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277results about How to "Fast deposition rate" patented technology

PVD chromium based ceramic composite coating piston ring and method for producing the same

The invention discloses a PVD chromium base ceramic composite coating piston ring and a preparation method thereof, and the piston ring is manufactured by plating a chromium base ceramic composite coating on a basal body of the piston ring which is treated by nitriding by adopting high power electric arc discharge method; the chromium base ceramic composite coating is composed of a bonding layer, a main wearing layer and an anti-attrition layer, wherein, the bonding layer is binded with the basal body of the piston ring in a metallurgical way, the main wearing layer is arranged on the bonding layer, and the anti-attrition layer is positioned on the surface of the main wearing layer; the bonding layer is Cr, the main wearing layer is a Cr/CrN multilayer coating formed by the Cr and the CrN which are alternately arranged, and the anti-attrition layer is a Cr/Cr2O3 multilayer coating formed by the Cr and the Cr2O3 that are alternately arranged. The coating structure has reasonable design, and the manufactured coating has good cementing property, high hardness and good lubricating property. Furthermore, the method used for manufacturing the piston ring has no pollution in the preparation process, and overcomes the serious problem of environmental pollution of the conventional electrodeposited chromium; as the manufactured coating has better abrasion resistant and corrosion resistant performance compared with the electrodeposited chromium, the service life of the piston ring is greatly prolonged.
Owner:WUHAN UNIV

A kind of preparation method of metal electrode of crystalline silicon solar cell

The invention discloses a method for preparing metal electrodes of a crystal silicon solar cell, which comprises the steps that: after the PN junction is prepared on a p-type crystal silicon substrate through diffusion, a silicon nitride antireflection layer is prepared on the surface of a n type emitting electrode, then, a thin Al layer with the thickness being 100nm to 1000nm is prepared on thesurface of a p-type conducting back through the vacuum sputtering technology, the vapor deposition technology or the screen printing technology, in addition, a thin Ag grid line layer with the thickness being 1mum to 5mum is prepared on the surface of the silicon nitride antireflection layer through the screen printing, next, an Al back field seed layer and an Ag grid line seed layer are formed through the traditional high-temperature sintering technology, finally, tin, copper or nickel is electroplated on the Ag grid line seed layer and the Al back field seed layer through the electroplatingprocess, and the metal electrodes are formed after the thickening. Compared with the prior art, the method combines the advantages of the screen printing process, the magnetron sputtering process, the vapor deposition process and the electroplating process, front metal grid line electrodes with high electrical conductivity and low light shielding rate can be obtained, and simultaneously, the consumption of expensive metal Ag can be effectively reduced, so important industrialized application prospects are realized.
Owner:NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI

Preparation method of carbon nano tube

The invention relates to a preparation method of a carbon nano tube. A direct current plasma injection chemical vapour deposition system is adopted for preparing the carbon nano tube. The preparation method comprises the following steps: by taking a mixed solution of nickel nitrite and magnesium nitrite as a catalyst precursor, dropping the mixed solution on a substrate such as molybdenum, zirconium or the like; airing and then placing the substrates on a deposition platform in a cavity of direct current plasma injection chemical vapour deposition equipment; discharging a direct-current arc so that argon and hydrogen form high temperature plasma; decomposing and reducing the catalyst solution by the high temperature plasma, so as to generate a Ni/MgO catalyst; and after hydrocarbon gas isintroduced, cracking the hydrocarbon gas by using the high temperature plasma, and then injecting the cracked hydrocarbon gas on the substrate so that the carbon nano tube is formed in the presence of the catalyst. The preparation method provided by the invention has the advantages that: the catalyst is obtained while the carbon nano tube directly grows, preparation process is simple, deposition speed is fast, and deposition quality is good; and meanwhile, the bamboo-joint-like carbon nano tube is generated, and the prepared carbon nano tube has larger diameter, good crystallinity, no windingand good dispersibility.
Owner:TIANJIN UNIVERSITY OF TECHNOLOGY

