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74 results about "Plasma flow" patented technology

Method of coating alloy wheels using inter-coat plasma

An alloy wheel is formed having a three dimensional configuration defining a face and recessed surfaces. The face of the wheel is machined providing a smooth surface at the face and defining an edge between the smooth surface of the face and the recessed surfaces. A nozzle element for projecting a plasma jet toward the wheel is provided. The plasma jet is projected toward the smooth surface of the face, the edge, and toward at least a portion of the recessed surfaces forming an alloy oxide at least on the face and the edge disposed between the face and the recessed surfaces. A first polymeric coating is applied over the face, the recessed surfaces and the edge disposed between the face and the recessed surfaces.
Owner:SUPERIOR INDUSTRIES INTERNATIONAL INC

Detachable combined type plasma filtering clamping shell

The utility model provides a detachable combined type plasma filtering card shell, which comprises a card shell, the card shell comprises an upper cover and a bottom shell clamped with the upper cover, the bottom shell is internally provided with a test paper card slot, and the upper cover is provided with a first sample adding hole facing the test paper card slot; the plasma separator is clamped on the upper cover, and the plasma separator comprises a supporting plate, a liquid storage cavity and a second sample adding hole, and the liquid storage cavity and the second sample adding hole are formed in the supporting plate. According to the detachable combined type plasma filtering clamping shell provided by the utility model, the plasma separator is clamped on the clamping shell, whole blood is added into the second sample adding hole, and then the pressurizing cover is bent to block the second sample adding hole, so that the filtering speed of the whole blood on the filter membrane is accelerated; the filtered plasma flows into the first sample adding hole from the liquid storage cavity to react with the test paper strip on the test paper clamping groove, so that the detection accuracy is improved, and further, the plasma separator and the clamping shell can be separated and independently used.
Owner:ZHEJIANG JULI MEDICAL TECH CO LTD

Polymer hollow-core optical fiber for integrated SF6 gas sensor and preparation method of polymer hollow-core optical fiber

The invention discloses a polymer hollow-core optical fiber for an integrated SF6 gas sensor and a preparation method thereof, which are characterized in that a plasma generator is butted with a polymer capillary tube, and the tail end of the polymer capillary tube is connected with an air extractor, so that a plasma flow is in contact with the inner surface of the whole polymer capillary tube to generate an activation effect; and then depositing metal and a dielectric film in the capillary tube through a liquid phase deposition method to obtain the flexible and low-loss intermediate infrared polymer hollow-core optical fiber. The optical fiber is used as a gas chamber and a laser transmission channel, and an integrated SF6 gas sensor can be constructed through spiral integration. Compared with the prior art, the plasma processing method can activate the inner surface of a long and thin polymer capillary tube, improve the quality and interface bonding force of a liquid phase deposition metal / dielectric film, and further construct the polymer / metal / dielectric intermediate infrared hollow-core optical fiber through a liquid phase deposition method. The obtained polymer hollow-core optical fiber has the advantages of low loss, flexibility and high stability, and is suitable for constructing a high-sensitivity integrated SF6 gas sensor.
Owner:EAST CHINA NORMAL UNIV

Plasma flow field parameter inversion method and system based on 1D-CNN

The invention provides a plasma flow field parameter inversion method and system based on a 1D-CNN, and relates to the technical field of electromagnetic inverse scattering, and the method comprises the steps: building a plasma flow field model of a hypersonic speed target, calculating the information of a scattered field under the action of electromagnetic waves through a current density convolution-time domain finite difference method, and calculating the information of the scattered field under the action of the electromagnetic waves; solving a far field electric field component according to a near-far field extrapolation formula; sample data of multiple groups of far-zone time domain electric field components are obtained by changing inversion parameters, and a data set is constructed after the sample data are preprocessed; training a pre-built 1D-CNN model according to the data set until a preset training condition is met, and obtaining a parameter inversion model; and performing inversion according to the parameter inversion model to obtain plasma flow field parameters of the hypersonic speed target.
Owner:江淮前沿技术协同创新中心 +1

