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248 results about "Glow plasma" patented technology

Surface coating method for hydrophobic and superhydrophobic treatment in atmospheric pressure plasma

The present invention relates to a method of coating fluorocarbon or hydrocarbon on the surface of a workpiece using atmospheric pressure plasma. More particularly, the present invention relates to a method of coating hydrocarbon or fluorocarbon on the surface of a workpiece using plasma generated under atmospheric pressure such that the workpiece can have a hydrophobic or super-hydrophobic surface.
The method of coating a surface of a workpiece with fluorocarbon to be hydrophobic or super-hydrophobic according to the present invention comprises the steps of generating first atmospheric pressure glow plasma by supplying a reaction gas into a discharge space formed between a first electrode and a second electrode, the reaction gas containing hydrogen gas, fluorocarbon gas and inert gas, the first and second electrodes being connected to an RF power supply of an atmospheric pressure plasma generator; and approaching the workpiece to the first electrode downstream of a reaction gas flow passing through the discharge space, such that the plasma created in the discharge space is transferred into a space between the first electrode and the workpiece to generate a second atmospheric pressure glow plasma therein, whereby a fluorocarbon coating layer can be formed on the surface of the workpiece.
Owner:KANG BANG KWON

Method of manufacturing vacuum composite film coating on surface of neodymium iron boron magnet

The invention relates to the technical filed of vacuum plating, in particular to a preparation method for conducting vacuum compound plating on the surface of a neodymium iron boron magnet, which is characterized in that the preparation method comprises the following steps: A. pre-treatment, the mixed liquor of washing liquid and purified water is used for conducting oil removal and parting medium washing to the magnet surface in an ultrasonic wave cleaner; B. ion cleaning and activation, the pre-treated neodymium iron boron magnet which is dried at 80-100 DEG C for 5-10 minutes undergoes bombardment activation of a glow plasma in vacuum environment, so as to increase surface activation energy; and C. vacuum plating, vacuum plating treatment is conducted to the neodymium iron boron magnet washed by ions in a vacuum chamber, and a metal plating is prepared on the surface. The deposited metal film on the surface of the neodymium iron boron magnet has the advantages of good stability, high bonding force and tightness, stronger anti-corrosion performance in cold and hot alternation environment. Furthermore, in the physical vapor deposition plating process, the plating thickness is affected much less by the magnet workpiece corner than in electroplating and chemical plating, and the pollution problem is avoided in the preparation process.
Owner:兰州大成科技股份有限公司

Double polar plates for fuel battery and method for making surface azote chromium thin film

The invention provides a bipolar plate for fuel cell and a surface nitric-chrome film preparation method which belong to fuel cell technique field. The bipolar plate is composed of a stainless steel thin plate substrate and its two sides nitric-chrome film; the nitric-chrome film thickness is micro-nanometer magnitude and is prepared by using electric arc ion filming method, therein, substrate passive film is removed by using ion sputtering method before filming, used ion comes from glow plasma of inert gases or electric arc plasma vaporized from metal target; a simple substance film with even component, a grads film with component changed continuously from inside to outside, or a multi-layer film with component changed alternately can be obtained by controlling filming parameter in film depositing process. The substrate provided by the invention is the stainless steel thin plate, and has a nitric-chrome film on surface. The stainless steel thin plate and intric-chrome film match connects in atom dimension because of ion film depositing, thereby, the bipolar plate has characteristics of low-cost besides complex characteristics, for example, corrosion resistance, electrical conduction, strengthen and hydrophobic etc. The bipolar plate and preparation method are mainly suitable for fuel cell manufacturing field.
Owner:DALIAN UNIV OF TECH

Titanium alloy surface high temperature oxidation resistance and wear resistance oxide gradient coat, and preparation method thereof

