The utility model relates to the technical field of
ion source auxiliary
coating, in particular to a novel durable
anode ion source which comprises a base, an
anode is arranged on the base, a cooling structure matched with the
anode is arranged on the base, an
electricity leading part is arranged on the cooling structure, and the cooling structure is externally connected with a power supply device through the
electricity leading part. An inner
cathode and an outer
cathode are arranged on the base, a gas distribution structure is further arranged on the base, the gas distribution structure is externally connected with a
gas supply device, magnetic steel is arranged on the outer wall of the supporting part, and the
magnetic mirror ratio of a
discharge cavity
magnetic field formed by the inner
cathode, the outer cathode and the anode is high. According to the technical scheme, electrons can be effectively gathered at the open end of a
discharge cavity formed by the inner cathode, the outer cathode and the anode, namely in an
ion emitting channel, so that collision of ions on the side walls of the inner cathode and the outer cathode is effectively reduced,
sputtering pollution is reduced, and
powder and
cut pollutants generated in the using process cannot be accumulated on the outer cathode and the anode.