Intelligent and smart jet plasma flow control device and method

The invention discloses an intelligent and smart jet plasma flow control device and method, and relates to the technical field of active flow control, the device comprises an aircraft surface, the aircraft surface is provided with jet holes in the Z direction, a dielectric barrier discharge exciter is arranged above the aircraft surface, and a corona exciter is arranged below the aircraft surface; the dielectric barrier discharge exciter comprises an insulating dielectric layer, the insulating dielectric layer is provided with a through hole in the Z direction, the through hole is the same as the jet hole in shape and size, a low-voltage electrode is tightly attached to the lower portion of the insulating dielectric layer, and a high-voltage electrode is tightly attached to the upper portion of the insulating dielectric layer; the corona exciter comprises a negative circular ring and a positive circular ring, a plurality of spray points are arranged at the top end of the negative circular ring, and an electrode net is arranged at the bottom of the positive circular ring. The device realizes three-dimensionally controllable jet flow in the direction, has the advantages of high mechanical efficiency, short response time, wide control frequency band and the like, and is flexible to control, exquisite and efficient in structural arrangement and high in practicability. Popularization and application are facilitated.
Owner:AIR FORCE UNIV PLA

Atmospheric pressure plasma processing method and atmospheric pressure plasma processing device

PCT designated stageWO2025258108A1Plasma techniqueMicrowavePlasma generator
Provided are an atmospheric pressure plasma processing method and an atmospheric pressure plasma processing device with which a sample is processed in a short time, and the number of processing steps is reduced. In the method and device, the surface of a sample is subjected to plasma processing under atmospheric pressure by means of: a plasma generating device that generates plasma by supplying a pressurized inert gas in a rotating flow from a gas inlet portion 38 to an inner peripheral surface of a reaction cylindrical body 31, and supplying microwaves controlled to a predetermined electric power amount into a high-frequency resonance cavity 34; a substantially cross-shaped reaction container 5; a sample moving mechanism 7 that enables a sample SF to move relative to the plasma flow within the reaction container 5; and a control means 9 that controls a plasma generation state in accordance with the state of the sample.
Owner:KOGOMA MASUHIRO

Plasma-assisted thermoplastic resin wire 3D printing method and printing nozzle

The invention relates to the technical field of 3D printing, and discloses a plasma-assisted thermoplastic resin wire 3D printing method and a printing nozzle. The free radicals and active functional groups on the surfaces of the molten thermoplastic resin wire and the heated printed layer are subjected to chemical reaction, and the interlaminar / interchannel polymer molecular chain entanglement effect is improved by heating the current printed layer and the adjacent printed layer (or printing channel); the nano / micron / millimeter modified filler is transmitted by plasma flow, so that the modified filler particles are embedded into the surface of the thermoplastic wire rod, and mechanical connection of the additional modified filler particles is formed between layers or between channels through the modified filler particles. According to the preparation method, through the synergistic effect of mechanical connection of additional modified filler particles, entanglement of polymer molecular chains and connection of interlayer chemical bonds, the interlayer and channel interface adhesion effect is enhanced, and the interlayer and channel bonding strength of a 3D printing product is improved.
Owner:TAIHANG NATIONAL LABORATORY

Air-breathing plasma jet generator for active flow control of aircraft

PendingCN122294351APlasma jetPlasma flow
This invention belongs to the field of plasma flow control technology for aircraft, specifically relating to an air-breathing plasma jet generator suitable for active flow control of aircraft. It is installed within an internal cavity of the aircraft, connected to an air intake and a nozzle. The air-breathing plasma jet generator generates orthogonal electric and magnetic fields. The electric field includes components in the direction of airflow and perpendicular to airflow. The magnetic field is used to confine electrons to gyroscopic motion and to ionize them through collisions with gas molecules. Furthermore, the magnetic field causes the ion current perpendicular to the airflow direction to generate an Ampere force in the direction of airflow under the influence of the magnetic field. This invention effectively solves the problem of exciter failure during high-speed flight by embedding the exciter entirely inside the aircraft and combining an innovative design of integrated excitation using magnetic fields, thermal energy, and acoustic waves, significantly improving the speed applicability range of plasma flow control technology.
Owner:SHENYANG AEROSPACE UNIVERSITY

