The invention discloses a displacement, force generation and measurement system and an indentation, scratch and surface profile meter. The system measures micro-newton level force and nanometer level displacement based on piezoelectric ceramics generated nanometer level displacement and bi/single pole capacitance difference structures, and comprises a piezoelectric ceramic displacement driver, a displacement sensor, a normal force sensor and a probe, wherein the sensors all employs bi/single pole capacitance difference structures, of which the capacitor arranging direction is along the setting direction, the piezoelectric ceramic displacement driver is so arranged to output displacement amount of the corresponding displacement driving signals along the setting direction and transmits the displacement amount to a target member of the displacement sensor, the displacement sensor is so arranged to transmit the displacement amount to the normal force sensor, and the probe is fixedly connected with the target member of the normal force sensor along the setting direction. The displacement, force generation and measurement system and the indentation, scratch and surface profile meter employing the displacement, force generation and measurement system have the advantages of good dynamic performance, high measuring sensitivity, easy manufacture and low cost.