50 results about "Ion acceleration" patented technology

The invention belongs to the technical field of ionic wind propellers, and particularly relates to a multi-stage ionic wind propelling device with a common electrode structure, which comprises a plurality of ionic wind generating units which are sequentially arranged along the airflow direction, each unit consists of a conductive support structure and an ionization needle tip on the conductive support structure, and the ionic wind generating units are used for ionizing air under the action of a high-voltage electric field; the multiple units are isolated from one another through the insulation supporting structures and are connected in series, the power supply access module alternately provides positive and negative high-voltage power supplies for all the units, all the conductive supporting structures sequentially serve as ionization electrodes and receiving electrodes in a multi-stage electric field, and the electrode sharing type continuous acceleration structure is achieved. An independent receiving end does not need to be arranged for each stage, the number of electrodes and supporting parts is remarkably reduced, the ion acceleration path is prolonged, the thrust density is improved, a frame-type or non-frame-type structure can be adopted for flexible construction according to requirements, and the advantages of being light in structure, high in thrust-weight ratio and high in expansibility are achieved; the invention is suitable for the fields of micro aircrafts and directional air supply.

Generation of impurity ions is prevented or reduced in a carbon ion generating device in which a laser-driven ion acceleration system is employed. A carbon ion generating device generates a carbonized region by irradiating a film made of an organic compound with a first laser beam, and generates carbon ions by irradiating at least a part of the carbonized region with a second laser beam.

An ion implantation system has a first linear accelerator for accelerating ions of an ion beam to a first energy along a beam path. A second linear accelerator positioned downstream of the first linear accelerator along the beam path accelerates the ions to a second energy. A charge stripper has a stripper tube with a passageway positioned between the first and second linear accelerators. A charge stripping medium is provided in the passageway to strip at least one electron from the ions as the ion beam passes through the charge stripping medium. A focusing apparatus is associated with the stripper tube to control a trajectory of the ions within the passageway of the stripper tube. The focusing apparatus can be two or more quadrupoles and include an electrostatic lens, a magnet, a solenoid, or a Einzel lens.

The invention provides a hole activation method of p-type nitride, which comprises the following steps: heating an object to be activated to an annealing temperature for annealing by using heating equipment, the object to be activated comprising the p-type nitride or an epitaxial wafer comprising the p-type nitride; and in the annealing process, applying an electric field to the to-be-activated object by applying voltage, and controlling positively charged H ions in the to-be-activated object to move out of a p-type layer of the to-be-activated object in an accelerated manner. According to the method, an electric field is added in the annealing process to accelerate movement of H elements in a p-type layer and escape from an epitaxial wafer, so that the hole concentration of p-type nitride is increased.

An apparatus includes a substrate support for holding a substrate at a cryogenic temperature during etching, a plasma source configured to generate a plasma located above the substrate support, an ion acceleration grid located between the plasma source and the substrate support, wherein the ion acceleration grid is configured to apply a potential difference that, during etching, accelerates ions from the plasma toward the substrate support, and an inlet for an etchant process gas, wherein the inlet is located between the ion acceleration grid and the substrate support.

The present application provides a kind of ion spectrometer, it is related to the technical field of low energy ion detection in space, the ion spectrometer includes: energy spectrum screening device, by applying first electric field to multiple ion beams to be measured with different energy, so that multiple ion beams to be measured are deflected and allow target ions with predetermined energy range to exit, energy spectrum screening device includes: first shell;First pole plate is configured as arc and is installed to first shell, first pole plate and first shell are grounded;Second pole plate is electrically insulated and installed in first shell, is configured as arc concentric with first pole plate, by adjusting the voltage applied to second pole plate, variable first electric field is formed between second pole plate and first pole plate;Mass spectrum testing device, second electric field is applied to target ions, so that target ions are accelerated and keep uniform speed flight, to obtain the mass-to-charge ratio of multiple different ions based on the different flight time of multiple different ions in target ions, multiple different ions are separated.

