42 results about "Plasma channel" patented technology

The invention relates to the field of plasma technology, and discloses a cascade arc plasma generator, which comprises a cathode structure, a cascade structure and an anode structure connected in sequence. When the cascade arc plasma generator is working, a working gas to be ionized enters an ionization chamber through an air inlet channel, a potential difference exists between a plurality of arc starting needles and an anode body, the plurality of arc starting needles all break down the working gas, the working gas is ionized, and plasma is formed, and is ejected to the outside of the cascade arc plasma generator through the ionization chamber, the plasma channel and the anode channel connected in sequence, enters an external device, and interacts with a material sample. The plurality of arc starting needles are parallel to each other and arranged at intervals, and the needle tips are all located in the same plane to form a planar plasma source, which can irradiate a large area of ​​material samples or irradiate a plurality of material samples at one time, and the arrangement of the plurality of arc starting needles can also be changed to be suitable for material samples of different shapes, so as to improve the irradiation efficiency.

The invention discloses an aero-engine fuel nozzle with a dual-mode plasma excitation and ignition structure, and relates to the technical field of aero-engine combustion chambers. Comprising a metal shell serving as a cathode for dielectric barrier discharge; the annular metal piece is located in the metal shell and serves as an anode for dielectric barrier discharge; the nozzle extends into the metal shell, and an auxiliary oil way and a main oil way are arranged on the nozzle; the nozzle is used as an anode for gliding arc discharge ignition; the venturi tube is located in the metal shell and located on the periphery of the nozzle; the venturi tube is used as a cathode of gliding arc discharge ignition, and a plasma channel is formed in the venturi tube and provides a channel for plasma formed by dielectric barrier discharge. Sliding arc discharge and dielectric barrier discharge assist ignition and combustion of fuel oil, active particles generated by the dielectric barrier discharge provide a good chemical and flow field environment for sliding arc ignition in a high-altitude environment, and the ignition success rate and the combustion stability of the sliding arc ignition in the high-altitude environment are greatly improved.

A plasma generation system for generating a multilayer plasma includes a plasma generator that includes an inner electrode, an intermediate electrode surrounding the inner electrode and defining therebetween an inner plasma channel having an inner plasma outlet, and an outer electrode surrounding the intermediate electrode and defining therebetween an outer plasma channel having an outer plasma outlet; a process gas unit configured to provide a first and a second process gas inside the inner and outer plasma channels, respectively; and a power supply unit configured to energize the first process gas into a first plasma that flows along the inner plasma channel and out through the inner plasma outlet as an inner layer of the multilayer plasma, and to energize the second process gas into a second plasma that flows along the outer plasma channel and out through the outer plasma outlet as an outer layer of the multilayer plasma.

A plasma processing device comprises: a reaction chamber body, a plasma channel plate is arranged on the top of the reaction chamber body, and the plasma channel plate comprises: a plasma channel plate body; a channel plate positioning piece surrounding the side of the plasma channel plate body; a conductive and heat conductive ring located between the channel plate positioning piece and the top wall of the reaction chamber body; and a plasma generating unit located above the plasma channel plate body. The plasma processing device can avoid the problem of damage to the plasma channel plate under high temperature conditions and poor grounding of the plasma channel plate.

The present invention provides a method and system for determining the physical properties of arc discharge plasma in transformer oil, relating to the field of data processing technology. The implementation scheme comprises: performing a power-frequency arc discharge on the transformer oil to determine the initial particle concentration of each element when a plasma channel is formed in the transformer oil, and collecting the radiation light from the power-frequency arc discharge; performing spectral analysis on the radiation light, and determining the particle type, heavy particle temperature, electron temperature, and excited-state temperature of the plasma in the transformer oil based on the spectral analysis results; iteratively correcting the initial particle concentration of each element based on the particle type, heavy particle temperature, electron temperature, and excited-state temperature of the plasma in the transformer oil to obtain a target particle concentration for each element; and determining the physical properties of the plasma in the transformer oil based on the target particle concentration for each element. This method can accurately describe the physical properties of the plasma in the transformer oil.

A lightning arresting device comprises a lightning arresting piece capable of leading lightning and a laser generator, the laser generator can generate laser for ionizing air to form a plasma channel, an opening is formed in the lightning arresting piece, and the laser penetrates through the opening in the induction direction and is emitted out of the lightning arresting piece, so that the lightning is led to the lightning arresting piece in the induction direction.