ActiveCN102732832ADense tissueSolve the problem of poor high temperature oxidation resistanceVacuum evaporation coatingSputtering coatingAntioxidant capacityCoated surface
The invention relates to a titanium alloy surface high temperature oxidation resistance and wear resistance oxide gradient coat. According to the coat, the surface of the coat is an oxide film layer comprising Al2O3, Cr2O3 and NiO2, wherein the thickness is 4-6 mum; the middle of the coat is an Al-Cr-Ni alloy layer, wherein the thickness is 2-4 mum; and an Al-Cr-Ni-Ti interdiffusion layer is arranged between the coat and a substrate to achieve metallurgical collection, wherein the thickness of the Al-Cr-Ni-Ti interdiffusion layer is 4-6 mum. According to the present invention, the oxide film layer on the surface of the coat has characteristics of compactness, flatness and strong antioxidant capacity; the Al-Cr-Ni alloy layer in the middle of the coat has characteristics of compact structure and high hardness so as to greatly improve wear resistance of the titanium alloy; the metallurgical collection of the coat and the substrate is achieved through the Al-Cr-Ni-Ti interdiffusion layer, and the combination strength is high; and a double glow plasma surface metallurgy technology is adopted to prepare the Al-Cr-Ni alloy layer on the surface of the titanium alloy, and then a plasma oxygen permeation treatment is performed on the Al-Cr-Ni alloy layer to prepare the high temperature oxidation resistance and wear resistance coat, such that the efficiency is high, and the process is simple.
Owner:NANJING UNIV OF AERONAUTICS & ASTRONAUTICS

Apparatus for generating atmosphere pressure microwave glow plasma

The invention relates to a device for generating atmospheric pressure microwave glow plasma. The device comprises a plasma reactor, a microwave regulating and monitoring system and a microwave source. The microwave source is connected with the left end of the microwave regulating and monitoring system through a coupling flange. The plasma reactor consists of a rectangular waveguide, a bar-shaped electrode, a flat electrode, a short-circuiting piston, a silica tube, a water-cooled jacket, an upper flange and a lower flange. Through holes are formed on the parts of the wide edges of the rectangular waveguide; the silica tube is installed on the rectangular waveguide by passing through the through holes; the water-cooled jacket is installed on the outer side of the silica tube; the silica tube is hermetically connected with the upper flange and the lower flange to form a working chamber; the bar-shaped electrode is hermetically connected with the upper flange through threads; the flat electrode is hermetically connected with the lower flange through threads; and the short-circuiting piston is arranged on the end part of the left side of the plasma reactor. The device can operate the microwave glow plasma at atmospheric pressure, thereby facilitating continuous production. The produced plasma has higher energy density, active particle concentration and efficiency.
Owner:WUHAN INSTITUTE OF TECHNOLOGY

Double polar plates for fuel battery and method for making surface carbon chromium thin film

The invention provides a bipolar plate for fuel cell and a surface carbon-chrome film preparation method which belong to fuel cell technique field. The bipolar plate is composed of a stainless steel thin plate substrate and its two sides carbon-chrome film; the carbon-chrome film thickness is micro-nanometer magnitude and is prepared by using electric arc ion filming method, therein, substrate passive film is removed by using ion sputtering method before filming, used ion comes from glow plasma of inert gases or electric arc plasma vaporized from metal target; a simple substance film with even component, a grads film with component changed continuously from inside to outside can be obtained by controlling filming parameter in film depositing process. The substrate provided by the invention is the stainless steel thin plate, and has a nitric-chrome film on surface. The stainless steel thin plate and carbon-chrome film match connects in atom dimension because of ion film depositing, thereby, the bipolar plate has characteristics of low-cost besides complex characteristics, for example, corrosion resistance, electrical conduction, strengthen and hydrophobic etc. The bipolar plate and preparation method are mainly suitable for fuel cell manufacturing field.
Owner:CHANGZHOU INST OF DALIAN UNIV OF TECH

Method for manufacturing gradient hard composite coating on surface of hard alloy

The invention relates to a method for manufacturing a gradient hard composite coating on the surface of a hard alloy. A dual-layer glow plasma surface alloying device is used, argon serves as plasma stimulation gas, a composite target manufactured through a refractory metal wire and a graphite plate serves as a source electrode, and refractory metal and a carbide composite cementation layer of the refractory metal are manufactured on the surface of the hard alloy; then mixed gas of tetramethylsilane and hydrogen is led in, and the gradient composite coating comprising refractory metal carbide and silicon carbide is prepared by continuously increasing the flow of the tetramethylsilane; and finally methane is led in, the flow of the methane is gradually increased, the flow of the tetramethylsilane is reduced at the same time, and the silicon carbide and diamond gradient hard composite coating is prepared. The coating prepared with the method and a base body are in metallurgical bonding, the coefficients of thermal expansion from the base body to the coating are distributed in a gradient manner, and the method has the characteristics of being small in stress, high in binding intensity and the like. Meanwhile, the overall coating is continuously prepared in one device, the process is simple, and the cost is low.
Owner:TAIYUAN UNIV OF TECH

