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65results about How to "Remove roughness" patented technology

Apparatus and Method for Improving Photoresist Properties

The invention can provide apparatus and methods of processing a substrate in real-time using subsystems and processing sequences created to improve the etch resistance of photoresist materials. In addition, the improved photoresist layer can be used to more accurately control gate and / or spacer critical dimensions (CDs), to control gate and / or spacer CD uniformity, and to eliminate line edge roughness (LER) and line width roughness (LWR).
Owner:TOKYO ELECTRON LTD

Switchable Neutral Beam Source

The invention can provide apparatus and methods of processing a substrate in real-time using a switchable quasi-neutral beam system to improve the etch resistance of photoresist layer. In addition, the improved photoresist layer can be used in an etch procedure to more accurately control gate and / or spacer critical dimensions (CDs), to control gate and / or spacer CD uniformity, and to eliminate line edge roughness (LER) and line width roughness (LWR).
Owner:TOKYO ELECTRON LTD

Apparatus and Method for Improving Photoresist Properties Using a Quasi-Neutral Beam

InactiveUS20110174606A1Eliminate line edge roughness line roughnessEliminate line roughness line width roughnessElectric discharge tubesExhaust apparatusLine widthPhotoresist
The invention can provide apparatus and methods of processing a substrate in real-time using a Quasi-Neutral Beam (Q-NB) curing system to improve the etch resistance of photoresist layer. In addition, the improved photoresist layer can be used to more accurately control gate and / or spacer critical dimensions (CDs), to control gate and / or spacer CD uniformity, and to eliminate line edge roughness (LER) and line width roughness (LWR).
Owner:TOKYO ELECTRON LTD

PZT (111) texture through Ir texture improvement

The present invention is directed to a method of forming a ferroelectric capacitor having a (111) PZT texture. The method includes forming a smooth bottom electrode diffusion barrier layer that facilitates a preferential (111) texture in the subsequently formed bottom electrode layer. The (111) bottom electrode layer texture than facilitates a high quality (111) texture in the overlying PZT layer, thereby improving bit-to-bit polarization charge uniformity for various capacitors as the ferroelectric capacitor sizes continue to shrink.
Owner:TEXAS INSTR INC

Bridge damage diagnosis method based on axle coupling system

InactiveCN106802222ADiscover hidden dangers in timeLow impact on normal traffic operationsElasticity measurementCoupling systemEngineering
The invention relates to the field of bridge engineering detection, specifically to a bridge damage diagnosis method based on an axle coupling system. The bridge damage diagnosis method includes the following specific steps: a. two detection vehicles depart from different positions of a bridge towards a 1# abutment direction to pass the bridge, and a signal acquisition subsystem synchronously acquires vertical acceleration response in the process of trolleys passing the bridge each time; b. the two detection vehicles depart from different positions of the bridge towards a 0# abutment direction to pass the bridge, and the signal acquisition subsystem synchronous acquires vertical acceleration response in the process of the trolleys passing the bridge each time; and c. using the vertical acceleration response of the trolleys measured in Step a and Step b to perform secondary integration processing on time t separately, thereby obtaining approximate vertical displacement response of the corresponding trolleys. Through the bridge damage diagnosis method based on the axle coupling system, detection signals can be obtained on the bridge to be detected through the detection vehicles, damage information of the bridge can be obtained through corresponding processing conversion according to the detection signals, the approximate position of bridge damage does not need to be known in advance, the operation is simple and easy, and the efficiency is high.
Owner:CHONGQING UNIV

Method of manufacturing honeycomb structures

A method of manufacturing a honeycomb structure, the method comprising the steps of forming staggered cells through the entire thickness of a fiber fabric, causing loosely held pegs to penetrate into respective ones of the cells, each peg having a cross-section of size smaller than that of the corresponding cell and being made of a material that is suitable for expanding; expanding the pegs so that they fill the cells and exert pressure on the inside faces of the cells; and shrinking the pegs and then withdrawing them.
Owner:SNECMA MOTEURS SA

