The invention provides a piezoelectric micromechanical ultrasonic
transducer, a control method and an array. The piezoelectric micromechanical ultrasonic
transducer (100) comprises: a substrate (101) provided with a back cavity (102); the composite
diaphragm structure is arranged above the back cavity and comprises a piezoelectric film layer (105) used for transmitting and receiving ultrasonic
waves based on the piezoelectric effect; the
phase change tuning layer (110) is mechanically coupled with the piezoelectric thin film layer and is prepared from a nonvolatile material with reversible mechanical properties, the nonvolatile material has at least two
stable phase forms under external excitation, and different phase forms correspond to different mechanical properties; the change of the
mechanical property causes the change of the overall effective rigidity of the composite
diaphragm structure; and the excitation structure (108) is coupled with the
phase change tuning layer and is used for applying external excitation to the
phase change tuning layer so as to drive the nonvolatile material to carry out nonvolatile switching among different phase forms, so that frequency tuning of the piezoelectric micromechanical ultrasonic
transducer is realized.