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221 results about "Reference wave" patented technology

Digital feedback dynamic adjustment method and system for neutron generator control signal

The invention relates to the technical field of data processing, and discloses a digital feedback dynamic adjustment method and system for a neutron generator control signal, and the method comprises the steps: calling a reconfigurable waveform parameter set corresponding to a target neutron from a mapping relation according to the yield and beam spot characteristic demands of the target neutron; generating a basic high-frequency pulse sequence of the neutron tube, and performing pre-distortion filtering on the basic high-frequency pulse sequence to obtain a high-frequency pulse sequence of the neutron tube; collecting an anode current and a target voltage signal of the neutron tube applied with the high-frequency pulse sequence during operation, and converting the anode current and the target voltage signal into a digital feedback current; comparing the digital feedback flow with a reference waveform in the reconfigurable waveform parameter set in real time to obtain an error correction amount of the high-frequency pulse sequence; dynamically adjusting the high-frequency pulse sequence according to the error correction; applying the dynamically adjusted high-frequency pulse sequence to a corresponding electrode in a neutron tube through power; the neutron tube control signal processing efficiency can be improved.
Owner:XIAN AOHUA ELECTRONICS INSTR

Isolation switch performance monitoring system

The invention provides an isolating switch performance monitoring system, which comprises a data acquisition module which at least comprises a current sensor and a signal conditioning circuit and is used for acquiring action current signals of a driving motor in an isolating switch in real time; the data processing module is used for performing filtering, noise reduction and time domain and frequency domain feature extraction on the received action current signal of the driving motor and establishing a corresponding waveform database according to the extracted features, and the waveform database at least comprises a normal waveform database and an abnormal waveform database; and the state evaluation module is used for comparing the real-time waveform with the reference waveform in the waveform database through a preset algorithm, identifying abnormal feature points existing in the real-time waveform and generating a corresponding performance evaluation result. Precise evaluation of the performance of the isolating switch is realized based on the current waveform of the driving motor.
Owner:SHENZHEN POWER SUPPLY BUREAU

VCSEL epitaxial wafer stress distribution monitoring method and system

The invention relates to the technical field of stress testing, in particular to a VCSEL epitaxial wafer stress distribution monitoring method and system. The method comprises the following steps: acquiring a PL spectrum of each measurement point and a peak wavelength of the PL spectrum, and decomposing the PL spectrum into polarization components along a first crystal orientation and a second crystal orientation; obtaining the initial polarization orthogonality of the measurement point based on the peak intensity of the polarization component; obtaining a reference wavelength of the VCSEL epitaxial wafer, and calculating a thermally induced wavelength drift factor of a measurement point; based on the thermally induced wavelength drift factor and a set maximum saturation value, thermally induced polarization artifacts of the measurement points are calculated, the thermally induced polarization artifacts are in positive correlation with the thermally induced wavelength drift factor, and the maximum saturation value is taken as an upper limit; subtracting the thermally induced polarization artifact from the initial polarization orthogonality to obtain a pure stress index; the pure stress indexes are mapped to the corresponding coordinates, the stress distribution diagram of the VCSEL epitaxial wafer is obtained, and the accuracy of the stress distribution monitoring result of the VCSEL epitaxial wafer is effectively improved.
Owner:WAFERCHINA CO LTD

Measuring arrangement for the interferometric determination of the surface shape of a test specimen, as well as a method for manufacturing an optical element for such a measuring arrangement

The invention relates to a measuring arrangement for the interferometric determination of the surface shape of a test object, wherein a test wave generated from electromagnetic radiation and reflected at the test object can be superimposed with a reference wave not reflected at the test object, with a reference element (110, 210, 310, 410) having a reference surface (112, 212, 312, 412) which, in the optical beam path, splits off the reference wave from the test wave before it strikes the test object (120, 220, 320, 420) by reflection, and at least one beam shaping surface (111, 211, 311, 411, 413, 414) located in the optical beam path in front of the reference surface, wherein this beam shaping surface is designed as an aspherical distortion correction surface such that a distortion occurring in a predetermined reference plane of the measuring arrangement is reduced. The invention further relates to a method for manufacturing an optical element for such a measuring arrangement.
Owner:CARL ZEISS SMT GMBH

