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282 results about "Plasma flow" patented technology

Low-temperature compatible wide-pressure-range plasma flow device

The invention is embodied in a plasma flow device or reactor having a housing that contains conductive electrodes with openings to allow gas to flow through or around them, where one or more of the electrodes are powered by an RF source and one or more are grounded, and a substrate or work piece is placed in the gas flow downstream of the electrodes, such that said substrate or work piece is substantially uniformly contacted across a large surface area with the reactive gases emanating therefrom. The invention is also embodied in a plasma flow device or reactor having a housing that contains conductive electrodes with openings to allow gas to flow through or around them, where one or more of the electrodes are powered by an RF source and one or more are grounded, and one of the grounded electrodes contains a means of mixing in other chemical precursors to combine with the plasma stream, and a substrate or work piece placed in the gas flow downstream of the electrodes, such that said substrate or work piece is contacted by the reactive gases emanating therefrom. In one embodiment, the plasma flow device removes organic materials from a substrate or work piece, and is a stripping or cleaning device. In another embodiment, the plasma flow device kills biological microorganisms on a substrate or work piece, and is a sterilization device. In another embodiment, the plasma flow device activates the surface of a substrate or work piece, and is a surface activation device. In another embodiment, the plasma flow device etches materials from a substrate or work piece, and is a plasma etcher. In another embodiment, the plasma flow device deposits thin films onto a substrate or work piece, and is a plasma-enhanced chemical vapor deposition device or reactor.
Owner:RGT UNIV OF CALIFORNIA

Electrosurgical device to generate a plasma stream

An electrosurgical device to generate a plasma stream and method to perform endoscopic or laparoscopic surgery within a patient's body comprising an electrosurgical generator coupled to a electrical power source to supply power to the electrosurgical device and a plasma generator including an electrode operatively coupled to the electrosurgical generator to receive electrical energy therefrom and concentrically disposed within an inner noble gas conduit to form a plasma channel coupled to a noble gas source to feed noble gas to the inner noble gas conduit and an outer electronegative gas conduit disposed in surrounding coaxial relation relative to the inner noble gas conduit to cooperatively form an electronegative gas channel therebetween coupled to a gas source to feed electronegative gas to the electronegative gas channel or an outer aspiration conduit disposed in surrounding coaxial relation relative to the inner noble gas conduit to cooperatively form an aspiration channel therebetween coupled to a negative pressure source such that the electrode heats the noble gas to at least partially ionize the noble gas to generate the plasma stream to be directed to the surgical site to perform the surgical procedure while the electronegative gas sustains the plasma stream at the surgical site and dilutes the noble gas adjacent the surgical site or the negative pressure source removes fluid and solid debris from the surgical site respectively.
Owner:BOVIE MEDICAL CORPORATION

Method of processing a substrate

The invention is embodied in a plasma flow device or reactor having a housing that contains conductive electrodes with openings to allow gas to flow through or around them, where one or more of the electrodes are powered by an RF source and one or more are grounded, and a substrate or work piece is placed in the gas flow downstream of the electrodes, such that said substrate or work piece is substantially uniformly contacted across a large surface area with the reactive gases emanating therefrom The invention is also embodied in a plasma flow device or reactor having a housing that contains conductive electrodes with openings to allow gas to flow through or around them, where one or more of the electrodes are powered by an RF source and one or more are grounded, and one of the grounded electrodes contains a means of mixing in other chemical precursors to combine with the plasma stream, and a substrate or work piece placed in the gas flow downstream of the electrodes, such that said substrate or work piece is contacted by the reactive gases emanating therefrom. In one embodiment, the plasma flow device removes organic materials from a substrate or work piece, and is a stripping or cleaning device. In another embodiment, the plasma flow device kills biological microorganisms on a substrate or work piece, and is a sterilization device. In another embodiment, the plasma flow device activates the surface of a substrate or work piece, and is a surface activation device. In another embodiment, the plasma flow device etches materials from a substrate or work piece, and is a plasma etcher. In another embodiment, the plasma flow device deposits thin films onto a substrate or work piece, and is a plasma-enhanced chemical vapor deposition device or reactor.
Owner:RGT UNIV OF CALIFORNIA

