51 results about "Beam scattering" patented technology

An electron beam drawing mask includes a pattern supporting film for transmitting an electron beam therethrough; an electron beam scattering body pattern formed over the pattern supporting film; and a support member for supporting the pattern supporting film and the electron beam scattering body pattern. The pattern supporting film has a film thickness of 0.005 to 0.2 micron, a film material density of 1.0 to 5.0 g/cm<3 >and an elastic modulus of 0.8x10<11 >Pa or higher. The electron beam scattering body pattern has a film thickness of 0.2 to 2 micron, a film material density of 1.0 to 5.0 g/cm<3>, and an elastic modulus of 0.8x10<11 >Pa or higher.

A method to repair a scattering stencil type mask having a high electron beam scattering property and low electron absorption. In order to correct a defect caused at the time of manufacturing of the mask, which is being used when a reduction projection image is transferred onto a substrate and has a pattern projection portion comprising an electron beam scattering material, a repair membrane is formed in the defective portion of the mask by irradiating a charged particle beam to said defect while a gas including substances having high scattering properties are supplied to the close vicinity of the defective portion.

A phased array antenna system on an aircraft that incorporates a choke plate that significantly attenuates sidelobes of the antenna beam pattern at elevation angles that would cause RF interference with ground-based terrestrial wireless networks. The choke plate includes a plurality of choke grooves that substantially circumscribe the antenna aperture. The choke plate has an upper surface that is positioned generally coplanar with the upper surface of the antenna aperture. The grooves of the choke plate may be filled with a dielectric material. The choke plate provides a smooth aerodynamic component that significantly attenuates beam scattering, and thus the radiation pattern sidelobes of the antenna at or below the horizon, when the aircraft is in flight.

The invention relates to a device for homogenising light, said device comprising a first lens array (11) provided with a number of convex lenses (12), and at least one second lens array (21) which is arranged at a distance from the first lens array in the beam scattering direction and through which the light refracted by the first lens array (11) can pass. The second lens array (20) comprises a number of first lenses (22) that are respectively arranged at a distance from each other, at least one of the first lenses (22) of the second lens array (21) being associated with each convex lens (12) of the first lens array (11). The convex lenses (12) of the first lens array (11) have a smaller curvature than the first lenses (22) of the second lens array (21) associated with said convex lenses.

The invention relates to a digital holographic device, in particular to a fingerprint acquisition and imaging device applied in the field of police. Aiming at the problems of poisonous detection and damage of the original state of physical evidences, which exist in the latent fingerprint appearing technology, the invention provides the non-contact digital holographic fingerprint acquisition device with nondestructive measurement, the device comprises a laser, a continuous attenuation piece, a half-wave plate, a polarization beam splitter prism, a completely reflecting mirror, a beam scattering filter system, a beam combination prism, a CCD (Charge Coupled Device) image sensor and a computer. The reflective digital holographic fingerprint imaging device disclosed by the invention can carry out acquisition for many times without destroying fingerprints, so that the problem of insufficient site fingerprint acquisition in the traditional criminal investigation can be solved, and extra information-phase information is provided for acquiring fingerprint information texture. The reflective digital holographic fingerprint imaging device has a practical significance for the fingerprint acquisition in the field of police.

A mask blank for electron beam exposure includes a pattern support layer that transmits an electron beam therethrough, an electron beam scattering layer formed on the pattern support layer, and a support body supporting the pattern support layer and the electron beam scattering layer. The pattern support layer is formed by a material that has an amorphous structure and that is mainly composed of carbon-silicon bonds. The pattern support layer is a tensional stress membrane that has a surface roughness of 0.2 (nm, Rms) or less. A mask for electron beam exposure is formed by patterning the electron beam scattering layer of the mask blank.

