2466results about "Material analysis using radiation diffraction" patented technology

An apparatus and method for generating electronically steerable beams of sequential penetrating radiation. Charged particles from a source are formed into a beam and accelerated to a target. Electromagnetic radiation generated by the target is emitted with an angular distribution which is a function of the target thickness and the energy of the particles. A beam of particles is produced by allowing the radiation to exit from an apparatus through a collimator proximal to the target. The direction of the beam is determined by the point of radiation production and the corresponding array of transmission regions of the collimator.

Apparatus for inspection of a sample includes a radiation source and an array of detector elements arranged to receive radiation from the surface due to irradiation of an area of the surface by the radiation source. The array has a first operative configuration for resolving the received radiation along a first axis perpendicular to the surface, and a second operative configuration for resolving the received radiation along a second axis parallel to the surface. A signal processor processes the signal from the detector array in the two configurations so as to determine a reflectance of the surface as a function of elevation angle relative to the surface and a scattering profile of the surface as a function of azimuthal angle in a plane of the surface.

Protein crystallization droplet actuators, systems and methods are provided. According to one embodiment, a droplet actuator for providing an array of crystallization conditions is provided and includes: (a) two or more processing reservoirs; (b) two or more dispensing reservoirs collectively comprising two or more crystallization reagents; and (c) a port for introducing a sample for crystallization analysis. Systems including the droplet actuator, methods of providing an array of crystallization conditions, and methods of identifying crystallization conditions are also provided.

An x-ray diffraction-based scanning method and system are described. The method includes screening for a particular substance in a container at a transportation center using a flat panel detector having a photoconductor x-ray conversion layer to detect x-rays diffracted by a particular substance in the container. The diffracted x-rays may be characterized in different ways, for examples, by wavelength dispersive diffraction and energy dispersive diffraction.

CD-GISAXS achieves reduced measurement times by increasing throughput using longer wavelength radiation (˜12×, for example) such as x-rays in reflective geometry to increase both the collimation acceptance angle of the incident beams and the scattering signal strength, resulting in a substantial combined throughput gain. This wavelength selection and geometry can result in a dramatic reduction in measurement time. Furthermore, the capabilities of the CD-GISAXS can be extended to meet many of the metrology needs of future generations of semiconductor manufacturing and nanostructure characterization, for example.

The object of the present invention is to provide an apparatus capable of X-ray imaging utilizing phase of X-rays with a simple construction. The X-ray imaging apparatus of the present invention is equipped with first and second diffraction gratings and an X-ray image detector. The first diffraction grating is constructed to generate the Talbot effect using X-rays irradiated at the first diffraction grating. The second diffraction grating is configured so as to diffract the X-rays diffracted by the first diffraction grating. The X-ray image detector is configured so as to detect the X-rays diffracted by the second diffraction grating. By diffracting X-rays diffracted by the first diffraction grating, the second diffraction grating is capable of forming image contrast caused by changes in phase of X-rays due to the subject arranged in front of the front surface of the first diffraction grating or between the first diffraction grating and the second diffraction grating. The X-ray image detector is capable of detecting X-rays creating image contrast.

A baggage scanning system and method employ combined angular and energy dispersive x-ray scanning to detect the presence of a contraband substance within an interrogation volume of a baggage item. The interrogation volume is illuminated with penetrating, polychromatic x-rays in a primary fan beam from a source such as a tungsten-anode x-ray tube. An energy-dependent absorption correction is determined from measurement of the attenuation of the fan beam at a plurality of different energies. Radiation coherently scattered by substances in the interrogation volume is detected by an energy-resolved x-ray detector operated at a plurality of scattering angles to form a plurality of scattering spectra. Each scattering spectrum is corrected for energy-dependent absorption and the corrected spectra are combined to produce a scattering pattern. The experimental scattering pattern is compared with reference patterns that uniquely characterize known contraband substances. The system and method can locate and identify a wide variety of contraband substances in an accurate, reliable manner. The system provides for automated screening, with the result that vagaries of human performance are virtually eliminated. False alarms and the need for hand inspection are reduced and detection efficacy is increased.

A projection-based x-ray imaging system combines projection magnification and optical magnification in order to ease constraints on source spot size, while improving imaging system footprint and efficiency. The system enables tomographic imaging of the sample especially in a proximity mode where the same is held in close proximity to the scintillator. In this case, a sample holder is provided that can rotate the sample. Further, a z-axis motion stage is also provided that is used to control distance between the sample and the scintillator.

Methods and systems for optimizing measurement system parameter settings of an x-ray based metrology system are presented. X-ray based metrology systems employing an optimized set of measurement system parameters are used to measure structural, material, and process characteristics associated with different semiconductor fabrication processes with greater precision and accuracy. In one aspect, a set of values of one or more machine parameters that specify a measurement scenario is refined based at least in part on a sensitivity of measurement data to a previous set of values of the one or more machine parameters. The refinement of the values of the machine parameters is performed to maximize precision, maximize accuracy, minimize correlation between parameters of interest, or any combination thereof. Refinement of the machine parameter values that specify a measurement scenario can be used to optimize the measurement recipe to reduce measurement time and increase measurement precision and accuracy.

An X-ray diffraction and X-ray fluorescence instrument for analyzing samples having no sample preparation includes a X-ray source configured to output a collimated X-ray beam comprising a continuum spectrum of X-rays to a predetermined coordinate and a photon-counting X-ray imaging spectrometer disposed to receive X-rays output from an unprepared sample disposed at the predetermined coordinate upon exposure of the unprepared sample to the collimated X-ray beam. The X-ray source and the photon-counting X-ray imaging spectrometer are arranged in a reflection geometry relative to the predetermined coordinate.

A system and method for displaying graphical information indicative of a plurality of material characteristics for a portion of a part under test. Energy is directed at the selected portion of the part under test. Resultant energy is detected from the selected portion of the part under test and data representative of each of a plurality of material characteristics for the portion of the part under test is obtained based, at least in part, upon the detected energy. A plurality of graphs is formed based upon the obtained data. Each of the graphs has information indicative of a separate one of the plurality of material characteristics. The plurality of graphs is displayed discrete from each other in a manner that facilitates substantially simultaneous visual comparisons between the information contained in each of the plurality of graphs.

A system and method for inspecting an object, the system and method comprising a source for generating a penetrating radiation beam for irradiating the object, the beam having, for each instant of time, an instantaneous energy spectrum of intensity, a shaper for modulating the generated beam, thereby creating a shaped beam, the shaper comprising at least a first section and a second section, the first section attenuating the intensity of a portion of the generated beam by a first attenuation factor and the second section attenuating the intensity of another portion of the generated beam by a second attenuation factor, and at least one detector for detecting the shaped beam after the shaped beam interacts with the object. The source may scan a beam across an object while the source and at least one detector are moving on a platform capable of highway travel or on an inspection module movable with respect to the object.