The present invention relates to an ion source (1), in particular an ion propellant for propelling a spacecraft, comprising a reservoir (2) for a propellant (3) having a solid state and being liquefiable to a liquid state, a heater (4) for liquefying the propellant (3) in the reservoir (2), an emitter (5) in fluid communication with the reservoir (2) for receiving a stream (S) of liquefied propellant (3) from the reservoir (2), an extractor (7) in front of the emitter (5) for extracting ions (3') from the liquefied propellant (3) of the emitter (5) and accelerating the extracted ions (3') away from the emitter (5), wherein at least one deflector (11) is disposed upstream of the emitter (3) in the stream (S) of the propellant (3) towards the emitter (5).

This invention relates to the field of ion accelerator cooling technology, and more particularly to a directional cooling device for the high heat load region of an ion accelerator. The device includes a fixed tube, a connecting tube, and a cooling tube. The fixed tube is connected to the outlet end of the ion accelerator vacuum pipe, and the connecting tube is connected to the fixed tube. The cooling tube forms a spiral structure and is fitted onto the outer circumference of the connecting tube. A cooling medium flows inside the cooling tube. The cooling tube includes a first spiral section near the fixed tube and a second spiral section away from the fixed tube. The pitch of the first spiral section is smaller than the pitch of the second spiral section. This invention achieves segmented enhanced cooling in the high heat load region of the ion accelerator through a variable pitch cooling tube. The densely pitched first spiral section enhances high-temperature heat dissipation, while the loosely pitched second spiral section reduces flow resistance, significantly improving the cooling efficiency and maintenance convenience of the ion accelerator cooling device. It achieves directional enhanced cooling for high heat load regions such as the analytical magnet front-end pipe and the accelerator tube outlet, avoiding beam thermal distortion.

In a TOFMS measurement unit, an ion acceleration section accelerates ions to send them into a flight space, within which a flight-field creation section creates, an electric field for causing ions to fly. A controller unit operates the measurement unit so as to repeat a measurement for a predetermined sample while varying a voltage applied to an electrode in the measurement unit, and calculates mass-resolving power based on each measurement result. An approximate function calculator unit finds an approximate function representing a relationship between the voltage and the mass-resolving power, based on data of combinations of the voltage and the mass-resolving power obtained under the control of the controller unit. A voltage determiner unit determines a voltage value corresponding to a target value of the mass-resolving power by the approximate function, and determines the voltage value as a voltage to be applied to the electrode in the TOFMS concerned.

The invention discloses a device suitable for isotope separation and a sealing structure thereof, and relates to the field of isotope separation.The device comprises a supporting table and an ion acceleration pipeline fixedly installed at the top end of the supporting table, one end of the ion acceleration pipeline is communicated with an ion source, and the outer side of the ion acceleration pipeline is sleeved with a spiral cooling pipe in the length direction; one end of the spiral cooling pipe is connected with a pump body, the pump body is connected with a heat exchange pipe, and a cooling circulation system composed of the spiral cooling pipe, the pump body, the heat exchange pipe and the cooling water tank can rapidly take away heat generated during operation of the ion acceleration pipeline, the heat dissipation efficiency is higher, and when the first moving seat and the second moving seat move in the length direction of the spiral cooling pipe, the heat dissipation efficiency is higher. Wind power generated by the fan is evenly blown to the ion acceleration pipeline and the spiral cooling pipe through the exhaust port, auxiliary cooling of the ion acceleration pipeline is achieved, and meanwhile it can be prevented that condensate water is generated on the surface of the spiral cooling pipe due to too low temperature.

This disclosure relates to a method (100) for fabricating a blazed grating. The method (100) comprises providing a substrate and a patterned mask layer (110) on the substrate, performing primary dry etching (120) of the substrate such that primary ions are accelerated towards a primary etch direction to impinge on the substrate, and performing secondary dry etching (150) of the substrate such that secondary ions are accelerated towards a secondary etch direction to impinge on the substrate. A primary projection of the primary etch direction and a secondary projection of the secondary etch direction onto the grating cross-sectional plane extend perpendicular to one and the other of a blaze facet direction and an anti-blaze facet direction, respectively, and ions accelerated towards a direction with a projection onto a grating cross-sectional plane perpendicular to the blaze facet direction are collimated to form a collimated ion beam for etching the substrate.

