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127results about "Linear accelerators" patented technology

Multi-leaf grating assembly, radiotherapy equipment and leaf locking method

The invention provides a multi-leaf grating assembly, radiotherapy equipment and a blade locking method. The multi-leaf grating assembly comprises a frame and at least two grating blades arranged at intervals. Each grating blade is in sliding connection relative to the frame and can slide along a first direction; the device further comprises a driving device and a locking piece connected with the driving device. When the grating blade slides into the initial position in the frame, the driving device can drive the locking piece to abut against the grating blade in the second direction, and the grating blade abuts against the frame. The first direction and the second direction are perpendicular to the thickness direction of the grating blade, and the first direction and the second direction are not parallel. The driving device can drive the locking piece to abut against the grating blade so that the grating blade can abut against the frame, and therefore the grating blade is fixed through friction force between the grating blade and the frame and friction force between the grating blade and the locking piece. Therefore, mechanical collision of grating blades or weakening of mechanical collision strength in acceleration and deceleration stages of high-speed rotation of the multi-leaf grating assembly is avoided.
Owner:SHENYANG NEUSOFT ZHIRUI RADIOTHERAPY TECH CO LTD

Acceleration cavity

To provide an acceleration cavity capable of switching energy of charged particles without using a complex mechanism.SOLUTION: An acceleration cavity comprises: a body that is in an electrically conductive cylindrical shape and includes a plurality of division members obtained by division using a plane along the central axis so that division surfaces along the plane are provided in a state of facing each other with a gap; a plurality of cell parts that are disposed inside the body in a state of being arranged in the axial direction of the central axis of the body and are communicated with each other using a communication part through which charged particles can pass; and a switch member that is disposed in the gap of the body, is movable in the gap along the plane, and performs movement to switch the magnitude of an electric field for accelerating the charged particles.SELECTED DRAWING: Figure 2
Owner:MITSUBISHI HEAVY IND MACHINERY SYST LTD

Optical design of a laboratory-scale compact free-electron laser based on inverse Compton scattering

The light source includes a linear accelerator for accelerating electron bunches to relativistic energies. The light source further includes a first grating downstream of the linear accelerator, which is positioned so that electron bunches pass through it to produce a diffraction pattern. The light source further includes an emittance exchange device downstream of the first grating, which rotates the diffraction pattern in a direction substantially parallel to the propagation direction of the electron bunches. The light source further includes a laser that generates light pulses. The light source is configured such that the light pulses from the laser interact with the electron bunches in an overtaking geometry at an interaction point downstream of the emittance exchange device, while the diffraction pattern is substantially parallel to the propagation direction of the electron bunches to produce light via inverse Compton scattering.
Owner:THE ARIZONA BOARD OF REGENTS ON BEHALF OF THE UNIV OF ARIZONA

High power ion beam generator systems and methods

PendingEP4593535A3Nuclear energy generationElectric arc lamps
Provided herein are high energy ion beam generator systems and methods that provide low cost, high performance, robust, consistent, uniform, low gas consumption and high current / high-moderate voltage generation of neutrons and protons. Such systems and methods find use for the commercial-scale generation of neutrons and protons for a wide variety of research, medical, security, and industrial processes.
Owner:SHINE TECHNOLOGIES LLC

Multi-leaf collimator, radiotherapy device and leaf dismounting method

This application provides a multi-leaf grating, a radiotherapy device, and a method for leaf removal. The multi-leaf grating includes a leaf frame, a first grating assembly, a first stop assembly, and a drive assembly. The leaf frame has a first leaf cavity and a first clearance groove located within the first leaf cavity, the first clearance groove extending along the width direction of the leaf frame. The first grating assembly includes a first leaf and a first limiting structure protruding from the first leaf. The first leaf is slidably disposed within the first leaf cavity along the width direction of the leaf frame, and the first limiting structure is slidably engaged with the first clearance groove. The first stop assembly is detachably disposed within the first clearance groove. The drive assembly is drively connected to the first leaf, enabling the first leaf to drive the first limiting structure to reciprocate along the first clearance groove, so that the first limiting structure abuts against or separates from the first stop assembly. The multi-leaf grating provided by this application can prevent leaf deformation and damage due to impact or detachment, thereby improving the treatment effect of the radiotherapy device and reducing leaf maintenance costs.
Owner:SHENYANG NEUSOFT ZHIRUI RADIOTHERAPY TECH CO LTD

