Displacement, force generation and measurement system and indentation, scratch and surface profile meter

Abstract

The invention discloses a displacement, force generation and measurement system and an indentation, scratch and surface profile meter. The system measures micro-newton level force and nanometer level displacement based on piezoelectric ceramics generated nanometer level displacement and bi / single pole capacitance difference structures, and comprises a piezoelectric ceramic displacement driver, a displacement sensor, a normal force sensor and a probe, wherein the sensors all employs bi / single pole capacitance difference structures, of which the capacitor arranging direction is along the setting direction, the piezoelectric ceramic displacement driver is so arranged to output displacement amount of the corresponding displacement driving signals along the setting direction and transmits the displacement amount to a target member of the displacement sensor, the displacement sensor is so arranged to transmit the displacement amount to the normal force sensor, and the probe is fixedly connected with the target member of the normal force sensor along the setting direction. The displacement, force generation and measurement system and the indentation, scratch and surface profile meter employing the displacement, force generation and measurement system have the advantages of good dynamic performance, high measuring sensitivity, easy manufacture and low cost.

Description

Technical field [0001] The present invention relates to the field of force and displacement measurement and control technology. More specifically, the present invention relates to a nanometer-scale displacement based on piezoelectric ceramics, and micron-level force measurement and nanometer-level displacement measurement based on a dual unipolar capacitance differential structure. System, and indenter, scratch tester and surface profiler with this system. Background technique [0002] Indenters, scratch meters, and surface profilers are widely used in the research of material physical properties and the research and development of new materials, and the core structure of these instruments is capable of generating and measuring micron-level force and nano-level Displacement generation and measurement systems. The existing systems generally have the problem of complex mechanical structure, large volume and weight, which leads to poor dynamic performance of the entire system. Summ...

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Problems solved by technology

[0002] Indentation instruments, scratch instruments, and surface profilers are widely used in the research of the physical properties of materials and the development of new materials, and the core structure of these instruments is to be able to generate and measure micronew level forces, and nanoscale Displacement generation and measurement systems, the existing systems generally have complex mechanical structures, large volume and weight, which leads to poor dynamic performance of the entire system

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