The invention discloses a metasurface integrated Micro-LED structure with
light beam shaping and light extraction enhancing functions, the structure comprises a Micro-LED
chip and a single-layer metasurface structure directly integrated on the light emitting surface of the Micro-LED
chip, and the metasurface is composed of a plurality of sub-
wavelength nano units arranged in a two-dimensional array. Wherein the sizes and the space periods of the nano units are cooperatively designed according to the light-emitting center
wavelength of the Micro-LED, the distance from a light-emitting layer in the
chip to a light-emitting surface and a preset
deflection angle of a
light beam, so that phase
delay values introduced by the units jointly form a composite two-dimensional phase distribution. According to the phase distribution, firstly, divergent spherical
wavefront is reconstructed into collimated
wavefront by compensating an
optical path difference so as to enhance light extraction, and secondly, a
linear phase gradient is superposed so that an
optical axis of a whole outgoing beam generates a preset
deflection angle. According to the invention, the functions of a complex optical
system are integrated on a chip layer, and the integration of efficient collimation, directional emission and light extraction enhancement of light beams is realized.