87 results about "Ion acceleration" patented technology

The invention belongs to the technical field of ionic wind propellers, and particularly relates to a multi-stage ionic wind propelling device with a common electrode structure, which comprises a plurality of ionic wind generating units which are sequentially arranged along the airflow direction, each unit consists of a conductive support structure and an ionization needle tip on the conductive support structure, and the ionic wind generating units are used for ionizing air under the action of a high-voltage electric field; the multiple units are isolated from one another through the insulation supporting structures and are connected in series, the power supply access module alternately provides positive and negative high-voltage power supplies for all the units, all the conductive supporting structures sequentially serve as ionization electrodes and receiving electrodes in a multi-stage electric field, and the electrode sharing type continuous acceleration structure is achieved. An independent receiving end does not need to be arranged for each stage, the number of electrodes and supporting parts is remarkably reduced, the ion acceleration path is prolonged, the thrust density is improved, a frame-type or non-frame-type structure can be adopted for flexible construction according to requirements, and the advantages of being light in structure, high in thrust-weight ratio and high in expansibility are achieved; the invention is suitable for the fields of micro aircrafts and directional air supply.

Generation of impurity ions is prevented or reduced in a carbon ion generating device in which a laser-driven ion acceleration system is employed. A carbon ion generating device generates a carbonized region by irradiating a film made of an organic compound with a first laser beam, and generates carbon ions by irradiating at least a part of the carbonized region with a second laser beam.

The present invention relates to a spacecraft electric thruster particularly suitable for both propellant-fed and air-breathing electric space propulsion comprising an ionization chamber (11) for plasma generation which develops along a central development axis (X), wherein the ionization chamber (11) has a chamber inlet (12) configured to allow gas inflow and a chamber outlet (13) configured to allow extraction of ionized gas particles; a power injection assembly (30) configured to perform electron heating for plasma generation inside the ionization chamber (11); a magnetic assembly (20) configured to generate a magnetic field for plasma confinement in the ionization chamber (11); and an ion extraction and acceleration assembly (40) configured to extract ionized gas particles from the ionization chamber (11) through the chamber outlet (13) and accelerate them along an ion acceleration direction (Z), wherein the power injection assembly (30) comprises a microwave power delivery system (31) configured to deliver an electric field oscillating at a selected microwave frequency (f) and to inject the generated oscillating electric field in the ionization chamber (11), and wherein the ionization chamber (11) comprises a plurality of walls (11a, 15,16,41) closed to the passage of microwaves apart from a portion of at least one lateral wall (11a) of the plurality of walls (11a, 15,16,41) at which the power delivery system (31) is coupled to inject the generated oscillating electric field in the ionization chamber (11), and is resonant for electromagnetic fields oscillating at the selected microwave frequency.

The utility model provides a power supply detection device for a proton heavy ion accelerator. The power supply detection device comprises a measuring probe and a controller module. The input end of the measuring probe is electrically connected to the output end of the power supply equipment so as to measure the output voltage of the power supply equipment; the output end of the measuring probe is electrically connected to the controller module and inputs the output voltage of the power supply equipment to the controller module, and the controller module controls the measuring probe to measure the output voltage of the power supply equipment according to a preset frequency. According to the scheme, the troubleshooting time of the beam fault caused by the unstable power supply is greatly shortened, the problem is found in advance when the power supply function is unstable, the replacement time is set to the non-treatment time, and downtime caused by thorough damage of the power supply is avoided.

An ion implantation system has a first linear accelerator for accelerating ions of an ion beam to a first energy along a beam path. A second linear accelerator positioned downstream of the first linear accelerator along the beam path accelerates the ions to a second energy. A charge stripper is positioned between the first and second linear accelerators and is at ground potential. A gas source enclosure selectively encloses a plurality of stripper gas containers in an enclosure environment at ground potential. Each of the plurality of stripper gas containers contains a respective stripper gas. A flow control apparatus can have one or more valves, mass flow controllers, and conduits that selectively fluidly couples each of the plurality of stripper gas containers to the charge stripper and that selectively controls a flow of each respective stripper gas to the charge stripper.

