17 results about "High energy beam" patented technology

This invention provides a method for eliminating bonding interface defects, a module for eliminating bonding interface defects, a semiconductor device processing apparatus, and a computer-readable storage medium. The method for eliminating bonding interface defects includes the following steps: locating at least one bubble defect on the bonding interface of a grain-wafer bond; and applying a pulsed high-energy beam from the grain side of the bonding interface to the at least one bubble defect to form at least one venting micro-via penetrating the corresponding grain above the bubble defect, wherein the peak power of the pulsed high-energy beam is not less than 10 kW, and its single-pulse energy is not greater than 1 mJ.

This invention relates to the field of metal surface strengthening technology, specifically a method for in-situ generation of TiC-TiN ceramic materials using a titanium-containing substrate and an atmosphere-assisted high-energy beam. This method utilizes the titanium-containing substrate itself as a titanium source. Under a specific atmosphere, high-energy beam irradiation causes the Ti element in the substrate to react in-situ with C and N elements in the atmosphere, generating a TiC and / or TiN ceramic strengthening layer on the substrate surface. Specifically, the method includes: pretreating the titanium-containing substrate; placing it in a reaction chamber and introducing an auxiliary gas containing C and / or N; scanning and irradiating the substrate surface with a high-energy beam, controlling process parameters to allow Ti to react with C and N, generating a 0.5-1.2 mm thick metallurgically bonded strengthening layer. The advantages are: this invention eliminates the need for additional titanium powder or carbon powder, resulting in a simple and low-cost process; the strengthened layer exhibits high bonding strength with the substrate with no risk of detachment; and it significantly improves the surface hardness, wear resistance, and corrosion resistance of the substrate, making it widely applicable in military, aerospace, and marine equipment fields.

This invention relates to the field of metal material processing technology, specifically to a method for optimizing the composition of high-strength and high-toughness aluminum-lithium alloys for additive manufacturing using rare earth synergistic refinement. The method includes the following steps: obtaining aluminum-lithium alloy matrix powder, and separately obtaining CeH2 powder as a cerium source and ZrH2 powder as a zirconium source as reaction precursors; uniformly mixing the CeH2 powder, ZrH2 powder, and aluminum-lithium alloy matrix powder to form a composite powder raw material; during electron beam additive manufacturing, based on the ultra-high temperature and ultra-high cooling rate environment provided by the molten pool formed on the composite powder raw material by high-energy beam scanning, CeH2 and ZrH2 decompose into highly active Ce atoms and Zr atoms, and promote the in-situ synthesis reaction between the two and molten aluminum to generate a (Ce,Zr)Al3 nanocomposite phase. This invention achieves spatiotemporal synchronization of refined phase generation and solidification nucleation by using CeH2 and ZrH2 as precursors to generate the (Ce,Zr)Al3 nanocomposite phase.

This invention discloses a method for constructing a digital model of a high-energy beam pre-controlled projectile with random defects. The method includes: establishing a model of the high-energy beam pre-controlled projectile using TrueGrid software; outputting the node and element information of the mesh according to the format requirements of the finite element software; extracting node and element data from the mesh model file, dividing the element data into base element data and pre-controlled zone element data; obtaining element data of the defect-forming locations and the remaining element data in the pre-controlled zone according to a pre-defined ratio of defect formation locations and their volume in the pre-controlled zone; randomly deleting element data from the defect-forming locations; and merging the data to form a mesh model file that meets the requirements, thus obtaining the element data of the high-energy beam pre-controlled projectile with random defects. This construction method can generate controllable random defects in the pre-controlled zone, completing the defect characterization of the high-energy beam pre-controlled projectile.

A method for depositing a metal material on a ceramic or mineral substrate uses an application device. A high energy beam from an energy source on the application device is directed onto a surface of the substrate. The metal material is applied to a region of the surface of the substrate and melted, at least in portions, by the high energy beam. After solidifying the metal material is deposited in the form of a material application on the surface of the substrate. The high energy beam impinging on the surface of the substrate defines a working region, a position of which can be modified by a relative displacement of the surface of the substrate and the laser device. In the working region, an indentation is made in the surface of the substrate, and the material is applied into the indentation.

The present application relates to the technical field of metal material processing, in particular to a rare earth synergistic refining high-strength and high-toughness aluminum-lithium alloy composition optimization method for additive manufacturing, comprising the following steps: obtaining aluminum-lithium alloy base powder, and respectively obtaining CeH2 powder as a cerium source and ZrH2 powder as a zirconium source as reaction precursors; uniformly mixing the CeH2 powder, the ZrH2 powder and the aluminum-lithium alloy base powder to form a composite powder raw material; in an electron beam additive manufacturing process, based on the super-high temperature and super-high cooling rate environment provided by the molten pool formed on the composite powder raw material by high-energy beam scanning, the CeH2 and the ZrH2 are decomposed into high-activity Ce atoms and Zr atoms, and in-situ synthesis reactions of the two with molten aluminum are promoted to generate (Ce, Zr)Al3 nanocomposite phases. By using CeH2 and ZrH2 as precursors, (Ce, Zr)Al3 nanocomposite phases are generated, and the spatial and temporal synchronization of refined phase generation and solidification nucleation is realized.