Semiconductor driving device and power conversion device

A semiconductor driving device according to the present disclosure includes: a timing generation unit which generates gate ON reference signals respectively for a plurality of gate terminals; a gate reference waveform generation unit which generates a first gate reference waveform and a second gate reference waveform on the basis of the gate ON reference signals, and controls the first gate reference waveform and the second gate reference waveform in shifting from a non-conductive state to a conductive state of a multi-gate semiconductor switching element and shifting from a conductive state to a non-conductive state of the multi-gate semiconductor switching element; and a signal amplification unit which receives, as an input waveform, the first gate reference waveform and the second gate reference waveform, and amplifies the input waveform so that an output waveform follows the input waveform.
Owner:MITSUBISHI ELECTRIC CORP

Dynamic time curling-based conventional DC line single-ended protection method and system

The invention discloses a conventional direct current line single-ended protection method and system based on dynamic time curling, and the method comprises the steps: 1, obtaining the positive and negative electrode voltages of a direct current transmission line, calculating the line mode voltage and the wavelet transformation modulus maximum value of the line mode voltage, and entering a step 2 when the maximum value meets a protection starting criterion; step 2, calculating the maximum value of the absolute value of the voltage change rate of the positive and negative voltage fault components in a preset time window, if the absolute value is greater than a short-distance fault auxiliary criterion threshold, entering step 5, otherwise, entering step 3; 3, calculating a line mode voltage fault component time sequence; 4, calculating a dynamic time curl distance characteristic quantity between the normalized line mode voltage fault component time sequence and the reference waveform time sequence, when the dynamic time curl distance characteristic quantity is smaller than or equal to a fault section identification judgment threshold value, entering the step 5, and otherwise, returning to the step 1; and 5, judging a fault type and a line, and determining a restart control scheme. According to the invention, the problem that the traveling wave protection far-end high-resistance fault is easy to reject operation is solved.
Owner:STATE GRID HENAN ELECTRIC POWER ELECTRIC POWER SCI RES INST

Interferometric test setup for testing the surface shape of a test object

PendingDE102024208940A1Using optical meansInterferomeReference wave
The invention relates to an interferometric testing arrangement for testing the surface shape of a test object, comprising a lighting device (105, 205, 305) for generating an input wave from electromagnetic radiation produced by a light source and an interferometer (150) in which, after splitting the input wave into at least one test wave directed towards the test object (170) and a reference wave, testing the surface shape of at least a partial surface of the test object (170) can be carried out by interferometric superposition of the at least one test wave and the reference wave, wherein a diffuser (130, 230, 330) is arranged in the lighting device, wherein the lighting device has a first optical path (110, 210, 310) and a separate second optical path (120, 220, 320), and wherein the input wave is transmitted via both the first optical path (110, 210, 310) and the second optical path (120, 220, 320). 220,320) can be coupled into the interferometer (150).
Owner:CARL ZEISS SMT GMBH

Antenna and method for generating orbital angular momentum beam

The invention provides an antenna and a method for generating an orbital angular momentum beam. The antenna adopts a holographic metasurface antenna integrating a monopole feed source and a metasurface unit network, and the monopole feed source is a coaxial feed monopole located in the center of a lower metal plate and is used for generating reference waves. Vortex beams propagating in the normal direction of an antenna serve as target waves, a hologram function is calculated in combination with reference waves, and then surface phase distribution is obtained. And modulating a gap state of the metasurface unit network by using the phase distribution to provide required phase compensation, so that the modulated unit interacts with a reference wave, and finally generating an orbital angular momentum wave beam in a specified mode. The monopole feed source and the metasurface are integrated through the holographic principle, a complex feed network and an external emission source are omitted, the antenna has the advantages of being simple in structure, low in profile, easy to miniaturize and integrate and the like, and the problems that in the prior art, occupied space is large, and design is complex are effectively solved.
Owner:TIANJIN UNIV OF TECH & EDUCATION (TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE)

