The utility model discloses a
thermal radiation control device of a photoetching
hot plate device, which comprises a heating seat, a controller, a temperature controller, a
hot plate, a
resistance wire and an
auxiliary heating component, the controller is fixedly mounted on the heating seat, the temperature controller is positioned inside the heating seat, and the bottom of the
hot plate is fixedly mounted at the top of the temperature controller. According to the utility model, the temperature controller is used for controlling the
resistance wire to heat, the heat of the
resistance wire is transmitted to the heat-conducting gel layer, the heat-conducting gel layer has better heat
conductivity and flowability, the heat-conducting gel layer is integrally heated more uniformly, the heat-conducting gel layer is more uniform in conduction temperature, the top of the hot plate is heated uniformly, and a
semiconductor wafer is heated uniformly; the air extracting pump and the
electric heating pipe are started, the air extracting pump extracts outside air through the air inlet
pipe, the outside air needs to be filtered through the filter and then enters the air outlet
pipe, the heating cylinder, the extension pipe, the
heat pipe and the hot air opening to be sprayed out, and the sprayed hot air is used for preventing the outside air from making contact with the top
coating glue of the
semiconductor wafer.