The invention relates to the technical field of additive manufacturing, in particular to an optical platform and equipment for additive manufacturing and an additive manufacturing method of the optical platform and the equipment. The light path output mechanism is used for outputting a high-energy beam; the at least one transparent blocking piece is arranged below the light path output mechanism and allows the high-energy beams to penetrate through, the transparent blocking pieces are arranged at the output end of the driving system, and in the additive manufacturing process, when pollutants such as material splashing and smoke dust are generated, the transparent blocking pieces can flexibly move under the action of the driving system, the pollutants are dynamically blocked, and the light path output mechanism is used for transmitting the high-energy beams. The probability that pollutants are directly deposited and attached to the surface of the light path output mechanism is effectively reduced, so that the situation that the normal laser propagation path is interfered after the surface of the light path output mechanism is polluted is avoided, the risk that the light path output mechanism is damaged due to pollution is reduced, and the stability and reliability of the whole additive manufacturing process are improved.

A mobile detection system that follows the high energy beamline during a tuning phase / startup phase of an ion implantation system or otherwise having a passive mobile monitoring system around the ion implantation system can identify radiation conditions that stationary detection systems outside or even inside the system may have missed or poorly reported data on. A mobile detection system that can move a radiation detector to pinpoint location near the ion implantation system or wafer cassette and take detailed data readings very near the source will provide enhanced abilities to determine radiation conditions and appropriately determine shutdown and cooldown times, thereby improving efficient use of the system.

The application discloses a rapid directional solidification device and a rapid directional solidification method. The device comprises a material placing bin, a plurality of electron gun heat sources, a fixing assembly and a driving assembly. In the working process, the material to be grown is placed in the material placing bin, the material is positioned and clamped through the fixing assembly, and the driving assembly is started to stably rotate the material. The plurality of electron gun heat sources arranged at intervals in the circumferential direction of the material placing bin are turned on, and the high-energy beam uniformly heats the rotating material, so that the specified area of the material is gradually melted to form a stable melting zone. Then, the driving assembly moves the material downward, and the melting zone shape and temperature field are kept stable under the synergistic action of the electron gun heat source and the liquid metal cooling, and the crystal growth process is completed. The rapid directional solidification device can realize controllable rapid directional solidification in a very wide cooling rate range (10 1 ~10 6 K / s order of magnitude), and the rapid directional solidification method can prepare single crystal and oriented polycrystal materials with non-equilibrium structures.

This invention discloses a method for synergistic control of residual stress and microstructure in a pulsed current-assisted metal additive manufacturing process, belonging to the field of metal material additive manufacturing technology. The method includes the following steps: S1, setting the process parameters for metal additive manufacturing and planning the area and timing for synchronously applying pulsed current; S2, during the layer-by-layer deposition process of the component, when a high-energy laser beam, electron beam, or electric arc acts on the deposition area to form a molten pool, a pulsed power supply is triggered by a synchronous control unit to apply a pulsed current with preset parameters to the molten pool and the heat-affected zone; S3, through the synergistic effect of the electroplasticity and Joule heating of the pulsed current, thermal stress relaxation, grain refinement, and microstructure homogenization are simultaneously achieved during the manufacturing process. This invention, by employing the above method and precisely controlling the electrical pulse parameters, simultaneously achieves stress relaxation and solidification microstructure optimization during the manufacturing process, significantly improving the dimensional stability, fatigue life, and mechanical properties of the formed component.

The present invention is a resist composition including at least one kind of hypervalent iodine compounds selected from the following formulae (1), (2), and (3), a carboxy group-containing compound, and a solvent. In the formula, n1 represents 0 to 2; n2 represents 0 to 2; n3 represents 0 to 3; R11 to R13 represent a halogen atom or a hydrocarbyl group having 1 to 10 carbon atoms; X1 to X3 represent *—O—XA1— or *—XA2(—R14)—C(═O)—; XA1 represents a carbonyl group or a hydrocarbylene group having 1 to 10 carbon atoms; XA2 represents nitrogen or sulfur; and R14 represents a hydrogen atom, a halogen atom, or a hydrocarbyl group having 1 to 20 carbon atoms. This can provide a non-chemically amplified resist composition that is excellent in sensitivity and a resolution limit in photolithography with a high-energy beam, in particular in electron beam (EB) lithography and EUV lithography.