A plasma focus system for aneutronic fusion is disclosed that includes an electrode assembly having an inner electrode extending along a pinch axis from a discharge end to a focus end, and an outer electrode surrounding the inner electrode to define a plasma channel for receiving a process gas containing aneutronic fusion fuel. The system also includes a power supply unit for applying a discharge driving signal to the electrodes, which causes the gas to be ionized into a plasma current sheath at the discharge end that flows along the plasma channel to reach the focus end where the sheath collapses toward the pinch axis to form a plasma pinch. The inner electrode has a tapered tip at the focus end that is configured to increase a speed of the sheath sufficiently to reach a pinch temperature high enough for the fuel to undergo aneutronic fusion reactions within the pinch.

An extraction chamber includes a main channel, a plasma channel, and a plurality of side channels fluidly connecting the main channel to the plasma channel. Each of the plurality of side channels has an average diameter of at most 200 μm at a narrowest cross section, and the extraction chamber has a separation efficiency of at least 95%. A multilevel extraction chamber, includes a main channel, a secondary channel fluidly connected to the main channel, a plasma channel fluidly connected to the secondary channel, a first set of a plurality of side channels fluidly connecting the main channel to the secondary channel, and a second set of a plurality of side channels fluidly connecting the secondary channel to the plasma channel. Each of the first set of side channels has an average diameter that is greater than the average diameter of each of the second set of side channels, and the extraction chamber has a separation efficiency of at least 95%.

A plasma nuclear fusion reactor comprises a reactor, a plasma channel is arranged in the reactor, an inlet of the plasma channel is communicated with an outlet of an electromagnetic acceleration channel of a plasma electromagnetic acceleration device, the inner end of the plasma channel is communicated with a plasma nuclear fusion chamber, and the inner wall of the plasma nuclear fusion chamber is an arc-shaped surface; the plasma electromagnetic acceleration device comprises a machine shell, a positive excitation conductor and a negative excitation conductor are arranged in the machine shell in parallel, the positive excitation conductor is connected with a positive pole of an excitation power supply, the negative excitation conductor is connected with a negative pole of the excitation power supply, and an electromagnetic acceleration channel capable of being vacuumized is arranged between the positive excitation conductor and the negative excitation conductor. The invention aims to provide the plasma nuclear fusion reactor which can rapidly accelerate plasmas, enables the plasmas to move at a high speed and have huge kinetic energy, and further enables the plasmas to enter the plasma nuclear fusion chamber and generate a nuclear fusion reaction.

The application discloses a sustained combustion type plasma nuclear fusion chamber. The chamber comprises a shell, a plasma channel is arranged in the shell, the plasma channel is a tapered pipeline from an inlet end to an outlet end, the inlet of the plasma channel is communicated with the outlet of an electromagnetic acceleration channel of a plasma electromagnetic acceleration device, the inner end of the plasma channel is communicated with a plasma nuclear fusion cavity, the inner wall of the plasma nuclear fusion cavity is an arc surface, a nuclear fusion sustained combustion cavity is arranged on the inner wall of the plasma nuclear fusion cavity, and the nuclear fusion sustained combustion cavity is filled with nuclear fusion fuel. The sustained combustion type plasma nuclear fusion chamber can make plasma enter the plasma nuclear fusion chamber and generate primary nuclear fusion, and the primary nuclear fusion can transmit heat to the nuclear fusion fuel in the nuclear fusion sustained combustion cavity, thereby triggering secondary nuclear fusion.

The utility model relates to vacuum coating equipment technical field especially is concerned about a kind of device of high-frequency oscillation auxiliary magnetron sputtering preparation DLC film, including vacuum sputtering cavity, vacuum system and gas delivery system, the vacuum system and gas delivery system are communicated with the inner chamber of vacuum sputtering cavity respectively, the inside of vacuum sputtering cavity is equipped with magnetron sputtering assembly, high-frequency oscillation auxiliary assembly and substrate turret assembly, plasma channel is formed between the magnetron sputtering assembly and substrate turret assembly, the high-frequency oscillation auxiliary assembly includes oscillation coil and the high-frequency oscillation power supply of oscillation coil electrical connection, the oscillation coil is set to the region corresponding plasma channel in vacuum sputtering cavity inside, the utility model breaks through the ionization limit of traditional magnetic field by introducing high-frequency oscillation field to strengthen the collision excitation of electron and particle, provides feasible path for preparing high-performance DLC film, and its technical research and development and application have important significance to break through industry bottleneck.