Model surface normal calculating method

The invention discloses a model surface normal calculating method. For a triangular network model spliced by a plurality of triangles and describing the surface structure of an object, through GPU rasterization, interpolation calculation is performed on each vertex and each pixel, calculation results are converted into position and normal information of the pixels, and lighting information of the surface of the model can be obtained by calculating the orientation of the normal of each pixel. The calculation of the orientation of the normal of each pixel includes two conditions: the first one is the calculation of the normal of a model without a normal map, and the second one is the calculation of the normal of a model with a normal map. The purposes of model surface transition unsmoothness elimination and small contrast are achieved.
Owner:WUXI FANTIAN INFORMATION TECH

System and method for eliminating the structure and edge roughness produced during laser ablation of a material

The present technology relates generally to laser ablation, and more particularly pertains to a system and method for eliminating structure and edge roughness, which is produced during the laser ablation of a material. Ablation of materials using a femtosecond laser beam produces a fine scale periodic structure in the ablated region. The structure consists of residual (i.e. unablated material) and is always perpendicular to the polarization direction of the laser beam. By changing the polarization direction during the ablation process, the structure is averaged over many directions and thus eliminated. This eliminates structure and edge roughness in a material caused by the laser ablation of the material. The method is employed to the repairing of photomasks so as to cause the optical quality thereof to be improved.
Owner:GLOBALFOUNDRIES INC

Method for producing a silicon wafer

ActiveUS20050148181A1High precision flatnessMinute surface roughnessPolycrystalline material growthAfter-treatment detailsWaferingSurface roughness
Provided is a method for producing a silicon wafer those surfaces exhibit precise flatness and minute surface roughness, and which allows one to visually discriminate between the front and rear surfaces, the method comprising a slicing step of slicing a single-crystal ingot into thin disc-like wafers, a chamfering step of chamfering the wafer, a lapping step for flattening the chamfered wafer, a mild lapping step for abrading away part of processing distortions on the rear surface of the wafer left after chamfering and lapping, a rear-surface mild polishing step for abrading away part of roughness on the rear surface of the wafer, an etching step for alkali-etching the remains of processing distortions on the front and rear surfaces of the wafer, a mirror-polishing step for mirror-polishing the surface of the etched wafer, and a cleaning step for cleaning the mirror-polished wafer.
Owner:SUMCO CORP

Pre-assembled anti-creep waist-clothing stay device and method of reinforcing crotch-adjacent inner-seam areas

InactiveUS20060218699A1Deter wearier 's skin irritationImproved anti-creep waist-clothingTrousersGirdlesAdhesiveEngineering
A pre-assembled anti-creep waist-clothing stay device including a patch having front and back surfaces and sized for application to a crotch-adjacent inner-seam area of the waist-clothing and a stay strip affixed to the back surface of the patch, the stay strip being positioned and sized such that the patch extends beyond edges of the stay strip. In key embodiments, the patch includes a heat-activated adhesive such that, when the patch is applied to the waist-clothing with iron-on heat and pressure, the patch adheres at its back surface to the waist-clothing, thereby securing the stay strip in position to prevent the waist-clothing from riding up and bunching in the crotch area.
Owner:PRODMASTERS

Microfluidic chip based on optical detection and preparation method thereof

ActiveCN104251910ARemove roughnessEliminate Thermal Mismatch IssuesMaterial analysis by optical meansSubstrate surfaceChemistry
The invention relates to a microfluidic chip based on optical detection and a preparation method thereof. A microfluidic chip based on optical detection includes an upper substrate layer, a lower substrate layer and an interlayer. The interlayer is positioned between the two substrate layers, the interlayer is provided with a sample channel and an injection hole, and the sample channel comprises a groove structure penetrating through the interlayer and substrate surfaces. The preparation method comprises the following steps: 1, preparing the groove structure and the injection hole in the interlayer, wherein the groove structure penetrates through the interlayer; and 2, bonding the interlayer with groove structure and the two substrates together, so that side wall of the groove and the substrate surfaces constitute the sample passage. The invention has the beneficial effects that the surface of the microfluidic chip sample channel is smooth, so no thermal mismatch exists; and arrangement of the injection hole leads to turbulence within the sample channel, so as to improve the detection accuracy. Therefore, the invention has the characteristics of simple preparation process, high stability and high detection sensitivity.
Owner:黄辉 +2