An ion implantation system has a first linear accelerator for accelerating ions of an ion beam to a first energy along a beam path. A second linear accelerator positioned downstream of the first linear accelerator along the beam path accelerates the ions to a second energy. A charge stripper has a stripper tube with a passageway positioned between the first and second linear accelerators. A charge stripping medium is provided in the passageway to strip at least one electron from the ions as the ion beam passes through the charge stripping medium. A focusing apparatus is associated with the stripper tube to control a trajectory of the ions within the passageway of the stripper tube. The focusing apparatus can be two or more quadrupoles and include an electrostatic lens, a magnet, a solenoid, or a Einzel lens.

The invention provides a hole activation method of p-type nitride, which comprises the following steps: heating an object to be activated to an annealing temperature for annealing by using heating equipment, the object to be activated comprising the p-type nitride or an epitaxial wafer comprising the p-type nitride; and in the annealing process, applying an electric field to the to-be-activated object by applying voltage, and controlling positively charged H ions in the to-be-activated object to move out of a p-type layer of the to-be-activated object in an accelerated manner. According to the method, an electric field is added in the annealing process to accelerate movement of H elements in a p-type layer and escape from an epitaxial wafer, so that the hole concentration of p-type nitride is increased.

An apparatus includes a substrate support for holding a substrate at a cryogenic temperature during etching, a plasma source configured to generate a plasma located above the substrate support, an ion acceleration grid located between the plasma source and the substrate support, wherein the ion acceleration grid is configured to apply a potential difference that, during etching, accelerates ions from the plasma toward the substrate support, and an inlet for an etchant process gas, wherein the inlet is located between the ion acceleration grid and the substrate support.

The invention discloses an element concentration detection method and device, a storage medium and electronic equipment. The method comprises the following steps: acquiring an estimated concentration of a target element in a to-be-detected sample; determining a preset concentration interval to which the estimated concentration belongs and a bias voltage corresponding to the preset concentration interval; the bias voltage is used for controlling the number of ions entering a detector in an inductively coupled plasma mass spectrometer (ICP-MS), so that the detector outputs a pulse signal; controlling the ion acceleration voltage of a collision reaction tank in the ICP-MS to be bias voltage; acquiring a first pulse signal of a target element output by the to-be-detected sample through ICP-MS detection; determining the actual concentration of the target element according to the first pulse signal and a correction model; wherein the correction model reflects the corresponding relation between the element concentration and the pulse signal in the preset concentration interval and the corresponding bias voltage. According to the technical scheme, the detection accuracy of the element concentration can be improved, and the service life of the detector is prolonged.

The present application provides a kind of ion spectrometer, it is related to the technical field of low energy ion detection in space, the ion spectrometer includes: energy spectrum screening device, by applying first electric field to multiple ion beams to be measured with different energy, so that multiple ion beams to be measured are deflected and allow target ions with predetermined energy range to exit, energy spectrum screening device includes: first shell;First pole plate is configured as arc and is installed to first shell, first pole plate and first shell are grounded;Second pole plate is electrically insulated and installed in first shell, is configured as arc concentric with first pole plate, by adjusting the voltage applied to second pole plate, variable first electric field is formed between second pole plate and first pole plate;Mass spectrum testing device, second electric field is applied to target ions, so that target ions are accelerated and keep uniform speed flight, to obtain the mass-to-charge ratio of multiple different ions based on the different flight time of multiple different ions in target ions, multiple different ions are separated.

The present invention relates to an ion source (1), in particular an ion propellant for propelling a spacecraft, comprising a reservoir (2) for a propellant (3) having a solid state and being liquefiable to a liquid state, a heater (4) for liquefying the propellant (3) in the reservoir (2), an emitter (5) in fluid communication with the reservoir (2) for receiving a stream (S) of liquefied propellant (3) from the reservoir (2), an extractor (7) in front of the emitter (5) for extracting ions (3') from the liquefied propellant (3) of the emitter (5) and accelerating the extracted ions (3') away from the emitter (5), wherein at least one deflector (11) is disposed upstream of the emitter (3) in the stream (S) of the propellant (3) towards the emitter (5).

