382 results about "Radiation exposure" patented technology

In the case of forming a fine resist pattern, it is desired to further reduce the roughness of the resist pattern.SOLUTION: A substrate processing apparatus comprising: a heat treatment unit configured to bake a resist film; an exposure unit configured to irradiate the resist film having a portion irradiated with a first radioactive ray with a second radioactive ray; a development unit configured to form a resist pattern by development for removing a part of the resist film; and a control unit configured to control the exposure unit such that the second radioactive ray is collectively irradiated to an entire region of the resist film including the portion irradiated with the first radioactive ray and a portion other than the portion irradiated with the first radioactive ray. The first radiation is ionizing radiation or non-ionizing radiation, and the second radiation is non-ionizing radiation. When the first radiation is non-ionizing radiation, the second radiation is non-ionizing radiation having a wavelength longer than the wavelength of the first radiation. The resist film includes a metal oxide photoresist material.SELECTED DRAWING: Figure 1

The invention relates to a device (1) for imaging micro- and / or nanostructures, in particular structures on microlithography masks. The device (1) comprises an illumination device (10) for illuminating an object (20) with illumination radiation and an image capture unit (40) for capturing the illumination radiation transformed by the object (20), wherein the device (10) is designed to be focusable, wherein the image capture unit (40) comprises at least two image capture sensors (45, 46, 47) which are arranged such that at least one image capture sensor (45, 46, 47) is defocused regardless of the focusing of the device (1).

The present invention relates to a device for measuring a line current. Said device comprises at least three sensor elements having paramagnetic centres, a pump-radiation source, an optical system, and at least three photodetectors which function as part of receiving systems and are each associated with a sensor element. In addition, the device contains two magnetic field sources which generate different bias magnetic fields for each sensor element. The pump-radiation source emits pump radiation into the optical system, which distributes the pump radiation to the sensor elements and thereby irradiates the paramagnetic centres with the pump radiation. These centres emit fluorescence radiation, the intensity and phase shift of which depend on the AC drive signal of the evaluation and control device and on the magnetic flux density acting upon them. The fluorescence radiation is separated from the pump radiation by the optical system and guided onto the photodetectors. The evaluation and control device generates a single-frequency sinusoidal AC drive signal having a frequency of 22 MHz (-4 MHz / +7 MHz), or within a range of 18 MHz to 29 MHz. The lock-in amplifiers are coupled to the sensor elements and evaluate the output signal of the photodetectors with respect to the AC drive signal in order to produce measurement values. Based on these measurement values, the evaluation and control device determines an estimated value for the magnitude of the line current in the line.

An information processing device including a processor, wherein the processor is configured to: acquire an optical image obtained by optically imaging a subject; specify a position of a region of interest based on the optical image; and perform control of displaying a first marker indicating a center position of an irradiation field of radiation and a second marker indicating a position determined in advance for the specified region of interest, in a case in which the subject is radiographically imaged from a direction that is substantially the same as an imaging direction of the optical imaging, on a display in a form of being superimposed on the optical image.

