The invention provides an aspheric
system error calibration method and device, and relates to the technical field of aspheric
system error calibration, and the method comprises the steps: obtaining an alignment error; acquiring a
rotational symmetry part of the measured aspheric surface at the first
wavefront of the original measurement position and a
rotational symmetry part of the measured aspheric surface at the second
wavefront after the measured aspheric surface is translated by the preset distance along the
optical axis; calculating an
error surface according to the
rotational symmetry part of the first
wavefront, the rotational symmetry part of the second wavefront and the alignment error; fitting the
error surface with a pre-constructed rotational symmetry error base, and solving a coefficient of each rotational symmetry error term; according to the coefficient and the rotational symmetry error substrate, reconstructing a rotational symmetry
surface shape component of the measured aspheric surface; obtaining a rotational symmetry part of a
system error according to the difference between the rotational symmetry part of the first wavefront and the reconstructed rotational symmetry
surface shape component; according to the invention, the calibration process is obviously simplified, the measurement time is shortened, and the calibration efficiency is improved.