The application discloses a kind of detection methods of automatically replacing
photoresist.The prior art is overcome by the present application, which has the problems of complex process flow, tedious steps and easy to cause abnormal
coating due to errors in manual replacement of
photoresist bottles.The application comprises the following steps:S1: simultaneously monitor the presence or absence of
photoresist in the glue
discharge pipe and buffer, determine whether to replace the photoresist
bottle alarm prompt, and automatically replace the photoresist
bottle operation;S2: simultaneously open the air
inlet valve and exhaust bubble valve, when the pressure gauge detects that the air pressure in the photoresist
bottle is greater than a certain threshold, start automatic glue supplement;S3: simultaneously monitor the presence or absence of photoresist below the glue
discharge pipe, buffer and exhaust bubble valve in real time, to determine whether the buffer is filled with photoresist, close the air
inlet valve and exhaust bubble valve, and complete the automatic glue supplement.By simultaneous linkage monitoring of multiple sensors in multiple positions, the replacement of photoresist bottles is automatically completed, reducing labor costs, avoiding human errors, and ensuring the quality of the process flow.