181 results about "Radio frequency plasma" patented technology

Embodiments provided herein generally include apparatus, plasma processing systems and methods for tuning in a radio frequency (RF) plasma processing system for improving substrate processing metrics. Some embodiments are directed to an apparatus for processing a substrate in a plasma processing system. The apparatus generally includes: an impedance for a match circuit configured to perform impedance matching for a plasma load; a diode-based switch coupled to the impedance for the match circuit; at least one signal generator coupled to the diode-based switch and configured to bias the diode-based switch to a first position based on a first impedance generated in the plasma load; and a second position based on a second impedance generated in the plasma load and an RF signal generator configured to provide an RF signal to the plasma load.

The invention discloses a radio frequency plasma comprehensive testing device and method for an ion process system, and relates to the technical field of plasma testing, and the device comprises a host and a coupling probe; the coupling probe is placed on a radio frequency transmission line of an ion process system, is used for carrying out coupling sampling on radio frequency energy through a capacitance or inductance coupling mode according to an electromagnetic field coupling principle, obtains current and voltage signals through coupling, and is also used for sensing and obtaining real-time temperature data in the probe; the host comprises a main body shell and a shielding frame arranged in the main body shell, and a data processing and analyzing unit is arranged in the shielding frame and used for performing data processing on the received voltage, current and temperature signals; the radio frequency power supply power, the radio frequency power supply frequency spectrum, the impedance of the matcher and the vacuum reaction cavity and other ion process system parameter values are calculated and generated, and meanwhile clutter capture and radio frequency transmission harmonic wave test results in radio frequency transmission are output, so that the comprehensive test of the ion process system is realized.

The invention discloses a method for synergistically preparing recycled aggregate from urban renewal garden waste and building waste, and relates to the field of treatment of garden waste and building waste. The method comprises the following steps: carrying out molecular-level deconstruction pretreatment on garden wastes, destroying cell walls by adopting dual-frequency ultrasound combined with biological enzymolysis, and treating the building wastes by combining high-pressure water jet with abrasive impact; performing nano-scale composite granulation, adding a nano-composite binder, and introducing CO2 to form a gel transition layer; by means of plasma-assisted sintering, particle diffusion is accelerated by means of radio-frequency plasma and an electric field; chemical vapor deposition is adopted, and a TiN-TiO2 gradient functional coating is formed; real-time monitoring and regulation are performed through a multi-mode sensor network and an intelligent algorithm, and process parameters are adjusted according to a product performance prediction result. The recycled aggregate disclosed by the invention is high in strength, good in heat preservation and strong in freezing resistance; negative carbon emission reduction is achieved in the production process, an intelligent system guarantees stable product quality, environmental protection and economic benefits are achieved, and urban update and solid waste treatment green transformation are promoted.

The invention discloses a radio frequency plasma generating device with a radial confinement magnetic field, and belongs to the technical field of plasma generating devices. Comprising a plasma generation area and a diffusion area which are vertically distributed and communicated, a quartz glass cover is arranged outside the plasma generation area, a water-cooling shielding device is arranged in the quartz glass cover, a magnet exciting coil is arranged outside the quartz glass cover, a quartz shell is arranged outside the diffusion area, and an outer annular magnet is fixedly arranged on the periphery of the quartz shell in a sleeving mode. An inner annular magnet matched with the outer annular magnet is fixed to the inner bottom of the quartz tube, and the bottom end of the quartz glass cover is fixedly connected with the top end of the quartz shell. The beneficial effects of the invention are that magnetic field configuration is optimized, and an induced potential field generated by electron cyclotron motion and an external constraint magnetic field are mutually counteracted; lateral diffusion of electron beams is effectively inhibited, spatial non-uniformity of plasma density is remarkably reduced, and the electron beams can be highly and uniformly diverged and distributed in a whole plasma area.

