The embodiment of the invention provides an ROF
photodiode, a manufacturing method thereof and an optical
receiver, and belongs to the technical field of photoelectric detection. The ROF
photodiode comprises: a
wafer substrate; the intrinsic
absorption layer is arranged on the upper surface of the
wafer substrate; the light-transmitting flat layer is arranged outside the intrinsic
absorption layer in a covering manner, and one surface of the light-transmitting flat layer, which is used for receiving the
Gaussian light emitted into the ROF
photodiode by the
optical fiber, is provided with a flat surface; the micro lens is arranged on the flat surface of the light-transmitting flat layer, and the center of the micro lens is aligned with the center of
Gaussian light emitted by the
optical fiber;
gaussian light emitted by the
optical fiber is converged after passing through the micro lens, and after the converged
Gaussian light passes through the light-transmitting flat layer, the
power density peak value is dispersed and weakened, and the converged Gaussian light is converted into flat-topped light to be emitted into the intrinsic
absorption layer. According to the ROF photodiode, Gaussian light emitted by the optical
fiber is dispersed, weakened and converted into flat-topped light, the
electric field suppression effect caused by light power
peak value concentration is avoided, the good bandwidth characteristic is guaranteed, and the
light response performance is improved.