419 results about "Common mode noise" patented technology

The invention discloses a miniature piezoelectric driving type detection contact integrated laser module and a contact type calibration method, particularly relates to the technical field of precision measurement, is used for solving the problem of dynamic time-varying interference of high-voltage driving pulses on micro-force signals, and is an interference coupling path synchronous acquisition and dynamic resolving technology based on a distributed electromagnetic probe. Online identification of transient interference energy distribution characteristics is realized; a multi-dimensional parameter fusion mechanism of an interference-response dynamic model quantifies cross-domain characteristics of interference energy, system response and signal noise into a comprehensive suppression coefficient, and reverse compensation waveform injection and adaptive filter dynamic adjustment are performed, so that full life cycle offset of common-mode noise is realized, and damage of residual interference to closed-loop control is avoided; through cross-domain collaborative analysis of laser-mechanical data, a self-healing iteration mechanism of contact type calibration parameters is established, progressive pollution of dynamic interference to a calibration reference is eradicated, and long-term consistency of detection precision under complex working conditions is ensured.

The invention belongs to the technical field of wind power generation equipment state monitoring and intelligent fault diagnosis, and discloses a wind turbine generator blade acoustic fault detection method based on transfer learning, and the method comprises the steps: building a standardized sample through acoustic signal simulation and multi-dimensional data enhancement, and extracting weak fault features through an STFT-Mel frequency spectrum; a dual-scale time-frequency attention module is introduced into the lightweight MobileNetV3, so that the focusing and recognition capability on early crack features is improved; by combining transfer learning with MMD domain difference and entropy minimization regularization, efficient alignment of a simulation domain and actually-measured wind field data is achieved, and the generalization performance of the model under the small sample condition is enhanced; a transverse difference spectrogram and longitudinal historical baseline self-evolution double-flow feature fusion mechanism is adopted, common-mode noise is suppressed, and single-blade positioning, progressive degradation early warning and synchronous aging recognition are achieved. The method is small in parameter quantity, low in calculation overhead and suitable for high-precision and low-cost intelligent detection of early damage of the wind turbine generator blades.

The invention relates to the technical field of gas detection, in particular to a dual-wavelength-based adaptive methane detection method and system, and the method comprises the following steps: collecting environmental interference characteristics of a to-be-detected gas environment in real time; synchronously emitting a first laser beam and a second laser beam to a to-be-detected gas environment according to the tunable laser source; receiving optical signals of the first laser beam and the second laser beam and converting the optical signals into electric signals; calculating a light intensity difference value of the first laser beam and the second laser beam based on the electric signal to generate a differential absorption signal; performing optical differential compensation on the differential absorption signal, outputting a methane concentration value, and performing environmental drift compensation on the methane concentration value based on environmental interference characteristics; and performing real-time threshold value judgment on the methane concentration value, and if the methane concentration value exceeds a preset threshold value, triggering a local early warning signal. According to the invention, the problem that the detection precision is reduced due to the fact that methane absorption signal common-mode noise and absorption coefficient drift cannot be synchronously inhibited due to dust concentration and temperature and humidity interference in a dynamic complex environment under a mine is effectively solved.

The invention discloses a linkage differential measurement system and method suitable for micro thrust calibration. The system comprises a linkage differential measurement rack, a liquid metal radio frequency coaxial cable connector arranged on the rack, and a mass center precise regulation and control device arranged on the rack. The linkage differential measurement system provides micro-Newton-level micro thrust except environment common-mode noise; the method comprises the following steps: a torsional pendulum inclination angle control module controls a torsional pendulum inclination angle # imgabs0 #; the centroid position deviation calculation module is used for calculating centroid position deviation; judging whether the offset s of the current centroid position is less than 10 [mu] m or not; the mass center position adjusting module is used for adjusting the mass center position; the gravitational wave micro-thrust calibration torsional pendulum solves the problems that the gravitational wave thruster needs to calibrate thrust noise besides calibrating thrust, high rigidity of a coaxial cable can generate interference on motion of the gravitational wave micro-thrust calibration torsional pendulum, and the gravitational wave micro-thrust calibration torsional pendulum has extremely high requirements on sensing precision of mass center regulation and control.