The invention discloses an automotive polypropylene material with good appearance and easy paint spraying and a preparation method thereof, and belongs to the technical field of high polymer materials. The polypropylene material is prepared from the following raw materials in parts by mass: 45 to 65 parts of photo-activated grafted polypropylene resin, 10 to 20 parts of a multifunctional modifier with a core-shell structure, 8 to 15 parts of a bio-based nanofiber reinforcing agent, 5 to 10 parts of a temperature-sensitive shape memory toughening agent, 0.1 to 0.5 part of a photocatalytic anti-pollution antioxidant, 0.1 to 0.5 part of an ionic liquid-based lubricant and 0.5 to 2 parts of a bionic nano adhesion accelerant. The raw materials are subjected to melt blending, extrusion and granulation through a double-screw extruder, and finally drying and radio frequency plasma treatment are performed to obtain the polypropylene material. The material does not need complex pretreatment, forms super-strong adhesive force with paint by virtue of multiple innovative mechanisms, and is stable in a complex environment. The molded product has the advantages of top-grade appearance, smooth and defect-free surface, good gloss and color stability and excellent comprehensive performance, and can meet the strict use and processing requirements of automobiles.

Some embodiments are directed to a method of processing a substrate in a plasma processing system. The method generally includes tuning a first capacitor and a second capacitor of a tuning circuit to match a first impedance corresponding to a first stage of a waveform, while a frequency of a radio frequency (RF) generator is preset to a first frequency; tuning a third capacitor of the tuning circuit and the frequency of the RF generator to match a second impedance corresponding to a second stage of the waveform, wherein the frequency of the RF generator is tuned to a second frequency; recording setting values of the first frequency and the second frequency that match different impedances at different stages of the waveform; and switching between the first frequency and the second frequency to match the different impedances at the different stages of the waveform.

The invention discloses a preparation process of a novel flame-retardant heat-insulating polyester fiber fabric, and relates to the technical field of fabric textile, and the preparation process of the fiber fabric comprises the following steps: S1, modifying polyester fibers; s2, preparing a bio-based flame retardant; s3, spinning a fiber layer containing bio-based flame-retardant components; s4, depositing a metal oxide thin film; s5, weaving the fabric; s6, coating an organic silicon flame-retardant coating and a heat-insulating coating; and S7, dipping a flame-retardant heat-insulating auxiliary agent. The surface of the polyester fiber is treated by radio frequency plasma, a flame retardant molecular chain containing phosphorus and nitrogen with the atomic ratio of phosphorus to nitrogen being 3: 2 is chemically grafted, and meanwhile, nano aerogel particles with the particle size being 60-80 nm are uniformly dispersed in a polyester spinning solution for blended spinning, so that the problem that an existing fabric is insufficient in flame retardance and heat insulation performance can be solved; the problems that in the high-temperature and flammable environment, the fabric cannot provide enough safety protection for a user due to poor flame-retardant and heat-insulating performance, fire hazards are likely to be caused, and personnel are scalded are solved.

The invention discloses metal ceramic MAX-phase composite powder for spraying and a preparation method of the metal ceramic MAX-phase composite powder, and belongs to the field of metal ceramic composite materials. The method comprises the following steps: mixing Ni powder, Cr powder and Cr2AlC nano powder with deionized water, a binder and a dispersant according to a specific ratio, and carrying out wet ball milling to prepare uniform slurry; carrying out spray granulation to obtain primary spherical powder; and finally, carrying out spheroidizing treatment on the primary powder by adopting radio frequency plasma under the protection of inert gas to obtain a final product. The core of the preparation method is that through an optimized two-step process, many limitations in the application aspect of an existing MAX phase material are solved, and the composite powder which is high in sphericity degree, good in flowability, compact in interior and stable in MAX phase component is successfully prepared. The powder can be directly used for thermal spraying, and an ideal raw material is provided for preparing a high-performance MAX-phase metal ceramic coating.

