The invention provides a test method and equipment for characterizing
etching sediment distribution, and the method comprises the steps: arranging a sampling cabin on the side wall of an
etching chamber, and placing a sampling piece in the sampling cabin; introducing radioactive
isotope labeled
etching gas to carry out an etching process; and performing radioisotope
imaging analysis on the sampling piece to obtain distribution data of the etching
sediment. The radioactive
isotope labeled sediments are collected through the sampling piece to obtain the distribution of the sediments in the etching chamber, so that the adjustment precision of etching process parameters is improved, and the device yield is improved; meanwhile, the representativeness of
sediment distribution data is improved through the position distribution of the sampling bins; in addition, a sampling piece is placed in the sampling bin, so that the sampling piece effectively reflects the actual distribution condition of sediments on the side wall of the etching chamber, and meanwhile, operation and maintenance are convenient; finally, after the sampling piece is taken out,
dry ice cleaning and radioactive substance detection are carried out in the etching chamber, and the influence of radioactive substance residues on the sediment distribution detection accuracy in the future and the damage to the etching chamber are avoided.