This invention relates to the field of ion accelerator cooling technology, and more particularly to a directional cooling device for the high heat load region of an ion accelerator. The device includes a fixed tube, a connecting tube, and a cooling tube. The fixed tube is connected to the outlet end of the ion accelerator vacuum pipe, and the connecting tube is connected to the fixed tube. The cooling tube forms a spiral structure and is fitted onto the outer circumference of the connecting tube. A cooling medium flows inside the cooling tube. The cooling tube includes a first spiral section near the fixed tube and a second spiral section away from the fixed tube. The pitch of the first spiral section is smaller than the pitch of the second spiral section. This invention achieves segmented enhanced cooling in the high heat load region of the ion accelerator through a variable pitch cooling tube. The densely pitched first spiral section enhances high-temperature heat dissipation, while the loosely pitched second spiral section reduces flow resistance, significantly improving the cooling efficiency and maintenance convenience of the ion accelerator cooling device. It achieves directional enhanced cooling for high heat load regions such as the analytical magnet front-end pipe and the accelerator tube outlet, avoiding beam thermal distortion.

The application relates to a structure for improving the acceleration efficiency of a radio frequency accelerating bucket in an ion implantation system. The radio frequency accelerating bucket structure comprises an inductor coil for feeding radio frequency power into an accelerating electrode through a matching circuit, a radio frequency accelerating bucket cavity for providing an insulation environment for the inductor coil and an additional capacitor, a capacitor adjusting ring for matching adjustment of the whole circuit, an accelerating electrode for generating a voltage for accelerating ions in an accelerating unit, ground electrodes 1 and 2 for forming an accelerating gap with the accelerating electrode, SF6 filled in the radio frequency bucket cavity for increasing the high-voltage resistance of the inductor coil, an isolation component for isolating the radio frequency accelerating bucket cavity and the accelerating cavity, an inductor coil adjusting cap for adjusting the size of the inductor, and a radio frequency power feeding head for feeding power into the inductor coil in the radio frequency accelerating bucket cavity. The ion accelerating implantation system can make ions obtain higher accelerating energy under the condition of equal radio frequency power feeding.

The invention provides an ion beam generation system based on a gallium ion filament, which comprises an ion source assembly, an emission gun assembly, an ion acceleration assembly, a focusing assembly and a deflection assembly, and is characterized in that the gallium ion filament forms a liquid film through current heating, gallium ions are ionized under a high-voltage electric field, and a primary ion beam is formed; the ion beam is further focused through an accelerating electrode and a multi-pole electrostatic lens in the system, biaxial scanning is achieved through an electrostatic deflection electrode set, and nanoscale beam spot control can be achieved in cooperation with a modular cavity, an anti-interference shielding structure and a vacuum compatible design. The device supports a 10 <-6 > Pa vacuum environment and a gas-assisted process, has the advantages of modular maintenance, high and low voltage signal isolation and the like, and is suitable for micro-nano processing scenes such as semiconductor repair, sample preparation, ion imaging and the like.

In a TOFMS measurement unit, an ion acceleration section accelerates ions to send them into a flight space, within which a flight-field creation section creates, an electric field for causing ions to fly. A controller unit operates the measurement unit so as to repeat a measurement for a predetermined sample while varying a voltage applied to an electrode in the measurement unit, and calculates mass-resolving power based on each measurement result. An approximate function calculator unit finds an approximate function representing a relationship between the voltage and the mass-resolving power, based on data of combinations of the voltage and the mass-resolving power obtained under the control of the controller unit. A voltage determiner unit determines a voltage value corresponding to a target value of the mass-resolving power by the approximate function, and determines the voltage value as a voltage to be applied to the electrode in the TOFMS concerned.