The invention discloses a plasma-assisted surface activation method. The method comprises the following steps: placing a material matrix in a reaction cavity, vacuumizing, introducing oxygen and inert gas, exciting a radio frequency power supply and a microwave power supply to form multi-frequency composite plasma, and treating the material. The physical bombardment of the radio frequency plasma and the chemical activation of the microwave plasma have a synergistic effect, and deep cleaning and efficient modification of the surface of the material are realized in a low-vacuum environment. The surface water contact angle of the treated material is reduced to 35 degrees or below, the adhesive force of a coating reaches 0-1 level, the tensile shear strength is improved to 22.5 MPa or above, the problems that a traditional surface treatment method is unstable in effect and insufficient in modification depth are effectively solved, and the surface treatment method has the outstanding advantages of being high in treatment efficiency, uniform and lasting in modification effect, environmentally friendly and the like.

A radio frequency plasma apparatus (100) and a vacuum system (1000). The radio frequency plasma apparatus (100) comprises an electromagnetic field generator (10), a magnetic field confinement mechanism (90), and a plasma generation chamber (20). The electromagnetic field generator (10) is configured to generate an electromagnetic field upon being energized. The magnetic field confinement mechanism (90) is configured to generate a confining magnetic field. The plasma generation chamber (20) is coupled to the electromagnetic field generator (10) and the magnetic field confinement mechanism (90), thus accommodating a working gas and plasma generated by the working gas under the action of the electromagnetic field and the confining magnetic field.

Systems and methods for multi-level pulsing are described. The systems and methods include generating four or more states. During each of the four or more states, a radio frequency (RF) generator generates an RF signal. The RF signal has four or more power levels, and each of the four or more power levels corresponds to the four or more states. The multi-level pulsing facilitates a finer control in processing a substrate.

The invention discloses a high-insulativity coating treatment method of a metal soft magnetic composite material, which belongs to the technical field of metal soft magnetic materials, and comprises the following steps: firstly, performing vacuum dehydration treatment on metal soft magnetic powder, and controlling the moisture content to be not higher than 0.1%; carrying out ultrasonic dispersion treatment on the boron nitride nanosheets to form a suspension, and modifying the magnesium borate nanowires and a silane coupling agent for later use; preparing an inorganic coating solution and an organic coating solution; activating the powder in the fluidized bed by adopting radio frequency plasma of argon-oxygen mixed gas; enabling the activated powder to enter a three-fluid nozzle fluidized bed reactor, and implementing synchronous spray coating in two stages: in the first stage, spraying inorganic coating liquid and applying pulse plasma to form a composite bottom layer; in the second stage, spraying organic coating liquid and carrying out ultraviolet precuring to form a resin layer; and the coated powder is treated by a stepped thermocuring procedure to obtain a finished product. The technical problem of how to improve the insulation coating performance of the metal soft magnetic composite material is solved.

The invention provides a deep carbon removal method for silicon carbide powder based on plasma-assisted composite catalytic oxidation, which is characterized by comprising the following steps: S1, cleaning and drying silicon carbide powder raw materials with acid to obtain pretreated silicon carbide powder; s2, immersing the pretreated silicon carbide powder into a cobalt nitrate, manganese nitrate or ferric nitrate solution, and carrying out dispersion treatment, evaporation treatment and calcination treatment to obtain a metal oxide / silicon carbide composite catalyst; s3, placing the metal oxide / silicon carbide composite catalyst in a radio frequency plasma reactor, and carrying out an oxidation reaction; and S4, after the oxidation reaction is finished, carrying out post-treatment to obtain the carbon-removed silicon carbide powder. The carbon removal effect is obviously better than that of a traditional high-temperature oxidation method.