A method of transition measurement based on a plasma probe

The application discloses a transition measurement method based on a plasma probe, wherein the plasma probe is arranged at different positions of an undisturbed part of an aircraft surface; the probe arrangement position is subjected to simulation analysis of aerodynamic heat and a temperature field in a flight process, and a probe material is selected according to a simulation result; three-dimensional plasma flow field simulation results are obtained for typical states in a transition window interval of a flight profile; three-dimensional plasma flow field electron density data are extracted, and a range of the plasma probe is determined according to the three-dimensional plasma flow field electron density data; a probe circuit is designed, and a plasma probe measurement device is obtained; the plasma probe measurement device is used to obtain a measured current-voltage curve and a saturated ion current of the probe, and electron density data are calculated according to the measured current-voltage curve and the saturated ion current, that is, a transition measurement signal of the probe plasma in the flight test, and a step change time of the transition measurement signal is taken as a transition occurrence time of measurement; according to the measured transition occurrence time, combined with telemetry data of the flight test, a transition measurement result is obtained, and validity of the transition measurement result is confirmed.
Owner:BEIJING LINJIN SPACE AIRCRAFT SYST ENG INST

Method for preparing high-density aluminum oxide coating by using suspension plasma spraying technology

The invention discloses a method for preparing a high-density aluminum oxide coating by using a suspension plasma spraying technology, and relates to the technical field of suspension plasma spraying, and the method comprises the following steps: 1, carrying out sand blasting treatment on an upper electrode plate; sequentially carrying out high-pressure washing, compressed air blow-drying and drying operations; 2, the upper electrode plate is placed in a sulfuric acid solution to be subjected to hard anodic oxidation treatment; 3, a dry ice sand blasting process is adopted for pretreating the hole periphery area of the surface of the steel plate; step 4, injecting the aluminum oxide suspension into high-energy plasma flame flow through plasma spraying equipment; the aluminum oxide particles in the suspension are rapidly molten in the flame flow, then collide with the surface of the upper electrode plate at a high speed along with the plasma flow, and are rapidly cooled and solidified to form a layer of high-compactness aluminum oxide coating on the surface of the upper electrode plate. By optimizing the coating preparation process and parameters, the compactness and corrosion resistance of the coating are improved, the service life of equipment parts is prolonged, and the cost of a production enterprise is reduced.
Owner:FERROTEC TECH&DEV(DALIAN) CO LTD

Plasma jet device

Plasma Jet Device The invention relates to a cold plasma jet device (1) comprising: - at least one gas supply inlet (2); - at least one tube (4) fluidically connected to the gas supply inlet and comprising at least one plasma outlet (5), the gas supply inlet and the plasma outlet defining a direction of gas and plasma flow; - at least one high-voltage electrode (6) outside the tube configured to generate an electric field in the tube; and - at least one electrically conductive element (7) having a floating electrical potential and extending axially inside the tube at least partially between the high-voltage electrode and the plasma outlet. Figure for the abstract: Fig. 3
Owner:ECOLE POLYTECHNIQUE +2

Localized heating device and localized heating system having the same

A localized heating device includes a plasma deforming portion and a heating portion. The plasma deforming portion includes an inlet end having a circular hole, an outlet end having an elongated hole with a first length and a first width, and a channel smoothly connected with the circular hole and the elongated hole. The heating portion, disposed at the outlet end, includes two control covers spaced by a slot. The elongated hole and the slot being oppositely disposed with respect to the plasma deforming portion. A plasma flow provided by a plasma producing source being to enter the channel via the circular hole, then to flow through the elongated hole, and finally to reach the slot.
Owner:IND TECH RES INST

Plasma-enabled liquid filtration and decontamination

Apparatus and method for decontaminating both contaminated waters and sorbent filter media, either separately or simultaneously, in a single system. Contaminants in a liquid flowing through a reaction chamber are removed by first generating a plasma within the liquid in the chamber, with the contaminants being broken into smaller particles at the interfaces between the generated plasma and the liquid. The combined plasma-liquid solution is then passed through a solid filter, which captures the smaller contaminant particles to decontaminate the liquid. To decontaminate the filter media, plasma flows through the filter material without the presence of liquid, the plasma reacting with the filter material to remove contaminants previously adsorbed by the filter.
Owner:THE GOVERNMENT OF THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY DEPARTMENT OF HEALTH & HUMAN SERVICES