Holographic antenna and control method of beam thereof, storage medium and electronic device

The present disclosure provides a holographic antenna, a beam control method thereof, a storage medium and an electronic device, and belongs to the technical field of antennas. The present disclosure can solve the problem that the existing antenna structure is complex and the polarization direction is not variable. The holographic antenna comprises a dielectric substrate, a radiation layer and a plurality of switch units. The radiation layer is provided with a plurality of slit openings. The switch units are arranged correspondingly to the slit openings. The holographic antenna further comprises an acquisition unit configured to acquire a target wave and a polarity of the target wave; a construction unit configured to construct a reference wave based on the polarity of the target wave; a calculation unit configured to calculate an interference wave based on the reference wave and the target wave; a sampling unit configured to obtain an excitation sampling value of each slit opening; and a control unit configured to control the switch units to control the switching state of the slit openings. The present disclosure can realize dynamic reconfiguration of different polarizations by using the holographic principle combined with a slot antenna.
Owner:BOE TECHNOLOGY GROUP CO LTD +1

Signal acquisition and antenna system aiming

PCT designated stageWO2026174572A1Software engineeringReference wave
An antenna system includes: a first antenna configured to beam steer electronically to first beams each with a beamwidth that is larger than a reference beamwidth; a second antenna configured to implement a second beam with a beamwidth that is smaller than the reference beamwidth; a gimbal; a gimbal driver; and a controller configured to: cause the first antenna to beam steer electronically to the first beams for a first mode of the antenna system; determine a preferred beam, of the first beams, based on a signal received by the first antenna via the preferred beam; and cause the gimbal driver to move the gimbal to mechanically steer the second antenna to at least one direction corresponding to the preferred beam for a second mode of the antenna system.
Owner:QUALCOMM INC +5

Coherent waveform design and efficient accumulation method for extended target phase cancellation

The invention provides an extended target phase offset coherent waveform design and efficient accumulation method. The method comprises the following steps: acquiring a pulse signal of a JFPA waveform received by a target, returning echo signals of a plurality of extended targets, and searching a target coarse velocity by using a minimum envelope entropy, constructing a matching function to perform motion compensation on the echo signal to obtain a two-dimensional time domain signal; taking the jitter initial phase of the echo signal corresponding to the reference waveform as a matched filter, and compensating the jitter initial phase of the echo signal corresponding to the coherent accumulation waveform; and designing the echo signal after initial compensation as a coherent echo signal, and performing Fourier transform on the coherent echo signal along slow time to obtain a coherent accumulation result of the target. According to the method, accurate initial phase jitter compensation is completed without target distance information, the method is suitable for an extended target, and after the echo signal of the JFPA waveform is subjected to initial phase jitter compensation, the phase is controlled to be uniform, so that the complexity of FFT coherent processing can be reduced.
Owner:XIDIAN UNIV

Synchrotron multi-harmonic bunch trajectory reconstruction method and system

The application provides a synchronous accelerator multi-harmonic beam trajectory reconstruction method and system, and relates to the technical field of accelerators. The method comprises the following steps: obtaining an accelerating cavity high-frequency signal of the synchronous accelerator, so as to generate a frequency-synchronized reference waveform according to the accelerating cavity high-frequency signal; setting a phase trigger window based on the reference waveform, so as to control the synchronous acquisition of beam signals of a full ring of the synchronous accelerator by a beam diagnosis device of the full ring; performing time domain analysis on the beam signals to obtain an effective beam signal interval, so as to calculate position data of the beam signals based on the effective beam signal interval; and reconstructing the motion trajectory of the beam according to the position data of the beam signals, which can accurately identify and associate the data of the same beam in the multi-harmonic acceleration process.
Owner:INST OF MODERN PHYSICS CHINESE ACADEMY OF SCI