A semiconductor processing system is provided. The system may have: a processing chamber defining an interior volume; a foreline in fluid connection with the internal volume and configured to receive process gas from the internal volume, the foreline having a foreline network and a foreline outlet conduit downstream of the foreline network; a throttle valve within the foreline outlet conduit, including a movable gate having an orifice, and configured to control gas flow through the foreline; and a gas injector in the foreline network and configured to direct a buffer gas into a conduit of the foreline network. The system may have a remote plasma source interface fluidly connected to the foreline outlet conduit, downstream of the interior volume, and having a plasma channel configured to direct a remote plasma flow into the foreline outlet conduit.

The invention provides a space propulsion method of a nanosecond-femtosecond composite light filament, which is used for solving the problem of low long-distance laser propulsion efficiency. The method specifically comprises the following steps: forming a kilometer-level length filament through a space filament forming principle of femtosecond laser, stabilizing the power density at 1013-1015W / cm < 2 > magnitude by utilizing a light intensity clamping effect, and realizing dozens of kilometer-level low-loss energy transmission; meanwhile, the transmission direction of the nanosecond laser is adjusted through the optical lens group, the formed nanosecond filament and the femtosecond laser are coaxially transmitted or transmitted at a certain angle and act on the same position, a plasma channel generated by the filament enables the transmission loss of the high-energy nanosecond laser to be greatly reduced, and the energy absorption of the target material to the nanosecond laser is remarkably improved; therefore, the surface of the target material is melted, gasified and even ionized in an extremely short time, a large number of high-speed reverse-spraying plasma plumes are generated, and high specific impulse and thrust are obtained. The method is suitable for various target materials, and precise control over the thrust, the specific impulse and the propelling direction can be achieved by regulating and controlling laser parameters.

A kind of synchronous timing control system for strong laser plasma interaction experiment, including a femtosecond laser device, a square wave signal generator, a jet signal synchronizer, three delay timers, a 12-way signal synchronizer, two shutter controllers, a YAG laser, a jet controller, multiple experimental acquisition instruments including an electron spectrometer, a rear imaging CCD, a spectrometer CCD.The present application is mainly applied to the field of strong laser plasma interaction, which can accurately control the interaction time of femtosecond laser pulse and nanosecond gate plasma channel, and accurately control the start acquisition time and acquisition duration of various experimental data, improve the signal-to-noise ratio, and the whole timing system is very easy to adjust.The present application also has strong expansibility, when ionized gas is not needed to form plasma channel, the 1Hz pulse signal timing of the right half of the dashed line can be removed, so that the interaction time of femtosecond laser pulse and millisecond gate jet gas can be accurately controlled.The expansibility of the present application is also reflected in that enough output ports have been reserved, and suitable functional elements can be connected subsequently.

The invention relates to thermal effect simulation in electrical discharge machining, in particular to a simulation method for a temperature field and a thermal stress field in electrical discharge machining. The method comprises the steps of collecting data through discharge machining experiment parameters, analyzing a single pulse discharge waveform, carrying out material microstructure characterization through a scanning electron microscope and an electron back scattering diffraction technology, establishing a physical model comprising an electrode, a workpiece and a plasma channel, carrying out model simplification, and setting a heat conduction model and a heat source model. Electric and magnetic field boundary conditions and heat conduction and fluid heat transfer conditions of a discharge channel are set, thermodynamic coupling analysis is carried out in ABAQUS software, the distribution condition of a transient heat effect and a stress field in discharge machining is simulated, numerical solution is carried out in combination with experimental data, and therefore the change condition of the temperature of the surface of a workpiece and the change condition of the thermal stress field in the machining process are obtained. Through the method, the distribution of thermal stress can be accurately predicted, and a theoretical basis is provided for optimizing a processing technology and reducing generation of microcracks.