Reduced graphene oxide supported high-entropy oxide, method of preparation and use

The application discloses a reduced graphene oxide loaded high-entropy oxide and a preparation method and application thereof, and relates to the technical field of high-entropy oxides. The preparation method comprises the following steps: ultrasonic treatment is conducted on graphene and metal salt respectively in respective solvents to obtain a metal salt solution and a graphene suspension; the metal salt solution is added into the graphene suspension, urea is added and stirred, and then the obtained mixed solution is pretreated to obtain a precursor powder; and the precursor powder is subjected to plasma flow treatment to obtain the reduced graphene oxide loaded high-entropy oxide. The high-entropy oxide obtained by using the preparation method has the advantages of polycrystal face scattering, excellent impedance matching and strong wave absorption loss capacity, and has a wide application prospect in the electromagnetic field of consumer electronics, new energy vehicles and military weapons.
Owner:XI AN JIAOTONG UNIV

Systems, methods, and devices for generating predominantly radially expanded plasma flow

Systems, devices, and methods generating a plasma flow are disclosed. A method may include applying energy that alternates between being at a base level for a first duration and at a pulse level for a second duration according to a controlled pattern, generating a plasma flow having a directional axis, and discharging the plasma flow alternating between a base configuration and a pulse configuration according to the controlled pattern. The plasma flow in the base configuration may have (1) a first temperature at the outlet and (2) a first flow front that advances along the directional axis. The plasma flow in the pulse configuration may have (1) a second temperature at the outlet that is greater than the first temperature and (2) a second flow front that advances along the directional axis at a speed greater than the first flow front.
Owner:PLASMA SURGICAL INC

A bio-adaptive surface composite modification method for beta titanium alloy

This invention provides a biocompatible β This invention relates to a method for composite modification of titanium alloy surfaces, belonging to the technical field of alloy modification methods. The invention includes applications in medical... β This invention involves introducing bioactive particles onto the surface of a titanium alloy substrate, performing friction stir processing (FSP) on the substrate to introduce bioactive particles and construct a gradient grain structure, and then subjecting the FSP-treated substrate to compressed plasma flow (CPF) treatment to achieve uniform distribution of bioactive particles and construct a topology with an average surface roughness of 3-6 μm suitable for cell growth. The invention precisely controls the amount of bioactive particles introduced and constructs a gradient grain structure through friction stir processing (FSP); simultaneously, compressed plasma flow (CPF) technology achieves uniform distribution of bioactive particles and an ideal surface roughness of 3-6 μm on the titanium alloy surface. Ultimately, this significantly improves the cell adhesion, proliferation capacity, and osteogenic properties of the material surface, solving the technical problem of low integration efficiency of traditional titanium alloy implants with human bone tissue.
Owner:SHANGHAI JIAOTONG UNIV

Plasma device

PendingCN122370265ADielectric cylinderPlasma flow
This disclosure provides a plasma device, belonging to the field of semiconductor equipment technology. The plasma device includes: a dielectric cylinder; a first cover plate covering the upper part of the dielectric cylinder, forming a plasma generation space together with the dielectric cylinder; a coil disposed outside the dielectric cylinder; a housing located below the dielectric cylinder; a second cover plate connected to the lower part of the dielectric cylinder and covering the upper part of the housing, forming a workpiece processing space together with the housing; at least one acceleration module is disposed in the second cover plate; the acceleration module includes: an electrode, an insulating layer, and an electrode feeder, wherein the insulating layer covers the electrode, the electrode feeder is used to feed energy into the electrode to form an electric field, the electric field is used to adjust the horizontal velocity of ions in the plasma flowing from the plasma space to the workpiece processing space, thereby adjusting the horizontal velocity of free radicals in the plasma; a grid located below the acceleration module and above the workpiece processing space.
Owner:BEIJING E TOWN SEMICON TECH CO LTD +1

