walls of the separation vessel.

A process and apparatus for synthesizing a nanopowder is presented. In particular, a process for the synthesis of nanopowders of various materials such as metals, alloys, ceramics and composites by induction plasma technology, using organometallic compounds, chlorides, bromides, fluorides, iodides, nitrites, nitrates, oxalates and carbonates as precursors is disclosed. The process comprises feeding a reactant material into a plasma torch in which is generated a plasma flow having a temperature sufficiently high to yield a superheated vapour of the material; transporting said vapour by means of the plasma flow into a quenching zone; injecting a cold quench gas into the plasma flow in the quenching zone to form a renewable gaseous cold front; and forming a nanopowder at the interface between the renewable gaseous cold front and the plasma flow.

An apparatus and methods for enhanced plasmapheresis comprising a filter membrane under an orbital motion or movement that has optimal local shear forces and maximum plasma flow output. The methods for biological separation and therapies comprise platelet collection, viral particle removal, cell washing and processing for stem cell selection, bone marrow purging, red blood cell collection, auto-transfusion, auto-immune disease treatment, selective macro-molecule removal, toxin removal, LDL removal, extracorporeal plasma delipidation, and the like.

An electrosurgical device to generate a plasma stream and method to perform endoscopic or laparoscopic surgery within a patient's body comprising an electrosurgical generator coupled to a electrical power source to supply power to the electrosurgical device and a plasma generator including an electrode operatively coupled to the electrosurgical generator to receive electrical energy therefrom and concentrically disposed within an inner noble gas conduit to form a plasma channel coupled to a noble gas source to feed noble gas to the inner noble gas conduit and an outer electronegative gas conduit disposed in surrounding coaxial relation relative to the inner noble gas conduit to cooperatively form an electronegative gas channel therebetween coupled to a gas source to feed electronegative gas to the electronegative gas channel or an outer aspiration conduit disposed in surrounding coaxial relation relative to the inner noble gas conduit to cooperatively form an aspiration channel therebetween coupled to a negative pressure source such that the electrode heats the noble gas to at least partially ionize the noble gas to generate the plasma stream to be directed to the surgical site to perform the surgical procedure while the electronegative gas sustains the plasma stream at the surgical site and dilutes the noble gas adjacent the surgical site or the negative pressure source removes fluid and solid debris from the surgical site respectively.

A unitary housing structure is provided for an electrical switching device such as a three-phase contactor. The housing includes internal partitions for separating an operator section from contact sections, and for isolating phase sections from one another. The partitions are contiguous with one another and with side walls of the housing, inhibiting plasma flow within the housing cavities. The housing is made of a thermoplastic material which is molded as a single piece. The thermoplastic may be partially protected from plasma and arcs by shields within the phase sections, such as splitter plate supports.

The invention is embodied in a plasma flow device or reactor having a housing that contains conductive electrodes with openings to allow gas to flow through or around them, where one or more of the electrodes are powered by an RF source and one or more are grounded, and a substrate or work piece is placed in the gas flow downstream of the electrodes, such that said substrate or work piece is substantially uniformly contacted across a large surface area with the reactive gases emanating therefrom The invention is also embodied in a plasma flow device or reactor having a housing that contains conductive electrodes with openings to allow gas to flow through or around them, where one or more of the electrodes are powered by an RF source and one or more are grounded, and one of the grounded electrodes contains a means of mixing in other chemical precursors to combine with the plasma stream, and a substrate or work piece placed in the gas flow downstream of the electrodes, such that said substrate or work piece is contacted by the reactive gases emanating therefrom. In one embodiment, the plasma flow device removes organic materials from a substrate or work piece, and is a stripping or cleaning device. In another embodiment, the plasma flow device kills biological microorganisms on a substrate or work piece, and is a sterilization device. In another embodiment, the plasma flow device activates the surface of a substrate or work piece, and is a surface activation device. In another embodiment, the plasma flow device etches materials from a substrate or work piece, and is a plasma etcher. In another embodiment, the plasma flow device deposits thin films onto a substrate or work piece, and is a plasma-enhanced chemical vapor deposition device or reactor.