Purely optically controllable switching device for purely optical control of the current flow in a line (LTG), wherein the purely optically controllable switching device comprises a line (LTG) and where one line (LTG) comprises a first line section and wherein one line (LTG) includes a second line section that is different from the first line section and does not overlap, and wherein the purely optically controllable switching device comprises an optically controllable switch (T2) and wherein the purely optically controllable switching device comprises one or more purely optical sensor elements (SE) and wherein the optically controllable switch (T2) is positioned in the line (LTG) between the first line section and the second line section and wherein the optically controllable switch (T2) in an “on” state electrically connects the first line section of the line (LTG) with the second line section of the line (LTG) and wherein the optically controllable switch (T2) in an “off” state electrically separates the first line section of the line (LTG) from the second line section of the line (LTG) and wherein an optical switching signal (SB) determines which of these two states, "On" state or "Off" state, the optically controllable switch (T2) assumes, and wherein the respective purely optical sensor element (SE) of the one or more purely optical sensor elements (SE) comprises a respective carrier material (TM) with respective crystals comprising one or more respective paramagnetic centers (NV), and wherein the respective purely optical sensor element (SE) of the one or more purely optical sensor elements (SE) emits a respective fluorescence radiation (FL) when irradiated with respective pump radiation (LB), which depends on the respective magnetic flux density B at the respective location of the respective purely optical sensor element (SE), and wherein the respective purely optical sensor element (SE) of the one or more purely optical sensor elements (SE) is positioned relative to the first line section such that a line current (I LTG) in the first section of the line (LTG) a magnetic field with a respective flux density B is generated at the respective location of the respective purely optical sensor element (SE), such that, at sufficient current strength, one or more respective paramagnetic centers (NV) of the respective purely optical sensor element (SE) influence the respective fluorescence radiation (FL) of these one or more respective paramagnetic centers (NV) of the respective purely optical sensor element (SE) in a specific respective way with respect to the respective purely optical sensor element (SE), characterized by that the purely optically controllable switching device has first respective means (LWL1, PL1, LIV) assigned to the respective purely optical sensor element (SE) for irradiating the one or more respective paramagnetic centers (NV) of the respective purely optical sensor element (SE) with respective pump radiation and that the purely optically controllable switching device second means (LWL2, F1, PD, LIV) which are assigned to the respective purely optical sensor element (SE), - for detecting and separating the respective fluorescence radiation (FL) of the one or more respective paramagnetic centers (NV) of the respective purely optical sensor element (SE) and - for the acquisition of a respective measurement signal, which depends on the respective intensity of the respective fluorescence radiation (FL) of the respective paramagnetic centers (NV1) of the respective purely optical sensor element (SE) and / or on the respective phase shift Δt of the respective modulation signal of the respective temporal course of the respective intensity of the respective fluorescence radiation (FL) of the respective paramagnetic centers (NV1) of the respective purely optical sensor element (SE) relative to the respective modulation signal of the respective temporal course of the respective intensity of the respective pump radiation (LB) irradiating the respective paramagnetic centers (NV1) of the respective purely optical sensor element (SE), or relative to a signal associated with this respective signal (e.g., respective transmit signal S5) and / or its respective temporal course, - wherein the respective first means and respective second means may comprise common respective device parts (LWL1, LWL2) relating to a respective purely optical sensor element (SE) individually and / or relating to several purely optical sensor elements (SE) depending on the application, and that the purely optically controllable switching device has third means (LIV) to generate an optical switching signal (SB) and to control the state of the optically controllable switch (T2) with this optical switching signal (SB) and that the optical switching signal (SB, SB') is derived from one or more respective intensities of one or more respective fluorescence radiation (FL, FL') of the respective paramagnetic centers (NV1, NV1') of one or more purely optical sensor elements (SE, SE') and / or from one or more respective phase shifts Δt of one or more respective modulation signals of one or more respective time profiles of one or more respective intensities of one or more respective fluorescence radiation (FL, FL') relative to one or more respective modulation signals of one or more respective time profiles of one or more respective intensities of one or more respective pump radiation (LB, LB') or relative to one or more respective signals associated with one or more respective signals (e.g.,depends on the transmission signals S5, S5') and / or their respective temporal progressions.

The invention provides a training method of a CT and DSA real-time automatic fusion registration system for structural heart disease intervention and a storage medium. The training method comprises the following steps: establishing a registration system data set; establishing an initial registration system; based on the registration system data set, training an initial registration system to obtain a trained CT and DSA intraoperative registration system; and inputting the preoperative CT image data and the intraoperative real-time DSA image data of the person to be identified into the trained CT and DSA intraoperative registration system to obtain an intraoperative real-time fusion navigation image and intraoperative risk graphical prompt information. According to the method, cross-modal and cross-time-point dynamic registration can be realized, higher-precision intraoperative navigation support is provided for structural heart disease intervention, the operation safety is improved, and radiation exposure is reduced.

The invention relates to the technical field of medical image processing and interventional therapy assistance, and discloses an intubation fluorescent image feature learning system for hepatic artery chemoembolization. Comprising an image acquisition module which is configured to acquire a distortionless two-dimensional fluorescent blood vessel image in a hepatic artery chemoembolization super-selective intubation process; the control module is used for extracting surface geometric features of the blood vessel from the two-dimensional fluorescent blood vessel image; inputting the surface geometric features to a preset spatial reasoning model, and outputting a spatial distribution probability matrix of each blood vessel part; capturing a difference signal between the spatial distribution probability matrix and angiography feedback data in an actual intubation process in real time, and forming an iterative training data set to optimize the spatial reasoning model; and identifying a potential complex blood vessel region according to the spatial distribution probability matrix, generating an intubation path early warning signal, and generating guide parameters of X-ray release opportunity and dose based on the early warning signal so as to reduce radiation exposure.