Microfluidic device for obtaining plasma

PCT designated stageWO2025224026A1Laboratory glasswaresSensorsMicrofluidicsCapillary channel
The invention relates to a microfluidic device (100) for obtaining blood plasma, comprising a module (110) for collecting blood (101), the module having a first membrane (111A), which is designed to separate the plasma, and a specific surface (112), which is arranged downstream of the first membrane (111A) in order to extract the plasma therefrom. The device (100) further has a capillary channel (120) which is fluidically connected to the specific surface (112), is arranged to circulate the plasma in the channel (120), and has a flow outlet (130). The capacity of the collection module (110) is thus greater than the capacity of the capillary channel (120), and the capillary channel (120) is arranged such that the combined effect of capillary action and gravity is greater than the surface tension of the plasma when the plasma flows through the capillary channel (120).
Owner:BELMONT DIAGNOSTICS

Automatic board separating method and apparatus for circuit board

This invention relates to the field of circuit board depaneling technology, specifically an automated circuit board depaneling method and equipment, comprising the following steps: introducing nitrogen gas into a sealed processing chamber to maintain an oxygen concentration ≤100ppm and a humidity of 40~60%RH; using a multi-axis robotic arm to drive a composite milling cutter to cut the circuit board along a V-cut line, with the vibration amplitude of the cutting area monitored in real time as <5μm; simultaneously spraying argon-oxygen mixed plasma onto the cutting surface during the cutting process, with the argon-oxygen mixed plasma flow covering a temperature of 100~150℃; after depaneling, the burr height of the circuit board edge is ≤5μm, and the surface roughness Ra is ≤0.8μm. This invention achieves high quality and high efficiency in automated circuit board depaneling, meeting the stringent requirements of modern circuit board manufacturing for depaneling processes.
Owner:VECTRON TECH ELECTRONICS EQUIP

Bladeless air sterilization device based on plasma flow control

This invention discloses a bladeless air sterilization device based on plasma flow control, comprising an induced airflow array and a plasma sterilization array arranged sequentially along the airflow direction. The induced airflow array consists of several SDBD (Solid State Difference) units, and the plasma sterilization array consists of several DBD (Deep State Difference) units. Each SDBD unit includes an SDBD unit dielectric layer, within which an SDBD unit high-voltage electrode is embedded, and an SDBD unit grounding electrode is disposed outside the SDBD unit dielectric layer. Each DBD unit includes two DBD unit dielectric layers, within which a DBD unit grounding electrode and a DBD unit high-voltage electrode are respectively embedded. This bladeless air sterilization device uses an induced airflow array instead of a bladed device, simplifying the structure and reducing costs; the high-voltage electrode is embedded in the dielectric layer, increasing safety; and multi-stage sterilization improves the sterilization rate.
Owner:GREEN AVIATION TECH RES INST OF CHONGQING JIAOTONG UNIV

Program method for automatically laminating steel wire mesh cloth

The invention relates to the technical field of industrial composite material manufacturing, and discloses a procedure method for automatically laminating a steel wire mesh, and the method comprises a material pretreatment module, a laminating execution module, a quality control module and a module cooperation mechanism; a dynamic activation unit is arranged, when steel wire mesh film coating pretreatment is carried out, a surface contact angle real-time monitoring standard is established, plasma treatment parameters are intelligently adjusted according to different base material characteristics, the surface energy control accuracy is guaranteed, and a base material pollution layer is dynamically eliminated based on plasma flow of a specific gas combination; an insufficient activation area is detected and corrected in real time, the bonding strength of a base material and an adhesive layer is enhanced, the demolding problem caused by a traditional process is solved, and the adhesive layer forming process parameters are monitored in real time by arranging a closed-loop adhesive coating unit and establishing a cooperative mechanism of a control model with the viscosity changing along with the temperature and a flow calculation formula. The problem that the thickness of a glue layer is out of control due to temperature fluctuation in a traditional process is solved.
Owner:KUNSHAN HENGSHENG ELECTRONICS

Short-process low-pressure plasma spraying device and method

The invention belongs to the technical field of high-end manufacturing, and particularly relates to a short-process low-pressure plasma spraying device and method. According to the method, a high-energy laser beam is located at the front end of plasma flame flow on the surface of a workpiece and moves synchronously with a spray gun, texturing treatment and surface cleaning are achieved, and synchronous preheating of a base material spraying area is achieved through induction coils coaxially distributed at the tail end of the plasma flame flow. According to the method, the problems of pollution, oxidation, deformation, stress concentration, even coating cracking and the like caused by the pretreatment process and multiple times of heating of the base material can be reduced to the maximum extent, and the coating processing and preparing efficiency and the coating quality are remarkably improved.
Owner:YANSHAN UNIV