A plasma treatment system for treating multiple substrates with a plasma. The treatment chamber of the plasma treatment system includes at least one pair of electrodes, typically vertically oriented, between which a substrate is positioned for plasma treatment. Each electrode includes a perforated panel that permits horizontal process gas and plasma flow, which improves plasma uniformity. A process recipe is defined that is effective for removing thin polymer areas, such as flash or chad, attached to and projecting from a polymer substrate.

A device and a method for plasma spraying are disclosed. The device comprises, a cathode, an anode, a plasma channel formed by the anode and intermediate electrodes, and one or more flowable material injectors. The plasma channel has a throttling portion that divides the plasma channel into a high pressure portion near the cathode formed by at least one intermediate electrode and a low pressure portion near the anode. During operation, a plasma generating gas is heated by the arc maintained between the cathode and the anode, forming plasma. When the plasma passes through the throttling portion, its speed increases to a supersonic speed, and at the same time its static pressure drops. Flowable materials are injected in the plasma flow in the low pressure portion. The particles in the flowable materials are heated by the plasma and the resultant heated particles and plasma are output from the outlet of the plasma channel.

The present invention provides a pulsed carbon plasma apparatus to produce a diamond-like carbon coating over an extended object, the coating having a high degree of thickness uniformity achieved by scanning the plasma flow over the surface of the object. The pulsed carbon plasma apparatus of the invention comprises a carbon plasma flow scanning device having at least one pair of deflecting coils, where the deflecting coils have, in the scanning plane, a different number of turns on opposite sides. The object may be made of metal, ceramic, glass or plastic. The coatings may be used to improve life and operating performance of tools and machine parts, and as decorative coatings.

A device and a method for generating a truly pulsed plasma flow are disclosed. The device includes a cathode assembly comprising a cathode and a cathode holder, an anode, and two or more intermediate electrodes, the anode and the intermediate electrodes forming a plasma channel expanding toward the anode. The intermediate electrode closest to the cathode may form a plasma chamber around the cathode tip. An extension nozzle forming an extension channel having a tubular insulator along at least a portion of its interior surface is affixed to the anode end of the device. During operation, a voltage is applied between the cathode and the anode and a current is passed through the cathode, the plasma, and the anode. The voltage and current profiles are selected to cause the rapid development of a plasma flow with required characteristics. A substantially uniform temperature and power density distribution of the plasma pulse is achieved in the extension nozzle. Additionally, ozone may be generated in the extension nozzle during the generation of the plasma pulse.

A microplasma spray coating apparatus includes a microplasma apparatus with an anode, cathode, and an arc generator for generating an electric arc between the anode and cathode. An arc gas emitter injects inert gas through the electric arc. The electric arc is operable for ionizing the gas to create a plasma gas stream. A powder injector nozzle extends through the anode and injects powdered material into the plasma stream for transfer to the workpiece.

An apparatus and method for controlling electron flow within a plasma to produce a controlled electron beam is provided. A plasma is formed between a cathode and an acceleration anode. A control anode is connected to the plasma and to the acceleration anode via a switch. If the switch is open, the ions from the plasma flow to the cathode and plasma electrons flow to the acceleration anode. With the acceleration anode suitably transparent and negatively biased with a DC high voltage source, the electrons flowing from the plasma are accelerated to form an electron beam. If the switch is closed, the ions still flow to the cathode but the electrons flow to the control anode rather than the acceleration anode. Consequently, the electron beam is turned off, but the plasma is unaffected. By controlling the opening and closing of the switch, a controlled pulsed electron beam can be generated.

Dielectric barrier discharge plasma actuators are used to manipulate exhaust flow within and behind a jet engine nozzle. The dielectric barrier discharge plasma actuators may be used to direct cooling airflow near the surface of the nozzle to reduce heating of the nozzle, create thrust vectoring, and reduce noise associated with the exhaust flow exiting the nozzle.