The invention discloses a device suitable for isotope separation and a sealing structure thereof, and relates to the field of isotope separation.The device comprises a supporting table and an ion acceleration pipeline fixedly installed at the top end of the supporting table, one end of the ion acceleration pipeline is communicated with an ion source, and the outer side of the ion acceleration pipeline is sleeved with a spiral cooling pipe in the length direction; one end of the spiral cooling pipe is connected with a pump body, the pump body is connected with a heat exchange pipe, and a cooling circulation system composed of the spiral cooling pipe, the pump body, the heat exchange pipe and the cooling water tank can rapidly take away heat generated during operation of the ion acceleration pipeline, the heat dissipation efficiency is higher, and when the first moving seat and the second moving seat move in the length direction of the spiral cooling pipe, the heat dissipation efficiency is higher. Wind power generated by the fan is evenly blown to the ion acceleration pipeline and the spiral cooling pipe through the exhaust port, auxiliary cooling of the ion acceleration pipeline is achieved, and meanwhile it can be prevented that condensate water is generated on the surface of the spiral cooling pipe due to too low temperature.

This disclosure relates to a method (100) for fabricating a blazed grating. The method (100) comprises providing a substrate and a patterned mask layer (110) on the substrate, performing primary dry etching (120) of the substrate such that primary ions are accelerated towards a primary etch direction to impinge on the substrate, and performing secondary dry etching (150) of the substrate such that secondary ions are accelerated towards a secondary etch direction to impinge on the substrate. A primary projection of the primary etch direction and a secondary projection of the secondary etch direction onto the grating cross-sectional plane extend perpendicular to one and the other of a blaze facet direction and an anti-blaze facet direction, respectively, and ions accelerated towards a direction with a projection onto a grating cross-sectional plane perpendicular to the blaze facet direction are collimated to form a collimated ion beam for etching the substrate.

The present invention relates to a constant-temperature cooling water system for cold capacity compensation of a heavy ion accelerator, comprising: deionized water passing through various systems of the accelerator enters an open water tank; the deionized water flowing out of the open water tank enters a first heat exchanger; a portion of the deionized water flowing out of the first heat exchanger enters a first cooling tower; the remaining portion enters a first water distributor after temperature and pressure testing; the deionized water flowing out of the first cooling tower enters a second heat exchanger; the deionized water flowing out of the second heat exchanger enters a chiller for cooling; the deionized water passing through the chiller passes through a second water distributor, a second heat exchanger, and a first heat exchanger in sequence before entering the first water distributor. The system, based on various physical experiments, such as the power and heat generation of various systems in an ion accelerator, diurnal and seasonal variations, and the cooling effect of the cooling tower, modifies the current cooling water system of a heavy ion accelerator to address the issues of cold capacity and control accuracy of the cooling water system of the heavy ion accelerator.

A method of performing negative electron activation dissociation (negative EAD) in mass spectrometry includes introducing a plurality of negatively charged analyte ions into an ion trap positioned in a chamber and trapping said negatively charged analyte ions in a reaction region of said ion trap, introducing a buffer gas into the chamber, using an electron source positioned in the chamber and external to the ion trap to generate electrons, and accelerating the electrons to form an electron beam and introducing the electron beam into the ion trap such that the accelerated electrons are capable of ionizing at least a portion of molecules of the buffer gas to generate a plurality of positively charged ions. The accelerated electrons interact with at least a portion of the analyte ions trapped in said reaction region to cause negative EAD thereof, thereby generating a plurality of fragment product ions.

The application discloses a surface oxide removing method and a quantum circuit preparation method. The surface oxide removing method is applied to a superconducting metal thin film and comprises the following steps: ionizing a set gas, accelerating ions formed after ionization, and forming a first compound composed of the ions and metal after physical and chemical reactions between the ions and surface oxides. In the application, the ions formed after ionization of the set gas and the surface oxides have physical and chemical reactions, and the first compound composed of the ions and metal is formed. The method for removing the oxides does not cause additional damage to the surface and the sidewall, does not affect the surface roughness, and does not cause additional loss channels.