The invention provides a preparation method of an HDMI (High Definition Multimedia Interface) high-performance common-mode suppressor made of a nanocrystalline material, relates to the technical field of electronic component preparation, and aims to meet the harsh requirement of HDMI high-frequency high-speed signals on common-mode noise suppression, the method comprises the following steps: constructing a multi-layer heterogeneous magnetic film with a gradient interface on a microstructured substrate by utilizing multi-target magnetron sputtering; a selective energy field assisted annealing technology is adopted to realize precise nanocrystallization and magnetic anisotropy regulation and control of the magnetic film; and a high-precision three-dimensional coil structure is integrated by combining a micromachining process. The prepared common-mode suppressor is small in size and high in integration level, shows excellent common-mode suppression efficiency, wide working bandwidth and excellent signal integrity in a high-frequency band, has high reliability, and is suitable for a new generation of HDMI (High-Definition Multimedia Interface).

The invention relates to a high-voltage level shift circuit and a layout structure thereof, and the high-voltage level shift circuit comprises a pulse generation module which is used for receiving an input signal and generating a double-path low-voltage domain narrow pulse signal; the level shift module is used for receiving the low-voltage domain narrow pulse signal and converting the low-voltage domain narrow pulse signal into a corresponding double-path high-voltage domain narrow pulse signal; the voltage transient noise detection module is used for detecting voltage transient noise and generating a transient noise intensity signal; the voltage transient noise filtering module is used for filtering voltage transient noise based on the received transient noise intensity signal to generate a double-path high-voltage domain filtering signal; and the RS trigger is used for converting the received high-voltage domain filtering signal into a high-side power device driving signal. The common-mode noise filtering capability and the VS negative bias resisting capability of the voltage transient noise filtering module can be enhanced, the transmission delay of a chip is effectively reduced, and the width of a narrow pulse signal is free of loss in the transmission process, so that the dynamic power consumption is reduced.

The invention discloses a method for suppressing common-mode noise of a CPT magnetometer, which can remarkably improve the performance of the CPT magnetometer by introducing a differential detection technology and an adaptive signal processing method. A beam of coherent laser is configured, two beams of light generated by a spectroscope respectively pass through different paths, one beam of light passes through an atomic gas chamber, the other beam of light does not pass through the atomic gas chamber, and a high-sensitivity photoelectric detector is used for collecting signals. A differential signal of two signals is generated by using a differential amplifier, so that the influence of common-mode noise is effectively eliminated. Then, the differential signal is subjected to adaptive filtering through a digital signal processor, and the signal quality is further improved. Experiments show that the method can significantly improve the measurement precision and stability of the CPT magnetometer, and has a wide application prospect.

The invention discloses a pipeline leakage monitor based on optical fiber interference and a monitoring method thereof, and belongs to the technical field of pipe network leakage monitoring. According to the invention, through the cooperation of the differential deformation of the outer cylinder and the inner cylinder and the air cavity, the two paths of sensing optical fibers are driven to generate reverse and equal-length length strain, and the improvement of the sensitivity of pipeline micro leakage sound pressure signal-optical phase signal conversion and the suppression of environmental common-mode noise are realized; a sound pressure signal generated in the leakage process of a pipeline is converted into phase change of light through a balanced optical fiber interferometer, a leakage signal is demodulated through a phase detection technology, and high-precision pickup of the tiny leakage sound pressure signal of the pipeline is achieved; the sound velocity is calibrated in real time through the temperature sensor and the sound velocity compensation module, and microsecond-level wireless signal time service is combined, so that the technical effects of large positioning error and difficulty in multi-device synchronous sampling caused by temperature drift of the sound velocity along with a transmission medium are solved.

The invention discloses an active pen and touch screen interaction system resistant to common-mode interference and a signal demodulation method. The system comprises a signal receiving terminal and a signal transmitting terminal. The signal transmitting terminal modulates data to be transmitted by adopting a differential binary phase shift keying modulation method, and transmits a generated modulation signal to the signal receiving terminal; the analog front-end receiving module is coupled with the signal transmitting terminal, receives the modulation signal and outputs a digital square wave signal after fidelity extraction processing; and the digital demodulation processing module performs differential coherent digital demodulation on the digital square wave signal based on the prior characteristics of the modulation signal, inhibits residual noise and recovers data to be sent. The analog front end focuses strong common-mode noise suppression and analog filtering, the digital demodulation algorithm performs secondary digital purification by using signal time sequence characteristics, and the two constructs an efficient anti-interference pipeline. Meanwhile, the regular square wave signals can be directly processed through differential coherent demodulation, and the requirements for performance and power consumption of a rear-end processor are lowered.