The application provides a self-cooling air-breathing radio frequency plasma electric thruster, which comprises an air inlet channel, an ionization chamber and a nozzle, the air inlet channel is divided into a main air inlet channel and a secondary air inlet channel, the main air inlet channel is communicated with the ionization chamber, a cooling flow channel is arranged on the periphery of the ionization chamber, the secondary air inlet channel is communicated with a gas guide channel, the gas guide channel is communicated with the cooling flow channel through a cooling flow channel inlet, and the cooling flow channel is communicated with the ionization chamber through a cooling flow channel outlet; the gas taken by the main air inlet channel directly enters the ionization chamber to be ionized, the gas taken by the secondary air inlet channel is guided to the cooling flow channel inlet through the gas guide channel, enters the cooling flow channel through the cooling flow channel inlet, cools the ionization chamber, and then enters the ionization chamber through the cooling flow channel outlet to be ionized, and the two gas flows entering the ionization chamber are accelerated through the nozzle after being ionized, so that the thruster generates thrust. The cooling design provided by the application has the advantages of simple structure and high energy utilization rate.

The invention discloses instant powder based on a nano modification technology and a preparation method of the instant powder, and belongs to the technical field of modified nano materials. The method comprises the following steps: (1) extracting active ingredients from roots and stems of beautiful millettia roots, and carrying out ethanol ultrasonic extraction, concentration, resin purification and vacuum drying; (2) after radio frequency plasma nano activation treatment, centrifuging to obtain a precipitate; (3) dissolving chitosan, sodium alginate and beta-cyclodextrin in an acetic acid solution, adding the precipitate, and performing high-pressure homogenization to form 80-150nm core-shell nanoparticles; (4) adding a polyethylene glycol-polylactic acid copolymer and lecithin for ultrasonic functional modification; and (5) mixing with maltodextrin and the like, carrying out supercritical CO2 treatment, and then carrying out spray drying to obtain instant powder with D50 of 15-30 [mu] m. Compared with the prior art, through nano activation and surface modification, the defects that traditional powder is slow in dissolution, large in activity loss and poor in stability are overcome.

A power generator has a first plurality of power amplifiers each configured to receive a first common supply voltage and output a plurality of discrete DC voltages. At least one of the plurality of discrete DC voltages may be varied by varying the first common supply voltage. The radio frequency power generator may also include a second plurality of power amplifiers that receive a second common supply voltage different from the first supply voltage or a different supply voltage. At least one discrete DC voltage of the plurality of discrete DC voltages may be varied by varying the second common supply voltage or a different supply voltage. The outputs of each power amplifier are superimposed in series to generate an output voltage for the power generator. One of the plurality of power amplifiers is activated or deactivated at a first time, while another of the plurality of power amplifiers is activated or deactivated at a second time.

The present invention relates to a method for monitoring deposition impurities on the first mirror of a tokamak based on a convolutional neural network. The method uses a spectrometer to real-time collect plasma spectral data of the sputtered and ionized surface material of the first mirror in a tokamak under low-pressure radio frequency conditions in a fusion device. According to the characteristics of plasma spectral data with different wavelengths and intensities corresponding to different sputtered materials on the first mirror surface, a convolutional neural network model is established and trained to be able to identify the spectral data of the composition and content of the sputtered materials on the first mirror surface. The spectral data obtained by plasma sputtering is input into a mature network model for analysis to judge the composition and content of the sputtered materials, so as to monitor the change of deposition impurities on the first mirror surface. The present invention obtains the radio frequency plasma spectral information generated on the first mirror surface through a spectrometer, and can identify the composition and content of the sputtered materials on the first mirror surface through a convolutional neural network model without damage, effectively and without affecting the experiment.

This invention discloses a radio frequency (RF) power control system and method, and an RF plasma system. The method includes: before the electrostatic chuck cleaning begins, loading a preset parameter set of an impedance matching network associated with the selected cleaning process recipe, and driving the variable capacitors and variable inductors in the impedance matching network to their preset initial positions in the preset parameter set before applying continuous wave RF power; applying continuous wave RF power to the electrostatic chuck and initiating the cleaning process; during the cleaning process, acquiring the load impedance in the impedance matching network in real time at a preset sampling rate, generating a real-time impedance trajectory, and calculating the impedance change rate; determining the current cleaning stage of the electrostatic chuck based on the magnitude of the load impedance and the impedance change rate, and dynamically switching to the impedance matching algorithm corresponding to the cleaning stage to adjust the positions of the variable capacitors and variable inductors in the impedance matching network. This invention achieves low-reflection power matching throughout the entire cleaning process.