Lateral coupling drift tube linear accelerator based on modular drift tube structure

PendingCN121772087ALinear acceleratorsDrift tubeQuantum electrodynamics
The invention provides a lateral coupling drift tube linear accelerator based on a modular drift tube structure, and the linear accelerator comprises a main acceleration cavity chain which is formed by sequentially arranging a plurality of acceleration cavities in a straight line, each acceleration cavity is internally provided with a plurality of drift tubes, and the structures and sizes of the plurality of drift tubes arranged in a single acceleration cavity are the same; the gaps among the plurality of drift tubes arranged in the single acceleration cavity are equal; the adjacent accelerating cavities are communicated through beam hole channels along the central axis of the main accelerating cavity chain; the permanent magnet type quadrupole lenses are arranged on the beam hole channels; and the side coupling cavities are formed in the off-axis positions between every two adjacent acceleration cavities, and the side coupling cavities are connected with the adjacent acceleration cavities through the coupling holes. The accelerator adopts a phase matching thought, so that the lengths of all the acceleration units in the same acceleration cavity and the structural sizes of the drift tubes are completely the same, the modular production and array installation of the drift tube structure are realized, and the manufacturing and testing work of the SCDTL is greatly simplified.
Owner:GUOKE ION (HANGZHOU) MEDICAL TECH CO LTD

Online frequency compensation method for drift tube linear accelerator

The invention provides a drift tube linear accelerator on-line frequency compensation method, which comprises the following steps: firstly, constructing an initial cavity three-dimensional simulation model, judging the flatness of an axial field through calculation, and adjusting the angle of an eccentric sheet if the flatness does not reach the standard; calculating the stability of the electric field, and adjusting the length of the coupling rod if the electric field does not reach the standard; the field flatness is judged again after stability tuning, and the angle of the eccentric piece is adjusted if the field flatness does not reach the standard; a tuning block is added according to an opening of the cavity, wherein the tuning block comprises a new pickup port tuner, and a vacuum pump mesh, a fixed tuner and a rod coupler are improved; after a tuning block is added, frequency, axial field flatness and stability calculation is carried out, if the three indexes all meet requirements, compensation is ended, and otherwise, it is considered that compensation cannot be carried out; according to the method, a frequency compensation scheme can be simulated and determined, so that the field flatness and stability meet the operation requirements, and a cold test system is prevented from being rebuilt in a tunnel for field adjustment.
Owner:CHINA SPALLATION NEUTRON SOURCE SCI CENT +1

A compact proton injector

ActiveCN116234140BNuclear energy generationMedical devicesProton implantationAtomic physics
The application provides a compact proton injector, comprising an ion source system, an RFQ and an IH-DTL connected in sequence, the working frequency of the RFQ and the IH-DTL is 714MHz, so that the total length of the RFQ and the IH-DTL is less than 3 meters, and the beam output energy of the IH-DTL is higher than 8MeV. The working frequency of the compact proton injector is set to 714MHz, so that the acceleration gradient of the IH-DTL can be increased to 9MV / m, and the acceleration gradient of the RFQ reaches 2MV / m, so that the total length of the RFQ and the IH-DTL is less than 3 meters, thereby reducing the volume and weight of the injector and reducing the construction cost.
Owner:SHANGHAI ADVANCED RES INST CHINESE ACADEMY OF SCI