The invention provides a polymer piezoelectric gas sensor system for detecting gases. The system comprises a gas passing pipe, a magnetic valve, a filter, a thermostatic chamber, a gas sensor array, a micro-compressor, a frequency meter and a control computer. The gas passing pipe is connected with the magnetic valve, the thermostatic chamber and the micro-compressor successively. The magnetic valve is connected with the filter. The sensor array is arranged in the thermostatic chamber. The sensor array is connected with the frequency meter through a wire. The frequency meter is connected with the control computer. The polymer piezoelectric gas sensor system can detect complex gases, and is advantaged by small size, low power consumption, strong applicability for detecting different gases and good selectivity. By utilizing the electron beam scattering method, thin polymer films are deposited on a quartz wafer, and the thickness of thin films and the uniformity of surfaces of the thin films can be controlled accurately. The system has advantages of simple and rapid operations and wide applicability, detections are qualitative but not quantitative, and the system is suitable for large-scale primary screening.

An electric field is applied below a resist to reduce proximity effects associated with electron beam scattering, thereby improving the resolution of features or lines written into the resist. Although the electrons in the electron beam can be very energetic (e.g., >>10 keV), it is shown that even a small electric field can reduce the number of electrons that re-enter the resist material after being scattered in the substrate, and thus reduce the energy deposited in the resist from these electrons. One advantage of this technique is that high potentials and high fields are not required. Accordingly, the methods described can be applied to existing tooling with little modification to the electron beam system.

The hologram recording/reproducing apparatus is for recording a hologram by emitting a recording beam (S) modulated by a spatial light modulator and a reference beam (R) having a same wavelength as the recording beam onto a hologram recording medium (B) so that the beams overlap each other with polarization direction (p) of the beams being matched to interfere with each other, and for reproducing the hologram by exposing the hologram recording medium storing the hologram to the reference beam to generate diffracted light and receiving the diffracted light by an imaging device. The spatial light modulator is controlled so as to form a data area (H0) corresponding to information to be recorded and a plurality of mark areas (H1) for detecting a position of the data area in the hologram recording medium (B) in recording of the hologram. The mark areas (H1) are formed at positions not to be overlapped by a beam scattering region which may be generated along a polarizing direction (p) of the reference beam on an outward side of the data area (H0).

New systems for characterizing laser beams, using measurements performed on light which has been Rayleigh scattered from the beam. Different implementations are used for beam profiling, using images of the Rayleigh scattered light, and for laser beam power measurement, using the integrated Rayleigh scattered light. Both of these implementations can be applied to laser beams having high powers, since the measurements do not require insertion of any element into the beam itself, but rather depend on light scattered laterally from the passing beam. The measurements can thus be termed “non contact” measurements, in contrast to prior art methods which require an element inserted into the beam. The systems use Rayleigh scattering from the laser beam passing through ambient air, such that no special scattering chambers or liquids are required for the measurements. Special cancellation algorithms or filters are used to discriminate from light arising from scattering from dust particles.

An apparatus and methods for small-angle electron beam scattering measurements in a reflection or a backscattering mode are provided. The apparatus includes an electron source, electron collimation optics before a sample, electron projection optics after the sample, a sample stage capable of holding the sample, and a electron detector module. The electrons emitted from the source are collimated and positioned to impinge nanostructures on the sample. The signals resulting from the interactions between the impinging electrons and the nanostructures are further magnified by the electron projection optics to reach a sufficient angular resolution before recorded by the electron detector module.

A laser machining apparatus includes a laser nozzle for supplying an assistive gas to remove undesirable materials and applying a laser beam at an angle, which is inclined with respect to a surface of a workpiece, a sputter blocking jig disposed over a region of the workpiece that is irradiated with the laser beam, so as to lie across directions in which the laser beam is scattered, and for blocking sputtered particles that are generated from the surface by the applied laser beam, and a joint connecting the laser nozzle and the sputter blocking jig to each other. The joint moves the laser nozzle and the sputter blocking jig in synchronism with each other.