Preparation method for iron-doped tungsten trioxide photoelectrode

The invention discloses a preparation method for an iron-doped tungsten trioxide photoelectrode. The preparation method comprises the following steps: firstly, preparing an amorphous tungsten oxide film: feeding an ITO (Indium Tin Oxide) conductive glass as a work electrode, a platinum gauze electrode as a counter electrode and a saturated calomel electrode as a reference electrode into electrolyte for electrodeposition to obtain the amorphous tungsten oxide film and drying the amorphous tungsten oxide film for later use; secondly, doping iron by using an impregnating method: feeding the amorphous tungsten oxide film obtained in the first step into 0.005mol / L Fe(NO3)3 solution and impregnating for 20-40 minutes to obtain an iron-doped tungsten oxide film, taking out the iron-doped tungsten oxide film and flushing the iron-doped tungsten oxide film with distilled water and drying the iron-doped tungsten oxide film in air; and thirdly, calcining: feeding the iron-doped tungsten trioxide photoelectrode in the second step into a muffle furnace, calcining the iron-doped tungsten trioxide photoelectrode at high temperature of 450DEG C for 3 hours, cooling the calcined iron-doped tungsten trioxide film at room temperature and then taking out to obtain the iron-doped tungsten trioxide photoelectrode. The photoelectric conversion efficiency and the photoelectric catalytic activity of the iron-doped tungsten trioxide photoelectrode are remarkably improved; the adopted experiment equipment is simple and easy to operate; and the used raw materials are abundant in natural word and low in cost and also have the advantages of environment friendliness and the like.
Owner:ZHEJIANG UNIV

Method for preparing back fully-passivated contact solar cell by utilizing tubular PECVD and back fully-passivated contact solar cell

The invention discloses a method for preparing a back fully-passivated contact solar cell by utilizing tubular PECVD and the back fully-passivated contact solar cell. The method comprises the steps of carrying out pre-cleaning, double-sided texturing, front boron diffusion, front laser selective doping, secondary cleaning and back polishing on a silicon wafer; depositing a silicon dioxide thin film layer and a phosphorus-doped amorphous silicon carbide thin film layer on the back surface of the tubular PECVD equipment, and performing annealing treatment to convert amorphous silicon carbide into microcrystalline silicon carbide; depositing an Al2O3 passivation layer and an antireflection layer; and performing silk-screen printing and sintering to obtain the back fully-passivated contact solar cell. The method disclosed by the invention has the advantages of simple process, convenience in operation, low cost, good compatibility with the existing production line, good preparation controllability, high preparation efficiency, good safety and the like, can be used for preparing the high-efficiency back fully-passivated contact solar cell, is suitable for large-scale preparation, is beneficial to industrial application, and has a very high use value and a very good application prospect.
Owner:HUNAN RED SUN PHOTOELECTRICITY SCI & TECH

Method for preparing compound diamond-like carbon coating by using medium-frequency magnetic-control glow discharge method

The invention relates to a method for preparing a nano compound diamond-like carbon coating, which is realized in a way that: glow discharge is produced by using a medium-frequency magnetic-control sputtering target; argon and excessive hydrocarbon gases are introduced, so that the metal on the target surface reacts with the hydrocarbon gases to produce metallic carbides; when the argon ions bombard the target surface, the target surface sputters the metallic carbides; strong plasma produced by the glow discharge of the target surface ionize the hydrocarbon gases, so that the hydrocarbon gases produce highly-ionized carbon ions; and the carbides sputtered from the target surface and the highly-ionized carbon ions produced from the hydrocarbon gases form a high-hardness carbide-doped nano compound diamond-like carbon coating on a workpiece surface. The coating prepared by the invention has the characteristics of high hardness, strong adhesive force, high growth speed, high production efficiency, low depositing temperature, low production cost, simple equipment structure and the like; and diamond-like carbon coatings with different thicknesses can be prepared on hard alloy, high-speed steel and various other workpieces.
Owner:WUHAN UNIV

Tungsten nitride based ternary nano composite super-hard film material and preparation method thereof

The invention discloses a tungsten nitride based ternary nano composite super-hard film material and a preparation method thereof. The material is a nano composite super-hard film which is covered on a substrate and has a chemical formula of WxM1-xN, wherein in the nano composite super-hard film, W represents tungsten metal, M represents metal replacement, N represents nitrogen, and the value range of the x is 0.06 to 0.72; and the film consists of the tungsten metal, nitride solid solution phase of the M metal and tungsten metal phase or consists of tungsten nitride phase, tungsten metal phase and M metal phase, the grain size of the film is 4 to 30 nanometers, and the thickness of the film is 3 to 7mu m. The method comprises the following steps: firstly, placing a composite target consisting of the tungsten metal and the metal replacement and the substrate on a cathode and in a sample stage in a vacuum chamber of magnetron sputtering equipment respectively; after the vacuum degree of the vacuum chamber is less than or equal to 1*10<-3> pa and the temperature of the substrate reaches 350 and 450 DEG C, making the vacuum chamber in argon-nitrogen mixed atmosphere, sputtering the composite target for 60 to 120 minutes to obtain the tungsten nitride based ternary nano composite super-hard film material. The film material and the preparation method can be widely applied in the fields of mechanical manufacture, automobile and textile industry, geologic drilling, die industry and the like.
Owner:HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI

Composite thick film based on diamond-like carbon thin film and coating method of composite thick film

The invention discloses a composite thick film based on a diamond-like carbon thin film and a coating method of the composite thick film. The composite thick film comprises a metal base layer, a transition layer and a diamond-like carbon layer which are successively formed from the surface of a substrate to the outside, wherein the transition layer is a mixture layer which is formed by stacking two film layers in a staggered manner by simultaneously using a magnetron sputtering technology and an enhanced type cathode arc technology; and the thickness of the diamond-like carbon layer is between 1 mu m and 10 mu m. The composite thick film is exquisite in design and simple in structure; the transition layer has the structure which is formed by stacking the two film layers in the staggered manner, the advantages of small internal stress of a magnetron sputtering film layer and large hardness of an enhanced type cathode arc film layer are played fully, large hardness and small internal stress of the transition layer are combined effectively, large hardness and small stress facilitate increasing of the thickness of the diamond-like carbon layer, and the thickness of the finally formed composite thick film reaches 20 mu m or above; and moreover, huge stress caused by a thick film function layer can be buffered effectively, therefore, the binding force of the composite thick film and the substrate is guaranteed, and meanwhile, surface defects of the composite thick film can be reduced effectively.
Owner:STARARC COATING TECH SUZHOU

Phosphorus chemical nickel plating concentrated solution and plating process

The invention discloses a phosphorus chemical nickel plating concentrated solution and a plating process, the concentrated solution comprises three parts of an A solution, a B solution and a C solution, a main salt, a brightening agent, an accelerating agent and deionized water are mixed into the A solution at room temperature; a first buffer, a first complexing agent, sodium hypophosphite, a stabilizer, polyethylene glycol 6000, a brightening agent and deionized water are mixed into the B solution at room temperature; a second buffer, a second complexing agent, the stabilizer, the sodium hypophosphite, the polyethylene glycol 6000, the accelerating agent, the brightening agent, ammonia and the deionized wate are mixed r at room temperature into the C solution; the A solution and the B solution are used for grooving, and the A solution and the C solution are used for replenishment. According to the volume percentage, the A solution, the B solution, and dilution water are mixed into a chemical nickel plating solution for plating, the nickel content in the nickel plating solution is lower than 4.0g / L, and the A solution and the C solution are replenished. When the concentrated solution is used for nickel plating, deposition rate is quick, coating hardness and wear resistance are high, and the concentrated solution is suitable for chemical nickel plating of aluminum alloy, all kinds of iron alloy, copper alloy, nickel iron alloy, nickel copper alloy and some non conductive substrates.
Owner:JINCHUAN GROUP LIMITED

Preparation method of thick tungsten coating material and tungsten coating material

The invention relates to a preparation method of a thick tungsten coating material. Chemical vapor deposition method is used, and a tungsten coating is deposited on a base material by using hydrogen for reduction of tungsten hexafluoride. The deposition rate is 0.4-1 mm/h, and the tungsten coating thickness is greater than or equal to 1 mm. The invention also relates to a tungsten coating material including pure copper or copper alloy, an adaptation layer and the tungsten coating; the adaptation layer is 1-5 layers of a tungsten copper gradient material, and the thickness of each layer is 0.5 - 1.5mm; the tungsten content of the tungsten copper gradient material closed to the tungsten coating side is 50-90wt.%; the tungsten contents of the middle layers of tungsten copper gradient material decrease successively, and the copper contents increase successively; and the copper content of the tungsten copper gradient material closed to the copper or copper alloy side is 50-90wt.%. In the tungsten coating material, a pure tungsten coating-adaptation layer-copper based material method is used, through adoption of the adaptation layer, the thermal expansion coefficient mismatch problem between tungsten and copper can be solved, and the thermal stress of the coating and the base can be reduced.
Owner:SOUTHWESTERN INST OF PHYSICS +1

Method for coating inner wall of electron-enhanced plasma discharge tube

The invention provides a method for coating the inner wall of an electron-enhanced plasma discharge tube. The method comprises the following six steps: 1, performing cleaning treatment on the inner wall of the tube to be treated before coating; 2, assembling a device for coating the inner wall of the electron-enhanced plasma discharge tube; 3, completing vacuum supply to a vacuum chamber, introducing an inert gas via an inert gas feed pipeline and feeding the inert gas into an insulating cover via the tube to be treated, and controlling the flow of the inert gas introduced into the vacuum chamber by use of a quality/flow controller; 4, providing negative impulse voltage to a cathode target table by virtue of external power supply and setting predetermined voltage value and duty ratio, thereby completing the cleaning of the inner wall of the tube; 5, introducing gaseous-state or vapor-state particles for deposition via a particle feed pipeline, providing the negative impulse voltage to the cathode target table by virtue of the external power supply and setting predetermined voltage value and duty ratio, thereby completing the coating of the inner wall of the tube; and 6, completing degassing of the vacuum chamber, taking out the tube to be treated and then completing the coating of the inner wall of the tube. The method has practical value in the surface material modification field.
Owner:BEIHANG UNIV

