The present invention belongs to the field of water-jet guided
laser micro-hole
machining. Specifically, provided is a
machining apparatus for a water-jet guided
laser micro-hole with a
high surface quality, the apparatus comprising: a
nanosecond laser device, which is turned on on the basis of a control instruction of a
machining control system and refracts an incident laser into a laser water-jet
coupling head by means of an
optical path transmission unit; a
CCD camera, which is arranged above the
optical path transmission unit, wherein the laser enters a detection
optical path by means of the optical path transmission unit and images on the
CCD camera, so as to detect the position of a laser spot
diameter at a
nozzle of the laser water-jet
coupling head in real time, and to complete the
coupling of the laser and a
water jet; and the laser water-jet coupling head, which is used for coupling the laser, which is focused in the coupling head, and a high-pressure
water flow, which enters a coupling cavity through a
pipe of a water cavity sidewall, at small holes of the
nozzle, so as to perform micro-hole machining on a workpiece. By means of the present invention, interference with a stable jet is reduced, and a micro-hole with a high roundness, a low taper and a good outlet / inlet morphology can be machined, thereby improving the machining efficiency, while also ensuring the precision and quality of micro-hole machining.