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Drug supply unit and substrate processing system thereunder, and drug supply method thereof

ActiveCN116266546BEliminate the risk of process accidentseliminate dangerLaboratory glasswaresOptically investigating flaws/contaminationChemical reactionDrug supply

This invention relates to a pharmaceutical supply unit and a substrate processing system thereunder, as well as a pharmaceutical supply method. It discloses a technique for ensuring the reliability and stability of the process by sensing and removing impurities generated during a chemical reaction when a pharmaceutical solution is supplied through the pharmaceutical supply unit.

Owner:SYSTEM ENGINEERING MEGA SOLUTION CO LTD