Nano composite Cr-Al-O (chromium-aluminum-oxygen) solar spectrum selective absorption coating and preparation method thereof

InactiveCN103255377AOvercome the problem of heavy metal pollutionImprove adhesionSolar heat devicesVacuum evaporation coatingPhysicsChemistry
The invention discloses a nano composite Cr-Al-O (chromium-aluminum-oxygen) solar spectrum selective absorption coating and a preparation method thereof. The absorption coating is characterized in that an infrared high reflection layer, a low oxygen absorption layer, a medium oxygen absorption layer and a high oxygen antireflection layer are sequentially deposited on a stainless steel substrate. According to the preparation method of the coating, an electric arc discharging method is adopted to sequentially deposit the infrared high reflection layer, the low oxygen absorption layer, the medium oxygen absorption layer and the high oxygen antireflection layer on the substrate. The coating is reasonable in structure design. The prepared Cr-Al-O composite coating has an absorption ratio of 0.92 to 0.94, a transmitting rate of 0.15 to 0.22, good heat stability and high adhesive force. Meanwhile, the preparation process is free from pollution, the severe environmental pollution problem of the conventional electroplating method is overcome, the problems of the magnetron sputtering method, such as poor heat stability and the high-temperature adhesive force of coating and the problem of the evaporation technology that uniformity of the coating is poor can be solved, and the nano composite Cr-Al-O solar spectrum selective absorption coating is expected to be applied to the medium-high-temperature solar utilization field.
Owner:WUHAN UNIV

Method for preparing inorganic scintillator film

The invention discloses a method for preparing an inorganic scintillator film. The method comprises the following steps of using an AxByXz powder raw material as an evaporation source; by using a substance sublimation principle, firstly performing vacuum pumping treatment on a deposition cavity containing the raw material and a substrate; then, heating the raw material and the substrate in the vacuum environment so that the AxByXz material is deposited onto the substrate; and thus obtaining an AxByXz inorganic scintillator film, wherein the A is a univalent alkali metal cation; the B is any one element from Cu and Ag; the X is a univalent halogen anion; and the ratio of the x to the y to the z is 1:1:2 or 1:2:3 or 2:1:3 or 3:2:5. The preparation method has the advantages that the operationis simple; the deposition speed is high; the cost is low; the large-area mass synthesis can be realized; and the obtained inorganic scintillator film layer has the advantages of uniformity, compactness, high crystallinity degree, good orientation performance, strong adhesion force with the substrate and excellent x-ray response performance. The invention provides an effective solution for the preparation of an inorganic scintillator thick film, and further provides an effective measure for the integration of a backend scintillator detector; and the market application potential is great.
Owner:HUAZHONG UNIV OF SCI & TECH

Production method of alloy oxide thin-film transistor

InactiveCN103117226AImprove flatnessExcellent deposition uniformity and consistencySemiconductor/solid-state device manufacturingIndiumOxide
The invention belongs to the technical field of production of semiconductor material thin-film transistors and relates to a production method of an alloy oxide thin-film transistor. After a P-type silicon substrate and an aluminum oxide ceramic target are placed in an existing pulse laser ablation device, the aluminum oxide ceramic target is subjected to pulse laser ablation and an aluminum oxide ceramic target film sample is formed on the P-type substrate by deposition. The surface of the Al2O3 ceramic target film sample is cleaned, ITZO (indium tin zinc oxide) semiconductor channel layer is made on the surface of a gate medium layer of the cleaned Al2O3 ceramic target film sample, TFT (thin film transistor) channels different in length and width are made by photoetching, and alloy semiconductor film channel layer material is deposited on a high-k gate medium layer at room temperature by radio frequency magnetron sputtering technology. Ni is deposited at room temperature by ion beam sputtering technology to form a source electrode and a drain electrode. The source electrode and the drain electrode are obtained after photoresist is stripped, and the alloy oxide thin-film transistor is obtained after annealing. The production process is simple, the principle is reliable, production performance is fine, production is environment-friendly, and the production method is low in cost and widely applicable.
Owner:QINGDAO UNIV
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