Apparatus for generating atmosphere pressure microwave glow plasma

Abstract

The invention relates to a device for generating atmospheric pressure microwave glow plasma. The device comprises a plasma reactor, a microwave regulating and monitoring system and a microwave source. The microwave source is connected with the left end of the microwave regulating and monitoring system through a coupling flange. The plasma reactor consists of a rectangular waveguide, a bar-shaped electrode, a flat electrode, a short-circuiting piston, a silica tube, a water-cooled jacket, an upper flange and a lower flange. Through holes are formed on the parts of the wide edges of the rectangular waveguide; the silica tube is installed on the rectangular waveguide by passing through the through holes; the water-cooled jacket is installed on the outer side of the silica tube; the silica tube is hermetically connected with the upper flange and the lower flange to form a working chamber; the bar-shaped electrode is hermetically connected with the upper flange through threads; the flat electrode is hermetically connected with the lower flange through threads; and the short-circuiting piston is arranged on the end part of the left side of the plasma reactor. The device can operate the microwave glow plasma at atmospheric pressure, thereby facilitating continuous production. The produced plasma has higher energy density, active particle concentration and efficiency.

Description

technical field [0001] The invention relates to the generation of plasma source under atmospheric pressure, in particular to a device for generating atmospheric pressure microwave glow plasma. Background technique [0002] As the fourth state of matter, plasma has higher temperature and energy density, and contains a large number of active components, thereby inducing physical changes and chemical reactions that cannot or are difficult to achieve in conventional chemical reactions. In addition, plasma engineering can provide more advantageous industrial processing methods, including the ability to achieve industrially relevant results more efficiently and cheaper, achieve the same purpose without generating large quantities of unwanted by-products and waste materials, and generate less pollution and toxicity. The same purpose is achieved in the case of waste. Therefore, plasma technology has a wide range of applications in industry, including microelectronic etching process...

AI Technical Summary

Problems solved by technology

Low-pressure plasma has disadvantages such as high maintenance costs and unfavorable continuous production in industrial applications. Therefore, the excitation of plasma under atmospheric pressure and its application in industry is the key to the wider industrial application of plasma.

At present, the plasma generated by microwaves under atmospheric pressure mainly includes plasma jets and torches, and there are few research reports on the generation of uniform glow.

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