Slender metal pipe inner wall diamond-film-like deposition method using DC glow discharge

A DC glow discharge, diamond-like film technology, applied in metal material coating process, gaseous chemical plating, coating and other directions, can solve the problems of complex equipment and high cost, and achieve low equipment cost, convenient use and maintenance. , the effect of easy industrial application

Inactive Publication Date: 2006-10-25
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

The equipment is simple and convenient, and can be used at 1Pa-10 3 Realized at a lower Pa vacuum, which solves the p...

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  • Slender metal pipe inner wall diamond-film-like deposition method using DC glow discharge

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Embodiment Construction

[0010] specific implementation plan

[0011] Specific embodiments of the present invention will be described in detail below in conjunction with the technical solutions and accompanying drawings.

[0012] Pull a tungsten wire with a diameter of 30 to 200 microns on the axis of the slender metal tube to be treated to form a coaxial electrode structure, and coat an insulating ceramic tube on the thin tube (the specific size depends on the size of the slender metal tube to be modified) ). Make a vacuum chamber with a stainless steel tube with a diameter of about 10cm (the specific length and diameter of the vacuum chamber are selected according to the size of the slender metal tube to be modified), put the slender metal tube to be treated with the insulating ceramic tube into the vacuum in the room. Pump the vacuum chamber to 10 with a mechanical pump (pumping speed > 4 liters / second) -1 Below Pa, then input the mixed gas of argon and methane or acetylene into the vacuum chamb...

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Abstract

The invention belongs to the surface transferring character of the low temperature plasma in the domain of the chemistry and the physics, the method of depositing the kind diamond. Film on the outer surface of the thin metal pipe using the direct current shining plasma is disclosed. Under the pressure of the same axes pole Pa, the several KV of the direct current even high voltage is used to produce the steady cylinder direct current plasma, the length of the cylinder direct current shinning plasma produced in the pipe can be controlled by the voltage of the voltage source, so the kind diamond film can be deposited on the whole inner surface of the thin metal pipe. The kind diamond film can be deposited evenly on the surface of the metal pipe with the diameter which is above 5mm and the length which is 5mm-2000mm, because of adopting the KV steady direct current power and the low needing of the vacuum degree, the cost of the setting is low and the using and the maintenance is easy.

Description

technical field [0001] The invention belongs to the material surface modification technology in the field of low-temperature plasma physics and chemistry, and relates to a method and a device for depositing a diamond-like film (DLC) on the inner surface of a slender metal tube by using DC glow discharge plasma. It can be used for internal surface modification treatment of military gun barrels, halogen gas-liquid delivery pipes in chemical laser weapons, nuclear reactor circulating water pipes, and piston parts of automobile engines. Background technique [0002] Using high-energy ion beam implantation technology and plasma source ion implantation and deposition technology to modify the surface of materials can greatly improve the mechanical and chemical properties of materials such as strength, hardness, corrosion resistance, and wear resistance. High-energy ion beam implantation technology and plasma source ion implantation and deposition technology have been widely used in...

Claims

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Application Information

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IPC IPC(8): C23C16/513C23C16/52
Inventor 温小琼王德真
Owner DALIAN UNIV OF TECH
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