169 results about "Reflectron" patented technology

A surgical microscopy system is provided wherein an optical coherence tomography facility is integrated into a microscopy system. A beam of measuring light formed by collimating optics of an OCT system is deflected by a beam scanner, traverses imaging optics, and is reflected by a reflector such that the beam of measuring light traverses an objective lens of microscopy optics and is directed to an object region of the microscopy optics. A position of the beam of measuring light being incident on the reflector is substantially independent on a direction into which the beam of measuring light is deflected by the beam scanner. When traveling through the beam scanner, the beam of measuring light is comprised of a bundle of substantially parallel light rays.

The content of the invention comprises a concept of multi-beam ion pre-selection from a single sample, coordinated mobility (against the gas flow) separation, cooling ions in supersonic gas flow and mass separation of thus low divergent ions by single or plural compact high-resolution orthogonal time-of-flight mass spectrometers both linear or reflectron type with controlled collision-induced dissociation (CID) and multi-channel data recording for the optimization of sample use in the analysis, and obtaining as much useful information about the sample as possible in a reasonably short time.

The invention relates to a time-of-flight mass spectrometer for injection of the ions orthogonally to the time-resolving axis-of-flight component, with a pulser for acceleration of the ions of the beam in the axis-of-flight direction, preferredly with a velocity-focusing reflector for reflecting the ion beam and with a flat detector at the end of the flight section. The invention consists of using, both for acceleration in the pulser and for reflection in the reflectors, a gridless optical system made up of slit diaphragms which can spatially focus the ions onto the detector in the direction vertical to the directions of injection and flight axis, but which does not have any focusing or deflecting effect on the other directions. For some reflector geometries it is essential to use an additional cylindrical lens for focusing, and for other reflector geometries the use of such a lens may be advantageous.

The invention relates to time-of-flight mass spectrometers for the measurement of daughter ion spectra (also called fragment ion spectra or MS/MS spectra) and corresponding measurement methods.According to the invention, the ions of an ion source are initially accelerated only to an intermediate level of energy, allowing them to decompose at that energy level by metastable decomposition or by collisionally induced fragmentation (CID). The ions are then accelerated in a second step to a high energy level. Light fragment ions gain a higher velocity than heavier fragment ions or non-decomposed parent ions. The spectrum of fragment ions can be detected separated by mass in either linear or reflector mode. An ion selector at the low energy level selects a single type of parent ion in order to avoid superpositions with fragment ions of other parent ions. A particularly preferred embodiment raises the potential of ions, for there second acceleration, during their flight through a small electrically isolated flight path chamber.

An optical amplifier with a flattened wideband response is obtained by coupling counter-propagating pumping energy into an optical waveguide to cause Raman amplification in the optical waveguide, and by reflecting an amplified signal received from the optical waveguide into an output waveguide using a reflector having a spectral characteristic that is complementary to the spectral gain characteristic of the Raman amplification.

The invention is directed to an arrangement and a method for the generation of EUV radiation of high average output, preferably for the wavelength region of 13.5 nm for use in semiconductor lithography. It is the object of the invention to find a novel possibility for generating EUV radiation of high average output which permits a time-multiplexing of the radiation of a plurality of source modules in a simple manner without overloading the source modules and without requiring extremely high rotational speeds of optical-mechanical components. This object is met, according to the invention, in that a plurality of identically constructed source modules which are arranged so as to be distributed around a common optical axis are directed to a rotatably mounted reflector arrangement which successively couples in the beam bundles of the source modules along the optical axis. The reflector arrangement has a drive unit by which a reflecting optical element is adjustable so as to be stopped temporarily in angular positions that are defined for the source modules and is oriented to the next source module in intervals between two exposure fields of a wafer by means of control signals emitted by an exposure system.

To transmit energy without direct mechanical or electrical contact, a transmitter unit emits a laser beam onto a radiation receiver of a receiver unit including a photovoltaic cell arrangement surrounded by a ring-shaped reflector. A portion of the laser beam is reflected from the reflector back to the transmitter unit, where the received reflected signal is evaluated to determine the position of the laser beam impinging on the radiation receiver. The transmitter unit deflects the laser beam as necessary to impinge directly on the photovoltaic cell arrangement and track any relative motion of the receiver unit. The receiver unit orients the radiation receiver to optimize the energy reception. The position of the laser beam is modulated and the resulting variation of the reflected signal is evaluated to determine therefrom the position of the laser beam on the radiation receiver.

An apparatus directing x-rays along a predetermined axis includes an x-ray optic having one or more nested x-ray reflector rings positioned relative to a source generating broad spectrum x-rays so that generated x-rays moving away from the predetermined axis are collected by the reflector incident at or close to a Bragg angle to thereby reflect the collected x-rays into a conically parallel beam. A first diffractor is positioned relative to the x-ray optic to receive incident thereon the conically parallel beam, the first diffractor selected from a truncated cone and a cylinder and diffracting the conically parallel beam toward the predetermined axis. A second diffractor is positioned relative to the first diffractor and having a geometry effective to receive incident thereon and redirect the conically parallel beam along the predetermined axis as a collimated beam of substantially parallel x-rays.

A system and method are provided to calibrate fluorescence detection of a fluorescence microscope by using a near-perfectly uniform reflector as a target in combination with temporary removal of the microscope's emission filter. Excitation light is reflected from the near-perfectly uniform reflector back into the microscope's objective optical system and transmitted to a dichroic. A small fraction of the excitation light passes though the dichroic and is measured by a CCD camera or other appropriate measurement device. By measuring the intensity of the residual excitation light at a plurality of points in the field of view, variations in illumination intensity may be determined. Using this, fluorescence detection at different points in the field of view may be readily calibrated.