Method for use with a radiotherapy device

Described is a method of determining whether repair or replacement of an electron gun of a radiotherapy device should be scheduled. The radiotherapy device comprises a linear accelerator and is configured to provide therapeutic radiation to a patient. The radiotherapy device comprises a vacuum tube comprising the electron gun, a waveguide configured to accelerate electrons emitted by the electron gun toward a target to produce said radiation. The radiotherapy device comprises also comprises a current sensor, the current sensor being configured to provide signals indicative of current supplied to the electron gun. The method comprises receiving a current value, processing the current value, and based on the processing of the current value, determining whether repair or replacement of the electron gun should be scheduled. Processing the current value comprises determining whether the current value meets at least one threshold criterion, and determining whether the current value has changed by at least a threshold amount in a particular time period.
Owner:ELEKTA AB

Filament power supply and radiotherapy equipment

This application relates to a filament power supply and a radiotherapy device. The filament power supply includes: an inverter circuit whose input terminal is connected to a DC power supply, and whose output terminal is connected to a magnetron, for converting DC power to AC power and using the AC power to provide power to the magnetron; and an adjustment circuit whose input terminal is connected to the output terminal of the inverter circuit, and whose output terminal is connected to the drive terminal of the inverter circuit, for acquiring the electrical parameters output by the inverter circuit, and generating a drive signal based on the electrical parameters and a given electrical parameter, the drive signal being used to adjust the electrical parameters output by the inverter circuit. By setting the adjustment circuit to acquire the output electrical parameters of the inverter circuit, generating the drive signal, and adjusting the output electrical parameters of the inverter circuit through the drive signal, the electrical parameters output by the inverter circuit can be accurately adjusted to the given electrical parameters required for the current application scenario, ensuring the temperature of the cathode filament in the magnetron, and further improving the service life of the magnetron.
Owner:SHANGHAI UNITED IMAGING HEALTHCARE

Radio frequency quadrupole linear accelerator, neutron source system, and radio frequency quadrupole linear accelerator manufacturing method

Maintainability is to be improved. A radio frequency quadrupole linear accelerator includes a tubular housing part having an outer peripheral surface at which two pairs of openings extending in an axial direction are formed facing each other, and a plurality of first vane electrodes inserted into the respective openings of the tubular housing part from outside toward an axial center, detachably attached to the openings, and disposed facing each other.
Owner:RIKEN CO LTD

Pi / 2 mode standing wave accelerating tube containing beam position detector and beam monitoring method

The invention provides a pi / 2 mode standing wave accelerating tube containing a beam position detector and a beam monitoring method. The pi / 2 mode standing wave accelerating tube containing the beam position detector comprises a plurality of radio frequency period units which are sequentially arranged in the axial direction, and each radio frequency period unit comprises four cavities which are sequentially a first accelerating cavity, a first coupling cavity, a second accelerating cavity and a second coupling cavity in the axial direction; axial acceleration electromagnetic fields are arranged in the first acceleration cavity and the second acceleration cavity and are used for accelerating the electron beam current; no axial acceleration electromagnetic field exists in the first coupling cavity and the second coupling cavity, and the first coupling cavity and the second coupling cavity are used for coupling power of adjacent acceleration cavities. A beam position detector is embedded in the cavity wall of the first coupling cavity and / or the second coupling cavity, at least one coupling cavity in each radio frequency period unit is provided with the beam position detector, and a beam pipeline of the beam position detector is collinear with the main axis of the pi / 2 mode standing wave accelerating tube and is used for monitoring the internal beam of the pi / 2 mode standing wave accelerating tube.
Owner:BEIJING RES INST OF AUTOMATION FOR MACHINERY IND

Multi-mode resonance simulation cavity and electron accelerator simulation device

The invention discloses a multimode resonance simulation cavity and an electron accelerator simulation device, the multimode resonance simulation cavity comprises a main simulation cavity, the main simulation cavity is provided with an input port, and the main simulation cavity accesses a power radio frequency signal through the input port; the at least one secondary simulation cavity is sequentially coupled and connected, and the first secondary simulation cavity in the at least one secondary simulation cavity is coupled and connected with the main simulation cavity; and the frequency modulation device is used for adjusting resonant frequencies of the main simulation cavity and the plurality of secondary simulation cavities. The invention solves the problem of single resonant mode of the analog cavity.
Owner:INST OF ADVANCED SCI FACILITIES SHENZHEN