The utility model discloses a plasma coating manufacturing dust-free clean production line, which comprises a dust-free spraying bin and a drying production line, the dust-free spraying bin comprises a base and a paint control assembly, a spraying bin body is installed on the upper side of the base, a spraying assembly sliding rail is installed at the bottom of an inner cavity of the spraying bin body, and a dust-free spraying assembly is installed on the drying production line. A universal spraying assembly is slidably mounted on the spraying assembly sliding rail and connected with the coating control assembly, and a discharging and filtering assembly communicating with an inner cavity of the spraying bin body is mounted on the upper portion of the side face of the spraying bin body. According to the plasma coating manufacturing dust-free clean production line, the cleanliness of the production environment can be effectively improved, the temperature and humidity in the plasma coating spraying environment can be adjusted and controlled, production and preparation of radio frequency plasma operation electrode products are facilitated, the plasma coatings can be dried after being sprayed, the temperature in the drying process is stable, the conveying speed is controllable, and the production efficiency is improved. And the drying quality of the plasma coating is ensured, and the product percent of pass is improved.

The invention discloses a radio frequency plasma cleaning device, which relates to the technical field of plasma cleaning equipment, and comprises a starting system, a vacuum system and a control system, the starting system comprises an outer shell, an airflow regulator, a quartz hollow tube and an inductance driving coil; the outer shell is provided with an inner cavity, the airflow regulator and the quartz hollow tube are arranged in the inner cavity, and the airflow regulator can regulate gas flow; the inductance driving coil is sleeved outside the quartz hollow tube; the vacuum system comprises a vacuum cabin, an objective table and vacuumizing equipment; the objective table is fixed in the vacuum cabin, an extraction opening of vacuumizing equipment is communicated with the interior of the cabin, and a communicating opening, corresponding to the upper portion of the objective table, of the vacuum cabin is communicated with a lower end opening of the quartz hollow tube; the control system comprises a radio frequency power supply which can provide radio frequency energy for the inductance driving coil, the power of the control system is adjustable, and the cleaning gas can be switched into different gases. The device is small in size, light in weight, compact in structure and low in cost.

A method and a device of adaptive EMC-EMI radio frequency signal data processing are provided. The method includes: performing segmentation and preprocessing in response to a radio frequency signal; performing Hilbert-Huang transform on signals after segmentation; calculating EMC power, EMI radio frequency energy and mode, and a radio frequency signal-to-noise mode, and comparing the EMC power, the EMI radio frequency energy and mode, and the radio frequency signal-to-noise mode with corresponding thresholds; and adaptively adjusting energy parameters of a radio frequency ablation device, or prompting a user to adjust the energy parameters of the radio frequency ablation device. Instantaneous and dynamic radio frequency plasma is qualitatively and quantitatively detected and classified according to a signal-to-noise mode and pattern recognition of radio frequency emission, and an actual state of the knife head is perceived, to performs adaptive control or prompt the user to perform an adjustment operation.

This invention discloses a CrN-W / DLC composite coating for WE43 magnesium alloy and its preparation method, belonging to the field of surface engineering and materials processing technology. The preparation method includes: pretreating the WE43 magnesium alloy substrate, placing it in a thin film deposition system, evacuating the system, introducing an Ar / N2 mixed gas, and using a Cr target for reactive magnetron sputtering deposition to form a CrN transition layer. During the deposition process, a W target is simultaneously introduced and co-deposited with the Cr target using reactive magnetron sputtering to obtain the CrN-W transition layer. Using a PECVD process, a carbon source precursor gas is introduced, and under the action of radio frequency plasma, it dissociates to form highly reactive species. These species are adsorbed, recombined, and cross-linked on the surface of the CrN-W transition layer to form a DLC functional layer, resulting in the CrN-W / DLC composite coating. The composite coating of this invention exhibits excellent bonding strength, wear resistance, and low friction performance, significantly improving the service performance of WE43 magnesium alloy.

