The invention relates to the technical field of
chip detection, in particular to an
integrated circuit chip micro-nano scale defect detection device which comprises an X-
ray detector, a driving motor, a rotating
assembly, a support, a detection mechanism, an ash removal
assembly and a blowing
nozzle. A detection platform is arranged on the X-
ray detector, a driving cavity is formed in the detection platform, and a driving motor is arranged behind the detection platform; a rotating
assembly is installed on the driving motor, a support is installed on the rotating assembly, a detection mechanism is fixedly installed on the support and comprises an X-
ray emitter and a
flat panel detector, and the driving motor drives the support to rotate through the rotating assembly; the dust removal assembly is located on the detection platform and connected with the blowing
nozzle, the rotating assembly drives the blowing
nozzle to clean the surface of the
integrated circuit chip through the dust removal assembly, multi-angle comparison detection is achieved through rotating motion, then the detection precision is improved, and the detection accuracy is guaranteed.