Calibration apparatus for spectrometer, article inspection apparatus with the same, and calibration method for spectrometer

To provide a calibration apparatus for spectrometers that enables measurement reproducibility among different spectrometers, an article inspection apparatus with the calibration apparatus, and a calibration method for spectrometers.SOLUTION: A calibration apparatus for spectrometers that measures the intensity of incident light for each wavelength, includes: a light source part that irradiates a spectrometer B, which is the calibration target, with light having a known spectrum; a storage part that stores a reference wavelength conversion formula FA defining a relation between each sensor and wavelength when a spectrometer A, serving as the reference, is irradiated with light having a known spectrum from the light source part; a calculation part that calculates a wavelength conversion formula FB for the calibration target by irradiating the spectrometer B with light having a known spectrum from the light source part and defining a relation between each sensor and wavelength; and a calibration part that determines a difference between the stored wavelength conversion formula FA and the wavelength conversion formula FB, and calibrates the spectrometer B by adding the difference as a correction coefficient Cλ to the wavelength conversion formula FB.SELECTED DRAWING: Figure 4
Owner:ANRITSU CORP

Tunable laser with integrated calibration structure

An integrated photonic circuit has a semiconductor tunable laser with two tuning elements and an output port providing a first laser output, and a calibration structure The calibration structure has a first reference element having a first reference wavelength response (a primary peak or valley at a first reference wavelength) as the semiconductor tunable laser is tuned by adjusting at least one of the tuning elements. The calibration structure also has a first photodetector. At least part of the laser output from the output port is coupled to the calibration structure. At least part of the first laser output is coupled within the calibration structure to the first reference element; and at least part of the first laser output leaving the first reference element after being coupled thereto is coupled to the first photodetector.
Owner:KOMLJENOVIC TIN +8

Signal conversion module, control device, motor control circuit, system and vehicle

This application provides a signal conversion module, a control device, a motor control circuit, a system, and a vehicle. The signal conversion module includes a switching circuit, a charging circuit, an energy storage circuit, and a discharging circuit. The switching circuit and the charging circuit are connected in series between the module's input and output terminals. The first terminal of the energy storage circuit is connected to the connection node between the charging circuit and the module's output terminal, and the second terminal of the energy storage circuit is grounded. The first terminal of the discharging circuit is connected to the first terminal of the energy storage circuit, and the second terminal of the discharging circuit is grounded. When the switching circuit receives a step control signal, the signal conversion module outputs a voltage ramp signal, which, together with a reference waveform signal, forms a pulse width modulation (PWM) signal. Using a signal conversion module to replace the microcontroller's output PWM signal effectively reduces costs, eliminates the constraints of control software, and reduces risk.
Owner:GUANGZHOU AUTOMOBILE GROUP CO LTD

Terahertz signal aliasing elimination method and system based on deconvolution

The invention provides a terahertz signal aliasing elimination method and system based on deconvolution, and relates to the technical field of detection, and the method comprises the steps: collecting time domain waveforms of a reference region and a detection region, and obtaining geometric and material parameters; calculating a point spread function based on the reference waveform and geometric prior; calculating a time axis standardization mapping function based on geometric prior, and carrying out standardization processing on the observation waveform; performing deconvolution processing on the normalized time axis to obtain a restored pulse train; and generating a flight time chart based on the recovered pulse train, and executing curvature correction in combination with geometric priori to obtain a defect distribution diagram. According to the method, by introducing reference region prior and time standardization, point spread function drift caused by curvature and refractive index gradual change is effectively overcome, noise amplification in a high-absorption medium is inhibited, signal aliasing can be stably removed in a polyethylene hot melting joint scene, and accurate defect positioning can be achieved.
Owner:SPECIAL EQUIP SAFETY SUPERVISION INSPECTION INST OF JIANGSU PROVINCE +1