1. The name of the design product: disposable bipolar radio frequency plasma surgical electrode handle. 2. The use of the design product: used for cutting, ablation, coagulation and hemostasis of soft tissue in surgical operation. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: perspective view.

This application provides an arc detection and processing method and apparatus for a radio frequency plasma processing system, belonging to the field of semiconductor equipment technology. The method includes: acquiring analog voltage and current signals from the matching unit side as analog electrical signals; acquiring image data within the reaction chamber; fusing the analog electrical signals and image data to obtain arc level information and spatial location information; executing real-time arc extinguishing control based on the level information; and executing a location-based processing strategy based on the spatial location information. This application achieves accurate arc detection and location through the fusion of electrical signals and image information, efficiently realizes arc extinguishing control based on a graded arc extinguishing strategy, and guides root cause management through a location-based processing strategy. This solves the problem of high arc misjudgment rate in existing technologies and helps to eliminate the causes of arc occurrence at their source.

The utility model discloses radio frequency plasma spheroidizing equipment which comprises a reaction chamber, a lamp box arranged at the top of the reaction chamber and a collecting chamber connected with the reaction chamber, a first water cooling unit is arranged on the reaction chamber and comprises a cooling cylinder arranged on the outer wall of the reaction chamber, and a second water cooling unit is arranged on the outer wall of the cooling cylinder. A cooling pipeline is formed between the inner wall of the cooling cylinder and the outer wall of the reaction chamber, a water inlet is formed in the bottom of the cooling pipeline, and a water outlet is formed in the top of the cooling pipeline. The lamp rectangular seat, the reaction chamber and the reaction chamber material collecting section adopt independent water cooling design, and the V-shaped pipe section and the straight pipe section adopt series water cooling design, so that a formed uniformly-distributed cooling water flow field enables the temperature distribution in the reaction synthesis chamber to be more uniform; different temperature gradients, caused by uneven temperature, of the nano powder at different positions in the cooling and crystallization process are reduced, and the quality of the synthesized nano powder material is further improved.

The invention discloses a binder-free silicon / carbon nanotube composite carbon fiber negative electrode material, a preparation method thereof and an application of the binder-free silicon / carbon nanotube composite carbon fiber negative electrode material in a lithium ion structure energy storage composite material. Carbon fibers are used as a substrate, catalyst nanowires are grown through a hydrothermal method, then dicyandiamide is used as a carbon source and a nitrogen source through a chemical vapor deposition method, and the binder-free silicon / carbon nanotube composite carbon fiber negative electrode material is prepared. Uniform and compact carbon nanotubes doped with nitrogen and embedded with ferrocobalt nanoparticles and arranged in a three-dimensional disordered structure grow on the surface of the carbon fiber, and then ultra-thin nano silicon is uniformly sputtered on a carbon nanotube substrate supported by the carbon fiber through a radio frequency plasma magnetron sputtering technology. The carbon nano tube and the silicon material are effectively compounded together, the advantages of carbon and silicon are combined, and a synergistic effect is achieved. When the obtained silicon-carbon composite material is used as a negative electrode material of a lithium ion structure energy storage composite material, excellent electrochemical performance and cycling stability are shown, and the flexible structure and excellent mechanical performance ensure efficient use of the material in different fields and different application scenes.