The application relates to an ion accelerator standardized power supply controller and a dynamic local reconfigurable method thereof, which comprises a main plate, a standardized self-defined interface, a main control plate interface and a main control plate; the main plate is provided with a communication interface for communication between the power supply controller and other devices; the standardized self-defined interface is used for connecting the main plate with different function sub-plates, WR sub-plates and power supply modules; the main control plate interface is used for collecting all controllable signals of the main plate to the main control plate; the main control plate is provided with an ARM processor and an FPGA; the ARM processor is configured with an embedded EPICS application program for reading and writing the FPGA and directly publishing related variables in the main control plate into standard EPICS supported PV variables to communicate with an upper computer; the FPGA is configured with a modular bottom layer regulator framework, and the monitoring and control of main circuits of different types of accelerator power supplies are realized by dynamically and locally reconfiguring corresponding modules. The application can be widely applied in the field of ion accelerators.

A charge stripper has a stripper tube 174 with a passageway, which may be positioned between the first and second linear accelerators of an ion implantation system, the first linear accelerator for accelerating ions of an ion beam to a first energy along a beam path, and the second linear accelerator positioned downstream of the first linear accelerator along the beam path accelerates the ions to a second energy. A charge stripping medium is provided in the passageway to strip at least one electron from the ions as the ion beam passes through the charge stripping medium. A focusing apparatus 200 is associated with the stripper tube to control a trajectory of the ions within the passageway of the stripper tube. The focusing apparatus can be two or more quadrupoles 202 and include an electrostatic lens, a magnet, a solenoid, or a Einzel lens.

The application relates to a device for laser-induced plasma injection into a substrate, which comprises a laser-induced assembly, an ion acceleration assembly, a vacuum injection assembly and a rotating support assembly; the ion acceleration assembly is installed on the upper end of the vacuum injection assembly, the upper side of the ion acceleration assembly is provided with the laser-induced assembly, and the output end of the rotating support assembly is located in the vacuum injection assembly; the plasma formed by the laser-induced assembly is accelerated and selected through the ion acceleration assembly, enters into the vacuum injection assembly and is injected into the substrate on the rotating support assembly. The application is favorable for improving the injection efficiency of the plasma and has simple structure and convenient operation.

A beam accelerator system comprises an ion accelerator that generates a high-energy ion beam, a low-pressure chamber, an anode adjacent and fluidly connected to the low-pressure chamber, a plasma window adjacent and fluidly connected to the anode, and a cathode housing block adjacent and fluidly connected to the plasma window. The plasma window comprises a plurality of cooling plates, each cooling plate comprising an aperture that is aligned with an aperture in one or more adjacent cooling plate to form a plasma channel. The cathode housing block comprises a cathode target region and a cooling portion. The cooling portion comprises a fluid inlet, a fluid outlet, a cooling channel fluidly coupling the fluid inlet and the fluid outlet, and an opening adjacent to the plasma window and aligned with a longitudinal axis of the plasma channel.

The invention relates to the technical field of ion accelerators, in particular to an accelerator fault self-recovery method, an ion accelerator and a readable storage medium, and the method comprises the steps: obtaining a working environment signal, and detecting whether an abnormal state exists or not according to the working environment signal; when the abnormal state exists, determining an abnormal state type and an abnormal state module according to the working environment signal; reading an abnormal state type, and adjusting the working environment signal in the abnormal state module to an abnormal adjustment value according to the abnormal state type; an abnormal state module is restarted, and when an abnormal state does not exist after the corresponding abnormal state module is restarted, a working environment signal in the abnormal state module is adjusted to be a usual set value; and when an abnormal state still exists after the corresponding abnormal state module is restarted, a fault signal is output to the upper computer. According to the invention, the abnormal state of the ion accelerator can be monitored in real time, the abnormal state can be recovered automatically, and a fault code is output to the upper computer, so that the abnormal state can be handled in time, and the maintenance efficiency and reliability are improved.