The invention discloses a multi-level pulse compensation type active EMI (Electro-Magnetic Interference) filter suitable for a multi-noise source switching power supply and a control method of the multi-level pulse compensation type active EMI filter. The invention provides a multi-level pulse compensation scheme based on switch behavior modeling, aiming at the problem of common-mode noise of adjacent rising edges and falling edges generated by a high-frequency switch in a multi-noise-source switching power supply. The time sequence delay and the edge slope of the compensation signal are calculated by analyzing the dv / dt characteristics in the switching-on and switching-off processes of the switching device, and accurate matching and offset with a noise source in phase and amplitude are achieved. Compensation control logic is realized by sharing a main control chip with a power circuit, and an additional controller and a high-precision sampling system are not needed; the self-adaptive tracking of the compensation amplitude is realized through the voltage following circuit; a multi-level compensation signal is output through the totem-pole circuit and injected into a common-mode path, and effective suppression of electromagnetic interference is achieved. The converter has the advantages of small size, low cost, simplicity and convenience in installation, high stability and the like, and is suitable for various multi-noise-source power electronic systems including a dual-active bridge converter, a phase-shifted full-bridge converter and an interleaving Buck converter.

The invention relates to a method and circuit for analyzing and reconstructing current type digital active EMI filtering based on a switching frequency spectrum, and the method comprises the steps: obtaining initial common-mode noise data and initial differential-mode noise data of a Buck circuit at a switching frequency point; constructing a common-mode equivalent circuit and a differential-mode equivalent circuit comprising a noise source, a compensation voltage source, a compensation capacitor, a parasitic capacitor and LISN impedance, and calculating initial compensation voltage common-mode data and initial compensation voltage differential-mode data of each frequency point to obtain initial compensation voltage data; synchronously outputting the initial compensation voltage data through a DAC (Digital-to-Analog Converter), and performing initial noise compensation; and measuring noise voltage on the LISN as noise source voltage, calculating to obtain secondary compensation voltage data, and carrying out superposition iteration on the compensation voltage data. The method is suitable for a scene with common-mode noise as a main part, can realize common-mode and differential-mode composite suppression without detection and size reduction, and continuously optimizes an EMI suppression effect through iterative updating.

The invention relates to a digital active EMI filtering method and circuit based on square wave analysis and reconstruction, and the method comprises the steps: obtaining common-mode noise source waveform data of a Buck circuit; determining compensation capacitance parameters according to a compensation circuit equivalent model, and generating compensation voltage data reduced by the common-mode noise source waveform data in an equal ratio; synchronously outputting PWM and the compensation voltage data through a synchronous control mechanism, and injecting the PWM and the compensation voltage data into a ground wire; and measuring the time delay between the PWM output signal and the DAC output signal, and reconstructing the compensation voltage data to carry out time delay compensation. By adopting the digital active EMI filtering method and circuit based on square wave analysis and reconstruction provided by the invention, time delay can be eliminated and common-mode EMI noise can be reduced while no detection is realized, the cost is reduced and the size is reduced.

The invention discloses a narrow-linewidth double-frequency laser generation method, and belongs to the technical field of microwave photons. Two paths of optical signals generated by two semiconductor lasers with different wavelengths are injected into the same optical microcavity, the two paths of optical signals enter a self-injection locking state in different modes of the optical microcavity, and the optical microcavity can output narrow-linewidth double-frequency laser. The invention further discloses a narrow-linewidth double-frequency laser generating device and a photo-production microwave method and device. Two double-frequency lasers with different frequencies are locked on one optical microcavity through an original double-self-injection locking technology, the problem of phase noise of a double-frequency light source is effectively solved while the linewidth of the input laser is narrowed, common-mode noise caused by mode difference of the two lasers in a locking state is eliminated, and the dual-frequency light source has the advantages of being simple in structure and convenient to operate. And the traditional servo locking technology is not needed, so that the complexity of the system is simplified.