The invention provides a plasma fuel cell. An additional ion separation field with field direction which is vertical to running direction is arranged on a plasma flow operating path after a plasma jet generation unit; and corresponding collection structures are arranged on moving directions of separated cation and anion, wherein an electron collection structure is connected with an electric energy output circuit of an electron transfer circuit which is used for moving collected electrons out of the separation field; the electrons are transferred to a porous electrode structure which is on anion collecting side, is communicated with an oxygen introducing structure, and is isolated from the anions by a solid oxide electrolysis isolation structure; oxygen anions reduced by the electrons are combined with cations collected via isolation through the solid oxide electrolysis isolation structure to release converted electric energy to the outside. The cell can break electrostatic balance with feasibility, has a simple structure, can use various fuel gases and effectively recover fuel residual gas, does not need a noble metal catalyst or a biopolar plate so as to reduce the cost, and has the advantages of fast starting, large power and good loading adaptability.

A plasma gun of the present invention includes: a container having a plasma outflow opening; a cathode (18) which is disposed inside the container to generate plasma by discharge; an auxiliary anode which is disposed to be able to be located between the plasma outflow opening and the cathode and is able to receive the plasma generated by the cathode; an exhaust valve for exhausting air from and sealing an inside of the container; and a plasma flow-out preventing/allowing device which prevents the plasma, having been generated by the discharge of the cathode, from flowing out from the plasma outflow opening and allows the plasma to flow out from the plasma.

The invention provides a magnetically stable plasma flow ignition generator. The ignition generator comprises a fitting seat, an insulator, a whirlcone, a cathode and an anode and is characterized in that a magnet-stabilizing coil is arranged outside the fitting seat; the fitting seat and the anode are combined into a whole with the inside thereof being a cavity, and an air inlet is arranged on the the side; the cathode is arranged in the cavity of the fitting seat and the anode, and the insulator is arranged between the cathode and the anode; the back part of the cathode is of sharp-pointed shape, and the sharp-pointed shape part is provided with a rotational flow exit-hole to form the whirlcone; the outlet of the anode is of a scaling nozzle shape, an inner compression horn matches with the cathode to compress and push the voltaic arc into the middle part of the anode and the ejected plasma jet flow is amplified by an enlargement horn to form a conical surface; an gas cooling vent is arranged on the anode, and an air inlet of the vent is arranged at an air inlet; the fitting seat is connected with a high voltage firing cable and grounded; an inner pole is arranged in the fitting seat, and the inner pole and the cathode are closely connected. In the invention, stability of the plasma arc and the occurrence of plasma jet flow under low current functional mode can be realized.

One embodiment of the present invention uses plasma-driven gas flow to cool down electronic devices. The cooling device comprises heat sink fin assembly, plasma actuator assembly, and magnetic circuit assembly. The plasma actuator assembly comprises electrodes and dielectric pieces. Voltages are applied to electrodes to drive the plasma gas flow. The magnetic circuit assembly provides magnetic field to interact with electrical field and plasma flow, and therefore an induced gas flow is pumped into, or pumped out from, heat sink fin assembly, to cool down heat sink fins.

The invention provides an arc coating apparatus having a steering magnetic field source comprising steering conductors disposed along the short sides of a rectangular target behind the target, and a magnetic focusing system disposed along the long sides of the target in front of the target which confines the flow of plasma between magnetic fields generated on opposite long sides of the target. The plasma focusing system can be used to deflect the plasma flow off of the working axis of the cathode. Each steering conductor can be controlled independently. In a further embodiment, electrically independent steering conductors are disposed along opposite long sides of the cathode plate, and by selectively varying a current through one conductor, the path of the arc spot shifts to widen an erosion corridor. The invention also provides a plurality of internal anodes, and optionally a surrounding anode for deflecting the plasma flow and preserving a high ionization level of the plasma. The invention also provides a shield at floating potential, restricting the cathode spot from migrating into selected regions of the target evaporation surface outside of the desired erosion zone. The shield may be positioned immediately above the region of the target surface in the vicinity of the anode, protecting the anode from deposition of cathodic evaporate and providing better distribution of cathodic evaporate over the substrates to be coated. The invention further provides correcting magnets adjacent to the short sides of the target, to move the arc spot between the long sides.