The invention provides an imaging method, device and equipment of an interventional instrument. The imaging method comprises the following steps: acquiring a movement track and a current position of the interventional instrument in an interventional environment; according to the motion trail and the current position, a local scanning visual field area of the imaging equipment is determined, and the local scanning visual field area at least comprises an expected advancing path of the interventional instrument; and imaging the interventional instrument according to the local scanning view area to obtain a local image of the interventional instrument. The radiation quantity in the imaging process of the interventional instrument is reduced, and the imaging accuracy is improved.

A method for testing a packaging substrate with at least one electron beam column is described, wherein the packaging substrate is a panel level packaging substrate or an advanced packaging substrate. The method includes placing the packaging substrate on a stage in a vacuum chamber; directing at least one electron beam of the at least one electron beam column on at least a first portion of the packaging substrate; directing the at least one electron beam of the at least one electron beam column on at least a second portion of the packaging substrate; detecting signal electrons emitted upon impingement of the at least one electron beam for testing a first device-to-device electrical interconnect path of the packaging substrate; and illuminating at least a third portion of the packaging substrate with UV radiation.

A radiation exposure dose management apparatus according to an embodiment is a radiation exposure dose management apparatus that manages a radiation dose received by a subject and includes processing circuitry configured: to obtain image data of the subject; to segment the image data in accordance with organs of the subject; to generate a voxel radiation dose distribution map indicating a radiation exposure dose of each of the voxels on the basis of a specific radiation exposure dose model and the image data; and to calculate a radiation exposure dose of each of the organs on the basis of the segmented image data and the radiation exposure dose of each of the voxels within the generated voxel radiation dose distribution map.

A method for forming a pattern including: a step for forming a film using an actinic ray-sensitive or radiation-sensitive resin composition containing a resin having a dispersion degree of less than 1.20, a compound generating an acid by irradiation with an actinic ray or radiation, and a solvent; a step for exposing the film; and a step for developing the exposed film with an organic processing liquid containing butyl acetate and a hydrocarbon having 9 to 12 carbon atoms. Also provided are the actinic ray-sensitive or radiation-sensitive resin composition, and a method for manufacturing an electronic device including the pattern forming method.

The present disclosure provides a method of determining contamination information of at least one first sensor of an object table, the method comprising the steps of: - irradiating a first grating of the at least one first sensor with radiation originating from a radiation source related to a second sensor; - capturing reflected radiation as reflected from the first grating; and - determining the contamination information of the first grating based on the reflected radiation.

A removal method capable of removing a functional layer from a film containing the functional layer with high precision, and a method for producing a recycled film using the removal method are provided. A removal method for removing a functional layer from a film including the functional layer includes the steps of processing the film by irradiating the functional layer with high-energy radiation and removing the functional layer from the processed film.

Optical coherence tomograph for examining an eye (3) which features: - a lighting device (4, 5) for providing source radiation, - an illumination and measurement beam path (7) comprising a splitting element (6) for splitting the source radiation into illumination radiation (B) and reference radiation (R), with the illumination radiation (B) illuminating an illumination field in the eye (3) and collecting backscattered illumination radiation in the eye (3) as measurement radiation (M), wherein the illumination and measurement beam path (7) comprises a scanner (13) for adjusting the lateral position of the illumination field in the eye (3) and a front optic (12), - a reference beam path (8) which provides for the reference radiation (R) an optical path length (21) corresponding to an optical path length from the splitting element (6) to the illumination field and back to a superposition point (71), - a detection beam path (14, 15, 17) which receives the measuring radiation (M) from the illumination and measuring beam path (7) and the reference radiation (R) from the reference beam path (8) and superimposes them at the superposition point (71) and directs them onto a detector (19), - the illumination and measuring beam path (7) further exhibits - a beam splitter (11) for separating the measuring radiation (M) collected by the eye (3) from the illumination radiation (B) directed to the eye (3), wherein the beam splitter (11) directs the separated measuring radiation (M) to the detection beam path (14, 15, 17), and - a light splitting element (32, 34) that splits the illumination radiation (B) into spots in order to illuminate the retina (2) with a multi-spot pattern, characterized in that - the lighting device (4, 5) is tunable with respect to the wavelength of the source radiation, - the detector is an area detector (19), - the detection beam path further - an optical element (14) acting only on the measuring radiation (M), which interacts with the front optics (12) and adjusts the numerical aperture with which measuring radiation (M) is collected in the eye (3), and - an aperture (15) which is arranged in front of the area detector (19), in or near an intermediate image plane and which defines the size of an object field from which the measuring radiation (M) reaches the area detector (19), and - wherein the aperture prior to the area detector is designed as a first multi-hole aperture (15) and a first multi-lens array (36) is arranged between this multi-hole aperture and the area detector (19), which focuses the radiation emanating from each hole of the first multi-hole aperture (15, 15a, 15b) onto a pixel area of ​​the area detector (19) which has a spatial resolution of 4 to 100 pixels in one direction, preferably as a 2D pixel area with 5 to 50 pixels or 5 to 40 pixels per direction.