Rapid inversion method based on radar electromagnetic model in high-cold and high-altitude geological environment

The invention discloses a rapid inversion method based on a radar electromagnetic model in a high-cold and high-altitude geological environment, and the core idea of the method is that a two-parameter wave field forward modeling model is constructed based on a Maxwell electromagnetic field equation, a time window-based convolution type objective function is utilized, and a real source function is not needed. Source-independent full-waveform inversion of single-offset GPR data is realized, an SVD method is introduced to automatically extract a reference waveform and determine the length of a time window, direct wave and reflected wave information is effectively separated, and the inversion calculation overhead is remarkably reduced in cooperation with a multi-scale frequency and random sub-source sampling strategy. According to the method, high-precision reconstruction can be performed on the underground dielectric constant and the conductivity on the premise that accurate source waveforms are not needed, and the practicability and the real-time performance of plateau area non-contact radar detection are remarkably improved.
Owner:HARBIN INST OF TECH

Optical comb light source and measuring apparatus

PendingUS20260079362A1Non-linear opticsOptical frequenciesReference wave
An optical comb light source outputs an optical comb having a plurality of modes. The optical comb light source includes an optical comb generating section, an optical frequency changing section, and a mode optical frequency controlling section. The optical comb generating section generates the optical comb. The optical frequency changing section receives a reference wavelength light having a predetermined optical frequency and changes the optical frequency of the reference wavelength light for output. The mode optical frequency controlling section controls a mode optical frequency that is an optical frequency of one mode of the plurality of modes such that a difference between the mode optical frequency and a target optical frequency that is an optical frequency of an output from the optical frequency changing section has a predetermined value. The optical comb generating section changes optical frequencies of the plurality of modes according to the controlled mode optical frequency.
Owner:ADVANTEST CORP

Wireless ultrasonic flow measurement method and apparatus

The application discloses a wireless ultrasonic flow measurement method and device, wherein reference waves are stored in devices at two ends of a river channel in advance, cross-correlation operation is performed on echo signals received by devices at two ends of an upstream and a downstream respectively and corresponding reference wave signals during actual flow measurement, and finally, a calculation result obtained by one of the devices is transmitted to the other device to calculate a final time difference, so that a large amount of original echo data does not need to be transmitted again, the requirements for software and hardware are low, and rapid and real-time accurate measurement of the river channel flow is more easily realized.
Owner:POWERCHINA ZHONGNAN ENG

Remote monitoring system for automatic packaging equipment

The invention provides a remote monitoring system for automatic packaging equipment, and relates to the technical field of industrial equipment monitoring, and the system comprises a plurality of synchronous sensing units which are used for collecting synchronous original data of each branch of a pneumatic network; and a data processing device. The data processing device is internally provided with a digital twinborn model and can predict a theoretical pulse reference waveform according to process beat parameters obtained from an equipment controller; performing cancellation processing on the synchronous original data and the theoretical waveform to separate out a pure residual signal; and after the occurrence of the micro-leakage event is confirmed, further performing inversion calculation based on the time delay information of the multi-point residual signal and a pre-stored pneumatic network topology matrix so as to determine a branch identifier of leakage, and sending an alarm instruction. The reliability and the positioning precision of micro-leakage detection can be remarkably improved, and the production recovery efficiency is improved.
Owner:STARS UNION EQUIP TECH JIANGSU CO LTD +1

