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Reagent dispensing apparatus and delivery method

This invention relates to a vapor or liquid phase reagent dispensing apparatus comprising:a vessel which comprises a removable top wall member, a sidewall member and a bottom wall member configured to form an internal vessel compartment to hold a source chemical up to a fill level and to additionally define an inner gas volume above the fill level;said sidewall member having a protuberance that extends into the internal vessel compartment adjacent to the top wall member;said top wall member and said sidewall member having opposing flat surfaces, wherein the opposing flat surfaces are optionally in contact with one another;fastening means for securing said top wall member to said sidewall member through the opposing flat surfaces that are optionally in contact with one another;said top wall member and said protuberance having opposing flat surfaces, wherein the opposing flat surfaces are not in contact with one another and at least a portion of the opposing flat surfaces are hardened; anda metal seal aligned and in contact with the hardened opposing flat surfaces of said top wall member and said protuberance;wherein said hardened opposing flat surfaces of said top wall member and said protuberance have a hardness greater than the hardness of said metal seal. The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices.
Owner:PRAXAIR TECH INC
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