The invention discloses a discharge rock breaking structure for rock mass presplitting joint forming and a using method thereof. The discharging rock breaking structure comprises a discharging assembly, a supporting assembly and a spraying assembly. The discharge assembly comprises two discharge columns with opposite polarities, the opposite sides of the two discharge columns are connected with discharge needles, and the pre-crack is arranged between the two discharge columns; a storage cavity used for storing fluid and supporting particles is formed in the storage bag, and a preset nozzle is formed in the position, opposite to the spray point, of the storage bag. During discharging, a plasma channel is generated in the rock mass between the spray points which are correspondingly arranged, the plasma channel expands to enable the rock mass to be pulled and damaged, and directional cracks are formed between the adjacent drill holes; when the discharging assembly discharges, fluid and supporting particles are continuously injected into the storage bag through the water pump, the fluid and the supporting particles in the storage bag are forced to enter the pre-crack from the preset nozzle, the supporting particles enter the pre-crack, the upper side and the lower side of the pre-crack are supported, and the crack is prevented from being closed due to ground stress.

A beam accelerator system comprises an ion accelerator that generates a high-energy ion beam, a low-pressure chamber, an anode adjacent and fluidly connected to the low-pressure chamber, a plasma window adjacent and fluidly connected to the anode, and a cathode housing block adjacent and fluidly connected to the plasma window. The plasma window comprises a plurality of cooling plates, each cooling plate comprising an aperture that is aligned with an aperture in one or more adjacent cooling plate to form a plasma channel. The cathode housing block comprises a cathode target region and a cooling portion. The cooling portion comprises a fluid inlet, a fluid outlet, a cooling channel fluidly coupling the fluid inlet and the fluid outlet, and an opening adjacent to the plasma window and aligned with a longitudinal axis of the plasma channel.

The present invention provides an arc plasma generator, which relates to the technical field of plasma generators. The arc plasma generator provided by the present invention includes a cathode, an insulating support assembly, an intermediate member, an air inlet member, an insulating member, and an anode; the cathode is connected to the top of the insulating support assembly; the intermediate member, the air inlet member, the insulating member, and the anode are clamped on the insulating support assembly from top to bottom. The intermediate member has a first plasma channel, the cathode penetrates through the top of the insulating support assembly and extends into the first plasma channel, and the anode has a second plasma channel that communicates with the first plasma channel through the air inlet member and the insulating member. The air inlet member is used to distribute the protective gas into the second plasma channel and form a spiral protective gas on the surface of the second plasma channel. The above-mentioned arc plasma generator can increase the arc voltage and reduce the arc current, can confine the plasma jet and improve the characteristics of the plasma in the arc root attachment area, stabilize the arc and inhibit electrode ablation.

The invention provides a physical property determination method and system for arc discharge plasma in transformer oil, and relates to the technical field of data processing. According to the implementation scheme, the method comprises the steps that power frequency arc discharge is conducted on transformer oil to determine the initial particle concentration of all elements when a plasma channel in the transformer oil is formed, and radiation light of power frequency arc discharge is collected; performing spectral analysis on the radiation light, and determining the particle type, the heavy particle temperature, the electron temperature and the excited state temperature in the plasma in the transformer oil based on the spectral analysis result; performing iterative correction on the initial particle concentration of each element based on the particle type, the heavy particle temperature, the electron temperature and the excited state temperature in the plasma in the transformer oil to obtain the target particle concentration of each element; and determining the physical performance of the plasma in the transformer oil based on the target particle concentration of each element. Therefore, the physical performance of the plasma in the transformer oil can be accurately described.

The present invention discloses a plasma atherosclerotic plaque ablation catheter, which belongs to the field of plasma technology. The plasma atherosclerotic plaque ablation catheter comprises: a catheter body, which comprises an expansion balloon; a plasma generator, which is arranged outside the expansion balloon and has a plasma channel, wherein outlets of the plasma channel are all arranged toward the plaque; a material delivery channel, which is connected to the plasma generator and is used to deliver water or plasma-activated hydrogel to the plasma generator; and a microelectrode device, which is arranged in the plasma generator and is connected to a high-voltage power supply via a wire. The microelectrode device ionizes water or plasma-activated hydrogel to generate reactive oxygen species, which flow toward the plaque through the plasma channel. The reactive oxygen species excited by the plasma perform early plaque ablation.