The application relates to an ion accelerator standardized power supply and a standardized method thereof, which comprises a cabinet, at least one main controller, at least one machine box and at least one standard module unit; each machine box is arranged in a vertical direction and stacked in the cabinet; at least one standard function module is arranged side by side in each machine box; each standard function module is arranged in the machine box in a hot-pluggable manner, connected with a backboard through a self-defined standard connector and controlled by the main controller; the power supply unifies different types of power supply technical solutions in the field of ion accelerators, has unified and flexible structures, realizes different types and different specifications of accelerator excitation power supplies by changing or combining the standard function modules in the machine box. The application improves the efficiency of ion accelerator power supply design, processing, operation and maintenance, simplifies and unifies the production process, shortens the production cycle, saves the labor cost and the production cost. The application can be widely applied to the field of ion accelerators.

An ion implantation system has a first linear accelerator for accelerating ions of an ion beam to a first energy along a beam path. A second linear accelerator positioned downstream of the first linear accelerator along the beam path accelerates the ions to a second energy. A charge stripper has a stripper tube with a passageway positioned between the first and second linear accelerators. A charge stripping medium is provided in the passageway to strip at least one electron from the ions as the ion beam passes through the charge stripping medium. A focusing apparatus is associated with the stripper tube to control a trajectory of the ions within the passageway of the stripper tube. The focusing apparatus can be two or more quadrupoles and include an electrostatic lens, a magnet, a solenoid, or a Einzel lens.

This application relates to the field of aerospace metrology technology, specifically to a polyatomic directional flow generation device. The device includes a directional flow generation chamber. Inside the chamber, an axially arranged radio frequency ion source, an ion acceleration module, an ion screening module, an ion neutralization module, and an ion absorption module are sequentially arranged. An radio frequency generation and pulse modulation module is mounted on the outer wall of the chamber, comprising a radio frequency signal generator, a pulse modulation module, a power amplifier, and a radio frequency coil. This application targets polyatomic molecules with complex compositions after ionization. Through active control and screening, it can generate a high-speed directional molecular flow with independently adjustable velocity and density, high gas purity, and good velocity consistency, providing a standard experimental environment simulating the orbital gas environment for space metrology instruments.

The invention relates to the technical field of ion accelerator radiotherapy, in particular to a drawing device for a beam distribution system. The drawing device comprises a shell assembly, a push rod assembly and a push rod assembly, wherein one end of the shell assembly is open; one end of the ionization chamber tray is inserted into the shell assembly through the opening; the two sliding assemblies are symmetrically arranged on the two sides of the ionization chamber tray and are respectively connected with the shell assembly; wherein the ionization chamber tray is provided with a receiving groove used for installing a beam detector, the shell assembly is provided with a square hole, and when the ionization chamber tray is embedded in the shell assembly, the square hole is aligned with the receiving groove. According to the beam detector, the bearing groove is formed in the ionization chamber tray, the ionization chamber tray is installed on the shell assembly in the drawable mode, the beam detector can be rapidly installed and replaced, meanwhile, the drawing device is light in structure and easy and convenient to operate, and repeated positioning precision can be ensured.

The present application relates to the technical field of batteries. Disclosed are a separator film and a preparation method therefor, and a battery and an electric apparatus. The separator film comprises a plurality of layers of microporous films, wherein an intermediate layer is provided between at least two layers of microporous films arranged to be adj acent to each other, and the intermediate layer includes a ferroelectric. In the solution of the present application, the separator film is configured to comprise a plurality of layers of microporous films, and an intermediate layer including a ferroelectric is provided between at least two layers of microporous films arranged to be adjacent to each other. Since the ferroelectric has a spontaneously polarized built-in electric field, which is equivalent to establishing an ion accelerator on an intermediate layer of the separator film, ions are accelerated under the action of the electric field when passing through the intermediate layer of the separator film, thereby improving the ionic conductivity of the separator film.