Automatic regulating apparatus of hot disc processing closed chamber
An automatic adjustment device, closed cavity technology, used in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as personal injury, exhaust gas leakage, personal and company economic losses, and achieve a good contact area. Effect
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[0019] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0020] Such as figure 1 , figure 2 As shown, the present invention includes a driving mechanism 1, a disc cover lifting mechanism 2, a disc cover, a sealing ring 7, a lower sealing body 8, a disc body 9 and a bottom plate 10, wherein the driving mechanism and the lower sealing body 8 are installed on the bottom plate 10 through a pillar 11 Above, the disc body 9 is arranged in the lower sealing body 8, and the disc cover is arranged on the upper end of the sealing body 8. The connected first process chamber a and the second process chamber c. The outer edge of the lower end surface of the disc cover is provided with a self-adjusting cavity b along the circumferential direction, and the outer edge of the upper end of the lower sealing body 8 is provided with a groove along the circumferential direction, and one end of the sealing ring 7 is accommodated in t...
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