The invention belongs to the technical field of material preparation, and particularly relates to a preparation method and application of a nanoscale lithium-silicon alloy. Silane gas and diluent gas are mixed and injected into a plasma thermal field generated by a radio frequency plasma generator to generate silicon atoms, then inert gas serves as carrier gas, a lithium source is fed into the plasma thermal field to generate lithium atom steam, and the silicon atoms and the lithium atom steam are alloyed in the high-temperature thermal field; under the driving of cooling airflow, the lithium-silicon alloy particles enter the cyclone classification chamber through high-temperature and low-temperature cooling areas, the unreacted lithium source and the large-particle-size lithium-silicon alloy particles are retained in the cyclone classification chamber, and the small-particle-size lithium-silicon alloy particles are brought into the collection chamber, are adsorbed on the surface of the filter and are blown off by periodic back-blowing airflow; lithium silicon alloy powder to be coated is obtained; and finally, the nano lithium silicon alloy to be coated is introduced into the fluidized bed, silicon and carbon coating is conducted through a vapor deposition method, the lithium silicon alloy with the inner coating layer being element doped silicon and the outer coating layer being carbon is prepared, and the alloy can be used as a thermal battery, a solid-state battery negative electrode material and a liquid lithium ion battery lithium supplementing agent.

The application provides a preparation method of a vertical carbon nanotube array / diamond-like carbon film composite adhesive material, and the preparation method comprises the following steps: uniformly covering a transfer medium on a target flexible substrate and heating to form a semi-cured state; turning over a vertical carbon nanotube array on a silicon substrate and applying pressure to make the vertical carbon nanotube array adhere to the surface of the semi-cured transfer medium, and fully combining the transfer medium and the vertical carbon nanotube array by heating and solidification; peeling the vertical carbon nanotube array from the silicon substrate to obtain a vertical carbon nanotube array with a transferred top end; and depositing a diamond-like carbon film on the surface of the vertical carbon nanotube array by using a radio frequency plasma deposition technology, so as to obtain the vertical carbon nanotube array / diamond-like carbon film composite adhesive material. The vertical carbon nanotube array is improved in adhesive characteristics by using the excellent mechanical properties of the diamond-like carbon, the contact area of the top end of the vertical carbon nanotube array and the surface to be adhered can be increased, and the method has the advantages of simplicity and easy operation.

The application relates to the technical field of purification or refining of silicon compounds, in particular to a high-purity quartz sand alkali metal targeted deep removal method, wherein quartz sand is mixed with silicon carbide abrasive and dry ground, and then is immersed into a solution containing ammonium fluoroborate, nano titanium dioxide and graphene quantum dots for etching; then a composite solution containing HEDP, EDTMPA, crown ether and beta-cyclodextrin is used to complex and leach alkali metals in a microwave field; then, through a photoelectric desorption reactor, the complex is decomposed under the cooperation of ultraviolet light and an electric field; then, a supergravity rotating bed is used for three-stage countercurrent washing; finally, a radio frequency plasma treatment is used to repair the crystal lattice and remove hydroxyl groups in a hydrogen atmosphere at high temperature; through multi-step cooperation, the alkali metals are deeply removed. Through surface modification, composite complexing, photoelectric desorption and other technologies, the total alkali metal content of the quartz sand is reduced, energy consumption is reduced, waste liquid is reduced, the purity and performance of the material are improved, and the application is suitable for high-end fields such as semiconductors.

This invention belongs to the field of thin film deposition technology and relates to a method for improving the uniformity and quality of DLC coatings prepared by PECVD. Based on PECVD equipment, a method for preparing uniform, highly wear-resistant / corrosion-resistant DLC coatings on irregularly shaped workpieces by controlling a rotating magnetic field is provided. The method includes a vacuum chamber system, a dynamic magnetic field generator, a radio frequency plasma excitation system, a dual-path gas supply system, and a vacuum and pressure regulation system. The dynamic magnetic field generator uses two sets of ring-arranged neodymium iron boron permanent magnets, driven by a motor to rotate the magnetic field vector. The top spray electrode and the bottom ring ground electrode form the main discharge circuit. The rotating magnetic field increases the number density of active groups and molecular kinetic energy during deposition. Different gas ratios are used during coating deposition to achieve high-density, high-quality DLC coatings. The workpiece for DLC coating deposition is placed at the bottom of the reaction chamber. This method is used to deposit uniform, highly wear-resistant, and highly corrosion-resistant DLC coatings on planar or irregularly shaped workpieces.