Ultrasonic flaw detection device and ultrasonic flaw detection method

To provide an ultrasonic flaw detection device or the like that can enhance defect detection accuracy and detect defect positions with high accuracy in ultrasonic flaw detection using a pulse compression method.SOLUTION: An ultrasonic flaw detection device 100 comprises an ultrasonic probe 1, a power spectrum calculation unit 31, a design waveform generation unit 32, a correlation function calculation unit 33 and a design waveform selection unit 34. The power spectrum calculation unit calculates a power spectrum corresponding to a first design waveform. The design waveform generation unit generates a plurality of second design waveforms having the same power spectrum as the first design waveform. The ultrasonic probe transmits a transmission wave based on the second design waveform to a flaw detection target material S and receives a reception wave reflected inside the flaw detection target material. The correlation function calculation unit calculates a plurality of second correlation functions between a reference wave corresponding to the transmission wave based on the second design waveform and the reception wave corresponding to the second design waveform. The design waveform selection unit selects a design waveform preferable for the ultrasonic probe among the plurality of second design waveforms based on a predetermined criterion.SELECTED DRAWING: Figure 2
Owner:NIPPON STEEL CORPORATION

Rotating device state change detection system and rotating device state change detection method

This state change detection system comprises: a rotation detection unit that outputs a pulse signal; a pulse calculation unit that obtains a pulse calculation waveform representing a pulse period for each rotation angle of a rotating body; a reference generation unit that generates a reference waveform in which an average pulse calculation waveform, which is obtained by averaging values of the pulse calculation waveform with an accumulated value for each rotation angle, is represented by the distribution for one rotation of the rotating body; a rotational fluctuation waveform generation unit that uses the reference waveform to generate a rotational fluctuation waveform obtained by extracting, from the pulse calculation waveform used to generate the reference waveform or a pulse calculation waveform succeeding the pulse calculation waveform, a fluctuation component other than a steady component that steadily occurs with the rotation of the rotating body; and a state change detection unit that detects a change in rotation state on the basis of the rotational fluctuation waveform.
Owner:NSK LTD

Design method and preparation method of high-transparency thin film with thickness of 2-5.5 μm on ZnSe substrate

Provided are a design method and a preparation method of a ZnSe substrate 2-5.5 μm high-transmittance thin film. The design method of the ZnSe substrate 2-5.5 μm high-transmittance thin film comprises the following steps: Sa, a film system is designed with 550 nm as a reference wavelength for optical thin film design, and a film stack formula Sub / 0.6(LHL)^2MK / AIR is used, and the film system is plated on both surfaces of the substrate; wherein, Sub is a ZnSe substrate, and AIR represents air, and in the film stack expression: H represents a 1 / 4 wavelength thickness of a high-refractive-index material ZnSe (zinc selenide), L represents a 1 / 4 wavelength thickness of a low-refractive-index material YbF3 (ytterbium fluoride), K represents a 1 / 4 wavelength thickness of a protective layer material Al2O3 (aluminum oxide), and M represents a 1 / 4 wavelength thickness of a connecting layer material Y2O3 (yttrium oxide); Sb, a film layer structure of Sub / YbF3 / ZnSe / YbF3 / ZnSe / YbF3 / Y2O3 / Al2O3 / Air is generated through the input film stack formula; Sc, the film layer thickness is optimized through a thin film design software, and the best film layer thickness is obtained, and the transmittance of the optimized film layer structure reaches a target in a 2-5.5 μm wave band; and Sd, the optimized best film layer thickness is input into a control computer of a film plating machine.
Owner:安徽光智科技有限公司

Photonic plate with test device

The invention relates to a photonic plate (PP) comprising at least one motif (MOT), a motif comprising at least one so-called functional photonic chip (PPf) and a test device (DT), the test device (DT) comprising: a first test assembly (E1t) comprising: a first coupler by the test slice (EDC1t), called the first test coupler, a first test light / waveguide coupling device (DC1t), a second coupler by the test slice (EDC2t), called the second test coupler, a second test light / waveguide coupling device (DC2t), the first and second test couplers being arranged symmetrically with respect to a point O, a so-called reference assembly (Er) comprising a reference waveguide (WGr) and a first (DC1r) and a second (DC2r) reference light / waveguide coupling device,The first (DC1t) and second (DC2t) test light / guide coupling devices and the first (DC1r) and second (DC2r) reference light / guide coupling devices are all identical. Figure 4,
Owner:COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Neural network enhanced wavefront sensing method and system based on super-structure surface and double-helix PSF coding