Atmospheric pressure glow plasma enhanced atom layer deposition device

The invention discloses an atmospheric pressure glow plasma enhanced atom layer deposition device, which comprises a main chamber, wherein a precursor body source air inlet pipeline opening, an upper electrode of a plasma generator and a lower electrode of the plasma generator are arranged inside the main chamber; a heater is arranged below the lower electrode of the plasma generator; an airstream channel is formed between the upper electrode of the plasma generator and the lower electrode of the plasma generator; an outlet of the precursor body source air inlet pipeline opening is opposite to the airstream channel and an inlet of the precursor body source air inlet pipeline opening is connected with a source air inlet heating pipeline; the source air inlet heating pipeline is connected with a carrier gas cylinder; a precursor body source bottle is connected to the source air inlet heating pipeline; both the upper electrode of the plasma generator and the lower electrode of the plasma generator are connected with a radio frequency power supply; a plurality of ventilating holes for introducing the plasma discharge gas are arranged on the upper electrode of the plasma generator; all the ventilating holes are connected with a plasma discharge gas bottle; both the heater and the radio frequency power supply are connected to a PLC (programmable logic controller) and the PLC is connected with a computer.
Owner:JIAXING KEMIN ELECTRONICS EQUIP TECH

Preparation method of nitrogen (N)-doped titanium dioxide (TiO2) porous film on surface of stainless steel matrix

The invention discloses a preparation method of a nitrogen (N)-doped titanium dioxide (TiO2) porous film on the surface of a stainless steel matrix, belonging to the field of the preparation technology of photocatalytic materials. The method is characterized by a technical scheme for preparing a high film-based bonding strength anatase type N-doped TiO2 porous film on a stainless steel matrix, and comprises the following steps of: firstly preparing a Ti-N diffusion coating layer composed of a Ti-N diffusion layer in the matrix and a surface Ti-N compound film on the surface of a stainless steel workpiece by use of a double glow plasma surface alloying technology; then performing anode oxidation on the Ti-N film on the workpiece surface to generate an N-doped TiO2 porous film; and finally performing thermal treatment in the air to prepare an anatase type N-doped TiO2 porous film. By adopting the preparation method disclosed by the invention, the prepared N-doped TiO2 porous film has the advantages of large specific surface area and good film-based bonding strength, and also has visible light catalysis performance; and the stainless steel after the N-doped TiO2 surface modification can be applied to the fields of photocatalysis self-cleaning, photocatalysis sterilization and the like.
Owner:TAIYUAN UNIV OF TECH

Gamma-TiAl alloy surface high temperature oxidation resistance and wear resistance coat, and preparation method thereof

The invention relates to a gamma-TiAl alloy surface high temperature oxidation resistance and wear resistance coat. According to the coat, the surface of the coat is an oxide film layer comprising Cr2O3 and NiO2, wherein the thickness is 2-3 mum; the middle of the coat is a Cr-Ni alloy layer, wherein the thickness is 2-4 mum; and a Cr-Ni-Ti-Al interdiffusion layer is arranged between the coat and a substrate to achieve metallurgical collection, wherein the thickness of the Cr-Ni-Ti-Al interdiffusion layer is 4-6 mum. According to the present invention, the Cr2O3 and NiO2 oxide film on the surface of the coat has characteristics of compact structure and strong antioxidant capacity; the Cr-Ni alloy layer in the middle of the coat has characteristics of uniform structure and high hardness so as to greatly improve wear resistance of the gamma-TiAl alloy; the metallurgical collection of the coat and the substrate is achieved through the Cr-Ni-Ti-Al interdiffusion layer, and the combination strength is high; and a double glow plasma surface metallurgy technology and a plasma oxygen permeation technology are firstly combined in the coat preparation process of the present invention, special plasma oxygen permeation equipment is not required, the coat can be directly prepared in 5 hours by adopting double glow plasma surface metallurgy equipment, the process is simple, and the efficiency is high.
Owner:NANJING UNIV OF AERONAUTICS & ASTRONAUTICS

Metal element liquid phase cathode discharge plasma spectrum rapid detection system and detection method thereof