A multi-axis plane mirror interferometer uses shared measurement and reference beams that respectively reflect from measurement and reference reflectors before that shared beams are split into individual beams corresponding to the measurement axes of the interferometer. An N-axis interferometer thus requires only N+1 measurement beam paths, one for the shared measurement beam and N for individual measurement beams, to provide for each measurement axis the two reflections that cancel angular misalignment between the measurement and reference reflectors.

A reflectron lens and method are provided. The reflectron lens comprises a tube having a continuous conductive surface along the length of the tube for providing an electric field interior to the tube that varies in strength along the length of the tube. The tube may comprise glass, and in particular, a glass comprising metal ions, such as lead, which may be reduced to form the conductive surface. The method includes a step of introducing a beam of ions into a first end of a dielectric tube having a continuous conductive surface along the length of the tube. The method further includes a step of applying an electric potential across the tube to create an electric field gradient that varies in strength along the length of the tube so the electric field deflects the ions to cause the ions to exit the tube through the first end of the tube.

An interferometric confocal method and assembly for terabyte volume optical data memories couples two-beam spectral interferometry to chromatic confocal technology and permits a longitudinal splitting of foci in the memory volume, with the foci having limited diffraction. A spectrometer is located downstream of the interferometer with confocal discrimination in the beam path. A diffractive optical zone lens (DOZE) with a usage of the first diffraction order is introduced into the interferometric beam path to achieve longitudinal chromatic splitting. The interferometer can be a fibre-coupled interferometer with a retroreflector in the fibre-coupled reference arm and with wavelength-dependent optical path difference modification by dispersion or diffraction. The optical path difference in the interferometer is set so that easily detectable wavelets are formed from detectable interferograms by spectral analysis.

In its most general terms the invention compensates for the effect of the mass offset in the prior art calibration method. This can be achieved either by correcting for the offset or assigning mass to the peaks in such a way that the offset is avoided. Accordingly in a first aspect there is provided a method of calibrating a reflectron time-of-flight mass spectrometer using a spectrum generated by fragment ions wherein a measured mass value is modified to take account of the effect of post source decay and that modified value is used for calibration. A modified calibration function can then be defined and used to determine actual fragment ion masses of an unknown compound.

In a substrate processing apparatus using a neutralized beam and a method thereof, the substrate processing apparatus includes: an ion source for emitting an ion beam at an emitting angle; reflectors at which the ion beam emitted by the ion source is incident and subject to 2n collisions (where n is a positive integer) in first and second opposite directions to neutralize the ion beam as a neutralized beam and to restore a direction of propagation of the neutralized beam to the emitting angle of the ion beam; and a substrate at which the neutralized beam generated by the reflectors is incident on to perform a process. Accordingly, an incident angle of the resultant neutralized beam is perpendicular to a substrate, while the direction of propagation of the originating ion source and the surface of the substrate are maintained to be perpendicular to each other.

The invention is directed towards common focus energy emitters having a common focus energy source and including two or more energy source units each having a 3D concave primary reflector for reflecting energy into an energy beam focused at the common focus energy source, and a secondary optical element for shaping the energy beam into an exit beam component of the exit beam. The 3D concave primary reflectors bound a minor 3D concave section of an imaginary primary reflector ellipsoid of revolution having a primary reflector axis of revolution non-coaxial with the energy emitter axis. Each primary reflector axis of revolution includes a first focal point disposed at the common focus energy source and a second focal point where its associated energy source is disposed thereat.

The invention relates to time-of-flight mass spectrometers, equipped with ion reflector and ion detector, with orthogonal ion injection and outpulsing of a segment of the ion beam perpendicular to the direction of injection in a pulser. The invention is directed to a time-of-flight mass spectrometer in which a reflector and an ion detector each have an angular offset about an axis that is perpendicular to the respective directions of injection and deflection. This allows a large distance to be used between the pulser and detector with the highest possible utilization of ions.

The invention relates to the acquisition of mass spectra of complex protein mixtures, often called protein profiles, for example to search for biomarkers which indicate stress situations, or to identify microbes. Up to now protein profiles have been acquired using ionization by matrix-assisted laser desorption with high detection sensitivity in linear time-of-flight mass spectrometers, but these display very poor mass resolution and a very poor reproducibility of the mass values. The invention provides methods which produce surprisingly similar mass spectra, but with far higher mass resolution and mass accuracy. Ionization takes place outside the vacuum at ambient pressure, preferably by means of laser desorption and CI post-ionization. Analysis of the ions takes place in a high-resolution mass spectrometer, for example a reflector time-of-flight mass spectrometer with orthogonal ion injection.

The headlamp assembly having low beam and high beam operation modes includes a light source, a reflector surface adapted to reflect light from the light source outward to a condenser lens positioned at a distance from the light source. An opaque shield is positioned between the light source and the condenser lens and is moveable between a first position, where a portion of the reflected light is blocked from reaching the condenser lens, and a second position, where substantially all of the reflected light is allowed to reach the condenser lens. The condenser lens has a first segment and a second segment wherein, when the opaque shield is in the first position, light is reflected almost entirely to the first segment of the condenser lens, and when the opaque shield is in the second position, light is reflected to the first and second segments of the condenser lens.

An interferometer system to generate an interference signal of a surface of a sample includes a broadband illuminator to provide a broadband illumination beam, a beam splitter to split the broadband illumination beam in a reference beam for reflection on a reference reflector and a measurement beam for reflection on the surface of the sample, and a detector to receive an interference radiation intensity created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample to generate an interference signal. The interferometer system having a continuous variable broadband reflector in the beam splitter and/or the reference reflector to adjust the broadband radiation intensity balance between the measurement beam and the reference beam.