A current-limiting and energy-reducing device for a particle beam and a method of using the same

The application discloses a current-limiting and energy-reducing device for a particle beam and a use method thereof. The current-limiting and energy-reducing device comprises a vacuum cavity, a current limiter and a plurality of energy reducers, and the current limiter and the energy reducers are arranged in parallel in the vacuum cavity. Two energy-reducing blocks with adjustable positions are arranged in each energy reducer, each energy-reducing block is in a wedge-shaped plate structure, the two energy-reducing blocks are arranged in parallel and move relatively during the adjustment process. The use method is that the current limiter and the energy reducers are independently operated, when only the flow intensity needs to be adjusted, the current limiter is adjusted to the required position, when only the energy needs to be adjusted, the energy reducers are adjusted or a single energy reducer is selectively adjusted, the thickness of each energy-reducing block through which the beam passes is added to reach the thickness value of the required energy-reducing material, and when the flow intensity and the energy need to be adjusted simultaneously, the current limiter and the energy reducers are adjusted simultaneously, so that the beam passes through the current limiter and the energy reducers in sequence. In the application, the thickness of the energy reducer is continuously adjustable, and the application is flexible and convenient.
Owner:CHINA SPALLATION NEUTRON SOURCE SCI CENT +1

Multifunctional quality control die body of radiotherapy equipment

The utility model relates to the field of quality control of medical annular linear accelerators. The utility model relates to a multifunctional quality control die body of radiotherapy equipment. The multifunctional quality control die body comprises a cube-shaped die body and an isosceles trapezoid die body hanging plate with a wide upper part and a narrow lower part, an inserting hole for inserting the mold body is formed in the center of the mold body hanging plate, and when the mold body is inserted into the mold body hanging plate, the front end of the mold body is partially exposed out of the mold body hanging plate; first laser positioning line grooves are formed in the upper side, the left side and the right side of the area, exposed out of the mold body hanging plate, of the mold body; metal point marks are mounted on the upper, lower, left and right sides of the die body; second laser positioning line grooves are formed in the left side wall and the right side wall of the mold body hanging plate; and prismatic measuring columns are arranged at four corners of the mold body hanging plate. By using the die body, the laser accuracy of an accelerator, the rotation center of a rack, the angle of a collimator, the rotation center of the collimator and the source skin distance can be measured.
Owner:SHUGUANG HOSPITAL AFFILIATED WITH SHANGHAI UNIV OF T C M

Superconducting electron linear accelerator device for isotope production

The utility model provides a superconducting electron linear accelerator device for isotope production, which comprises an injector, a superconducting acceleration module and an irradiation target area which are arranged in sequence, and the superconducting acceleration module is connected with a low-temperature cooling system, a radio frequency driving system and a control system; the superconducting acceleration module comprises a low-beta-value Ni3Sn superconducting cavity and five standard Ni3Sn superconducting cavity modules, the low-beta-value superconducting cavity is an SRF acceleration cavity of a 2-cell cavity with beta = 0.7, and each standard superconducting cavity module consists of four SRF acceleration cavities of the 2-cell cavity with beta = 1 which are connected in series; and the input end of the standard superconducting cavity module adopts a symmetrical double-input coupler. According to the linear accelerator device provided by the utility model, the Ni3Sn superconducting cavity adopts a 2-cell and double-input coupler structure, so that the power requirement of high-power input coupling can be reduced under high flow intensity, a high-power electron beam is generated at lower cost, and efficient and economic production of isotopes is realized.
Owner:SHANGHAI ADVANCED RES INST CHINESE ACADEMY OF SCI