The invention discloses a neural network enhanced wavefront sensing method and system based on a metasurface and double-helix PSF coding, and the method comprises the steps: loading a preset reference phase diagram and a to-be-measured phase diagram on unmodulated parallel light through a spatial light modulator, thereby generating a reference wavefront and a to-be-measured wavefront; mutually orthogonal double-helix phase distribution is generated by using the polarization multiplexing super-structure surface, and a reference double-helix point spread function image and a to-be-measured double-helix point spread function image are obtained; and outputting a phase distribution matrix of the wavefront to be measured by using the self-calibration dual-encoder neural network to realize synchronous reconstruction of the dual-channel wavefront. The method can realize high-resolution real-time wavefront measurement under single exposure, has high robustness and expandability, and is suitable for the fields of adaptive optics, polarization imaging, optical communication and the like.
Owner:NANJING UNIV

Sound synchronization method and system among multiple devices

The invention provides a sound synchronization method and system among multiple devices, and belongs to the technical field of audio synchronization, and the method comprises the following steps: waveform capture: employing an audio collection device to collect audio waveforms output by each device; waveform identification: carrying out feature extraction on the collected waveforms, and carrying out waveform classification based on the extracted features; waveform matching: comparing the target waveform of the to-be-synchronized equipment with the reference waveform, and determining the time offset of the target waveform and the reference waveform; waveform coupling; and dynamically correcting. Synchronization is realized through five steps of waveform acquisition, identification, matching, coupling and dynamic correction: high-sensitivity waveform acquisition, feature extraction and machine learning classification, offset determination through cross-correlation algorithm matching, phase locking adjustment delay establishment, and dynamic correction in combination with environmental parameter monitoring and sound velocity prediction. The system comprises an audio acquisition, processing and control module, can eliminate sound transmission time difference, and ensures that audiences can obtain unified hearing feeling at any position.
Owner:ZHEJIANG HUACHUANG IOT TECHNOLOGY CO LTD +3

Methods of determining overlayer reference wavelength

A method of determining an overlay reference wavelength, the method comprising: forming a pattern structure including a wafer and overlay keys on the wafer; obtaining first setup values of the pattern structure for first measurement wavelengths, respectively; selecting second measurement wavelengths among the first measurement wavelengths by filtering the first measurement wavelengths based on the first setup values; obtaining second setup values of the pattern structure for the second measurement wavelengths, respectively; and selecting a reference wavelength among the second measurement wavelengths based on the second setup values, wherein each of the first setup values is proportional to a deviation value of target sigma values of the overlay keys at a respective first measurement wavelength, and wherein each of the second setup values is inversely proportional to a deviation value of stack sensitivity values of the overlay keys at a respective second measurement wavelength.
Owner:SAMSUNG ELECTRONICS CO LTD

Multi-port test system and rapid time-sharing full-cross S parameter measurement method

The invention discloses a multi-port test system and a rapid time-sharing full-cross S parameter measurement method, and belongs to the field of electronic measurement and microwave radio frequency testing, an excitation emission path of the system comprises an excitation source, an excitation switching module, M emission route amplification modules and M groups of bi-directional coupler matrixes, and each group comprises N bi-directional couplers; m > = 2, N > = 2; the reference receiving path comprises the bi-directional coupler matrix, M reference route amplification modules and M receiving modules; the measurement receiving path comprises the bi-directional coupler matrix, M measurement route amplification modules and M receiving modules; the two paths of output of the receiving module are digital reference wave quantity data and measurement wave quantity data which are sampled by an ADC (Analog to Digital Converter) in the receiving module; the external test ports are divided into M groups, and each group comprises N test ports. The method is carried out through the system, and automatic testing and performance characterization of the multi-port microwave device and assembly are achieved.
Owner:CHENGDU WEIPIN TECH CO LTD