Semiconductor apparatus fabrication method forming a resist pattern, a film over the resist, and reflowing the resist

A semiconductor apparatus fabrication method is capable of effectively suppressing edge roughness when an extremely fine resist pattern is formed. In the semiconductor apparatus fabrication method, the extremely fine resist pattern is covered with a film whose heat-resistance temperature is higher than the softening temperature of the resist pattern. In this state, the resist pattern is heated at a temperature higher than the softening temperature and lower than the heat-resistance temperature in order to cause reflow in the resist pattern.
Owner:FUJITSU SEMICON LTD

Method and device for precisely controlling axial fiber polishing thickness

The present invention is axial fiber grinding and polishing method and device with precise control on grinding and polishing thickness, controlled length and simultaneous treatment of several fibers. The fiber grinding and polishing thickness up to 0.01 micron is realized through regulating the voltage applied on the piezoelectric PZT and altering the position of the ground fiber relative to the datum block. The fiber grinding length is controlled precisely with the precise guide mechanism and locating sensor for axial grinding of fiber longer than 100 mm. One arc discharge polishing process is adopted, in which arc discharge produces high temperature to smelt the surface of the fiber under polishing to eliminate surface roughness, micro cracks and pits causing great loss. The microcrystalline glass is engraved with several V-grooves for several fibers to be set on for simultaneous processing in high work efficiency.
Owner:BEIJING JIAOTONG UNIV

Plukenetia volubilis linneo body lotion and preparation method thereof

InactiveCN104825366AMoisturizes skin Rough skinEliminate rough skinCosmetic preparationsToilet preparationsWoolTriethanolamine
The invention relates to plukenetia volubilis linneo body lotion and a preparation method thereof. The body lotion consists of an American ginseng stem and leaf extracting solution, albolene, white oil, glycerin monostearate, plukenetia volubilis linneo oil, wool fat, triethanolamine and distilled water. The preparation method comprises the following steps: (1) mixing the American ginseng stem and leaf extracting solution, triethanolamine and the balance of distilled water into an aqueous phase according to the formula amount; (2) mixing the white oil, albolene, glycerin monostearate, wool fat and plukenetia volubilis linneo oil into an oil phase according to the formula amount; (3) respectively heating the two phases to 80-85 DEG C, preserving the temperature, slowly adding the aqueous phase into the oil phase while stirring so as to emulsify, uniformly stirring, cooling to room temperature, thereby obtaining the product. The body lotion disclosed by the invention has the advantages that (1) the body lotion has the effects of moistening the skin and eliminating rough skin, the skin is kept smooth and tender, the effects of resisting wrinkles, resisting allergy and whitening are achieved, and the body lotion does not have any side effect; (2) the body lotion is low in cost, simple in process and convenient to operate; and (3) the product does not contain lead, mercury and other heavy metal elements and does not have any toxic or side effect.
Owner:SANYA QIXING BIOLOGICAL ENERGY DEV CO LTD

Apparatus and method for improving photoresist properties using a quasi-neutral beam

The invention can provide apparatus and methods of processing a substrate in real-time using a Quasi-Neutral Beam (Q-NB) curing system to improve the etch resistance of photoresist layer. In addition, the improved photoresist layer can be used to more accurately control gate and / or spacer critical dimensions (CDs), to control gate and / or spacer CD uniformity, and to eliminate line edge roughness (LER) and line width roughness (LWR).
Owner:TOKYO ELECTRON LTD

