Polymer piezoelectric gas sensor system for detecting gases

A gas sensor and gas detection technology, applied in instruments, measuring devices, scientific instruments, etc., can solve the problems of increased difficulty, low sensitivity, low integration, etc., and achieve the effects of wide application, simple operation and low price

Inactive Publication Date: 2013-10-02
谷宇
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, this type of gas sensor has the following disadvantages: 1. It needs to heat the temperature control device, which increases the volume, power consumption and complexity of the sensor: it is inconvenient to use the current microelectronics process to mak...

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  • Polymer piezoelectric gas sensor system for detecting gases
  • Polymer piezoelectric gas sensor system for detecting gases
  • Polymer piezoelectric gas sensor system for detecting gases

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Embodiment Construction

[0017] Describe technical scheme of the present invention in detail below in conjunction with accompanying drawing:

[0018] Such as figure 1 , 2 , are schematic diagrams of the working and cleaning process of the polymer piezoelectric gas sensor system of the present invention, including a gas conduit 1, a solenoid valve 2, a filter 3, a constant temperature chamber 4, a gas sensor array 5, a micro compressor 6, and a frequency meter 7. Control computer 8, wherein the gas conduit 1 is connected with the solenoid valve 2, the thermostatic chamber 4, and the micro compressor 6 in sequence, the solenoid valve 2 is connected with a filter 3, and the sensor array 5 is arranged in the thermostatic chamber 4 , the sensor array 5 is connected to the frequency meter 7 through a wire 9, and the frequency meter 7 is connected to a control computer 8.

[0019] The sensor array consists of 8 gas sensors coated with different polymer films.

[0020] Such as image 3 , 4 , the gas sens...

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Abstract

The invention provides a polymer piezoelectric gas sensor system for detecting gases. The system comprises a gas passing pipe, a magnetic valve, a filter, a thermostatic chamber, a gas sensor array, a micro-compressor, a frequency meter and a control computer. The gas passing pipe is connected with the magnetic valve, the thermostatic chamber and the micro-compressor successively. The magnetic valve is connected with the filter. The sensor array is arranged in the thermostatic chamber. The sensor array is connected with the frequency meter through a wire. The frequency meter is connected with the control computer. The polymer piezoelectric gas sensor system can detect complex gases, and is advantaged by small size, low power consumption, strong applicability for detecting different gases and good selectivity. By utilizing the electron beam scattering method, thin polymer films are deposited on a quartz wafer, and the thickness of thin films and the uniformity of surfaces of the thin films can be controlled accurately. The system has advantages of simple and rapid operations and wide applicability, detections are qualitative but not quantitative, and the system is suitable for large-scale primary screening.

Description

technical field [0001] The invention belongs to the technical field of gas sensors, in particular to a polymer piezoelectric gas sensor system for detecting gas. Background technique [0002] Gas sensing has broad application prospects in the fields of atmospheric pollution detection, flammable, explosive, toxic and harmful gas detection, robot disease diagnosis, and military affairs. The gas sensors currently used are mainly conductance-controlled sensors (there are two types of bulk conductance control and surface conductance control), such as the gas sensor with the publication number CN114655A, whose structure mainly includes a layer of metal oxide gas-sensitive semiconductor (such as ZnO, SnO 2 etc.) and a heater, the principle of which is to detect the gas content based on the nature of the redox property of the gas gaining and losing electrons on the surface of the gas-sensitive semiconductor. This type of gas sensor needs to be heated to about 300°C to ensure the sm...

Claims

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Application Information

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IPC IPC(8): G01N27/00
Inventor 谷宇
Owner 谷宇
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