The invention provides a high thermal conductivity carbon fiber cloth, which comprises a carbon fiber cloth and an attachment evenly distributed on the carbon fiber cloth. The attachment is a high thermal conductivity mixture, and includes micro-nano ceramic powder, a curing agent and adhesive resin, wherein, the weight percentage of the micro-nano ceramic powder is 20-50%, the weight percentage of the curing agent is 10-40%, and the weight percentage of adhesive resin is 30-60%. The high thermal conductivity carbon fiber cloth provided by the invention utilizes high thermal conductivity carbon fiber adhesive resin to replace the traditional insulating gel system so as to greatly increase the thermal conductivity between carbon fiber beams, if carbon fiber beam scattering, fracture and other phenomena occur, thermal energy can also be transmitted to other carbon fiber beams through the high thermal conductivity adhesive resin between carbon fiber, thus improving the heat conductivity coefficient, and also ensuring the directional properties of heat transfer. Therefore, the problems of low integral heat dissipation and poor reliability of carbon fiber cloth serving as a thermal conductivity product in the prior art can be solved.

A reflecting-type blue laser lighting assembly relates to the technical field of lighting. The lighting assembly has a multilayer structure and includes, successively from bottom to top, a luminescentlayer, a substrate, a light beam scattering layer, and a high-reflecting aluminum plate. The luminescent layer, the substrate, the light beam scattering layer and the high-reflecting aluminum plate are tightly connected in a sintering manner. The luminescent layer is a glassy state substance containing fluorescent powder. The substrate is alumina, zinc oxide or quartz, of which the surface is coated with a film. The light beam scattering layer is a glassy state substance having micropores, which is composed of low-melting point glass powder and hollow alumina. The ratio of thicknesses of thelight beam scattering layer, the substrate and the luminescent layer is (1:10:1) - (2:5:2). The wavelength range of the blue laser is 420 to 480 nm. The surface, coated with the light beam scatteringlayer slurry, of the substrate is placed above the high-reflecting aluminum plate.

Particle detection systems and methods are disclosed. In one embodiment, a particle detection system comprises an incident beam light source that emits an incident beam, a particle interrogation zone disposed in the path of the incident beam, a photodetector disposed to detect the incident beam after passing through the particle interrogation zone, a pump beam light source for emitting a pump beam, the pump beam being targeted at the particle interrogation zone, wherein the incident beam, the pump beam, and photodetector are arranged such that the photodetector is configured to detect a combination of light from the incident beam, scattered light due to incident beam scattering in the particle interrogation zone, and scattered light due to pump beam scattering in the particle interrogation zone.

The invention discloses a laser correlation type computer mouse walking maze competition scoring system, and belongs to the field of communication. The system comprises a starting point signal detection device placed at the starting point of the maze, an end point signal detection device placed at the end point of the maze, a signal receiving device for monitoring the starting point signal and theend point signal, and upper computer scoring software for processing the starting point signal and the end point signal. The starting point signal detection device comprises a starting point laser emission module and a starting point illuminance detection module which are oppositely arranged; the end point signal detection device comprises an end point laser emission module and an end point illuminance detection module which are oppositely arranged; a starting point signal and an end point signal are detected by adopting a principle that a computer mouse shields laser beams emitted by a laseremission module to cause illuminance change of an illuminance detection module. Laser beams emitted by the laser emitting module are high in directivity, interference generated by light beam scattering is avoided, and therefore the accuracy of the scoring system is improved. The illuminance sensing module is high in detection speed, and the response speed of the scoring system is increased.

Disclosed is a field emission device. The field emission device includes: an anode substrate including an anode electrode formed on a surface thereof and a fluorescent layer formed on the anode electrode; a cathode substrate disposed opposite to and spaced apart from the anode substrate, and including at least one cathode electrode formed toward the anode substrate and a field emitter formed on each cathode electrode; and a gate substrate having one surface in contact with the cathode substrate, wherein the gate substrate include gate insulators surrounding the field emitters and having a plurality of openings exposing the field emitters, and a plurality of gate electrodes formed on the gate insulators around the openings and electrically isolated from one another. Thus, when the trajectories of the electron beams emitted from the emitters are rapidly changed over time by a voltage difference between the gate electrodes, an electron beam-scanned area can be expanded due to residual images and the electron beam can be more uniformly emitted due to an electron beam scattering effect and a linear beam spreading effect, resulting in improved emission uniformity of the fluorescent layer.