Holographic illuminator for synchrotron-based projection lithography systems

InactiveUS6927887B2Increase scattering angleMitigate potential high-angle scatterDiffusing elementsDiffraction gratingsImaging processingLithographic artist
The effective coherence of a synchrotron beam line can be tailored to projection lithography requirements by employing a moving holographic diffuser and a stationary low-cost spherical mirror. The invention is particularly suited for use in an illuminator device for an optical image processing system requiring partially coherent illumination. The illuminator includes: (1) a synchrotron source of coherent or partially coherent radiation which has an intrinsic coherence that is higher than the desired coherence, (2) a holographic diffuser having a surface that receives incident radiation from said source, (3) means for translating the surface of the holographic diffuser in two dimensions along a plane that is parallel to the surface of the holographic diffuser wherein the rate of the motion is fast relative to integration time of said image processing system; and (4) a condenser optic that re-images the surface of the holographic diffuser to the entrance plane of said image processing system.
Owner:EUV

Image processing method and device, and terminal device

The invention discloses an image processing method and device, and a terminal device. The method includes the following steps of converting an image from the RGB space to the YCbCr space to obtain a first processed image; performing smoothing filtering on the chromaticity component of the first processed image in the YCbCr space to obtain a second processed image; and converting the second processed image from the YCbCr space to the RGB space. According to the image processing method, the image is converted from the RGB space to the YCbCr space, the chromaticity component is subjected to smoothing filtering in the YCbCr space, the unsmooth phenomenon of the chromaticity components Cb and Cr can be eliminated, when the processed image is converted from the YCbCr space back to the RGB space, the moire on the image also disappears, the moire on the image can be effectively removed, the image blurring can be prevented, the image quality is improved, and the technical problem that after the interpolation, the image high-frequency edge has moire can be solved.
Owner:QIKU INTERNET TECH SHENZHEN CO LTD

Skin whitening and moisturizing mask

The invention discloses a skin whitening and moisturizing mask and belongs to the field of cosmetics. The skin whitening and moisturizing mask disclosed by the invention comprises the following components in parts by mass: 5-10 parts of aloe, 10-15 parts of pearl powder, 5-10 parts of lemon essential oil, 5-10 parts of rose essential oil and 5-10 parts of lavender essential oil. The mask formed by mixing plant essential oils with the pearl powder is mild, has no stimulation to skin, has no side effects and is capable of whitening and moisturizing the skin.
Owner:栾晓健

Black rice cake and processing method thereof

InactiveCN105875771ASolve the technical problems of resurrectionSolve technical problemsDough treatmentBakery productsPreservativeSugar
The invention discloses a black rice cake. The black rice cake is prepared from, by weight, 18-22 parts of fresh eggs, 18-22 parts of salad oil, 18-22 parts of wheatmeal, 17-19 parts of white granulated sugar, 9-11 parts of syrup, 5-6 parts of black rice flour, 4-6 parts of drinking water, 0.8-1.2 parts of an emulsifying agent, 0.6-0.7 part of a raising agent, 0.4-0.45 part of edible salt, 0.1-0.12 part of essence, 0.1-0.12 part of acidity regulator, 0.1-0.12 part of a thickening agent, 0.06-0.08 part of preservative and 0.04-0.06 part of a stabilizing agent. The obtained cake is rich in nutrition and fragrant and sweet in mouthfeel, the problem of cooked black rice retrogradation is solved, fragrance of black rice and egg fragrance of a cake are fully fused together, the variety of cakes is enriched, and people can enjoy the delicious cake while made healthier; in addition, existing baking production equipment is matured, large-scale production can be achieved, and requirements for social development can be met.
Owner:CHACHA FOOD CO LTD

