The present invention relates to an apparatus for forming a
closed chamber when wafers are processed in a hot disc, and specifically an automatic regulating apparatus of a hot disc
processing closed chamber. The apparatus includes a driving mechanism, a disc cover elevating mechanism, a disc cover, a sealing ring, a low sealing body, a disc body and a base plate. The driving mechanism and the low sealing body are mounted on the base plate, the disc body is arranged in the low sealing body, the disc cover is arranged on the upper end of the sealing body, a
processing chamber is formed among the disc body, the disc cover and the low sealing body, an automatic regulating chamber is arranged on the disc cover along the periphery, a groove is arranged on the low sealing body along the periphery, one end of the sealing ring is accommodated in the automatic regulating chamber, the other end of the sealing ring stretches out the automatic regulating chamber body and is connected with the groove on the upper end of the low sealing body in a cooperation mode, a
processing air inlet and an adjusting air inlet are arranged on the disc cover, a processing
waste gas outlet is arranged on the low sealing body, one end of the disc cover elevating mechanism is connected with the driving mechanism, and the other end of the disc cover elevating mechanism is connected with the disc cover. According to the invention, the processing
waste gas leakage due to bad contact between the disc cover and the low sealing body can be avoided, and the full sealing in the processing chamber can be realized.