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Platinum group metal alloy coating with controlled alloying elements and preparation method thereof

A technology of alloying elements and platinum group metals, which is applied in the direction of metal material coating process, coating, ion implantation plating, etc., can solve the problems of low bonding strength of the coating, impurities in the coating, cracks in the coating, etc., to achieve Strong binding force, easy coating thickness, and the effect of coating thickness control

Inactive Publication Date: 2012-07-04
陈照峰
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method can overcome the disadvantages of low coating bonding strength, impurities in the coating, and cracks in the coating in the prior art.

Method used

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  • Platinum group metal alloy coating with controlled alloying elements and preparation method thereof
  • Platinum group metal alloy coating with controlled alloying elements and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0021] Select 12 iridium wires 50 and 12 zirconium wires 60 respectively, pass through the corundum disc 40, and adjust the lengths of the iridium wires 50 and zirconium wires 60 so that the end faces are flush and the distance from the molybdenum workpiece 70 is 17 mm. The six zirconium wires at the other end are connected to the power supply 10, the six zirconium wires are connected to the power supply 20, and the 12 iridium wires are connected to the power supply 30, and argon gas is introduced after vacuumizing to the ultimate vacuum. The process parameters of the dual-glow plasma technology are set as the target voltage is 900V, the substrate voltage is 350V, and the working pressure is 25Pa. Start deposition, after the workpiece is energized, turn on the iridium wire power supply 30, after 1 hour of deposition time, turn on the zirconium wire power supply 10, after another 1 hour of deposition, turn on the zirconium wire power supply 20, and after another 0.5 hour of depo...

Embodiment 2

[0023] 10 iridium wires 50, 3 zirconium wires and 3 hafnium wires 60 pass through the corundum disc 40, the distance between one end and the niobium workpiece 70 is 19 mm, the other end 3 zirconium wires are connected to the power source 10, and the 3 hafnium wires are connected to the power source 20 , 10 iridium wires are connected to the power supply 30, and argon gas is introduced after vacuuming to the ultimate vacuum. The process parameters of the dual-glow plasma technology are set to be 850V for the target, 320V for the substrate, and 25Pa for the working pressure. Start deposition. After the workpiece is powered on, turn on all source power supplies. After 1 hour of deposition time, turn off the zirconium wire power supply 10. After another 1 hour of deposition, turn off the hafnium wire power supply 20. After another 1 hour of deposition, turn off all power supplies. After deposition, an alloy coating with a thickness of 45 μm can be obtained. From the surface layer ...

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Abstract

The invention relates to a method for preparing a platinum group metal alloy coating on the surface of a refractory metal material; and in the coating, iridium or platinum are main components, zirconium, hafnium, tantalum, niobium and aluminium are alloying elements, and oxides of the alloying elements are enhancing components. The preparation method of the coating comprises the following steps of: taking a number of platinum group metal wires and alloying metal wires, and leading the platinum group metal wires and alloying metal wires to pass through aluminium oxide ceramics and be fixed, thereby forming an alloying target; and placing the target and a workpiece in a vacuum chamber, wherein one end of the target faces towards the workpiece, the other end of the target is connected with a power source, the platinum group metal wires are connected with a group of power sources in parallel, and the alloying metal wires can be connected with two to five groups of power sources according to the distributional design. The alloy coating is deposited in a vacuum furnace by adopting a double-glow plasma method; in the deposition process, the electricity of a part of the alloying elements can be cut off, the electricity can be supplied again after the electricity is cut off, and after the electricity is cut off, the connected alloying wires are in the non-working state and do not sputter alloying atoms or ions, and therefore, the content of the alloying elements in the coating can be adjusted.

Description

technical field [0001] The invention relates to a platinum group metal alloy coating and a preparation method thereof, in particular to a platinum group metal alloy coating with controllable alloy element composition on the surface of a refractory material and a preparation method thereof. Background technique [0002] Refractory metals have been widely used in various spacecraft and engine materials. They have excellent high-temperature strength, corrosion resistance, and high-temperature resistance. However, they will fail due to oxidation in a high-temperature aerobic environment, which affects the service life of the material. Adding alloying elements or preparing a high-temperature oxidation-resistant coating on its surface is a necessary way to overcome the poor high-temperature oxidation of refractory metals. Platinum group metals have good corrosion resistance and high temperature oxidation resistance, and can adapt to stress deformation caused by elastic-plastic def...

Claims

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Application Information

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IPC IPC(8): C22C5/04C23C14/14C23C14/38
Inventor 陈照峰丛湘娜李斌斌
Owner 陈照峰
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