The invention discloses an ultrasonic power supply
impedance network, a variable
inductor, a
control circuit and a control method. The variable
inductor, the ultrasonic power supply
impedance network and the
control circuit are included. The variable
inductor is composed of a main
magnetic core, two auxiliary magnetic cores, a main winding and an auxiliary winding, and air gaps are formed between the auxiliary magnetic cores and the main
magnetic core. The magnetic saturation degree of the auxiliary
magnetic core is changed by adjusting the control current, then the magnetic saturation state of the main magnetic core is changed, and dynamic change of the
inductance value is achieved. The ultrasonic power supply load is capacitive, the
control circuit can enable the load impedance and the variable inductor to reach a
resonance state, the loss is effectively reduced, and the energy transmission efficiency is improved. Besides, according to the
impedance matching method, the two auxiliary inductors are utilized, the
impedance matching speed is improved through coarse adjustment, the
impedance matching precision is improved through fine adjustment, the impedance matching method has the advantages of being high in matching precision, wide in matching range, capable of being dynamically adjusted and the like, and the application field of the variable inductor is further expanded.