Nano-femtosecond dual-laser composite machining system

Abstract

The invention relates to a nano-femtosecond dual-laser composite machining system. The system comprises a femtosecond laser, a nanosecond laser, a synchronous control circuit, an illuminating light source, a semi-transparent semi-reflecting mirror, a first dichroscope, a second dichroscope, a focusing lens and a charge coupled device (CCD) image detector, wherein the synchronous control circuit controls laser pulse output of the femtosecond laser and the nanosecond laser, and accurately adjusts relative time of nanosecond pulse and femtosecond pulse in the aspect of time to synchronize leading edges of the two pulses; the illuminating light source is positioned on one side of the semi-transparent semi-reflecting mirror, and the second dichroscope, the first dichroscope and the focusing lens are coaxially arranged on the other side of the semi-transparent semi-reflecting mirror in turn and are positioned on a straight line together with the illuminating light source; and the CCD image detector is positioned at the tail end of a reflecting light path of the semi-transparent semi-reflecting mirror. Through the system, the advantages of high femtosecond laser machining accuracy and high nanosecond laser machining efficiency are simultaneously integrated, and high-accuracy and high-efficiency micro-nano machining is realized; and the system can be widely applied to the fields such as high-accuracy machining of aviation and aerospace key parts, microstructure machining of a laser fusion ignition target, microstructure machining of a microsensor and the like.

Description

technical field [0001] The invention relates to a nanofemtosecond dual-laser composite processing system, which belongs to the technical field of ultrafast laser and micro-nano processing. Background technique [0002] Miniaturization is a common development trend in the fields of manufacturing, biology, environment, information, and medical devices. Laser is one of the ideal micro / nano manufacturing tools, which has the characteristics of three-dimensional controllability, high precision, flexibility, no contact, no pollution, and strong material adaptability. Laser micro / nano manufacturing is a cutting-edge interdisciplinary field, involving mechanics, optics, physics, chemistry, materials, information, etc., and can be used to manufacture micro / nano scale electromechanical systems, optoelectronic devices, energy devices, sensors, actuators, fluids systems, optical fiber communication systems, biomedical / diagnostic instruments, lab-on-a-chip, etc. It has received extensi...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to overcome the deficiency that the existing micro-nano processing technology cannot take into account the processing accuracy and efficiency at the same time, and provide a nano-femtosecond dual-laser composite processing system, which can simultaneously improve the micro-nano processing accuracy and efficiency

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