Tuning method of radio frequency quadrupole field accelerator cavity and medium

PendingCN121815535APrecise electric field distributionImprove manufacturing precisionLinear acceleratorsQuadrupole fieldParticle physics
The invention provides a tuning method of a radio frequency quadrupole field accelerator cavity and a medium. The method comprises the following steps: acquiring an initial measurement result of four-quadrant electric field distribution in the radio frequency quadrupole field accelerator cavity based on a perturbation body; performing gravity error compensation on the initial measurement result to obtain a corrected measurement result; obtaining a dipolar field component and a quadrupolar field component in the cavity of the radio frequency quadrupolar field accelerator based on the correction measurement result; and judging whether the radio frequency quadrupole field accelerator cavity meets a tuning target or not based on the dipolar field component and the quadrupole field component, and if not, executing tuning operation until the tuning target is met. According to the invention, the gravity error generated by the perturbation method can be compensated, and the movement track of the perturbation body in the cavity of the radio frequency quadrupole field accelerator can be fitted, so that the accurate electric field distribution in the cavity can be simulated, and the accurate tuning can be realized.
Owner:HUABORON NEUTRON TECH (HANGZHOU) CO LTD

Modularized electron accelerator pulse modulator device

The invention relates to the technical field of electron accelerators, and particularly provides a modular electron accelerator pulse modulator device. The device comprises a cabinet, a system main controller, a central dynamic energy pool and a power module cluster composed of N power modules. The power modules are installed in a pluggable mode through the backboard slots and form a hybrid cascade Marx topology through the series busbars. The system main controller is integrated with a digital twinborn calculation module, coordinates the central dynamic energy pool to execute non-uniform energy distribution on each power module through a control bus, and controls each module to pre-shape an output pulse waveform. And each power module comprises a module energy storage unit, a module power switch unit and a module fine tuning unit formed by a GaN FET, and is used for realizing nanosecond precision correction of a pulse waveform. According to the invention, through modularized and intelligent control, the problems of pulse waveform distortion, low energy efficiency and insufficient reliability of a traditional device are effectively solved.
Owner:EAST CHINA UNIV OF TECH

Radioisotope production device and radioisotope production method

To provide a radioisotope manufacturing technology that can manufacture radioisotope according to customer request.SOLUTION: The radioisotope manufacturing apparatus 1 includes an electron gun 2 that generates an electron beam E, an accelerator 3 that accelerates the electron beam E, a bending electromagnet 4 that distributes the electron beam E accelerated by the accelerator 3, and at least two manufacturing ports 5 that are provided on the tip branching off from the bending electromagnet 4 and in which radioisotope is manufactured by the incidence of the electron beam E.SELECTED DRAWING: Figure 1
Owner:KK TOSHIBA

Particle accelerator having configurable quadrupole assembly

An ion implanter. The ion implanter may include an ion source, to generate a continuous ion beam. The ion implanter may further include a linear accelerator, comprising a buncher, to receive the continuous ion beam and generate a bunched ion beam, and further comprising a plurality of acceleration stages, arranged to receive the bunched ion beam and accelerate the bunched ion beam. The ion implanter may also include a plurality of quadrupoles, arranged in alternating fashion with the plurality of acceleration stages; and a plurality of quadrupole switch assemblies, coupled to the plurality of plurality of quadrupoles, respectively, wherein a given quadrupole switch assembly comprises a polarity switching circuit.
Owner:APPLIED MATERIALS INC

A focusing coil control system for an accelerator

ActiveCN116723625BReduce operating currentquick debuggingNuclear energy generationLinear acceleratorsControl systemComputational physics
The application relates to the technical field of accelerator control, in particular to a focusing coil control system of an accelerator, which comprises a front-end ion pump acquisition module, a tail-end ion pump acquisition module and a processing module. The front-end ion pump acquisition module is used for acquiring a first ion pump current value of the front-end ion pump; the tail-end ion pump acquisition module is used for acquiring a second ion pump current value of the tail-end ion pump; the processing module is used for generating a group of coil control parameters according to the first ion pump current value and the second ion pump current value; and a plurality of coil control modules are used for respectively adjusting the coil current of each focusing coil according to the coil control parameters, so that the first ion pump current value and the second ion pump current value are minimized. The beneficial effect is that the coil control parameters of the focusing coil are automatically changed according to the running current by the processing device, so that the running current of the ion pump is minimized, the rapid debugging of the focusing coil of the accelerator is realized based on the above process, and the optimal beam distribution is realized.
Owner:SHANGHAI SINOTEX HIGH ENERGY TECH