Heating device

To enable easy heating of a heating object to reach high temperature.SOLUTION: A processing device (12) is used for heating a heating object (W) of a particulate matter by water plasma (J) jetting from a water plasma generator (11). A feeding device includes a housing body (65) configured to house the heating object and into which the water plasma flows. The housing body includes a swirling flow generation part (72) configured to convert a flow in a jet direction of the water plasma to a swirling flow to agitate the heating object. The swirling flow generation part swirls the heating object housed inside the housing body together with the water plasma and the heating object can be heated while agitated by the water plasma.SELECTED DRAWING: Figure 6
Owner:HELIX CO LTD

Graphite boat dry cleaning device based on remote plasma

The utility model discloses a graphite boat dry cleaning device based on remote plasma, which comprises a plasma excitation unit, a cleaning chamber, a vacuum unit, a gas collection chamber and a uniform gas regulation and control chamber, and the plasma excitation unit and the vacuum unit are both arranged on the outer side of the cleaning chamber; the plasma excitation unit is connected with the cleaning chamber through a plasma feed-in pipeline, a graphite boat to be cleaned is placed in the cleaning chamber, and plasma airflow excited by the plasma excitation unit flows into the cleaning chamber through the plasma feed-in pipeline; the bottom of the cleaning chamber is provided with a uniform gas regulation and control chamber, the end part of the uniform gas regulation and control chamber is provided with a gas collection chamber, the gas collection chamber is connected with a vacuum unit through a vacuum pipeline, and gas in the cleaning chamber flows through the uniform gas regulation and control chamber, the gas collection chamber and the vacuum unit and then is discharged. The graphite boat cleaning device has the advantages of being compact in structure, convenient to operate, high in plasma distribution uniformity, high in stability and the like, and the graphite boat cleaning quality is remarkably improved.
Owner:HUNAN RED SUN PHOTOELECTRICITY SCI & TECH

Plasma treatment and hot-pressing laminating equipment for PP-based composite cellular board

The invention relates to the technical field of cellular board processing, in particular to plasma processing and hot-pressing laminating equipment for a PP (polypropylene)-based composite cellular board, which sequentially comprises an unwinding component, a hot-pressing laminating component, a laminating component and a plasma processing component along the material advancing direction, and the unwinding component is used for releasing a UD glass fiber belt, glass fiber cloth and a PP film which form a panel; the first plasma processing part is used for activating the surfaces of the UD glass fiber belt and the glass fiber cloth to form a reinforcing material; the preheating component is used for preheating the activated reinforcing material and the PP film; and the laying part is used for laminating the reinforcing material and the PP film to form the panel prepreg. And the second-stage plasma treatment system adopts a spray gun array which is symmetrically arranged up and down in a staggered manner and of which the inclination angle can be independently adjusted, and is combined with a negative pressure suction groove which is cooperatively arranged with the spray guns, so that the plasma flow can penetrate through honeycomb hole grids from multiple angles and perform dead-corner-free activation on the inner wall, and meanwhile, pollutants are immediately pumped away by the negative pressure groove, so that secondary pollution is avoided.
Owner:GUANGDONG WANGU IND TECH CO LTD

Composite structure reaction cavity for treating exhaust gas in general semiconductor industry by utilizing plasma torch

