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651 results about "Residual compressive stress" patented technology

In a mathematical sense the term compressive residual stress refers to a negative residual stress condition. For example, if the residual stress condition at a particular location within a body has a value of -100 MPa, it is said to be in a state of compressive residual stress.

PMOS transistor with compressive dielectric capping layer

A salicide layer is deposited on the source/drain regions of a PMOS transistor. A dielectric capping layer having residual compressive stress is formed on the salicide layer by depositing a plurality of PECVD dielectric sublayers and plasma-treating each sublayer. Compressive stress from the dielectric capping layer is uniaxially transferred to the PMOS channel through the source-drain regions to create compressive strain in the PMOS channel. To form a compressive dielectric layer, a deposition reactant mixture containing A1 atoms and A2 atoms is provided in a vacuum chamber. Element A2 is more electronegative than element A1, and A1 atoms have a positive oxidation state and A2 atoms have a negative oxidation state when A1 atoms are bonded with A2 atoms. A deposition plasma is generated by applying HF and LF radio-frequency power to the deposition reactant mixture, and a sublayer of compressive dielectric material is deposited. A post-treatment plasma is generated by applying HF and LF radio-frequency power to a post-treatment gas that does not contain at least one of A1 atoms and A2 atoms. Compressive stress in the dielectric sublayer is increased by treating the sublayer in the post-treatment plasma. Processes of depositing a dielectric sublayer and post-treating the sublayer in plasma are repeated until a desired thickness is achieved. The resulting dielectric layer has residual compressive stress.
Owner:NOVELLUS SYSTEMS

Sheet material double face precise forming method and apparatus based on laser blast wave effect

The invention relates to the field of laser processing manufacture, in particular to a laser shock precision forming method and a device. The device comprises a laser, an outer light path system, a laser shock head system A, a flying optical processing system with a laser shock head system B, a test sample system, a detection feedback system, a multi-axis link machine tool and a tool fixture system, a central control processor and a control system. A laser beam emitted by the laser is split by the outer light path system and are respectively transmitted to the front and the rear surfaces of a workpiece to subject the front and the rear surfaces of the double-sided workpiece with an energy absorption layer and a confinement layer to laser-induced shock wave. According to the requirements of the shape and the formation rule of a plate material, the double-sided laser shock head can execute simultaneous and non-simultaneous shock, counter shock, staggered shock, shocks with same and different energy, etc., so that the plate material is formed by generating a certain plastic deformation and a stress field distribution and that a certain residual stress is formed on the surface of the plate material. The method can achieve accurate quantitative formation, good repeatability and high forming efficiency, and can easily achieve automatic production.
Owner:JIANGSU UNIV

Metal part remanufacturing method adopting stress control and 3D printing

The invention discloses a metal part remanufacturing method adopting stress control and 3D printing. The metal part remanufacturing method comprises steps as follows: firstly, a body sample and a cladding sample of a metal part are prepared, and laser parameters required by the same residual compressive stress are acquired through laser shock; secondly, a to-be-repaired metal part is preprocessed, a repairing area and a repairing allowance of the part are determined with an image recognition method; the metal part is subjected to cladding repair layer by layer by the aid of a laser 3D printer, and the size of a repaired part reaches the originally designed size of the part; finally, residual tensile stress is eliminated through the laser shock, and then a residual compressive stress layer is formed on the working surface of the metal part with a laser shock processing method. According to the metal part remanufacturing method, the part repairing is performed by adopting laser 3D printing, the overall deformation of the part is not large, further, the repairing size precision is easy to control, and follow-up processing is not required; the repaired parts acquire equal overall strength, a value of residual compressive stress of a part surface strengthening layer after the laser shock processing keeps balance, and the service life of the remanufactured part is prolonged.
Owner:GUANGDONG UNIV OF TECH

Low-temperature assisted ultrasonic surface rolling intensifying device and processing method

The invention discloses a low-temperature assisted ultrasonic surface rolling intensifying device and a processing method. The device consists of a surface rolling member, a loading member and a heating member, wherein a clamping handle is arranged on the surface rolling member; the loading member is arranged at the tail end of the surface rolling member; a spring, a pressure sensor, a baffle, a transducer and an amplitude-change pole are sequentially arranged on the end face of the loading member; the amplitude-change pole is provided with a rolling head of which the front end is provided with a roller through a guide sleeve; the outer side of the surface rolling member is connected with an ultrasonic generator; and the heating member is provided with a temperature controller and heating wires connected and controlled by the temperature controller According to the processing method disclosed by the invention, an ultrasonic rolling technology and low-temperature heating treatment are combined; on the basis of softening materials by using low temperature heating, an ultrasonic frequency electrical signal is converted into ultrasonic mechanical vibration by using the transducer; and after the ultrasonic mechanical vibration is amplified by the amplitude-change pole, vibration with a certain amplitude is outputted and transmitted to the rolling head, and high-speed vibration between the rolling head and workpieces in the rolling process is realized, thereby better refining material grains on the surface layers of the workpieces, and generating greater residual compressive stress and high surface hardness.
Owner:SOUTH CHINA UNIV OF TECH

Method for prolonging life of pump shells and blades by carrying out laser strengthening micro-cracks

The invention discloses a method for prolonging life of pump shells and blades by carrying out laser strengthening, which relates to the technical fields of machinery manufacturing and laser processing application. The method adequately combines the characteristics of laser cladding with laser shock strengthening, i.e., the method comprises the steps of performing laser cladding repair on micro-cracks at first, and then performing laser shock strengthening treatment on a cladding layer, thus effectively solving the problem that the pump shells and blades are easy to generate internal defects such as cracks and air holes in the laser cladding repair process, and avoiding the problems of welding deformation, large heat influence area, easy generation of heat cracks and the like in a conventional processing method; the method disclosed by the invention is capable of generating a high-amplitude residual compressive stress on the surface of a material, effectively improving the fretting fatigue resistance of the material, comprehensively improving the mechanical properties of the material, and greatly prolonging the fatigue life of the material, thus achieving the purposes of prolonging the life and improving the reliability and safety.
Owner:JIANGSU UNIV

Method and device of shot peening for surface of metal component by means of light-water complex

ActiveCN102925646AImprove impact performanceLarge amplitude of residual compressive stressLaser processingHigh energy
The invention relates to the technical field of laser processing, and discloses a method and a device of shot peening for the surface of a metal component by means of a light-water complex. According to the method and the device of the shot peening for the surface of the metal component by means of the light-water complex, laser beams of high energy density and deionized water with certain pressure are utilized for coupling, and the light-water complex obtained after the coupling is utilized for the shot peening for the surface of the metal component. Through the shot peening with the light-water complex, the problem that shot peening effect is not ideal due to the fact that a water constraining layer is uneven in thickness and high in flexibility is solved, the deionized water with the certain pressure has certain momentum, the constraining effect of the deionized water can be similar to rigid constraint, and therefore the constraining effect is better. At the same time, after the shot peening, the shock pressure of the deionized water and the laser induced shock pressure are superposed, and therefore residual compressive stress amplitude generated on the surface of the material is enabled to be significantly improved, the residual compressive stress field is distributed more evenly, the surface material is high in nanocrystallization, and mechanical properties of the material are effectively improved.
Owner:JIANGSU UNIV
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