The application discloses a surface oxide removing method and a quantum circuit preparation method. The surface oxide removing method is applied to a superconducting metal thin film and comprises the following steps: ionizing a set gas, accelerating ions formed after ionization, and forming a first compound composed of the ions and metal after physical and chemical reactions between the ions and surface oxides. In the application, the ions formed after ionization of the set gas and the surface oxides have physical and chemical reactions, and the first compound composed of the ions and metal is formed. The method for removing the oxides does not cause additional damage to the surface and the sidewall, does not affect the surface roughness, and does not cause additional loss channels.

A charge stripper has a stripper tube 174 with a passageway, which may be positioned between the first and second linear accelerators of an ion implantation system, the first linear accelerator for accelerating ions of an ion beam to a first energy along a beam path, and the second linear accelerator positioned downstream of the first linear accelerator along the beam path accelerates the ions to a second energy. A charge stripping medium is provided in the passageway to strip at least one electron from the ions as the ion beam passes through the charge stripping medium. A focusing apparatus 200 is associated with the stripper tube to control a trajectory of the ions within the passageway of the stripper tube. The focusing apparatus can be two or more quadrupoles 202 and include an electrostatic lens, a magnet, a solenoid, or a Einzel lens.

A beam accelerator system comprises an ion accelerator that generates a high-energy ion beam, a low-pressure chamber, an anode adjacent and fluidly connected to the low-pressure chamber, a plasma window adjacent and fluidly connected to the anode, and a cathode housing block adjacent and fluidly connected to the plasma window. The plasma window comprises a plurality of cooling plates, each cooling plate comprising an aperture that is aligned with an aperture in one or more adjacent cooling plate to form a plasma channel. The cathode housing block comprises a cathode target region and a cooling portion. The cooling portion comprises a fluid inlet, a fluid outlet, a cooling channel fluidly coupling the fluid inlet and the fluid outlet, and an opening adjacent to the plasma window and aligned with a longitudinal axis of the plasma channel.

The application relates to an ion accelerator standardized power supply and a standardized method thereof, which comprises a cabinet, at least one main controller, at least one machine box and at least one standard module unit; each machine box is arranged in a vertical direction and stacked in the cabinet; at least one standard function module is arranged side by side in each machine box; each standard function module is arranged in the machine box in a hot-pluggable manner, connected with a backboard through a self-defined standard connector and controlled by the main controller; the power supply unifies different types of power supply technical solutions in the field of ion accelerators, has unified and flexible structures, realizes different types and different specifications of accelerator excitation power supplies by changing or combining the standard function modules in the machine box. The application improves the efficiency of ion accelerator power supply design, processing, operation and maintenance, simplifies and unifies the production process, shortens the production cycle, saves the labor cost and the production cost. The application can be widely applied to the field of ion accelerators.

An ion implantation system has a first linear accelerator for accelerating ions of an ion beam to a first energy along a beam path. A second linear accelerator positioned downstream of the first linear accelerator along the beam path accelerates the ions to a second energy. A charge stripper has a stripper tube with a passageway positioned between the first and second linear accelerators. A charge stripping medium is provided in the passageway to strip at least one electron from the ions as the ion beam passes through the charge stripping medium. A focusing apparatus is associated with the stripper tube to control a trajectory of the ions within the passageway of the stripper tube. The focusing apparatus can be two or more quadrupoles and include an electrostatic lens, a magnet, a solenoid, or a Einzel lens.

This application relates to the field of aerospace metrology technology, specifically to a polyatomic directional flow generation device. The device includes a directional flow generation chamber. Inside the chamber, an axially arranged radio frequency ion source, an ion acceleration module, an ion screening module, an ion neutralization module, and an ion absorption module are sequentially arranged. An radio frequency generation and pulse modulation module is mounted on the outer wall of the chamber, comprising a radio frequency signal generator, a pulse modulation module, a power amplifier, and a radio frequency coil. This application targets polyatomic molecules with complex compositions after ionization. Through active control and screening, it can generate a high-speed directional molecular flow with independently adjustable velocity and density, high gas purity, and good velocity consistency, providing a standard experimental environment simulating the orbital gas environment for space metrology instruments.