To provide a pattern forming method capable of obtaining a pattern excellent in in-plane uniformity of line width.SOLUTION: A pattern forming method including (1) a step of forming a film using an actinic ray-sensitive or radiation-sensitive resin composition including a resin (A) that decomposes by the action of an acid to increase polarity and a compound (B) that generates an acid upon irradiation with actinic rays or radiation, (2) a step of exposing the film, and (3) a step of subjecting the exposed film to at least one of development or rinsing with an organic treatment liquid containing butyl acetate and a hydrocarbon having 11 or more carbon atoms, in which a content of the hydrocarbon having 11 or more carbon atoms in the organic treatment liquid is 1% by mass or more and 35% by mass or less.SELECTED DRAWING: None

Methods are provided for cleaning a substrate. An exemplary method includes irradiating a pathogenic formation on a surface of the substrate with radiation in a wavelength range of 350 nm to 800 nm, wherein the substrate includes metal particles on the surface of the substrate, and wherein a highest temperature of the metal particles during the irradiation is less than or equal to 45° C.; and delaminating the pathogenic formation from the substrate.

A moving body tracking device obtains the position of a tracking object 55, and generates a signal for permitting irradiation of a target 50 with radiation when it is determined that the tracking object 55 exists inside a gate range. In the moving body tracking device, the gate range varies between timing when the tracking object 55 enters the inside from the outside of the gate range and timing when the tracking object exits from the inside to the outside. Accordingly, provided are a moving body tracking device and a radiation irradiation system with which it is possible to suppress a change in the dose distribution and a decrease in irradiation efficiency due to the influence of latency.

A method for measuring the surface roughness of an object, wherein this method is: a) Receiving a speckle image showing an object while it is being irradiated by coherent electromagnetic radiation associated with wavelengths between 850 nm and 1400 nm, b) Determining the surface roughness measurement based on the speckle image, c) To provide the measurement value of the surface roughness, Includes.

A method of determining beta radiation intensity based on calculated resonance frequency and calculated quality factor can include providing an electrical sensor comprising at least one prong, irradiating the first composite material of the one of the plurality of planar surfaces and the material of the second section with beta radiation from a beta radiation source; measuring at least one impedance value from the electrical sensor with an impedance analyzer; calculating at least one resonance frequency value based on the measured at least one impedance value; calculating at least one quality factor value based on the calculated at least one resonance frequency value; and determining the beta radiation intensity based on the calculated at least one resonance frequency value and the calculated at least one quality factor value.

To perform angle adjustment between a bulb and a radiation imaging device when a radioactive ray is emitted in a horizontal direction appropriately while suppressing costs.SOLUTION: A system 100 includes a bulb (radioactive ray irradiation unit) 23 for emitting a radioactive ray R. The system 100 includes the bulb 23 and a distance measuring unit (measuring unit) 29 for measuring a distance from an imaging device 1 for generating an image based on the radioactive ray R emitted from the bulb 23 and outputting distance information. The system 100 calculates angle information on the imaging device 1 for an irradiation direction of the radioactive ray R by the bulb 23 on the basis of the distance information measured by the distance measuring unit (measuring unit) 29.SELECTED DRAWING: Figure 5

A method for operating a mask inspection device, in which a photomask illuminated with EUV radiation is imaged onto an image sensor of an EUV camera by a projection lens. The photomask is borne by a positioning system, the positioning system being designed to change the position of the photomask relative to the projection lens. The photomask is moved relative to the projection lens during an exposure process of the EUV camera so that an image line is captured. An image structure included in the image line is compared with a reference structure and a variance between the image structure and the reference structure results in the positioning system being actuated in order to perform a corrective movement of the photomask. The invention also relates to a mask inspection device, a control system and a computer program product.

