Fabrication Methods for Micro Compound Optics

a technology of compound optics and fabrication methods, applied in the field of fabrication techniques, can solve problems such as problems
US20080094694A1Inactive Publication Date: 2008-04-24XRADIA
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
XRADIA
Publication Date
2008-04-24
Estimated Expiration
Not applicable · inactive patent

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Abstract

Methods for fabricating refractive element(s) and aligning the elements in a compound optic, typically to a zone plate element. The techniques are used for fabricating micro refractive, such as Fresnel, optics and compound optics including two or more optical elements for short wavelength radiation. One application is the fabrication of the Achromatic Fresnel Optic (AFO). Techniques for fabricating the refractive element generally include: 1) ultra-high precision mechanical machining, e.g,. diamond turning; 2) lithographic techniques including gray-scale lithography and multi-step lithographic processes; 3) high-energy beam machining, such as electron-beam, focused ion beam, laser, and plasma-beam machining; and 4) photo-induced chemical etching techniques. Also addressed are methods of aligning the two optical elements during fabrication and methods of maintaining the alignment during subsequent operation.
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Description

RELATED APPLICATIONS

[0001] This application is a Divisional of U.S. application Ser. No. 10 / 688,187, filed on Oct. 17, 2003, which claims the benefit under 35 USC 119(e) of U.S. Provisional Application No. 60 / 419,331 filed on Oct. 17, 2002, both of which are incorporated herein by reference in their entirety.BACKGROUND OF THE INVENTION

[0002] The present invention pertains generally to fabrication techniques to be used for fabricating micro refractive, such as Fresnel, optics and compound optic comprising two or optical elements for short wavelength radiation. One application is the fabrication of the (AFO) described in U.S. patent application Ser. No. 10 / 134,026, which is incorporated herein by this reference in its entirety.

[0003] The Achromatic Fresnel Optic (AFO) is a multi, such as two, element compound optic that is comprised of a diffractive Fresnel zone plate and a one or more refractive Fresnel lenses. The optic is described in U.S. patent application Ser. No. 10 / 134,026,...

Claims

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