The invention discloses a composite structure reaction cavity for treating exhaust gas in the generic semiconductor industry by using a plasma torch. The composite structure reaction cavity comprises the plasma torch, a pyrolysis cavity, a combustion cavity and a quenching cavity which are sequentially communicated from top to bottom, a pyrolysis cavity air inlet pipe is arranged on the pyrolysis cavity, composite gradient heat insulation devices are arranged in the pyrolysis cavity and the combustion cavity, and a water tank used for collecting dust is arranged below the quenching cavity; according to the composite structure reaction cavity for treating the exhaust gas in the general semiconductor industry by using the plasma torch, the strong rotational flow gas inlet pipe and the plasma flow field cooperate, so that the retention time of the exhaust gas in a high-temperature area is prolonged by 10-30%, and the decomposition efficiency of refractory substances is improved to 99% or above; due to the gradient heat insulation design of the porous silicon carbide inner cylinder, the nanometer heat preservation layer and the water cooling interlayer, the heat loss of the reaction cavity is reduced by 40-60%, the temperature of the outer wall is controlled to be 40 DEG C or below, and energy conservation and safety are both considered; due to the material characteristic and the porous structure design of the porous silicon carbide inner cylinder, the problem of high-temperature corrosion is solved, meanwhile, SiOx deposition is reduced, and the continuous operation period of equipment is prolonged by more than 50%.
Owner:ZHONGJIWEI (SHANGHAI) FILTRATION SYSTEM CO LTD

Kinetic energy harvesting system

A kinetic energy harvesting system includes an air intake accelerator. The air intake accelerator is formed as a funnel which receives an airflow. A plasma generator receives the airflow from the air intake accelerator and generates a plasma flow. An inductor current section generates electricity from the plasma flow. The sensor system further includes a plasma sensor. The plasma sensor senses a speed and temperature of the plasma flow. The inductor current section further includes multiple metal wires mounted in the plasma flow. The multiple metal wires generate induction electricity from the plasma flow.
Owner:FRLIN COLE

Method and device for calculating RCS (Radar Cross-Section) of target wrapped around plasma flow field

The invention discloses a plasma surrounding flow field coating target RCS calculation method and device. The method comprises the following steps: determining each scattering center of a target body and distribution of plasma around a flow field; respectively calculating a transmission path of the electromagnetic wave in the plasma after passing through each scattering center; based on the distribution of the plasma around the flow field, plasma parameters on each transmission path are extracted; calculating attenuation constants and phase shift constants of the electromagnetic waves on the corresponding transmission paths based on the plasma parameters on each transmission path; based on the attenuation constant and the phase shift constant, calculating the scattering field intensity after the electromagnetic wave passes through the plasma; calculating scattering echoes of the target body based on the field intensity of the electromagnetic wave after the electromagnetic wave passes through the plasma; and calculating the RCS of the target body based on the scattering echo of the target body. According to the method, the calculation efficiency is high, and the real-time calculation requirement can be met.
Owner:BEIJING INST OF ENVIRONMENTAL FEATURES

Device for providing a plasma

A device for providing a plasma, comprising at least one plasma-generating element with one inlet and one outlet for a gaseous fluid, wherein a first flow channel is arranged in the plasma-generating element, optionally a second flow channel which is arranged concentrically thereto and surrounds the first flow channel at least in sections, is arranged, the first flow channel being fluidically connected to a first connection for a gaseous fluid for forming a heated gas flow and / or a plasma flow, and the inlet of the plasma-generating element being fluidically connected to a conveying element, with which the gaseous fluid can be accelerated.
Owner:THERMAL PROCESSING SOLUTIONS GMBH

Semiconductor process chamber

The invention discloses a semiconductor process chamber, and belongs to the field of semiconductor processing. The semiconductor process chamber comprises a chamber body and a shielding disc used for shielding at least partial area of a wafer, an upper electrode assembly and a lower electrode assembly used for bearing the wafer are arranged in the chamber body, the shielding disc provided with a first air inlet hole is arranged between the upper electrode assembly and the lower electrode assembly, the upper electrode assembly is provided with an air inlet channel, and the lower electrode assembly is provided with a second air inlet hole. At least part of the upper electrode assembly is arranged in a lifting mode so that the distance between the outlet end of the air inlet channel and the inlet end of the first air inlet hole can be adjusted. When the semiconductor process chamber is in a process state, the distance between the outlet end of the air inlet channel and the inlet end of the first air inlet is smaller than a preset value; when the semiconductor process chamber is in a cleaning state, the distance between the outlet end of the air inlet channel and the inlet end of the first air inlet hole is larger than a preset value, so that a plasma circulation gap communicated with the two is formed therebetween. According to the scheme, the interior of the shielding disc can be cleaned, and the cleaning effect on the shielding disc is enhanced.
Owner:BEIJING NAURA MICROELECTRONICS EQUIP CO LTD