The present application relates to the technical field of aerospace space metrology, and in particular, to a polyatomic molecular directed beam generation device, comprising a directed beam generation chamber, wherein a radio frequency ion source, an ion acceleration module, an ion screening module, an ion neutralization module and an ion absorption module which are arranged in sequence in an axial direction are provided inside the directed beam generation chamber, a radio frequency generation and pulse modulation module is provided on the outer wall of the directed beam generation chamber, and the radio frequency generation and pulse modulation module comprises a radio frequency signal generator, a pulse modulation module, a power amplifier and a radio frequency coil. According to the present application, for polyatomic molecules with complex compositions after ionization, a high-speed directed molecular beam with independently adjustable velocity and density, high gas purity and good velocity consistency can be formed by means of active regulation and screening, which can provide a standard test environment simulating an orbital gas environment for a space metrology-related instrument.

The present invention relates to the field of controlled nuclear fusion in nuclear energy applications. The title of the present invention is a positive-ion circular-collision nuclear fusion reactor. The technical problems to be solved by the present invention are: the nuclear fusion reaction times are short and the energy gains Q are less than 1. Our technical solution is: using an accelerator to accelerate hydrogen isotope positive ions to (0.1-3) Mev, and then inducing nuclear fusion reactions by circular collision. In the past, it was believed that the probability of inducing nuclear fusion by collision was less than 0.0001. We simultaneously employ five technical schemes to solve the problem of low probabilities of positive ion collision-induced nuclear reactions: 1. using the accelerator to accelerate the positive ions to (0.1-3) Mev; 2. using circular collision to induce nuclear fusion; 3. enabling collision in a collision area having a large cross section; 4. enabling collision in a long collision area; and 5. using a plurality of sets of electromagnetic lenses to focus ion beams to increase the ion density. In the present invention, energy generated by nuclear fusion is converted into heat energy in an energy conversion area, and then high-pressure steam is generated for power generation.

The application provides a compact beam switching deflection device and application thereof, and relates to the technical field of ion accelerator equipment. The device comprises a superconducting beam splitter, a multi-channel vacuum chamber and a superconducting combined magnet which are connected in sequence, wherein the superconducting beam splitter is used for splitting the input beam, the multi-channel vacuum chamber is provided with a plurality of outlet flanges, each outlet flange is connected to a branch beam line pipe, and at least one branch beam line pipe is provided with a superconducting combined magnet. The application adopts a superconducting magnet to deflect the beam, improves the maximum field strength of the deflection magnet, reduces the deflection radius of the beam, and thus reduces the floor area. Furthermore, the combined superconducting magnet is adopted to combine the quadrupole field on the dipole field, reduces the use of the quadrupole magnet, and thus further reduces the floor area.

The present disclosure provides a multi-ion accelerator beam species switching control system and method. The control system comprises: a database configured to store operation parameters of a multi-ion accelerator; a treatment control system configured to perform protocol conversion on received beam information, generate beam application information, and the beam information at least includes ion species, energy size and particle number; an accelerator control system configured to generate control instructions based on the beam application information and the ion species ready for the multi-ion accelerator, and send the control instructions and the operation parameters to the multi-ion accelerator to control the multi-ion accelerator to switch the beam species; an accelerator safety interlock system configured to obtain operation state information and beam state information of the multi-ion accelerator, determine a beam species switching result based on the operation state information and the beam state information, and feed back the beam species switching result to the treatment control system and the accelerator safety interlock system.

The invention discloses a time-of-flight mass analysis device, which comprises an ionization acceleration region for generating ions, screening the ions according to the initial energy and initial position of the ions and accelerating the ions to move towards a field-free region; the field-free region is used for providing free motion space with enough distance for ions; the reflection area is located at the tail end of the field-free area and used for reflecting ions to the signal detection area; and the signal detection area is used for detecting ion types. The ionization acceleration area of the device adopts a voltage driving mode of repulsion pulses and introduction of the pulses to reduce the initial space dispersion and initial energy dispersion of ions, meanwhile, the ionization probability of molecules is increased, and the resolution and sensitivity of time-of-flight mass analysis can be improved.

