To provide a salt, an acid generator and a
resist composition capable of producing a
resist pattern having good
line edge roughness.SOLUTION: The acid generator and the
resist composition contain a salt represented by formula (I). [In the formulae, Q1, Q2, R1z, and R2z are each independently
hydrogen, fluoro,
alkyl, or the like; z is an integer of 0 to 6; X10 is - CO-O -, - O-CO -, or the like; mm1 is 0 or 1; L1 and L2 are each independently - CO-O -, - O-CO -, or the like; and are each independently - CO-O -, - CO-O -, - CO-CO -, - CO-CO -, - CO-CO-CO -, - CO-CO-CO -, - CO-CO-CO-CO -, - CO-CO-CO-CO-CO-CO-CO-CO-CO-CO-CO-CO-CO-CO-CO-CO-CO-CO-CO-CO-CO-CO-CO-CO-CO-CO-CO- L12 R5 X1 X1 W1 R10 L12, R10 represents an
aromatic hydrocarbon group having one or more substituents, one or more of the substituents being -OR11, R11 being a
hydrogen atom or an
acid labile group; m5 represents an integer of 1 to 4; and Z + represents an organic cation. ] SELECTED DRAWING: None