The invention relates to a metal element liquid phase cathode discharge plasma spectrum rapid detection system and a detection method thereof. The system comprises a plasma generation device, a fiber spectrometer and an ICCD camera. A needlelike platinum electrode cathode is arranged in the plasma generation device, the top of the plasma generation device is provided with an anode, the sidewall of the plasma generation device is provided with a fiber probe, and the needlelike platinum electrode cathode is respectively connected with a power supply negative electrode and an oscilloscope through two resistors; a graphite carbon rod is connected with a translation bench, a power supply positive electrode and a third resistor connected with the oscilloscope; and a condensing lens is arranged in front of the ICCD camera, and the fiber spectrometer and the ICCD camera are connected with a computer. In the detection process, voltage and current are increased, the needlelike platinum electrode cathode discharges to generate glow plasma, and the oscilloscope determines the current-voltage waveform; and the computer analyzes an optical signal to complete qualitative or quantitative detection of a metal element. The detection system uses no peristaltic pump, so loss caused by flow introduction of a sample in the determination process is avoided, and analysis detection of a trace quantity of the metal element in an environment sample is convenient.
Owner:NORTHWEST NORMAL UNIVERSITY

Diamond single crystal surface metallization treatment method

ActiveCN106835054AImprove the efficiency of graphitization transformationPromote the graphitization processVacuum evaporation coatingSputtering coatingEtchingIron group
The invention discloses a diamond single crystal surface metallization treatment method. The method comprises steps as follows: the surface of a diamond single crystal is bombarded and sputtered with Fe, Co or Ni as a source electrode target material with a double-glow plasma diffusion metallizing technique; the single crystal is soaked in an acid solution, so that remaining metal and graphite are removed; a metal diffusion coating is prepared on the surface of the diamond single crystal with strong carbide metal as a target material with a double-glow plasma diffusion metallizing technique. Uniformly distributed micro pits are formed in the surface of the single crystal under the bombardment and sputtering functions of the double-glow plasma and the graphitized catalytic function of Fe, Co, Ni and other iron group metals, surface roughening and activation are realized, strong carbide metallic elements react with a part of carbon atoms on the surface of the diamond so that chemical bond combination is realized, and the bonding strength of the surface metallization coating and the single-crystal diamond is improved. Bombardment etching and metallization treatment are realized with one device, the process is simple, the cost is low, and the method is suitable for industrial production.
Owner:山西国脉金晶碳基半导体材料产业研究院有限公司

Method for preparing surface plasma nitrided layer of high-entropy alloy

The invention provides a method for preparing a surface plasma nitrided layer of a high-entropy alloy. The method comprises the steps that a high-entropy alloy base material is cleaned, a part is dried in a plasma nitriding furnace; and after the inner pressure and the outer pressure of the plasma nitriding furnace are identical, the part is placed on a cathode disk, vacuumizing is conducted on a furnace body, high-purity ammonia gas is fed into the furnace body, the temperature is raised and then kept, feeding of the ammonia gas is cut off, vacuumizing continues to be conducted, and the surface plasma nitrided layer of the high-entropy alloy is obtained after furnace cooling. According to the method for preparing the surface plasma nitrided layer of the high-entropy alloy, the LDMC-100A type pulse plasma nitriding furnace and the double glow plasma nitriding technology are utilized to conduct nitriding on the surface of the high-entropy alloy for the first time; the method for preparing the surface plasma nitrided layer of the high-entropy alloy has the advantages that the plasma nitrided layer is thick, high in combination strength and hardness and resistant to wear and corrosion; besides, the method for preparing the surface plasma nitrided layer of the high-entropy alloy has the advantages that the nitriding speed is high, the nitrided layer has good performance, technological deformation is small, and gas consumption and electricity consumption are small; and the method for preparing the surface plasma nitrided layer of the high-entropy alloy is a non-pollution nuisance-free ideal technology, and the surface plasma nitrided layer of the high-entropy alloy can be widely applied to the working conditions having a high wear resistance requirement and a high corrosion-resistance requirement.
Owner:TAIYUAN UNIV OF TECH

Preparation of high film substrate bond strength photocatalysis TiO2 film

A preparation method of a photocatalytic TiO2 film with high coating-substrate bonding strength belongs to the photocatalytic material preparation technical field, relating to a method for preparing a photocatalytic TiO2 film with high coating-substrate bonding strength on a metallic matrix. The method is characterized in that: firstly, by means of a double layer glow plasma metal impregnation technology, a titanium impregnation coating consisting of a diffused layer of titanium inside a matrix and a surface titanium settled layer is formed on the surface of the metal matrix at a high temperature of between 800 and 1,000 DEG C; the concentration of titanium inside a plating layer is increased from inside to outside and is in gradient distribution, thereby ensuring excellent bonding strength between a film and the matrix; then, a workpiece is placed inside an ordinary heating furnace, and undergoes heating treatment through making direct use of air within a temperature range of between 400 and 600 DEG C; therefore, the surface of the metal matrix is formed into a nitrogen-doped anatase-type TiO2 film with excellent photocatalytic performance. The preparation method has ideal process repeatability and easily controlled quality, and can be used in aspects such as water contaminant degradation and air purification.
Owner:TAIYUAN UNIV OF TECH