The invention discloses an underwater pulse discharge plasma channel time-varying resistance prediction method based on a PINN, and belongs to the technical field of calculation. The method comprises the following steps: firstly, collecting discharge experiment data under various initial conditions, and performing preprocessing according to model training requirements; and secondly, a PINN neural network is constructed according to the requirement of an underwater pulse discharge actual task, a discharge equivalent loop and the Kirchhoff's law are combined to improve a PINN loss function, and the PINN loss function is made to be suitable for prediction of the plasma channel time-varying resistance. Thirdly, minimizing a loss function, optimizing model parameters, and training a PINN neural network to find optimal parameters; and finally, a corresponding time-varying resistance value can be obtained by inputting underwater pulse discharge time data. According to the method, the physical law and the neural network are combined for predicting the time-varying resistance of the underwater pulse discharge plasma channel for the first time, and the mapping relation of the time-varying resistance can be effectively constructed by combining physical information and the neural network.

This invention discloses an energy control method for high-energy electrohydraulic detonation, belonging to the field of pulse power technology. It includes: control of the electrical and chemical energy of a metal wire, utilizing the high amplitude component of a composite pulse power to rapidly deposit electrical energy into the metal wire and completely release its chemical energy; control of plasma channel deposition energy, adjusting the channel deposition energy and external radiated heat through the long pulse width component of the composite pulse power, enabling the metal powder to react with the liquid medium and release energy; control of metal powder release energy, adjusting the reaction rate between the metal powder and the liquid medium to achieve self-sustaining reaction and improve the energy release efficiency of the metal powder; and control of shock wave energy, adjusting the composite pulse power, metal wire size, and metal powder parameters to improve the conversion efficiency of the deposited energy into shock wave energy, meeting application requirements. This invention achieves precise energy control during electrohydraulic detonation through the matching of multiple stages.

The invention relates to a plasma torch with an electrode holding element (12) having an outer surface and an inner surface opposite the outer surface, which is directed towards a nozzle plate (14) with a plasma channel (30), wherein an opening (34) with a thread is formed on the inside of the electrode holding element (12), into which a ring element (20) with an electrode (22) arranged therein can be screwed, wherein an opening (34) in the electrode holding element (12) is formed concentrically to a centrally arranged opening (32) formed in the ring element (20) such that the ring element (20) can be clamped towards the electrode holding element (12) by means of a locking screw (36). Alternatively, the ring element (20) is self-lockingly fastened in the electrode holding element (12) by the use of a fine thread as an external thread.

The invention relates to a plasma torch (10) for coating surfaces, wherein the plasma torch (10) has a gas / plasma channel for generating a plasma jet (26) directed along a first direction (X). The plasma torch (10) is designed to be operated within a working distance range measured along the first direction (X) from a surface (24) to be coated, such that the plasma jet (26) strikes the surface (24) to be coated in a plasma impact zone (44).The plasma torch (10) has a coating material injector (14) for injecting coating material (28) into the plasma jet (26), wherein the plasma torch (10) is designed, in particular the coating material injector (14) is arranged relative to the gas / plasma channel, such that the coating material (28) is injected along a direction different from the first direction (X) in the plasma jet (26), so that the coating material (28) is melted and entrained by the plasma jet (26), so that a coating material jet (30) is generated which has a velocity component in a first direction (X) parallel to the plasma jet (26) and a velocity component in a second direction (Y) perpendicular to the plasma jet (26).During operation of the plasma torch (10), the coating material jet (30) strikes the surface (24) to be coated in a coating material impact zone (46) offset along the second direction (Y) relative to the plasma impact zone (44) within the working distance range. The plasma torch (10) has a plurality of gas nozzles (16, 18, 20, 22) for generating gas jets (32, 34) for cooling the coated surface (24) and / or cleaning the surface (24) to be coated. The gas nozzles (16, 18, 20, 22) are arranged and / or aligned on the plasma torch (10) such that, during operation of the plasma torch (10) within the working distance range, the gas jets (32, 34) strike the coated and / or to-be-coated surface (24) in gas impact zones (36, 38, 40, 42). hit.At least one first gas nozzle (16) is arranged and / or aligned on the plasma torch (10) relative to the plasma channel (12) in such a way that, during operation of the plasma torch (10), within the working distance range, a first gas impact zone (36), in which a first gas jet generated by means of the first gas nozzle (16) hits the surface (24), is arranged further along the second direction (Y) relative to the plasma impact zone (44) than the coating material impact zone (46).