The application relates to the technical field of particle acceleration, and particularly discloses a high-repetition nanosecond beam pulsing system and method, wherein the high-repetition nanosecond beam pulsing system comprises, in sequence along a beam transmission direction, a direct current ion source, a low-energy beam transmission section, a radio frequency quadrupole field accelerator, a high-energy beam transmission section and a target chamber, adopts a three-stage structure of 'front-end pulsing + middle-stage acceleration + rear-end purification', and is helpful to stably realize high-repetition, nanosecond narrow pulse width output; through pre-chopping and post-bunching, the pulse width is ensured, and invalid particles are reduced to enter a subsequent acceleration channel; the working frequency of the radio frequency chopper is half of the target pulse repetition frequency, the difficulty of synchronous control can be reduced, time sequence accuracy and phase synchronization can be ensured, beam loss and phase disorder can be avoided, pulse time sequence consistency can be ensured, and beam utilization rate can be improved; and the high-repetition nanosecond beam pulsing is stably ensured.

This invention relates to the field of additive manufacturing metal materials technology, specifically disclosing a low-cracking-prone, low-expansion-cobalt-based iron-nickel-cobalt alloy powder and its preparation method. This alloy optimizes the composition of traditional expansion alloys. Its key technology lies in the synergistic addition of trace amounts of rare earth elements lanthanum (La) and boron (B), while strictly limiting the content of copper (Cu), to suppress the formation of low-melting-point phases and reduce grain boundary oxide segregation, thereby significantly improving the alloy's resistance to thermal cracking during high-rate, high-energy-beam additive manufacturing. Compared with existing technologies, the alloy powder provided by this invention enables the additive manufacturing of high-density, low-defect, high-performance expansion alloy components.

The application provides a method for preparing a metal truss structure by using a high-energy beam 3D printing, which comprises the following steps: S10. The free end of a wire material with a wire diameter of 0.8mm-4mm is pulled to a first target welding point on a base material, a focal point of a laser beam with a power of not more than 2000W is aligned with the first target welding point for spot welding, so that one end of the wire material is welded on the base material, and the exposure time of the laser beam is 0.04s-0.4s; S20. The wire material is pulled towards a second target welding point on the base material, so that the wire material is in contact with the second target welding point on the base material, and the wire material is welded on the base material at the second target welding point in the welding mode of the wire material welded at the first target welding point; and S30. The wire material is cut off by using a single-pulse laser with a duration of 1ms-10ms or a multi-pulse laser with an action time of 10-100 pulse periods and a peak power of 200w-2000w at the second target welding point. The application has the beneficial effects of high production efficiency, low cost, and the combination of the laser beam and the plasma beam used alone or in combination, and is more flexible.

The application relates to the technical field of metal processing, in particular to a part cutting device for metal processing, which comprises a base assembly, a high-energy beam cutting assembly, a cooling and chip removal assembly and a self-adaptive adjusting assembly. The base assembly is provided with sliding rails and a fixed clamp, and the fixed clamp is linked with the self-adaptive adjusting assembly through a driving rack. The high-energy beam cutting assembly realizes accurate cutting through a focusing lens group, and the cooling and chip removal assembly reduces thermal deformation and removes waste chips through a cooling liquid nozzle and a chip removal channel. The self-adaptive adjusting assembly adjusts the position of the fixed clamp in real time through a detection module, so that the optimal cutting distance is ensured. The application can efficiently complete the continuous grooving operation of stepped shaft parts, and significantly improves the cutting precision and the automation level of the equipment.

The present invention is the resist composition includes a compound represented by the following general formula (1) and a solvent. This can provide a resist composition that exhibits excellent sensitivity, stability, and ease of handling for photolithography using a high-energy beam, particularly EB lithography and EUV lithography, as well as a patterning process that uses the resist composition.

This invention relates to the field of metal welding technology, specifically to a high-efficiency, precision, and low-stress welding manufacturing method for titanium alloy through-hole components. Addressing the problems of low efficiency, large deformation, and prominent residual stress in traditional fillet welds, this invention modifies the fillet joint between the through-hole component and the pressure-resistant structural shell into a zero-gap butt joint between a conformal skirt and the shell opening. A narrow-gap bevel with a large blunt edge is set on the assembly mating surface, and a high-energy beam single-pass self-fusion root pass weld penetrates the blunt edge in one go. Subsequently, laser-arc hybrid welding is used for filling, and a symmetrical alternating welding sequence is implemented to balance heat accumulation. After welding, the weld is subjected to conformal local stress-relief annealing, while key parts of the through-hole component are forcibly cooled using copper cold sleeves and copper cold jackets. This invention significantly improves the welding efficiency of through-hole components, effectively controls welding deformation, precisely reduces residual stress, and significantly improves the structural reliability after welding.