The invention discloses a self-locking noise suppression level shift circuit with ultra-low delay, relates to the technical field of intelligent power driving, and aims to solve the problem that delay is increased when noise is filtered out through an RC filter circuit in the prior art. Comprising a high-voltage level shifting circuit, a common-mode noise elimination circuit, a differential-mode noise elimination circuit and an RS latch which are electrically connected, the common-mode noise elimination circuit is used for transmitting 1 / 2VDD voltage to the input end of the RS latch when common-mode noise exists, relatively low threshold voltage of the RS latch is designed, the 1 / 2VDD voltage is made to be high level for the RS latch, and therefore the 1 / 2VDD voltage is made to be low level for the RS latch. The state of the RS latch is kept unchanged, the differential mode noise elimination circuit is used for starting the differential mode noise elimination circuit through resistor voltage division when differential mode noise exists, and the input end of the RS latch is kept at a high level. The self-locking noise suppression level shift circuit provided by the invention is used for eliminating common-mode noise and differential-mode noise of dV / dt noise and has lower delay.

According to the current compensation-based level shift circuit provided by the invention, one path of low-voltage pulse signal is accessed through the first level input end and the second level output end respectively, so that the two paths of low-voltage pulse signals are converted into two paths of high-voltage pulse signals; the signals are output to the current compensation circuit and the common-mode noise elimination circuit through the first level output end and the second level output end, and the output of the current compensation circuit and the output of the common-mode noise elimination circuit jointly influence the signal states of the R end and the S end in the latch. And the latch is used for restoring the high-voltage pulse signal into a floating square wave signal with the same phase as the input signal. The level shift circuit not only can resist high common-mode noise, but also has a good inhibition effect on differential-mode noise, and the stability and reliability of the level shift circuit are effectively improved.

The invention relates to the technical field of amplifiers, and discloses an analog-to-digital converter combination instrument amplifier which comprises a first-stage amplifier, the first-stage amplifier is in signal connection with a second-stage amplifier, the second-stage amplifier is in signal connection with a front-end low-pass filter (LPF), the front-end low-pass filter (LPF) is in signal connection with an analog-to-digital converter (ADC), and the analog-to-digital converter (ADC) is in signal connection with the analog-to-digital converter. And an unbalanced input-to-balanced differential circuit output module is arranged between the second-stage amplifier signal and a front-end low-pass filter (LPF). From the perspective of signal processing and conversion, a precise signal transition bridge is constructed by adding an unbalanced input-to-balanced differential circuit output module, unbalanced signals output by a second-stage amplifier are converted into double-end balanced differential signals, common-mode noise interference is effectively resisted through a differential transmission mode, the signal purity is guaranteed, and the signal quality is improved. The front-end low-pass filter and the analog-to-digital converter are adaptive to differential signals, so that the signal transmission is stable and anti-interference, and the analog-to-digital conversion is more accurate.

An active compensation device including a first element group including an integrated sensing / compensation unit configured to generate a sensing signal corresponding to at least one of common-mode noise and differential-mode noise on at least two high-current paths, and a second element group including a compensation control unit including a negative impedance converter and configured to generate a compensation signal corresponding to the sensing signal and provide the compensation signal to the integrated sensing / compensation unit. The compensation control unit further including a stabilization unit configured to prevent oscillation caused by the sensed noise. The first element group and the second element group are mounted on a single substrate.

An integrated circuit device includes a multiplexor and multiple receivers for high-speed data communication interfaces. The multiplexor includes multiple signal inputs, a selector input, and a signal output. Each receiver includes a differential data signal input including a positive signal input and a negative signal input, a first termination resistor to terminate the positive signal input to a reference voltage node, a second termination resistor to terminate the negative signal input to the reference voltage node, and a noise measurement node to detect common mode noise at the reference voltage node, the noise measurement node coupled to an associated one of the signal inputs.

The invention relates to a high-precision accelerometer signal pseudo-differential digital conversion circuit and a working method. The circuit comprises an I-V conversion circuit, a pseudo-differential amplification circuit and an AD conversion circuit. The I-V conversion circuit is used for converting a current signal output by an accelerometer into a voltage signal, filtering high-frequency interference and realizing impedance matching with the pseudo-differential amplification circuit so as to reduce signal distortion; the pseudo-differential amplification circuit is used for differentiating the ground and an input signal so as to reduce the influence of common-mode interference on the detection precision of the circuit, and adjusting the amplitude of an input voltage signal at the same time; and the AD conversion circuit is used for performing high-precision digital conversion on the input pseudo-differential voltage signal. According to the invention, I-V conversion with high common-mode noise suppression is realized, and high-precision voltage signal digital conversion is also realized.