The present application relates to the technical field of ion accelerator, in particular to a drift tube type linear accelerator. The linear accelerator comprises: a cavity cylinder, which is a shell structure with a cavity inside; a drift tube, which is a square tube with open slots at both ends; a first cross beam and a second cross beam arranged in the cavity; wherein a plurality of drift tubes are arranged along the central axis of the cavity cylinder at intervals, the first cross beam and the second cross beam are both provided with support rods, the support rods on the first cross beam and the second cross beam are arranged alternately and connected with the drift tubes one by one; the first cross beam is connected with a positive electrode, and the second cross beam is connected with a negative electrode, for establishing a radio frequency electric field between adjacent drift tubes. In the present application, the drift tube is arranged as a square tube with open slots at both ends and mixed arrangement, so that the linear accelerator can not only keep a high acceleration gradient in the longitudinal direction, but also have a strong focusing force in the transverse direction.

This invention discloses a bipolar ion source for ionization and acceleration separation, belonging to the field of plasma technology. The bipolar ion source includes an upper inner magnetic ring, a lower inner magnetic ring, an upper outer magnetic ring, a lower outer magnetic ring, a ceramic channel, an anode, and an intermediate electrode. The anode is located in a first zero magnetic field region at the bottom of the ceramic channel cavity, and the intermediate electrode is located in a second zero magnetic field region in the middle of the ceramic channel cavity. The inner and outer magnetic rings are coaxially arranged on the inner and outer sides of the ceramic channel, forming a first magnetic field and a second magnetic field, respectively. The first magnetic field forms a first zero magnetic field region at the bottom of the channel, and the second magnetic field forms a second zero magnetic field region in the middle of the channel, with the peak value of the second magnetic field located in the plume region outside the ceramic channel. This invention, through the combination of the bipolar magnetic field and the intermediate electrode, ensures that the ionization of the working fluid mainly occurs between the anode and the intermediate electrode, and that ion acceleration mainly occurs after the intermediate electrode. This achieves partitioned control and decoupling of the ionization and acceleration processes, reducing electron energy in the ionization region, decreasing electron conduction current, improving ionization and discharge efficiency, and facilitating high-voltage acceleration and increased ion energy, while simultaneously reducing sputtering on the ceramic wall.

This invention relates to the field of ion accelerators, and more particularly to an electron cooling vacuum system for ion accelerators and a method for obtaining vacuum. The vacuum system includes two irregularly shaped vacuum chambers, two racetrack-shaped vacuum chambers, two vacuum chamber devices, a vacuum pipeline device, two electrostatic deflection plates, two first vacuum chambers, an electron gun vacuum chamber, and a collector vacuum chamber. The electron cooling vacuum system for ion accelerators provided by this invention, through the cooperation of a pentagonal alloy getter film, a titanium sublimation film, and NEG components, can effectively remove reactive gases and stably maintain a vacuum level of less than 1 × 10⁻⁶ within a vacuum pipeline device up to 8 m long. ‑9 The extremely high vacuum level of Pa significantly improves the beam lifetime. Because the shape of the irregular vacuum chamber is adapted to the shape of the internal space of the magnet, it not only meets the requirements of beam dynamics for magnetic field uniformity, but also realizes the pumping function in an extremely narrow physical space, solving the problem of not being able to install a large pump in a small space.

The invention relates to a focusing type electrospray thruster, which relates to the technical field of electric propulsion, and comprises an emitting electrode with a tip, a leading-out electrode with an equal-width notch, a focusing electrode with an equal-width rotary expanding notch and an accelerating electrode with an equal-width rotary expanding notch which are arranged in sequence, the notch centers of the leading-out electrode, the focusing electrode and the accelerating electrode and the tip of the emitting electrode are positioned on the same straight line; the emitting electrode and the focusing electrode are connected to a high-voltage direct-current power supply with the same electrical property, the leading-out electrode and the accelerating electrode are grounded, the emitting electrode and the leading-out electrode lead out an ion beam, the leading-out electrode and the focusing electrode focus the ion beam to reduce a divergence angle, and the focusing electrode and the accelerating electrode accelerate the ion beam with the reduced divergence angle. The method has the advantages that an ion accelerated divergent electric field of the electrospray thruster is converted into a divergent-focused electric field, and the plume divergence angle and the non-axial loss of a beam are reduced.