There is described a device (100) for analyzing particles of a sample, the device (100) comprising: i) an electromagnetic radiation source to illuminate the sample with electromagnetic radiation to thereby generate a scattered signal; ii) a detector to detect a first component (Ivh) of the scattered signal (101), and a second component (Ivv) of the scattered signal (102); and iii) a control device configured to: a) determine (110) the depolarization ratio (Ivh / Ivv) of the sample based on the detected first component (Ivv) and the detected second component (Ivh); b) calculate (122) a polarizability (α) associated with the sample, and c) determine (120) a shape characteristic (p) of the sample particles based on the depolarization ratio (Ivh / Ivv) and the polarizability (α).

A gas sensor (100) is described, which comprises a gas absorption cell (6), configured to house a gas to be detected, an incandescent light bulb (1) comprising a glass bulb (2) and a filament (3) enclosed in the glass bulb (2). The gas sensor (100) also comprises a first detector (4), configured to detect radiation in a first wavelength range of 1-5 um, and a control unit (7), configured to provide a drive current through the filament (3) of the incandescent light bulb (1) during operation of the gas sensor (100). The gas sensor comprises a second detector (5), configured to detect radiation in a second wavelength range of 6-15 µm radiation. The second detector (5) is arranged such that the second detector (5) is illuminated by radiation from the incandescent light bulb (1) during operation of the gas sensor (100).

The invention relates to a device (10) for generating a burst in secondary radiation (12), comprising a primary source (14) for generating primary radiation (16) and a secondary source (18) for generating the secondary radiation (12), wherein the device (10) is configured such that the primary radiation (16) strikes the secondary source (18) and thereby generates the secondary radiation (12), wherein the primary source (14) is configured for burst-mode operation in which several pulse-burst sequences (20), each consisting of several individual pulses (22), are generated, wherein the pulse-burst sequences (20) each have a duration in the range between 0.1 ms and 1 s. The invention further relates to a method for generating a burst in secondary radiation (12).

A mechanical measuring device for simple, reproducible and accurate measurement of leg length differences, characterized by the fact that a measuring table in conjunction with two "foot supports" enables centimeter / millimeter accurate measurement of the difference in leg lengths without further aids and without further radiation exposure of the patients.

Disclosed herein is a device for chiral sensing comprising a chiral plasmonic substrate, wherein when the device is assembled together with a first light source, a liquid sample comprising a plurality of chiral analytes, a second light source, and an instrument, the first light source is configured to illuminate the chiral plasmonic substrate with electromagnetic radiation; and the second light source is configured to illuminate the chiral plasmonic substrate with circularly polarized electromagnetic radiation. The instrument is configured to process electromagnetic signal from the first light source and the second light source to determine a property of the liquid sample.

The present invention relates to a method for applying an image onto a receiving medium, wherein the image is applied onto the recording medium by depositing a UV-curable ink and the ink is irradiated with radiation, wherein the radiation comprises two types of UV radiation. The present invention further relates to a printing apparatus and a software product.

Presented is an invention in which visible light is substituted for damaging radiation, enabling students to learn about radiology through active learning (e.g. by manipulation of a study's subject and seeing, in real time, the resulting changes in the generated image) but without exposure to damaging radiation. The invention also allows student and senior practitioners to practice radiological techniques (e.g. patient positioning, fluoroscopy) without radiation exposure. The invention also allows demonstration of the relationship between a three-dimensional object and its two-dimensional depictions, such as between a machine part and that part's views on a technical drawing.

A compact flow instrument for multiplexed analysis of a pooled population of subsets of particles exposed to a sample includes an examination zone with one or more examination compartments for irradiating a passing particle with electromagnetic radiation (EMR), one or more EMR sources for irradiating the passing particle, one or more detectors configured to detect EMR emitted or scattered by the passing particle, a syringe pump driven by a stepper motor to deliver sheath fluid in characteristic pulses according to each step of the stepper motor for transporting the passing particle, and a controller. The controller is configured to actuate the syringe pump to deliver sheath fluid to transport the passing particle, capture the detected EMR at a rate commensurate with the velocity of the transported particle as it passes through the examination zone, and compile information about the captured EMR.

Apparatus for determining the flowability of a metal powder for use in an additive manufacturing process, comprises; an illumination device 41 to illuminate the powder 33 with electromagnetic radiation 43; an image capture device 42 arranged to detect radiation reflected back from the powder and capture multiple sequential images of the reflected radiation; and an image analysis device configured to compare sequential images to determine differences between the images and compute the rate of movement of particles of the metal powder. Flow speed of the powder can be calculated.