The invention relates to a multi-absorption-band ultra-wideband common-mode filter based on a mixed resonator structure. The multi-absorption-band ultra-wideband common-mode filter comprises a coupling microstrip line, a dielectric substrate, a main resonator, an auxiliary resonator and a resistor, the filter has an upper surface and a lower surface, and a coupling microstrip line comprises a metal conduction band located on a dielectric substrate and a metal ground layer located below the dielectric substrate; two ends of the coupling microstrip line are respectively connected with the input port and the output port; the main resonator is etched in the middle of the metal ground layer; the auxiliary resonator is etched on the outer side of the main resonator in the metal ground layer; the coupling microstrip line is mutually coupled with the main resonator and the auxiliary resonator to realize mixed resonance; the resistor crosses the gap of the auxiliary resonator at the intersection of the auxiliary resonator and the symmetric line, and the two ends of the resistor are connected with the metal ground layers inside and outside the metal conduction band; according to the invention, the ultra-wideband common-mode suppression bandwidth and a plurality of absorption bands are provided, and the absorption bands dissipate common-mode noise in the form of heat energy, so that the problem of potential common-mode electromagnetic interference in the system is reduced, and normal transmission of differential-mode signals is not damaged at the same time.

The invention relates to the technical field of aero-engine state monitoring, and discloses an aero-engine blade tip gap measuring probe and system based on an eddy current method.The aero-engine blade tip gap measuring probe adopts a coplanar Archimedes spiral double-coil array, and in the measuring process, the blade tip gap can be measured by applying anti-phase excitation; the common-mode noise suppression in the blade tip clearance measurement process is realized by combining a differential amplification circuit; signal extraction and temperature drift compensation are realized through a phase-locked amplification technology and an impedance-resistance orthogonal decoupling architecture, and finally micron-order gap analysis is realized. The aero-engine blade tip clearance measurement system provided by the invention can still keep excellent reliability under extreme working conditions of high temperature, high rotating speed and the like of a turbine, and meanwhile, the measurement precision of the blade tip clearance can be remarkably improved.

The present invention relates to the field of power integrated circuits, and disclosed is a level shift circuit for improving the anti-noise capability of a high-voltage gate driver chip. When a high-voltage domain power rail rises rapidly, a feedback control module detects that common-mode noise is present in a signal transmission path, and outputs a feedback signal to control the load impedance of a level shift branch to be reduced, thereby reducing the amplitude and time of impact of the noise, and filtering out residual noise by a rear-stage filter circuit can ensure that the noise would not cause logic function disorder of a high-voltage domain circuit. Moreover, the time of impact of the noise can be greatly shortened due to the action of a dynamic load structure and the feedback control module, and the noise can be thoroughly filtered out by the rear-stage filter circuit. Therefore, the allowed minimum pulse width of an input signal can be effectively reduced, and a signal transmission delay can be greatly reduced.

The invention discloses an electromagnetic interference suppression circuit and method and a power adapter, and belongs to the technical field of power adapters, the electromagnetic interference suppression circuit comprises a common mode inductor, a first end of the common mode inductor is connected to a live wire input end of the power adapter, a second end of the common mode inductor is connected to a null line input end of the power adapter, and the common mode inductor is used for generating magnetic flux; common-mode noise of the live line input end and the zero line input end of the power adapter is suppressed; the differential mode filter is connected with the common mode inductor in parallel and is used for suppressing differential mode noise between the live wire and the zero wire; and the first end of the grounding resistor is connected with the zero line input end of the power adapter, the second end of the grounding resistor is grounded, and the grounding resistor is used for providing a low-impedance path and guiding an electromagnetic interference signal passing through the input end of the power adapter to the ground. Through the combined action of the common mode inductor, the differential mode filter and the grounding resistor, the electromagnetic compatibility of the power adapter can be effectively improved, and the electromagnetic interference is reduced.

Circuits, devices, and systems incorporating a low-voltage common-mode transient immunity (CMTI) test. The CMTI test of this disclosure may be used in a variety of applications, such as a data transmission circuit configured to communicate across galvanic isolation. A differential circuit may include two signal paths. For robust common-mode transient rejection, the first signal path should be the same as the second signal path. Differences in resistance, inductance, and capacitance between the two signal paths may result in common-mode noise being measured at the output terminals as a differential signal. Devices according to the techniques of this disclosure are configured to include a test mode to perform a low-voltage test that outputs a measurement of the CMTI at any stage of production or field deployment.