An extraction chamber includes a main channel, a plasma channel, and a plurality of side channels fluidly connecting the main channel to the plasma channel. Each of the plurality of side channels has an average diameter of at most 200 μm at a narrowest cross section, and the extraction chamber has a separation efficiency of at least 95%. A multilevel extraction chamber, includes a main channel, a secondary channel fluidly connected to the main channel, a plasma channel fluidly connected to the secondary channel, a first set of a plurality of side channels fluidly connecting the main channel to the secondary channel, and a second set of a plurality of side channels fluidly connecting the secondary channel to the plasma channel. Each of the first set of side channels has an average diameter that is greater than the average diameter of each of the second set of side channels, and the extraction chamber has a separation efficiency of at least 95%.

The invention provides a front feeding PEALD coating system, and relates to the technical field of semiconductor equipment. Comprising a process chamber assembly, and a plasma assembly, an air inlet assembly and a vacuum assembly which are connected to the process chamber assembly, and the process chamber assembly at least comprises two process chambers; plasma channels are arranged on the back sides of the two process chambers so as to be connected with the plasma assembly; feeding openings are formed in the front sides of the two process chambers, side sliding door assemblies are arranged at the feeding openings, and the side sliding door assemblies are configured to be capable of closing or opening the two process chambers through transverse movement; a first air passage and a second air passage which are respectively used for communicating the two process cavities are symmetrically formed in the cavity door main body, and the first air passage and the second air passage are communicated to the vacuum assembly so as to exhaust air from the two process cavities at the same time. According to the scheme, the equipment depth volume can be reduced, and the reaction uniformity is improved.

The invention relates to the technical field of novel light sources, and particularly discloses a plasma-metal oxide coupling-based light emitting method, which comprises the following steps of S1, selecting a metal oxide as a light emitting carrier; s2, constructing a discharge device comprising a high-voltage electrode, a grounding electrode, a light-emitting carrier, a direct-current adjustable power supply, a current-limiting resistor and a wire; s3, placing the metal oxide on the surface of a cathode and applying a direct-current voltage to form a plasma channel; and S4, realizing dynamic matching of the plasma excitation intensity and the carrier concentration of the metal oxide based on voltage regulation and control, and obtaining controllable light-emitting output. The method has the beneficial effects that a plasma channel is established on the surface of the metal oxide through direct-current discharge, dynamic regulation and control of a carrier recombination process are realized through voltage regulation under the synergistic effect of high-energy electron bombardment and a heat effect of plasmas, and the luminous efficiency and the light intensity stability are remarkably improved; and a brand new technical direction is provided for the development of high-brightness and low-energy-consumption solid-state light sources.

This disclosure relates to a coating apparatus and a coating system. The coating apparatus includes a cavity, an evaporation unit, and an ionization unit. Both the evaporation unit and the ionization unit are disposed within the cavity. The ionization unit includes a cathode terminal, an anode terminal, and an arc power source, wherein the anode of the arc power source is coupled to the anode terminal, and the cathode of the arc power source is coupled to the cathode terminal. The ionization unit is configured to form a plasma channel between the active surface of the anode terminal and the cathode terminal, the plasma channel passing through the radiation region of the evaporation unit; and the anode terminal includes an anode cover plate configured to expose a portion of the active surface.

The invention discloses an anode surface material etching simulation method based on a plasma discharge channel, and belongs to the field of thermal plasma simulation modeling. The problems that existing material etching simulation depends on a hypothetical heat source, the influence of the transient evolution process of a plasma channel on material etching cannot be fully considered, and the simulation prediction precision is low are solved. By considering multi-physical field coupling and a transient process, high-precision key data of anode surface pressure distribution and heat flux density distribution can be provided, errors caused by a traditional assumed heat source model are overcome, and the corrosion removal process of an anode surface material is accurately simulated. The simulation result not only can accurately reflect the anode surface temperature field distribution, but also can predict the geometric contour, diameter and depth of the anode surface pit in detail. The method is mainly applied to material etching simulation of the plasma discharge channel.

Disclosed is a plasma generating device which includes a reactor body having a gas injection hole on one side thereof, and a collector connected to an opposite side of the reactor body and having a collection space in an interior thereof. The reactor body and the collector provide a reaction space having a plasma channel in an interior thereof.