Radionuclide production system and radionuclide production method

To provide a radioactive nuclide production system and a radioactive nuclide production method which improve cooling performance of a target material including a material nuclide, suppress contamination of impurities to the target material, and are capable of efficiently producing a radioactive nuclide.SOLUTION: A radioactive nuclide production system 1 comprises: a particle beam irradiation device 10 which generates a particle beam 11; and a target 20 which generates radioactive nuclide by irradiation of the particle beam 11. In the target 20, a target material 21 including a material nuclide generating the radioactive nuclide is mounted on a target cooling plate 22 cooling the target material 21. In a radioactive nuclide production method, the target material 21 including the material nuclide forms the target 20 mounted on the target cooling plate 22 cooling the target material 21, and the target 20 is irradiated with the particle beam 11 or bremsstrahlung while cooling the target material 21 by the target cooling plate 22 to produce radioactive nuclide.SELECTED DRAWING: Figure 1
Owner:HITACHI HIGH TECH CORP

Multi-leaf grating control method and device and multi-leaf grating structure of linear accelerator

The invention provides a multi-leaf grating control method and device and a multi-leaf grating structure of a linear accelerator, and the method is applied to a layered multi-leaf grating structure comprising two layers of blade groups, the first layer of blade group comprises n blades, and the second layer of blade group comprises n + 1 blades, the first-layer blade group is located above the second-layer blade group, the blades in the two-layer blade group are arranged in a staggered manner, and the first-layer blade group and the second-layer blade group comprise various blades with different thicknesses. Blade control signals in a plurality of control periods are obtained, and the blade control signals comprise control signals corresponding to various blades in a first-layer blade group and a second-layer blade group respectively; in each control period, in response to a blade control signal, controlling a driving motor corresponding to at least one blade in the two layers of blade groups to rotate; rotation of the driving motor drives the blades controlled by the driving motor to move by a target moving distance according to the target moving direction, so that the two layers of blade groups form a radiation field in an irregular shape.
Owner:SHENYANG NEUSOFT ZHIRUI RADIOTHERAPY TECH CO LTD

Linear accelerator joint

ActiveCN116018722BTransit-tube leading-in arrangementsMedical devicesStructural engineeringElectrical and Electronics engineering
The present disclosure discloses a reusable joint for a medical linear accelerator, a reusable CF choke flange for a medical linear accelerator, a linear accelerator, and a method of forming a reusable joint for a medical linear accelerator. The reusable joint includes a CF choke flange, a CF cover flange, and a gasket. The CF choke flange includes a first waveguide slot, a choke groove, and a first CF groove including a first knife edge, wherein the choke groove is disposed radially inward from the first CF groove on the CF choke flange. The CF cover flange includes a second waveguide slot aligned with the first waveguide slot and a second CF groove including a second knife edge and aligned with the first CF groove. The gasket is disposed between and in contact with the first CF groove and the second CF groove.
Owner:医科达(英国)有限公司

Neutron beam generation system for neutron capture therapy

Disclosed is a neutron beam generation system for neutron capture therapy. According to an embodiment of the present disclosure, provided is a neutron beam generation system comprising: an injector which generates proton beams; an RF linear accelerator connected to the injector to accelerate the proton beams; a beamline which transmits the proton beams accelerated by the RF linear accelerator; a target which generates fast neutrons by colliding with the proton beams transmitted by the beamline; and a beam shaping assembly provided on one side of the beamline and configured to decelerate the fast neutrons into epithermal neutrons.
Owner:DAWONMEDAX LTD

