The invention discloses a
semiconductor neutron detector, a preparation method and a
neutron flux measuring device, and relates to the field of
neutron detection.The
semiconductor neutron
detector sequentially comprises an ohmic
electrode, a substrate, a buffer layer, an epitaxial layer and a Schottky
electrode from bottom to top; the substrate, the buffer layer and the epitaxial layer are all made of 4H-SiC; when the
semiconductor neutron
detector detects neutrons, the neutrons and the epitaxial layer are subjected to
nuclear reaction,
electron hole pairs excited by neutron energy deposition sequentially pass through the buffer layer and the substrate from the epitaxial layer to the ohmic
electrode, and the ohmic electrode outputs neutron current signals which are converted into
voltage signals in the sampling circuit so as to perform
neutron detection. By adopting the characteristics of high
hardness, high
thermal conductivity, wide forbidden band and high displacement
threshold energy of the 4H-SiC material, the high-
fluence-rate
neutron flux can be measured in real time, and the reliability and stability of the semiconductor neutron detector are improved.