Sheep placenta capsule compound nest-defence capsule for beautifying face

The invention belongs to the technology field of Tibetan medical health food, particularly a hard capsule prepared from saffron extract, Tibetan medlar extract, Tibetan solomonseal extract, Tibetan angelica extract, Chinese yam extract, multiflower knotweed root extract, seaweed extract, proanthocyanidin , vitamin B6, vitamin E, vitamin C, etc. The prepration process for the hard capsule includes mixing the materials, stirring; filling into capsules, sealing; checking; and packaging to obtain finished product. The capsule is effective in caring ovary, caring skin, postponing aging, etc.
Owner:苟春虎

Trapezoid groove mosaic structure for blades and upper canopy of water turbine model runner

The invention provides a trapezoid groove mosaic structure for blades and an upper canopy of a water turbine model runner. An original rectangular groove assembling type structure adopted in the upper canopy and the blades of the water turbine model runner is changed into the trapezoid groove mosaic structure, the other structures are not changed, the blades and the upper canopy are tightly held and combined through screws, and therefore trapezoid grooves can make tight contact with side faces of trapezoid protruding blocks. The trapezoid groove mosaic structure is simple, convenient to operate, safe and reliable, machining problems are solved, the assembling difficulty is lowered, the problem that matching gaps exist between rectangular protruding blocks of the blades and rectangular grooves of the upper canopy is thoroughly solved, and the phenomenon that because the gaps exist in the flow passing surface of the upper canopy after assembling, the flow passing surface of the upper canopy is not smooth is eliminated.
Owner:HARBIN ELECTRIC MASCH CO LTD

Carriage assembly of a hard disk drive and method of manufacturing the same

A carriage assembly of a hard disk drive, and a manufacturing apparatus for the same are not susceptible to problems such as flying leads breaking and resin residue being deposited on bonding terminals when the flying leads of a long tail suspension circuit board are pulled off the bonding terminals of a flexible printed circuit board. The flying leads of the long tail suspension circuit board and the bonding terminals of the flexible printed circuit board are ultrasonically bonded together by placing an ultrasonic tool in contact with opposite surfaces of the flying leads to the surfaces that are bonded to the bonding terminals and applying ultrasonic vibration from the ultrasonic tool in a state where the flying leads are pressed onto the bonding terminals. Coating layers composed of a thermally meltable metal that melts at a lower temperature than the material forming the bonding surfaces are respectively formed on the opposite surfaces of the flying leads.
Owner:KK TOSHIBA

Rolling tool

The invention relates to a rolling tool with a roller support protruding in a feed direction. One or more rolling rollers are arranged on the periphery of the roller support and can rotate with the axis of the rollers. The rolling tool is used for processing a workpiece surface. One of the rolling rollers has a contact surface for contacting the workpiece. The contact surface has a rough segment with a projection protruding outwards in a radial direction about the axis of the rollers. The invention also relates to a method for processing a workpiece surface with the rolling tool in the invention.
Owner:HOFFMANN GMBH QUALITATSWERKZEUGE

Flame axial propagation velocity measurement method based on flame self-luminous property

The invention provides a flame axial propagation velocity measurement method based on a flame self-luminous property and relates to a method for measuring the propagation velocity of a flame in a detonation chamber from a retarding state to a knocking state. The problem that the time resolution is low in detecting a flame propagation speed with a pressure sensor or an ion probe at present and theinstantaneous propagation speed of a detonation wave is difficult to obtain is solved. The method comprises a step of filling the detonation chamber with an optical window with pre-mixed combustible gas, and igniting to generate a flame to propagate downstream from the detonation chamber, a step of imaging the flame at a frame rate larger than 200 kHz by using a high-speed camera, a step of cutting, calibrating and binarizing each captured image by using MATLAB software to determine the actual axial position corresponding to a flame front at the axial centerline of the detonation chamber, anda step of calculating the propagation speed of the detonation wave according to the actual position of the flame front of each image and a shooting time. The method is suitable for the fine measurement of the speed during the study of flame propagation in the detonation chamber.
Owner:NORTHWESTERN POLYTECHNICAL UNIV

Assembled anti-creep waist-clothing stay device and method of reinforcing crotch-adjacent inner-seam areas