Acceleration structure and irradiation accelerator device

The invention discloses an acceleration structure and an irradiation accelerator device, and relates to the technical field of accelerators. The acceleration structure comprises a body, a plurality of beam current channels are arranged in the body, each beam current channel extends along a first direction, and the plurality of beam current channels are arranged in parallel along a second direction; the starting end of each beam channel is used for arranging an electron gun, and an acceleration electromagnetic field can be generated in each beam channel to accelerate electron beams emitted by the electron guns; the body is further provided with a beam outlet corresponding to the tail end of the beam channel so that the accelerated electron beam can be emitted out of the body. Wherein an included angle is formed between the first direction and the second direction. By applying the acceleration structure disclosed by the invention, the space occupation can be reduced, the electron beam utilization rate and uniformity can be improved, and the acceleration structure can be flexibly adjusted to adapt to different irradiation requirements.
Owner:CHINA INSTITUTE OF ATOMIC ENERGY

A Fault Location Method for Equal Gradient Traveling Wave Accelerator Tubes Based on Transmission Line Transient Response

This invention discloses a fault location method for an equal-gradient traveling-wave accelerator tube based on transmission line transient response, belonging to the field of radio frequency electronic linear acceleration. It includes: equating the equal-gradient accelerator tube to a single transmission line composed of multiple cascaded uniform lossless transmission lines; and using transmission line transient response analysis methods to equate the transmission and reflection isowave processes of the delayed pulse generated by the traveling-wave pulse source in the transmission line to the transmission and reflection isowave processes at the moment of arcing fault occurrence in the equal-gradient traveling-wave accelerator tube. This yields the relationship between the round-trip time of the microwave pulse leading edge between the start and fault points and the fault location, thereby determining the fault location. This method can obtain the arcing location within the equal-gradient traveling-wave accelerator tube conveniently and at a relatively low cost without altering the existing accelerator device.
Owner:HUAZHONG UNIV OF SCI & TECH

Energy measurement system and method of energy measurement in linear accelerator

An ion implanter. The ion implanter may include an ion source to generate a continuous ion beam, and a linear accelerator to receive generate a bunched ion beam from the continuous ion beam, and accelerate the bunched ion beam. The linear accelerator may include a plurality of acceleration stages, arranged to accelerate the bunched ion beam to a plurality of energy levels, respectively, and a beam energy measurement system, arranged to measure a beam energy of the bunched ion beam, after exiting at least one of the plurality of acceleration stages. As such, the beam energy measurement system may include a fingerprint signal generation circuit, to impart a fingerprint signal into an RF signal to an acceleration stage of the linear accelerator, and a fingerprint detection circuit, disposed downstream of the acceleration stage, and arranged to detect the fingerprint signal.
Owner:APPLIED MATERIALS INC

Method for determining output beam intensity of standing wave accelerating tube

The embodiment of the invention provides a method for determining the output beam intensity of a standing wave accelerating tube, and the method comprises the steps: building a target digital model corresponding to a target assembly, determining a simulated electron beam energy value according to a theoretical electron beam energy value emitted by the standing wave accelerating tube, and enabling simulated electrons to irradiate the target digital model according to the simulated electron beam energy value, calculating to obtain a first mapping relation between the unit X-ray dose rate of the first position and the simulated electron beam energy value; acquiring an actual electron beam energy value emitted by the standing wave accelerating tube and measuring an actual X-ray dose rate of the second position; and obtaining an actual unit X-ray dose rate according to the actual electron beam energy value and the first mapping relation, and calculating the ratio of the actual X-ray dose rate to the actual unit X-ray dose rate to obtain the beam intensity. According to the determination method in the embodiment of the invention, the influence of the material and structural characteristics of the target assembly on the X-ray dose rate is considered, the calculation precision of the beam intensity is improved, and a more accurate reference basis is provided for the design and debugging of the standing wave accelerating tube.
Owner:CHINA INSTITUTE OF ATOMIC ENERGY