High-temperature-oxidation-resistant and abrasion-resistant AlCrN coating on surface of titanium-aluminum alloy and preparation method thereof

InactiveCN105839049AImprove wear resistanceThe surface of the coating is smooth and denseVacuum evaporation coatingSputtering coatingOxidation resistantGlow plasma
The invention discloses a high-temperature-oxidation-resistant and abrasion-resistant AlCrN coating on the surface of a titanium-aluminum alloy and a preparation method thereof. The coating is deposited on the surface of a titanium-aluminum alloy workpiece through the double glow plasma surface technology, an AlCrN deposited layer is located on the surface of the coating and is 5-10 micrometers thick, and a compact oxidized layer rich in Al2O3 and Cr oxide is formed by the AlCrN deposited layer at a high temperature; an AlCrN diffused layer is arranged in the coating and is 12-15 micrometers thick; the hardness of the obtained coating is 30-37 GPa, the room temperature friction coefficient of the coating is 0.3-0.33, and the high-temperature friction coefficient of the coating is 0.47-0.49. The preparation method includes the steps of charging, vacuumizing, workpiece surface activation, plasma permeation of the AlCrN coating, cooling and discharging. The obtained AlCrN coating solves the problem that the titanium-aluminum alloy is poor in high-temperature-oxidation resistance; meanwhile, the gradient structure of the diffused layer achieves metallurgical bonding of the coating and a substrate, and good high-temperature-oxidation resistance and good abrasion resistance are achieved.
Owner:NANJING UNIV OF AERONAUTICS & ASTRONAUTICS

Platinum group metal alloy coating with controlled alloying elements and preparation method thereof

The invention relates to a method for preparing a platinum group metal alloy coating on the surface of a refractory metal material; and in the coating, iridium or platinum are main components, zirconium, hafnium, tantalum, niobium and aluminium are alloying elements, and oxides of the alloying elements are enhancing components. The preparation method of the coating comprises the following steps of: taking a number of platinum group metal wires and alloying metal wires, and leading the platinum group metal wires and alloying metal wires to pass through aluminium oxide ceramics and be fixed, thereby forming an alloying target; and placing the target and a workpiece in a vacuum chamber, wherein one end of the target faces towards the workpiece, the other end of the target is connected with a power source, the platinum group metal wires are connected with a group of power sources in parallel, and the alloying metal wires can be connected with two to five groups of power sources according to the distributional design. The alloy coating is deposited in a vacuum furnace by adopting a double-glow plasma method; in the deposition process, the electricity of a part of the alloying elements can be cut off, the electricity can be supplied again after the electricity is cut off, and after the electricity is cut off, the connected alloying wires are in the non-working state and do not sputter alloying atoms or ions, and therefore, the content of the alloying elements in the coating can be adjusted.
Owner:陈照峰

Titanium alloy surface ceramic/metal gradient high-temperature composite coating and preparing method thereof

The invention relates to a titanium alloy surface ceramic/metal gradient high-temperature composite coating and a preparing technology. A titanium alloy serves as a matrix of the coating, an Al-Nb-Si alloy serves as a target material, and the gradient high-temperature composite coating is prepared through arc glow plasma. The gradient high-temperature composite coating is composed of two parts, an inner layer of the coating has the good high temperature oxidation resistance performance and is an aluminum-rich Ti-Al-Nb-Si multi-component alloying metal layer in good thermal physical performance cooperation with the matrix, an outer layer of the coating is a ceramic layer with titanium and aluminum nitride as the main part, the ceramic layer has the good high temperature oxidation resistance performance and the frictional wear performance, and chemical components of the coating are gradually changed in a gradient manner. The gradient high-temperature composite coating has the good high temperature oxidation resistance performance and also has the good room temperature resistance performance and the high-temperature dry sliding friction wear performance, the coating and the titanium alloy matrix are in typical metallurgy combination, and combination is firm.
Owner:QINGDAO BINHAI UNIV
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