A noise reduction circuit includes: noise canceler circuitry configured to inject a compensation current into a power line and ground to reduce a common mode noise current that flows through the power line and the ground into a commercial power supply from a power converter with a switching element connected to the commercial power supply; and overcurrent inhibitor circuitry provided on a compensation current path through which the compensation current flows, the overcurrent inhibitor circuitry being configured to inhibit application of an overcurrent to the noise canceler circuitry.

Circuits, devices and systems that include a low voltage test for common mode transient immunity (CMTI). The CMTI test of this disclosure may be used in a variety of applications, such as a data transmission circuit configured to communicate across galvanic isolation. A differential circuit may include two signal paths. For robust common mode transient rejection, the first signal path should be the same as the second signal path. Differences in the resistance, inductance, and capacitance between the two signal paths may result in common mode noise being measured as a differential signal at the output terminals. Devices according to the techniques of this disclosure are configured to enter a test mode to conduct a low voltage test that outputs a measurement of CMTI at any phase of production or field use.

A planar multilayer transformer in a power converter wherein winding arrangements and placement of shields reduces common mode noise to a level wherein the common mode inductor in an input EMI filter can be reduced and even eliminated decreasing the power dissipation and increasing the power density. The methods presented herein can reduce the number of layers in the multilayer PCB by eliminating the layers used for the shields and still be in full compliance with EMI requirements.

The invention relates to a successive approximation register type analog-to-digital conversion system for a brain-computer interface, which is characterized in that a P-end input and an N-end input are respectively connected with two bootstrap sampling switch modules to form a differential signal acquisition channel, and the two bootstrap sampling switch modules are symmetrically designed to suppress common-mode noise; the two bootstrap sampling switch modules are respectively connected to the two segmented CDAC array modules, the segmented CDAC array modules are divided into a high-segment capacitor bank and a low-segment capacitor bank, and the high-segment capacitor bank and the low-segment capacitor bank are connected through a bridging capacitor; the output end of the segmented CDAC array module is connected to the differential input end of the dynamic comparator module, and a comparison result is output to the SAR logic module; the SAR logic module is based on event-driven dynamic logic control, outputs 12-bit digital codes, feeds back control signals to the segmented CDAC array module at the same time, and adjusts a capacitor switching strategy. Compared with the prior art, the invention has the advantages of high precision, low energy consumption, miniaturization and the like.

The invention provides an epitaxial growth control method and device, computer equipment and a storage medium. The epitaxial growth control method comprises the following steps: irradiating a wafer to be measured and the surface of a reference irradiation surface by adopting a super-continuum spectrum laser light source to obtain a reflected light signal; synchronously scanning and filtering the reflected light signal to output two paths of narrow-band light; the two paths of narrow-band light are converted into electric signals and then differential operation is carried out, and the reflectivity of the wafer to be measured is calculated according to a differential result; and determining growth parameters of the epitaxial layer based on the reflectivity, and adjusting process parameters of the reaction cavity according to the growth parameters so as to control epitaxial growth of the wafer to be tested. According to the super-continuum spectrum laser light source, multiple characteristic wavelengths can be scanned in one process step, synchronous monitoring of multiple growth parameters is achieved, and the monitoring requirement of a complex epitaxial structure is met; in addition, common-mode noise in the measurement process is eliminated in real time through the double-beam differential measurement technology, the signal-to-noise ratio is greatly increased, the measurement precision is improved, and accurate control over epitaxial growth is achieved.

A common mode noise filter (1) according to an embodiment comprises: a first conductor part (3); a second conductor part (4); a first barrier layer (5) electrically insulated from the first conductor part (3); and a second barrier layer (6) electrically insulated from the second conductor part (4). The first conductor part (3) has a first spiral conductor (31) and a first lead-out conductor (32). The second conductor part (4) has a second spiral conductor (41) and a second lead-out conductor (42). The first barrier layer (5) is provided at a position at which the first lead-out conductor (32) and the outermost periphery (315) of the first spiral conductor (31) overlap when viewed in the vertical direction. The second barrier layer (6) is provided at a position at which the second lead-out conductor (42) and the outermost periphery (415) of the second spiral conductor (41) overlap when viewed in the vertical direction.