Multi-reflective time-of-flight mass analyzer, including: a latticeless ion accelerator; two ion mirrors arranged to reflect ions in a first dimension (X-dimension) and elongated in a second dimension (Z-dimension); and an ion detector; wherein the ion accelerator is arranged and configured to accelerate ions into a first of the ion mirrors at an angle to the first dimension, such that the ions are repeatedly reflected between the ion mirrors in the first dimension (X-dimension) while moving in the second dimension (Z-dimension); where the ions are not spatially focused in the second dimension (Z-dimension) as they move from the ion accelerator to the ion detector; and wherein the mass analyzer has a duty cycle of ≥ 5% and a resolution of ≥ 20000, wherein the distance in the first dimension (X-dimension) between the reflection points in the two ion mirrors is between 400 mm and 900 mm; wherein the mass analyzer is configured such that the ions travel a distance in the second dimension (Z-dimension) from the ion accelerator to the ion detector of between 150 mm and 400 mm, and wherein the ions are reflected between 3 and 10 times by the ion mirrors as they travel from the ion accelerator to the ion detector.

The application discloses a kind of neutron tube structures of accelerating polar adjustable radial extraction penning ion source, including sleeve, the one end inside sleeve is equipped with anode cylinder, the outer embedding of the cylinder body of anode cylinder is equipped with insulator, radial extraction hole is opened in the side of anode and insulator, the outside of radial extraction hole is coaxially equipped with acceleration cylinder with insulator, copper target is equipped at the tail end of acceleration cylinder;When using, adjusting nut, lengthening or compressing corrugated expansion pipe, the distance between acceleration cylinder and discharge cavity is adjusted, then external circuit is added voltage to anode cylinder, under the joint action of electric and magnetic field, gas ionizes, generates ion, ion is extracted through radial extraction hole, at this time, acceleration cylinder applies positive high voltage, ion is accelerated and extracted, and neutron is generated by hitting copper target;The present application is more easily extracted by setting radial extraction hole and configuring corrugated expansion pipe around acceleration cylinder, improves acceleration performance, controls the area of ion beam hitting copper target, improves copper target utilization rate, and improves neutron yield.

The application discloses a target post film thickness measurement imaging system for laser ion acceleration, and forms the following optical paths after the target: an incident light path, in which incident light rays are emitted by an illumination light source, enter a microscopic objective lens after passing through a first beam splitting cube, and are focused by the microscopic objective lens to irradiate the target; and a reflected light path, in which reflected light is formed after the target is irradiated by the incident light, enters the first beam splitting cube through the microscopic objective lens, is split into two beams by the first beam splitting cube, one of the two beams enters a spectrometer, and the other enters a second beam splitting cube, is split into two beams again by the second beam splitting cube, one of the two beams enters a first camera, and the other enters a second camera. The target post film thickness measurement imaging system for laser ion acceleration disclosed by the application solves the problems of target imaging illumination and target film thickness detection simultaneously through one system, reduces the complexity of the system, and saves space.

In one aspect, a time-of-flight (TOF) mass analyzer is disclosed, comprising: an inlet for receiving ions; a first ion acceleration region in which at least a portion of the ions received is accelerated to a first energy; a first field-free ion drift region positioned downstream of the first ion acceleration region for receiving the accelerated ions; a second ion acceleration region positioned downstream of the first field-free ion drift region for receiving ions exiting the first field-free ion drift region and accelerating the ions to a second energy; a second field-free ion drift region positioned downstream of the second ion acceleration region for receiving ions exiting the second ion acceleration region; and an ion detector for receiving ions passing through the second field-free ion drift region and generating ion detection data. The ion detection data may be analyzed to generate a mass spectrum of the detected ions.