Detection substrate, manufacturing method thereof and flat panel detector

Abstract

The invention discloses a detection substrate, a manufacturing method thereof and a flat panel detector. The detection substrate comprises a substrate body, a plurality of transistors, an oxide layer,a plurality of reading electrodes and a plurality of photoelectric conversion structures, wherein the transistors, the oxide layer, the reading electrodes and the photoelectric conversion structuresare sequentially located on the substrate body; the first electrodes of the transistors are electrically connected with the photoelectric conversion structures in a one-to-one correspondence manner through the reading electrodes, and the material of an active layer comprises an oxide; and each photoelectric conversion structure comprises an N-type semiconductor layer, an intrinsic semiconductor layer and a P-type semiconductor layer. The oxide layer at least covers the channel regions of the transistors and is insulated from the reading electrodes. The oxide layer covering the channel regionsof the transistors is arranged between the layer where each transistor is located and the layer where each reading electrode is located, so hydrogen atoms generated in the subsequent process of depositing the photoelectric conversion structure react with the oxide layer, the hydrogen atoms are prevented from reaching the channel region, the stability of the transistor is effectively improved, andthe performance of the flat panel detector is improved.

Description

technical field [0001] The invention relates to the technical field of photoelectric detection, in particular to a detection substrate, a manufacturing method thereof and a flat panel detector. Background technique [0002] X-ray inspection technology is widely used in industrial non-destructive testing, container scanning, circuit board inspection, medical treatment, security, industry and other fields, and has broad application prospects. Traditional X-Ray imaging technology belongs to analog signal imaging, which has low resolution and poor image quality. The X-ray digital imaging technology (Digital Radio Graphy, DR) that appeared in the late 1990s uses X-ray flat panel detectors to directly convert X-ray images into digital images, because the converted digital images are clear, high-resolution, and easy to save and store. Transmission has become a hot research topic at present. According to different structures, X-ray flat panel detectors are divided into direct conv...

AI Technical Summary

Problems solved by technology

However, during the deposition process of the PIN film, hydrogen atoms (H plasma) diffuse to the channel region of a-IGZO TFT, resulting in poor stability of a-IGZO TFT, which in turn affects the performance of the flat panel detector.

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