The invention relates to a manufacturing device of a continuous energy spectrum electron source and belongs to the technical field of space utilization. The device is characterized in that an electron beam scattering film is applied under an electron gun; one side of the film is coated with an aluminum layer and the other side thereof is coated with a concentric silver ring Kapton film; during actual use, an aluminum disc equipped with the electron beam scattering film and the electron gun are mounted in a vacuum chamber; the aluminum disc is grounded by a wire; the vacuum chamber is vacuumized to 10-4Pa; the electron gun is turned on to emit a monoenorgetic electron beam; and after the monoenorgetic electron beam penetrates through the electron beam scattering film, an electron beam with a continuous energy spectrum is obtained. The device can simulate a space electron environment relatively truly, and is applicable to surface charge and discharge experiments of a satellite.

A light source system comprises a light source, a light splitting and combining assembly, a scattering assembly and a dodging element; the light source comprises a plurality of laser diodes or laser diode arrays and is used for generating laser, the laser comprises at least first wavelength light and second wavelength light, and the first wavelength light and the second wavelength light are different in color or wavelength; the light splitting and combining assembly is used for combining the laser to form a combined light beam; the scattering assembly is used for scattering and dodging the combined light beam, the scattering assembly comprises a first scattering element and a second scattering element, and the first scattering element and the second scattering element are independently arranged; the dodging element is located between the scattering assembly and the light splitting and combining assembly or located behind the scattering assembly or located between the first scattering element and the second scattering element and used for dodging of light beams entering the dodging element. According to the light source system, the multicolor laser is scattered through the two scattering elements which are independently arranged, the scattering effect is achieved, the size of the light source system is reduced, and light loss is reduced.

The invention provides a particle counting sensor which comprises a light source for emitting light beams, a gas circuit assembly for circulation of to-be-detected gas flow, a photoelectric detector and a scattered light collecting assembly, wherein the light beams and the gas flow are crossed to form a light working area; the scattered light collecting assembly surrounds the light beam and comprises a first scattered light collecting structure and a second scattered light collecting structure which are arranged on the two opposite sides of the light working area respectively; the second scattered light collecting structure, the light working area, the first scattered light collecting structure and the photoelectric detector are arranged in sequence; a light reflecting surface is arranged in the first scattered light collecting structure, and a first reflecting cavity is defined by the light reflecting surface; the first scattered light collection structure is provided with a first light inlet and a first light outlet which are used for communicating the first reflection cavity with the outside, the first light inlet faces the light working area, and the first light outlet is combined with the photoelectric detector; the second scattered light collecting structure is provided with a third reflecting surface facing the light working area, and light of at least a part of area of the third reflecting surface is reflected into the first reflecting cavity.

The embodiment of the invention relates to the field of communication, in particular to a timing system for a robot labyrinth. The system comprises a starting point signal detection device, an end point signal detection device, a signal receiving device and an upper timing device. The starting point signal detection device comprises a starting point laser emitting module and a starting point illuminance detection module which are located at the starting point of the labyrinth and oppositely arranged; the laser emitting module emits laser to the starting point illuminance detection module; when the tracing robot passes through the starting point to shield the laser, the laser intensity detected by the starting point illuminance detection module is smaller than a first threshold value, and a starting signal is sent to a signal receiving device; and similarly, the end point signal detection device sends an end point signal, and the upper timing device performs timing according to the starting point signal and the end point signal. The laser beams emitted by the laser emission module are high in directivity, so that interference generated by light beam scattering is avoided, and the accuracy of the timing system is improved; and the detection speed of the starting point illuminance detection module is high, and the response speed of the timing system is improved.