Deflagration-non-equilibrium plasma magnetohydrodynamics power generating method and device

The invention provides a deflagration-non-equilibrium plasma magnetohydrodynamics power generating method and a device used by the method, which can generate a low-temperature non-equilibrium plasma flow which flows through magnetic fields to form a magnetic fluid power generating system. The method comprises the following steps: 1, deflagrating fuel, wherein an oxidant and the fuel are mixed in a ratio of 1.05 to 1.5 times of chemical reaction equivalent weight, and the mixture enters a fuel deflagration chamber for continuous deflagration so as to form high-pressure gas of which the pressure is between 0.5 and 2 MPa; 2, generating the jet plasma, wherein the high-pressure gas obtained in the first step enters a plasma generating pipe of which the voltage is between 5 and 50 kV and the frequency is between 10 kHz and 1 MHz at a speed of between 20 and 200 m / s so as to generate the non-equilibrium jet plasma which has the characteristics of the magnetic fluid and of which the conductivity is between 10 and 20 S / m and the temperature is between 1,000 and 1,200 K; and 3, generating power by the magnetic fluid, wherein the non-equilibrium jet plasma enters the magnetic fields of a normal conducting electromagnet of which the magnetic induction is between 0.5 and 2.5 T at a speed of between 20 and 200 m / s, and moves to generate electromotive force.
Owner:SOUTHEAST UNIV

Magnetically stabilized plasma flow ignition generator

InactiveCN101463763AFix stability issuesTroubleshooting Plasma Jet Generation IssuesGas turbine plantsJet propulsion plantsPlasma jetEngineering
The invention provides a magnetically stable plasma flow ignition generator. The ignition generator comprises a fitting seat, an insulator, a whirlcone, a cathode and an anode and is characterized in that a magnet-stabilizing coil is arranged outside the fitting seat; the fitting seat and the anode are combined into a whole with the inside thereof being a cavity, and an air inlet is arranged on the the side; the cathode is arranged in the cavity of the fitting seat and the anode, and the insulator is arranged between the cathode and the anode; the back part of the cathode is of sharp-pointed shape, and the sharp-pointed shape part is provided with a rotational flow exit-hole to form the whirlcone; the outlet of the anode is of a scaling nozzle shape, an inner compression horn matches with the cathode to compress and push the voltaic arc into the middle part of the anode and the ejected plasma jet flow is amplified by an enlargement horn to form a conical surface; an gas cooling vent is arranged on the anode, and an air inlet of the vent is arranged at an air inlet; the fitting seat is connected with a high voltage firing cable and grounded; an inner pole is arranged in the fitting seat, and the inner pole and the cathode are closely connected. In the invention, stability of the plasma arc and the occurrence of plasma jet flow under low current functional mode can be realized.
Owner:HARBIN ENG UNIV

Rectangular cathodic arc source and method of steering an arc spot

The invention provides an arc coating apparatus having a steering magnetic field source comprising steering conductors disposed along the short sides of a rectangular target behind the target, and a magnetic focusing system disposed along the long sides of the target in front of the target which confines the flow of plasma between magnetic fields generated on opposite long sides of the target. The plasma focusing system can be used to deflect the plasma flow off of the working axis of the cathode. Each steering conductor can be controlled independently. In a further embodiment, electrically independent steering conductors are disposed along opposite long sides of the cathode plate, and by selectively varying a current through one conductor, the path of the arc spot shifts to widen an erosion corridor. The invention also provides a plurality of internal anodes, and optionally a surrounding anode for deflecting the plasma flow and preserving a high ionization level of the plasma. The invention also provides a shield at floating potential, restricting the cathode spot from migrating into selected regions of the target evaporation surface outside of the desired erosion zone. The shield may be positioned immediately above the region of the target surface in the vicinity of the anode, protecting the anode from deposition of cathodic evaporate and providing better distribution of cathodic evaporate over the substrates to be coated. The invention further provides correcting magnets adjacent to the short sides of the target, to move the arc spot between the long sides.
Owner:G&H TECH LLC
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