Method for preparing Ti-Si-N nanocrystalline-amorphous composite superhard coating

A nanocrystalline and hard coating technology, applied in coating, superimposed layer plating, metal material coating process, etc., can solve the problem of magnetron sputtering method with low ionization rate, poor use effect and low coating hardness and other problems, to achieve good application prospects, high ionization rate, and fast deposition rate.

Inactive Publication Date: 2009-06-17
WUHAN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Its main disadvantage is that the ionization rate of the magnetron sputtering method is low,

Method used

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  • Method for preparing Ti-Si-N nanocrystalline-amorphous composite superhard coating
  • Method for preparing Ti-Si-N nanocrystalline-amorphous composite superhard coating
  • Method for preparing Ti-Si-N nanocrystalline-amorphous composite superhard coating

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[0020] Example 1: The glow discharge cleaning of the workpiece is carried out at 400-450°C in an argon atmosphere; after the glow cleaning is completed, it is placed in a vacuum chamber, and a magnetic field is used under the conditions of 0.5Pa, negative 150V bias and 400-450°C A controlled metal target arc discharge is used to prepare a metal Ti transition layer. The deposition thickness of the metal Ti transition layer is 200 nanometers; then silane and nitrogen are introduced, and the pressure is controlled at 0.8 Pa. Ti ions are evaporated from the Ti target and react with nitrogen to form TiN . Silane dissociates into Si ions and reacts with nitrogen to form Si 3 N 4 . TiN and Si under the action of bias 3 N 4 At the same time, a film is grown on the substrate to form a Ti-Si-N nanocomposite coating. The flow rate of nitrogen gas is 150sccm; the flow rate of silane gas is 250sccm, and the SiH flowed into the vacuum chamber 4 The flow of nitrogen and nitrogen is controlled by...

Example Embodiment

[0022] Example 2: The glow discharge cleaning of the workpiece is carried out at 400-450°C under an argon atmosphere; after the glow cleaning, it is placed in a vacuum chamber and controlled by a magnetic field under the conditions of 1Pa, negative 200V bias and 400-450°C The metal target arc discharge to prepare the metal Ti transition layer, the deposition thickness of the metal Ti transition layer is 200 nanometers; then pass in silane and nitrogen, and the pressure is controlled at 1.5Pa. Ti ions are evaporated from the Ti target and react with nitrogen to form TiN . Silane dissociates into Si ions and reacts with nitrogen to form Si 3 N 4 . TiN and Si under the action of bias 3 N 4 At the same time, a film is grown on the substrate to form a Ti-Si-N nanocomposite coating. The flow rate of nitrogen gas is 200 sccm; the flow rate of silane gas is 350 sccm, and the SiH that flows into the vacuum chamber 4 The flow of nitrogen and nitrogen is controlled by a mass flow controller,...

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Abstract

The invention discloses a method for preparing a Ti-Si-N nano-crystal-noncrystalline composite ultra-hard coating. The method employs high-density arc discharge controlled by a magnetic field to lead the Ti arc target to evaporate Ti; nitrogen and steam are ventilated so as to react with Ti to generate TiN; meanwhile, silane (SiH4) is inlet and decomposed to Si ions and H ions; the Si ions react with the nitrogen to generate Si3N4. Under bias pressure, the TiN crystal and the SiN4 competitively grow on the workpiece substrate simultaneously to form a film, thus generating the Ti-Si-N nano-crystal-noncrystalline composite coating. The prepared Ti-Si-N nano-crystal-noncrystalline composite coating has the advantages of high hardness, strong adhesion, fast growth speed of coating, high production efficiency, low production cost, simple structure of coating equipment, and the like; according to the use requirement, the preparation of the Ti-Si-N nano-crystal-noncrystalline composite coating of different thickness can be carried out on various workpieces such as hard alloy, stainless steel, carbon steel, and the like.

Description

technical field [0001] The invention relates to a preparation method of a Ti-Si-N nanocrystal-amorphous composite superhard coating, which belongs to the field of thin film materials. Background technique [0002] With the progress of modern manufacturing industry, more and more difficult-to-machine materials, especially the emergence of high-speed cutting, dry cutting and micro-lubrication cutting technology, put forward higher technical requirements for metal cutting tools. The emergence of coated tools is a revolution in the history of metal cutting tool technology development. Plating super-hard coating materials on the surface of metal cutting tools is in line with the high technical requirements of modern manufacturing for metal cutting tools. The metal cutting tool matrix maintains its high strength, and the coating on the surface can play its role. The advantages of "superhard, tough, wear-resistant, and self-lubricating" greatly improve the durability and adaptabil...

Claims

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Application Information

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IPC IPC(8): C23C28/00C23C14/35C23C14/24C23C14/14C23C16/455C23C16/30
Inventor 杨兵杨种田丁辉付德君
Owner WUHAN UNIV
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