InactiveUS7640602B2Improved anti-creep waist-clothing stayMinimizing tearingTrousersGirdlesAdhesiveMechanical engineering
A pre-assembled anti-creep waist-clothing stay device including a patch having front and back surfaces and sized for application to a crotch-adjacent inner-seam area of the waist-clothing and a stay strip affixed to the back surface of the patch, the stay strip being positioned and sized such that the patch extends beyond edges of the stay strip. In key embodiments, the patch includes a heat-activated adhesive such that, when the patch is applied to the waist-clothing with iron-on heat and pressure, the patch adheres at its back surface to the waist-clothing, thereby securing the stay strip in position to prevent the waist-clothing from riding up and bunching in the crotch area.
Owner:PRODMASTERS

Shower gel and preparation method thereof

The invention relates to the daily necessities chemical industry field, and especially relates to a shower gel and a preparation method thereof, wherein the shower gel is prepared from the following raw materials in parts by weight: ammonium laureth sulfate, disodium laureth sulfosuccinate, polyammonium salt, a coconut oil derivative, lauryl betaine, sodium lauroyl sarcosine, glycerol, sodium chloride, citric acid, hydroxypropyltrimonium chloride hydrolyzed protein, a wheat germ extract, meadowfoam seed oil, peppermint oil, a lilac extract, natural honey, a citrus essence, an aloe essence extract, garlic oil, tetrasodium EDTA, propanol, propylene glycol, methylisothiazolinone, decyl glucoside, PEG-100 stearate, hydroxyethyl cellulose, and deionized water. The shower gel contains a variety of amino acids, vitamins, and mineral nutritional ingredients, and is capable of eliminating phenomena of skin surface dryness, roughness, skin itching, skin allergies, too much dandruff and the like.
Owner:GUANGXI UNIV

Method and device for precisely controlling axial fiber polishing thickness

The present invention is axial fiber grinding and polishing method and device with precise control on grinding and polishing thickness, controlled length and simultaneous treatment of several fibers. The fiber grinding and polishing thickness up to 0.01 micron is realized through regulating the voltage applied on the piezoelectric PZT and altering the position of the ground fiber relative to the datum block. The fiber grinding length is controlled precisely with the precise guide mechanism and locating sensor for axial grinding of fiber longer than 100 mm. One arc discharge polishing process is adopted, in which arc discharge produces high temperature to smelt the surface of the fiber under polishing to eliminate surface roughness, micro cracks and pits causing great loss. The microcrystalline glass is engraved with several V-grooves for several fibers to be set on for simultaneous processing in high work efficiency.
Owner:BEIJING JIAOTONG UNIV

System and method for eliminating the structure and edge roughness produced during laser ablation of a material

The present technology relates generally to laser ablation, and more particularly pertains to a system and method for eliminating structure and edge roughness, which is produced during the laser ablation of a material. Ablation of materials using a femtosecond laser beam produces a fine scale periodic structure in the ablated region. The structure consists of residual (i.e. unablated material) and is always perpendicular to the polarization direction of the laser beam. By changing the polarization direction during the ablation process, the structure is averaged over many directions and thus eliminated. This eliminates structure and edge roughness in a material caused by the laser ablation of the material. The method is employed to the repairing of photomasks so as to cause the optical quality thereof to be improved.
Owner:GLOBALFOUNDRIES INC

High precision polishing method and device for arc discharge fiber cross section

The present invention is fiber grinding and polishing arc discharge process and device. The device consists of a PZT height regulator, a motor speed controller, a precise guide conveying belt, a locating sensor and electrodes. The arc discharge polishing process is that the arc discharge between two electrodes produces high temperature effect to smelt the surface of the ground fiber so as to eliminate micro crack of the fiber surface with the fiber being controlled to move axially in the controlled moving speed. Microscopic observation shows that the polished fiber is transparent, stable in performance and without surface micro crack.
Owner:BEIJING JIAOTONG UNIV
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